JP2013115352A5 - - Google Patents

Claims (7)

A method of manufacturing an electrostatic chuck having a substrate having a substrate mounting surface on which a substrate is mounted, an electrode built in the substrate, and an annular gas channel built in the substrate,
A through hole forming step of forming a plurality of through holes in the first green sheet and a connecting portion provided between the adjacent through holes in an annular shape;
A temporary bonding step of temporarily bonding the first green sheet on a second green sheet and closing one side of the plurality of through holes with the second green sheet;
After the temporary bonding step, the connecting portion is removed, the connecting portion removing step of forming the annular through hole by integrating the plurality of through holes,
A third green sheet is temporarily bonded onto the first green sheet, the other side of the annular through-hole is closed with the third green sheet, and an annular gas flow is formed only by the first green sheet. A gas flow path forming step for forming a path;
And a substrate forming step of firing each of the temporarily bonded green sheets to form the substrate.   In the through hole forming step, a plurality of second through holes and a second connecting portion provided between the adjacent second through holes inside the plurality of through holes formed in an annular shape. The method for manufacturing an electrostatic chuck according to claim 1, wherein:   3. The method of manufacturing an electrostatic chuck according to claim 2, wherein in the through hole forming step, a part of the plurality of through holes and a part of the plurality of second through holes are communicated with each other. An electrostatic chuck having a base having a substrate placement surface on which a substrate is placed, an electrode built in the base, and an annular gas flow path built in the base,
The annular gas channel includes a first annular gas channel formed in the same plane by only one green sheet, and a second gas gas channel disposed inside the first annular gas channel. An annular gas flow path,
The electrostatic chuck according to claim 1, wherein the first annular gas flow path and the second annular gas flow path are provided on an outer peripheral side of a half of the radius of the base body in a plan view. The electrostatic chuck according to claim 4, wherein a projection having an annular shape in plan view is provided on an outer edge portion of the substrate mounting surface. Wherein the first annular gas passage and gas passage of the second annular, claim 4 or 5 The electrostatic chuck according to, characterized in that communicate with each other. An electrostatic chuck according to any one of claims 4 to 6 ,
And a base plate for fixing the electrostatic chuck via an adhesive layer.