JP2013115352A5 - - Google Patents

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Publication number
JP2013115352A5
JP2013115352A5 JP2011262320A JP2011262320A JP2013115352A5 JP 2013115352 A5 JP2013115352 A5 JP 2013115352A5 JP 2011262320 A JP2011262320 A JP 2011262320A JP 2011262320 A JP2011262320 A JP 2011262320A JP 2013115352 A5 JP2013115352 A5 JP 2013115352A5
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JP
Japan
Prior art keywords
annular
substrate
holes
electrostatic chuck
green sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011262320A
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English (en)
Japanese (ja)
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JP2013115352A (ja
JP5785862B2 (ja
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Priority to JP2011262320A priority Critical patent/JP5785862B2/ja
Priority claimed from JP2011262320A external-priority patent/JP5785862B2/ja
Publication of JP2013115352A publication Critical patent/JP2013115352A/ja
Publication of JP2013115352A5 publication Critical patent/JP2013115352A5/ja
Application granted granted Critical
Publication of JP5785862B2 publication Critical patent/JP5785862B2/ja
Active legal-status Critical Current
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JP2011262320A 2011-11-30 2011-11-30 静電チャック及びその製造方法、基板温調固定装置 Active JP5785862B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011262320A JP5785862B2 (ja) 2011-11-30 2011-11-30 静電チャック及びその製造方法、基板温調固定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011262320A JP5785862B2 (ja) 2011-11-30 2011-11-30 静電チャック及びその製造方法、基板温調固定装置

Publications (3)

Publication Number Publication Date
JP2013115352A JP2013115352A (ja) 2013-06-10
JP2013115352A5 true JP2013115352A5 (cg-RX-API-DMAC10.html) 2014-09-25
JP5785862B2 JP5785862B2 (ja) 2015-09-30

Family

ID=48710596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011262320A Active JP5785862B2 (ja) 2011-11-30 2011-11-30 静電チャック及びその製造方法、基板温調固定装置

Country Status (1)

Country Link
JP (1) JP5785862B2 (cg-RX-API-DMAC10.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10832931B2 (en) * 2014-05-30 2020-11-10 Applied Materials, Inc. Electrostatic chuck with embossed top plate and cooling channels
US11133212B2 (en) * 2018-05-16 2021-09-28 Applied Materials, Inc. High temperature electrostatic chuck
KR102188779B1 (ko) * 2018-10-15 2020-12-08 세메스 주식회사 기판 지지 장치 및 그 제조방법
JP7752139B2 (ja) * 2020-06-09 2025-10-09 ラム リサーチ コーポレーション 複数の加熱ゾーンおよび熱ボイドを使用した台座熱プロファイルの調節

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001118915A (ja) * 1999-10-15 2001-04-27 Applied Materials Inc 内蔵チャンネルを有する多層セラミック静電チャック
JP4944600B2 (ja) * 2006-12-28 2012-06-06 新光電気工業株式会社 基板温調固定装置
JP4418484B2 (ja) * 2007-07-04 2010-02-17 日本碍子株式会社 静電チャック及びそれを用いたワークの冷却方法
JP4929150B2 (ja) * 2007-12-27 2012-05-09 新光電気工業株式会社 静電チャック及び基板温調固定装置
JP4612707B2 (ja) * 2008-05-15 2011-01-12 日本特殊陶業株式会社 静電チャック、静電チャック装置、及び静電チャックの製造方法

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