KR20140098196A - 다이어프램 밸브 - Google Patents

다이어프램 밸브 Download PDF

Info

Publication number
KR20140098196A
KR20140098196A KR1020147017375A KR20147017375A KR20140098196A KR 20140098196 A KR20140098196 A KR 20140098196A KR 1020147017375 A KR1020147017375 A KR 1020147017375A KR 20147017375 A KR20147017375 A KR 20147017375A KR 20140098196 A KR20140098196 A KR 20140098196A
Authority
KR
South Korea
Prior art keywords
diaphragm
sheet
holder
vickers hardness
seat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020147017375A
Other languages
English (en)
Korean (ko)
Inventor
다이치 기타노
츠토무 시노하라
미치오 야마지
류타로 니시무라
Original Assignee
가부시키가이샤 후지킨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 후지킨 filed Critical 가부시키가이샤 후지킨
Publication of KR20140098196A publication Critical patent/KR20140098196A/ko
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F16K25/005—Particular materials for seats or closure elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0236—Diaphragm cut-off apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Diaphragms And Bellows (AREA)
  • Lift Valve (AREA)
KR1020147017375A 2011-12-06 2012-11-27 다이어프램 밸브 Withdrawn KR20140098196A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011266922A JP2013119877A (ja) 2011-12-06 2011-12-06 ダイヤフラム弁
JPJP-P-2011-266922 2011-12-06
PCT/JP2012/080537 WO2013084744A1 (ja) 2011-12-06 2012-11-27 ダイヤフラム弁

Publications (1)

Publication Number Publication Date
KR20140098196A true KR20140098196A (ko) 2014-08-07

Family

ID=48574118

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147017375A Withdrawn KR20140098196A (ko) 2011-12-06 2012-11-27 다이어프램 밸브

Country Status (7)

Country Link
US (1) US20140326915A1 (OSRAM)
JP (1) JP2013119877A (OSRAM)
KR (1) KR20140098196A (OSRAM)
CN (1) CN104094027A (OSRAM)
SG (1) SG11201402331PA (OSRAM)
TW (1) TW201344087A (OSRAM)
WO (1) WO2013084744A1 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210027452A (ko) * 2018-07-31 2021-03-10 가부시키가이샤 후지킨 밸브 장치

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6186275B2 (ja) 2013-12-27 2017-08-23 株式会社フジキン 流体制御装置
US10529911B2 (en) 2016-01-29 2020-01-07 Microjet Technology Co., Ltd. Piezoelectric actuator
US10615329B2 (en) 2016-01-29 2020-04-07 Microjet Technology Co., Ltd. Piezoelectric actuator
US10378529B2 (en) * 2016-01-29 2019-08-13 Microjet Technology Co., Ltd. Miniature pneumatic device
EP3203079B1 (en) 2016-01-29 2021-05-19 Microjet Technology Co., Ltd Piezoelectric actuator
US10385838B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Miniature fluid control device
US10584695B2 (en) 2016-01-29 2020-03-10 Microjet Technology Co., Ltd. Miniature fluid control device
US10451051B2 (en) * 2016-01-29 2019-10-22 Microjet Technology Co., Ltd. Miniature pneumatic device
US10388849B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Piezoelectric actuator
US10487820B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature pneumatic device
US10487821B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature fluid control device
US10371136B2 (en) 2016-01-29 2019-08-06 Microjet Technology Co., Ltd. Miniature pneumatic device
JP6574452B2 (ja) * 2016-01-29 2019-09-11 研能科技股▲ふん▼有限公司 小型空気圧動力装置
JP6516696B2 (ja) * 2016-03-01 2019-05-22 株式会社鷺宮製作所 容量調整弁
US10746169B2 (en) 2016-11-10 2020-08-18 Microjet Technology Co., Ltd. Miniature pneumatic device
US10655620B2 (en) 2016-11-10 2020-05-19 Microjet Technology Co., Ltd. Miniature fluid control device
US10683861B2 (en) 2016-11-10 2020-06-16 Microjet Technology Co., Ltd. Miniature pneumatic device
JP6914044B2 (ja) * 2017-01-31 2021-08-04 株式会社キッツエスシーティー ダイヤフラムバルブ
KR102254663B1 (ko) * 2017-07-31 2021-05-21 가부시끼가이샤후지킨 가스 공급 시스템
US10774938B2 (en) * 2017-11-09 2020-09-15 Swagelok Company Diaphragm valve with metal seat
US11143318B2 (en) * 2018-03-19 2021-10-12 Hitachi Metals, Ltd. Diaphragm valve and mass flow controller using the same
WO2019193978A1 (ja) * 2018-04-06 2019-10-10 株式会社フジキン バルブ装置および流体制御装置、流体制御方法、半導体製造装置及び半導体製造方法
CN112930454A (zh) * 2018-10-26 2021-06-08 株式会社富士金 阀装置和气体供给系统
JP7633703B2 (ja) * 2020-03-26 2025-02-20 株式会社フジキン バルブ装置
EP4196703A1 (en) 2020-11-30 2023-06-21 Parker-Hannifin Corporation Dual axis seat retainer
KR102849824B1 (ko) * 2021-04-01 2025-08-25 가부시키가이샤 후지킨 제어기 및 기화 공급 장치
US11761547B1 (en) * 2022-04-07 2023-09-19 Horiba Stec, Co., Ltd. Valve orifice insert

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63115970A (ja) * 1986-10-31 1988-05-20 Motoyama Seisakusho:Kk ダイヤフラム弁
JPH0427274U (OSRAM) * 1990-06-29 1992-03-04
JP3505589B2 (ja) * 1992-04-20 2004-03-08 清原 まさ子 管継手用リテーナ
US5215286A (en) * 1992-05-26 1993-06-01 Nupro Company High pressure diaphragm valve
JP3280119B2 (ja) * 1993-06-02 2002-04-30 清原 まさ子 ダイヤフラム弁
JP3372091B2 (ja) * 1993-11-15 2003-01-27 株式会社本山製作所 ダイヤフラム弁構造
TW397909B (en) * 1996-09-30 2000-07-11 Benkan Corp Integration gas controller
WO2001094824A1 (en) * 2000-06-05 2001-12-13 Fujikin Incorporated Orifice-built-in valve
JP4700234B2 (ja) * 2001-07-31 2011-06-15 株式会社フジキン ダイヤフラム弁
JP4119275B2 (ja) * 2003-02-18 2008-07-16 忠弘 大見 真空排気系用のダイヤフラム弁
EP1613882A2 (en) * 2003-04-14 2006-01-11 Swagelok Company Diaphragm valve seat
JP3861206B2 (ja) * 2003-12-08 2006-12-20 株式会社フジキン 流体制御器
JP2008089103A (ja) * 2006-10-03 2008-04-17 Smc Corp 手動切換弁
EP2003379A1 (en) * 2007-06-12 2008-12-17 Luxembourg Patent Company S.A. High pressure diaphragm valve with exchangeable seat assembly

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210027452A (ko) * 2018-07-31 2021-03-10 가부시키가이샤 후지킨 밸브 장치

Also Published As

Publication number Publication date
JP2013119877A (ja) 2013-06-17
TW201344087A (zh) 2013-11-01
SG11201402331PA (en) 2014-08-28
WO2013084744A1 (ja) 2013-06-13
CN104094027A (zh) 2014-10-08
US20140326915A1 (en) 2014-11-06

Similar Documents

Publication Publication Date Title
KR101599117B1 (ko) 다이어프램 밸브 및 다이어프램 밸브용 시트 홀더 유닛
WO2013084744A1 (ja) ダイヤフラム弁
JP6072648B2 (ja) ダイヤフラム弁
US20170130848A1 (en) Diaphragm valve, fluid control device, semiconductor manufacturing apparatus, and semiconductor manufacturing method
US10125876B2 (en) Diaphragm valve, fluid control device, semiconductor manufacturing apparatus, and semiconductor manufacturing method
US9175779B2 (en) Diaphragm valve
JP5804784B2 (ja) 逆止弁
TWI684721B (zh) 流體控制器
TWI690670B (zh) 隔膜閥
KR101809810B1 (ko) 다이어프램 밸브
JP6228336B1 (ja) 環状弁
JP2010159790A (ja) ダイヤフラム弁用ダイヤフラム押さえおよびこれを備えたダイヤフラム弁
JP5582570B2 (ja) バルブ及びバルブ用シートパッキン
KR20220140821A (ko) 밸브 장치
KR20170099720A (ko) 디스크 상부에 탄성체가 구비된 안전밸브
CN211117788U (zh) 单向阀装置和阀头
JP2015048862A (ja) ダイヤフラム弁
JP2012107650A (ja) ディスク式スチームトラップ

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20140624

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid