JP2013119877A5 - - Google Patents

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Publication number
JP2013119877A5
JP2013119877A5 JP2011266922A JP2011266922A JP2013119877A5 JP 2013119877 A5 JP2013119877 A5 JP 2013119877A5 JP 2011266922 A JP2011266922 A JP 2011266922A JP 2011266922 A JP2011266922 A JP 2011266922A JP 2013119877 A5 JP2013119877 A5 JP 2013119877A5
Authority
JP
Japan
Prior art keywords
seat
diaphragm valve
diaphragm
holder
vickers hardness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011266922A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013119877A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011266922A priority Critical patent/JP2013119877A/ja
Priority claimed from JP2011266922A external-priority patent/JP2013119877A/ja
Priority to CN201280060027.9A priority patent/CN104094027A/zh
Priority to PCT/JP2012/080537 priority patent/WO2013084744A1/ja
Priority to US14/359,373 priority patent/US20140326915A1/en
Priority to SG11201402331PA priority patent/SG11201402331PA/en
Priority to KR1020147017375A priority patent/KR20140098196A/ko
Priority to TW101145562A priority patent/TW201344087A/zh
Publication of JP2013119877A publication Critical patent/JP2013119877A/ja
Publication of JP2013119877A5 publication Critical patent/JP2013119877A5/ja
Pending legal-status Critical Current

Links

JP2011266922A 2011-12-06 2011-12-06 ダイヤフラム弁 Pending JP2013119877A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2011266922A JP2013119877A (ja) 2011-12-06 2011-12-06 ダイヤフラム弁
CN201280060027.9A CN104094027A (zh) 2011-12-06 2012-11-27 隔膜阀
PCT/JP2012/080537 WO2013084744A1 (ja) 2011-12-06 2012-11-27 ダイヤフラム弁
US14/359,373 US20140326915A1 (en) 2011-12-06 2012-11-27 Diaphragm valve
SG11201402331PA SG11201402331PA (en) 2011-12-06 2012-11-27 Diaphragm valve
KR1020147017375A KR20140098196A (ko) 2011-12-06 2012-11-27 다이어프램 밸브
TW101145562A TW201344087A (zh) 2011-12-06 2012-12-05 隔膜閥

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011266922A JP2013119877A (ja) 2011-12-06 2011-12-06 ダイヤフラム弁

Publications (2)

Publication Number Publication Date
JP2013119877A JP2013119877A (ja) 2013-06-17
JP2013119877A5 true JP2013119877A5 (OSRAM) 2015-01-08

Family

ID=48574118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011266922A Pending JP2013119877A (ja) 2011-12-06 2011-12-06 ダイヤフラム弁

Country Status (7)

Country Link
US (1) US20140326915A1 (OSRAM)
JP (1) JP2013119877A (OSRAM)
KR (1) KR20140098196A (OSRAM)
CN (1) CN104094027A (OSRAM)
SG (1) SG11201402331PA (OSRAM)
TW (1) TW201344087A (OSRAM)
WO (1) WO2013084744A1 (OSRAM)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6186275B2 (ja) 2013-12-27 2017-08-23 株式会社フジキン 流体制御装置
US10529911B2 (en) 2016-01-29 2020-01-07 Microjet Technology Co., Ltd. Piezoelectric actuator
US10615329B2 (en) 2016-01-29 2020-04-07 Microjet Technology Co., Ltd. Piezoelectric actuator
US10378529B2 (en) * 2016-01-29 2019-08-13 Microjet Technology Co., Ltd. Miniature pneumatic device
EP3203079B1 (en) 2016-01-29 2021-05-19 Microjet Technology Co., Ltd Piezoelectric actuator
US10385838B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Miniature fluid control device
US10584695B2 (en) 2016-01-29 2020-03-10 Microjet Technology Co., Ltd. Miniature fluid control device
US10451051B2 (en) * 2016-01-29 2019-10-22 Microjet Technology Co., Ltd. Miniature pneumatic device
US10388849B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Piezoelectric actuator
US10487820B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature pneumatic device
US10487821B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature fluid control device
US10371136B2 (en) 2016-01-29 2019-08-06 Microjet Technology Co., Ltd. Miniature pneumatic device
JP6574452B2 (ja) * 2016-01-29 2019-09-11 研能科技股▲ふん▼有限公司 小型空気圧動力装置
JP6516696B2 (ja) * 2016-03-01 2019-05-22 株式会社鷺宮製作所 容量調整弁
US10746169B2 (en) 2016-11-10 2020-08-18 Microjet Technology Co., Ltd. Miniature pneumatic device
US10655620B2 (en) 2016-11-10 2020-05-19 Microjet Technology Co., Ltd. Miniature fluid control device
US10683861B2 (en) 2016-11-10 2020-06-16 Microjet Technology Co., Ltd. Miniature pneumatic device
JP6914044B2 (ja) * 2017-01-31 2021-08-04 株式会社キッツエスシーティー ダイヤフラムバルブ
KR102254663B1 (ko) * 2017-07-31 2021-05-21 가부시끼가이샤후지킨 가스 공급 시스템
US10774938B2 (en) * 2017-11-09 2020-09-15 Swagelok Company Diaphragm valve with metal seat
US11143318B2 (en) * 2018-03-19 2021-10-12 Hitachi Metals, Ltd. Diaphragm valve and mass flow controller using the same
WO2019193978A1 (ja) * 2018-04-06 2019-10-10 株式会社フジキン バルブ装置および流体制御装置、流体制御方法、半導体製造装置及び半導体製造方法
WO2020026579A1 (ja) * 2018-07-31 2020-02-06 株式会社フジキン バルブ装置
CN112930454A (zh) * 2018-10-26 2021-06-08 株式会社富士金 阀装置和气体供给系统
JP7633703B2 (ja) * 2020-03-26 2025-02-20 株式会社フジキン バルブ装置
EP4196703A1 (en) 2020-11-30 2023-06-21 Parker-Hannifin Corporation Dual axis seat retainer
KR102849824B1 (ko) * 2021-04-01 2025-08-25 가부시키가이샤 후지킨 제어기 및 기화 공급 장치
US11761547B1 (en) * 2022-04-07 2023-09-19 Horiba Stec, Co., Ltd. Valve orifice insert

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63115970A (ja) * 1986-10-31 1988-05-20 Motoyama Seisakusho:Kk ダイヤフラム弁
JPH0427274U (OSRAM) * 1990-06-29 1992-03-04
JP3505589B2 (ja) * 1992-04-20 2004-03-08 清原 まさ子 管継手用リテーナ
US5215286A (en) * 1992-05-26 1993-06-01 Nupro Company High pressure diaphragm valve
JP3280119B2 (ja) * 1993-06-02 2002-04-30 清原 まさ子 ダイヤフラム弁
JP3372091B2 (ja) * 1993-11-15 2003-01-27 株式会社本山製作所 ダイヤフラム弁構造
TW397909B (en) * 1996-09-30 2000-07-11 Benkan Corp Integration gas controller
WO2001094824A1 (en) * 2000-06-05 2001-12-13 Fujikin Incorporated Orifice-built-in valve
JP4700234B2 (ja) * 2001-07-31 2011-06-15 株式会社フジキン ダイヤフラム弁
JP4119275B2 (ja) * 2003-02-18 2008-07-16 忠弘 大見 真空排気系用のダイヤフラム弁
EP1613882A2 (en) * 2003-04-14 2006-01-11 Swagelok Company Diaphragm valve seat
JP3861206B2 (ja) * 2003-12-08 2006-12-20 株式会社フジキン 流体制御器
JP2008089103A (ja) * 2006-10-03 2008-04-17 Smc Corp 手動切換弁
EP2003379A1 (en) * 2007-06-12 2008-12-17 Luxembourg Patent Company S.A. High pressure diaphragm valve with exchangeable seat assembly

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