JP2013109074A - Device and method for manufacturing blue phase type liquid crystal panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device and a method for manufacturing a blue phase type liquid crystal panel in which the whole surface of a liquid crystal layer of a blue phase type liquid crystal panel material in a state of being immersed in a liquid coolant can be uniformly irradiated with light and the liquid crystal layer is made to have a uniform blue phase state accordingly even when the blue phase type liquid crystal panel material is large.SOLUTION: In a device for manufacturing a blue phase type liquid crystal panel, an ultraviolet light source for irradiating a liquid crystal panel material in a state of being immersed in a liquid coolant with light is disposed so that a boundary surface between the liquid coolant and atmospheric air is not present between the ultraviolet light source and the liquid crystal panel material.

Description

  The present invention relates to a blue phase liquid crystal panel manufacturing apparatus and a blue phase liquid crystal panel manufacturing method.

  In recent years, liquid crystal panels are highly demanded to increase the response speed of switching display, and various liquid crystal driving methods are being studied. As a liquid crystal driving method for realizing such a high response speed, it has been proposed to drive the liquid crystal panel while maintaining the liquid crystal in a blue phase state.

  The blue phase is a liquid crystal phase that appears between the cholesteric phase and the isotropic phase, and can change the diffraction angle and polarization state of incident light with a response time on the order of microseconds by an electric field or magnetic field. Show properties. Therefore, the liquid crystal element in the blue phase state can realize a response speed far exceeding that of the liquid crystal element in the conventional liquid crystal panel. Further, when a liquid crystal element in a blue phase state is used for a liquid crystal panel, an alignment film is unnecessary and a wide viewing angle can be achieved. Therefore, practical application of such a liquid crystal panel is expected.

  However, the blue phase appears only within a very narrow temperature range of several degrees Centigrade (generally a temperature range of 1 to 3 degrees C) between the costelic phase and the isotropic phase. Therefore, since it is necessary to control the temperature of the liquid crystal element with high accuracy, it is difficult to put a liquid crystal panel using a liquid crystal element in a blue phase into practical use.

In order to deal with such a problem, various proposals have been made on a method for putting a liquid crystal panel using a liquid crystal element in a blue phase state into use, that is, a blue phase liquid crystal panel (for example, Patent Document 1). And Patent Document 2).
Specifically, Patent Document 1 discloses that a polymer network derived from a monomer having a specific chemical structure is formed in a low-molecular liquid crystal exhibiting a blue phase at a specific temperature. In the liquid crystal material in which is formed, a temperature range larger than the temperature range in which the blue phase appears in the liquid crystal constituting the liquid crystal material can be obtained, that is, the temperature range in which the blue phase appears can be expanded. It is disclosed.

The liquid crystal material having such a structure is mixed with a monomer that is polymerized by photopolymerization or thermal polymerization in the liquid crystal, and under a temperature condition in which a blue phase appears in the liquid crystal constituting the liquid crystal composition in which the liquid crystal and the monomer are mixed. It can be obtained by polymerizing the monomer.
In addition, when a monomer that is polymerized by thermal polymerization is used to obtain a liquid crystal material, it may be difficult to set the polymerization temperature within a temperature range in which a blue phase appears in the liquid crystal. The form of the network may change depending on the heating conditions. Therefore, it is preferable to use a monomer that is polymerized by photopolymerization as the monomer for obtaining the liquid crystal composition.

  As a technique for obtaining a blue phase liquid crystal panel having a liquid crystal material having a structure in which a polymer network is formed in a liquid crystal as a liquid crystal layer using a monomer that is polymerized by photopolymerization, liquid crystal and the liquid crystal are spirally wound. A blue phase liquid crystal panel material in which a liquid crystal layer is formed from a liquid crystal composition containing a chiral agent, a photocuring material resin, and a photopolymerization initiator for aligning the structure and causing a blue phase to appear is produced and obtained. A method of irradiating light (for example, ultraviolet light) having a wavelength at which a photocurable resin and a photopolymerization initiator react with the liquid crystal layer while controlling the temperature of the liquid crystal layer of the blue phase liquid crystal panel material has been proposed. (See Patent Document 2).

  Here, as a specific method for obtaining a blue-phase liquid crystal panel from a blue-phase liquid crystal panel material, for example, the liquid crystal layer of the blue-phase liquid crystal panel material is heated to an isotropic phase, and then gradually. A method in which the temperature is lowered to the blue phase and the light is irradiated while maintaining the temperature at which the blue phase appears, or the liquid crystal layer of the liquid crystal panel material of the blue phase method is heated to the isotropic phase, For example, the light irradiation may be performed in a state (isotropic phase appearance state) within + 5 ° C. from the phase transition temperature between the phase and the isotropic phase.

  In order to obtain a blue phase liquid crystal panel from a blue phase liquid crystal panel material in this way, the liquid crystal layer of the blue phase liquid crystal panel material is in a state where a blue phase appears in the liquid crystal layer, or blue It is necessary to perform light irradiation while maintaining the temperature of the liquid crystal layer of the phase type liquid crystal panel material within a specific temperature range related to the phase transition temperature between the blue phase and the isotropic phase in the liquid crystal layer. However, the temperature at which the blue phase appears in the liquid crystal layer of the blue phase liquid crystal panel material is the temperature at which the blue phase appears in the liquid crystal constituting the liquid crystal layer, and the temperature at which the blue phase appears in the liquid crystal as described above. Is within a very narrow temperature range, it is necessary to control the temperature of the liquid crystal layer within an extremely narrow temperature range even when light is irradiated on the liquid crystal layer of a blue phase liquid crystal panel material.

  In recent years, the substrate size of liquid crystal panels has been increased. Therefore, the blue phase liquid crystal panel material used in the method for obtaining the blue phase liquid crystal panel is also increased in size, but the temperature of the large blue phase liquid crystal panel material can be adjusted, for example. It is difficult to maintain the temperature of the liquid crystal layer within a specific narrow temperature range by arranging on the stage and adjusting the temperature distribution of the blue phase liquid crystal panel material.

Japanese Patent No. 3779937 JP 2011-8242 A

  Thus, as a result of repeated studies on a technique for obtaining a large blue phase liquid crystal panel, the inventors have obtained a blue phase liquid crystal panel material as an object to be processed W as shown in FIG. The refrigerant tank 11 is disposed so as to be immersed in a liquid refrigerant L having a large heat capacity such as pure water, and the temperature of the liquid refrigerant L in the refrigerant tank 11 is controlled by temperature control means (not shown). By adjusting to a predetermined temperature, the temperature distribution of the liquid crystal panel material of the blue phase system is maintained within the temperature range where the blue phase appears in the liquid crystal layer, and the blue phase liquid crystal panel material in a state where the blue phase appears The liquid crystal layer is irradiated with light (for example, ultraviolet rays) from a light source including a plurality of lamps 90 provided above (outside in FIG. 12) outside the refrigerant tank 11 via the liquid refrigerant L. The thought.

However, the surface of the liquid refrigerant L in the refrigerant tank 11, that is, the state of the boundary surface LS between the liquid refrigerant L and the atmosphere is not always stable, and fluctuates (waves) due to, for example, undesired vibration from the outside of the refrigerant tank 11. Will occur. On the other hand, the light from the light source arranged outside the refrigerant tank 11 is refracted at the boundary surface LS between the atmosphere and the liquid refrigerant L when entering the liquid refrigerant L. Therefore, when fluctuation occurs on the surface of the liquid refrigerant L, the boundary surface LS between the atmosphere and the liquid refrigerant L is not flat, and when the shape of the boundary surface LS is in a wavy state in this manner, Even if the light from the light source is adjusted so that the irradiance distribution on the light irradiation surface of the liquid crystal panel material of the blue phase method is uniform when the surface of the refrigerant is flat, the air and the liquid refrigerant L Since the boundary surface LS is not flat, the irradiance distribution of light on the light irradiation surface of the liquid crystal panel material of the blue phase method becomes non-uniform. Moreover, the irradiance distribution changes over time. Therefore, the curing state of the photocurable resin constituting the liquid crystal layer of the blue phase liquid crystal panel material is uneven in place. That is, there is a problem that unevenness occurs in the blue phase state (appearance of the blue phase) in the liquid crystal layer of the obtained blue phase type liquid crystal panel.
In FIG. 12, examples of optical paths (light paths in the atmosphere and light paths in the liquid refrigerant L) from the light emitted from the light source to the workpiece W are indicated by arrows.

  The present invention has been made based on the above circumstances, and its purpose is to perform uniform light irradiation on the entire surface of a liquid crystal layer of a blue phase liquid crystal panel material immersed in a liquid refrigerant. Therefore, even if the liquid crystal panel material of the blue phase method is large, the blue phase method can be used to produce a blue phase type liquid crystal panel in which the liquid crystal layer can be in a uniform blue phase state. The present invention provides a liquid crystal panel manufacturing apparatus and a blue phase liquid crystal panel manufacturing method.

The blue phase type liquid crystal panel manufacturing apparatus of the present invention has a liquid refrigerant inside, and the liquid refrigerant contains a liquid crystal, a chiral agent and an ultraviolet curable resin, and exhibits a blue phase at a specific temperature. A refrigerant tank for immersing a liquid crystal panel material of a blue phase system having a liquid crystal layer comprising:
An ultraviolet light source for irradiating the liquid crystal panel material immersed in a liquid refrigerant in the refrigerant tank with light containing ultraviolet light having a wavelength for curing the ultraviolet curable resin constituting the liquid crystal layer of the liquid crystal panel material;
Power supply means for supplying power to the ultraviolet light source;
Adjust the temperature of the liquid refrigerant in the refrigerant tank so that the temperature of the liquid crystal panel material immersed in the liquid refrigerant in the refrigerant tank becomes the blue phase appearance temperature at which the blue phase appears in the liquid crystal layer of the liquid crystal panel material. A blue phase liquid crystal panel manufacturing apparatus comprising a temperature control means for
The ultraviolet light source is arranged such that there is no interface between the liquid refrigerant and the atmosphere between the ultraviolet light source and the liquid crystal panel material.

The blue phase liquid crystal panel manufacturing apparatus of the present invention further includes a reflecting mirror that reflects light including ultraviolet rays emitted from the ultraviolet light source,
The reflecting mirror is preferably arranged so that there is no interface between the liquid refrigerant and the atmosphere between the reflecting surface of the reflecting mirror and the ultraviolet light source.

In the blue phase liquid crystal panel manufacturing apparatus of the present invention, the refrigerant tank includes an inlet and an outlet for liquid refrigerant, and the outlet is located above the inlet.
It is preferable to have a liquid refrigerant supply source for supplying liquid refrigerant from the inlet to the refrigerant tank.

  In the blue-phase-type liquid crystal panel manufacturing apparatus of the present invention, the liquid refrigerant supply source is a liquid refrigerant circulation unit that circulates the liquid refrigerant discharged from the outlet and flows into the refrigerant tank from the inlet. It is preferable to constitute a part.

In the blue phase liquid crystal panel manufacturing apparatus of the present invention, the apparatus includes a temperature sensor that measures the temperature of the liquid refrigerant in the refrigerant tank, and a controller.
The control unit operates the temperature control unit based on the temperature information of the liquid refrigerant from the temperature sensor, so that the temperature of the liquid crystal panel material immersed in the liquid refrigerant in the refrigerant tank is the blue phase appearance temperature. It is preferable to control the temperature of the liquid refrigerant in the refrigerant tank.

In the blue phase type liquid crystal panel manufacturing apparatus of the present invention, the inlet comprises a first inlet and a second inlet,
The liquid refrigerant supply source includes a first liquid refrigerant supply source that supplies a liquid refrigerant having a first temperature higher than the blue phase appearance temperature from the first inlet into the refrigerant tank, and a first temperature lower than the blue phase appearance temperature. A second liquid refrigerant supply source for supplying liquid refrigerant at a temperature of 2 into the refrigerant tank from the second inlet,
Between the first inlet and the first liquid refrigerant supply source, a first flow rate control for controlling a flow rate per unit time of the liquid refrigerant flowing into the refrigerant tank from the first inlet. Means are provided,
Between the second inlet and the second liquid refrigerant supply source, a second flow rate control for controlling the flow rate per unit time of the liquid refrigerant flowing into the refrigerant tank from the second inlet. Means are preferably provided.

In the blue phase liquid crystal panel manufacturing apparatus of the present invention, the apparatus includes a temperature sensor that measures the temperature of the liquid refrigerant in the refrigerant tank, and a controller.
The controller controls the flow rate per unit time of the liquid refrigerant flowing into the refrigerant tank from the first inlet and the refrigerant tank from the second inlet based on the temperature information of the liquid refrigerant from the temperature sensor. By adjusting the ratio of the liquid refrigerant flowing into the unit to the flow rate per unit time, the temperature of the liquid crystal panel material immersed in the liquid refrigerant in the refrigerant tank becomes the blue phase appearance temperature. It is preferable to control the temperature of the liquid refrigerant inside.

  In the blue phase type liquid crystal panel manufacturing apparatus of the present invention, the liquid crystal panel material is transported from the outside of the refrigerant tank into the refrigerant tank, and is allowed to pass through a region irradiated with light including ultraviolet rays emitted from the ultraviolet light source. The blue phase liquid crystal panel obtained by curing the ultraviolet curable resin in a state where the blue phase appears in the liquid crystal layer of the liquid crystal panel material by irradiating light in the refrigerant tank It is preferable that a transport mechanism for transporting the refrigerant tank to the outside is provided.

  In the blue phase type liquid crystal panel manufacturing apparatus of the present invention, the ultraviolet light source preferably has a configuration in which a plurality of excimer lamps are arranged in parallel.

In the blue phase liquid crystal panel manufacturing apparatus of the present invention, the excimer lamp constituting the ultraviolet light source is made of a dielectric material, and one discharge electrode is provided on the outer surface of the discharge vessel filled with a discharge medium. Disposed, the other discharge electrode is disposed inside the discharge vessel, and these discharge electrodes are electrically connected to the power feeding means,
The discharge electrode disposed on the outer surface of the discharge vessel is preferably at a ground potential or grounded.
In the blue phase type liquid crystal panel device of the present invention having such a configuration, the excimer lamp includes a phosphor containing a phosphor that is excited by excimer light generated inside the discharge vessel and emits ultraviolet light. A layer may be provided on the inner surface of the discharge vessel.

In the blue phase type liquid crystal panel manufacturing apparatus of the present invention, the excimer lamp constituting the ultraviolet light source is made of a dielectric material, filled with a discharge medium, and has a substantially cylindrical outer shape and sealed at one end. The outer tube and the inner tube that are open at the other end are arranged substantially coaxially, and have a discharge vessel in which the opening end of the outer tube and the opening end of the inner tube are sealed. And
One discharge electrode is disposed on the outer surface of the discharge vessel on the outer tube side, and the other discharge electrode is disposed on the outer surface of the discharge vessel on the inner tube side. Connected,
The discharge electrode disposed on the outer surface of the discharge vessel on the outer tube side is at a ground potential or grounded, and only the discharge electrode disposed on the outer surface of the discharge vessel on the outer tube side It is preferable to be in contact with the liquid refrigerant in the refrigerant tank.
In the blue phase type liquid crystal panel device of the present invention having such a configuration, the excimer lamp includes a phosphor containing a phosphor that is excited by excimer light generated inside the discharge vessel and emits ultraviolet light. A layer may be provided on the inner surface of the discharge vessel on the outer tube side.

In the blue phase type liquid crystal panel manufacturing apparatus of the present invention, the excimer lamp constituting the ultraviolet light source includes an outer tube and an inner tube each having a substantially cylindrical outer shape made of a dielectric material filled with a discharge medium. Is disposed substantially coaxially, and has a hollow cylindrical discharge vessel in which both ends of the outer tube and the inner tube are sealed,
One discharge electrode is disposed on the outer surface of the discharge vessel on the outer tube side, and the other discharge electrode is disposed on the outer surface of the discharge vessel on the inner tube side, and these discharge electrodes are electrically connected to the power supply means. Connected to
The discharge electrode disposed on the outer surface of the discharge vessel on the outer tube side is at a ground potential or grounded, and only the discharge electrode disposed on the outer surface of the discharge vessel on the outer tube side It is preferable to be in contact with the liquid refrigerant in the refrigerant tank.
In the blue phase type liquid crystal panel device of the present invention having such a configuration, the excimer lamp includes a phosphor containing a phosphor that is excited by excimer light generated inside the discharge vessel and emits ultraviolet light. A layer may be provided on the inner surface of the discharge vessel on the outer tube side.

  In the blue phase type liquid crystal panel manufacturing apparatus of the present invention, the ultraviolet light source includes a rare gas enclosed in a discharge vessel which is a light emitting tube, and is separated from each other on the outer surface of the discharge vessel. A pair of external electrodes are arranged along the direction, and a plurality of rare gas fluorescent lamps having power supply terminals connected to the ends of the pair of external electrodes are arranged in parallel. It is preferable.

  In the blue phase type liquid crystal panel manufacturing apparatus of the present invention, the rare gas fluorescent lamp includes a cylindrical outer tube having translucency covering the entire discharge vessel, and an insulating property that closes both ends of the outer tube. And a power supply terminal connected to an external electrode provided on the outer surface of the discharge vessel projects through the cover member to the outside of the outer tube, and the power supply terminal It is preferable that the protruding portion in is electrically connected to the power feeding means.

  In the blue phase type liquid crystal panel manufacturing apparatus of the present invention, it is preferable that the protruding portion of the power supply terminal is exposed to the outside of the refrigerant tank.

In the blue phase type liquid crystal panel manufacturing apparatus of the present invention, the rare gas fluorescent lamp further comprises a cooling gas introduction means,
A lid member that closes the opening at both ends of the outer pipe is positioned outside the refrigerant tank, and one of the lid members is a cooling gas that introduces the cooling gas supplied from the reject gas introduction means into the outer pipe. It is preferable that an introduction portion is provided, and the other lid member is provided with a cooling gas discharge portion for discharging the cooling gas introduced into the outer tube.

A method for producing a blue phase liquid crystal panel according to the present invention uses the above-described blue phase liquid crystal panel manufacturing apparatus, and contains a liquid crystal, a chiral agent, and an ultraviolet curable resin, and exhibits a blue phase at a specific temperature. A method for producing a blue phase liquid crystal panel for obtaining a blue phase liquid crystal panel from a blue phase liquid crystal panel material having a liquid crystal layer comprising a product,
Set the temperature of the liquid refrigerant in the refrigerant tank so that the temperature of the liquid crystal layer of the liquid crystal panel material immersed in the liquid refrigerant in the refrigerant tank becomes the blue phase appearance temperature at which the blue phase appears in the liquid crystal layer,
A step of irradiating the liquid crystal panel material in a state where a blue phase appears in the liquid crystal layer with light including ultraviolet rays having a wavelength for curing the ultraviolet curable resin constituting the liquid crystal layer of the liquid crystal panel material by an ultraviolet light source. It is characterized by.

A method for producing a blue phase liquid crystal panel according to the present invention uses the above-described blue phase liquid crystal panel manufacturing apparatus, and contains a liquid crystal, a chiral agent, and an ultraviolet curable resin, and exhibits a blue phase at a specific temperature. A method for producing a blue phase liquid crystal panel for obtaining a blue phase liquid crystal panel from a blue phase liquid crystal panel material having a liquid crystal layer comprising a product,
The liquid refrigerant is immersed in the liquid refrigerant in the refrigerant tank by adjusting the ratio between the flow rate per unit time of the liquid refrigerant at the first temperature flowing into the refrigerant tank and the flow rate per unit time of the liquid refrigerant at the second temperature. The temperature of the liquid refrigerant in the refrigerant tank is set so that the temperature of the liquid crystal layer of the liquid crystal panel material in the state becomes the blue phase appearance temperature at which the blue phase appears in the liquid crystal layer,
A step of irradiating the liquid crystal panel material in a state where a blue phase appears in the liquid crystal layer with light including ultraviolet rays having a wavelength for curing the ultraviolet curable resin constituting the liquid crystal layer of the liquid crystal panel material by an ultraviolet light source. It is characterized by.

  In the method for producing a blue-phase liquid crystal panel according to the present invention, the temperature of the liquid refrigerant in the refrigerant tank is measured, and the unit of the liquid refrigerant at the first temperature is determined based on the obtained temperature value of the liquid refrigerant. It is preferable to adjust the ratio between the flow rate per time and the flow rate per unit time of the liquid refrigerant at the second temperature.

In the blue phase liquid crystal panel manufacturing apparatus of the present invention, the liquid crystal panel material and the blue phase liquid crystal panel material immersed in the liquid refrigerant in the refrigerant tank filled with the liquid refrigerant Since the light from the ultraviolet light source arranged so that there is no boundary between the liquid refrigerant and the atmosphere is irradiated between the liquid crystal panel material and the liquid crystal panel material, It can be easily adjusted, and even when fluctuations (waves) occur at the interface between the liquid refrigerant and the atmosphere, the light emitted from the ultraviolet light source is in the state of the interface between the liquid refrigerant and the atmosphere. Since it reaches the liquid crystal panel material without being affected, the light irradiance distribution on the light irradiation surface of the liquid crystal panel material is substantially uniform only by adjusting the light emitted from the ultraviolet light source. It can be.
Therefore, according to the blue phase type liquid crystal panel manufacturing apparatus of the present invention, since the entire liquid crystal layer of the blue phase type liquid crystal panel material immersed in the liquid refrigerant can be irradiated, the blue phase Even when the liquid crystal panel material of the system is large, a blue phase liquid crystal panel can be obtained in which the liquid crystal layer can be in a blue phase state without unevenness.

  According to the blue phase liquid crystal panel manufacturing method of the present invention, by using the blue phase liquid crystal panel manufacturing apparatus of the present invention, a liquid crystal panel material in a state where a blue phase appears in a liquid crystal layer in a liquid refrigerant is obtained. On the other hand, since the entire surface of the liquid crystal layer can be uniformly irradiated with light containing ultraviolet light having a wavelength that cures the ultraviolet curable resin that constitutes the liquid crystal layer of the liquid crystal panel material, the liquid crystal layer has a uniform blue color. A blue-phase liquid crystal panel that can be in a phase state can be obtained.

It is explanatory drawing which shows an example of a structure of the liquid crystal panel manufacturing apparatus of the blue phase system of this invention with the liquid crystal panel material of a blue phase system. (A) is explanatory drawing which shows the optical path of the light from an ultraviolet light source in the liquid crystal panel manufacturing apparatus of the blue phase system of FIG. 1, (b) is reflection in the liquid crystal panel manufacturing apparatus of the blue phase system of FIG. It is explanatory drawing which shows the optical path of the light from an ultraviolet light source in the case of not using a mirror. FIG. 2 is an explanatory diagram illustrating an example of a configuration in the case where an excimer lamp is used as an ultraviolet light source in the blue phase liquid crystal panel manufacturing apparatus of FIG. 1 together with a blue phase liquid crystal panel material. FIG. 5 is an explanatory diagram showing another example of the configuration when an excimer lamp is used as an ultraviolet light source in the blue phase type liquid crystal panel manufacturing apparatus of FIG. 1 together with a blue phase type liquid crystal panel material. FIG. 5 is an explanatory diagram showing still another example of the configuration when an excimer lamp is used as an ultraviolet light source in the blue phase type liquid crystal panel manufacturing apparatus of FIG. 1 together with a blue phase type liquid crystal panel material. (A) is explanatory drawing which shows an example of a structure at the time of using a noble gas fluorescent lamp as an ultraviolet-ray light source with the liquid crystal panel material of a blue phase system in the liquid crystal panel manufacturing apparatus of the blue phase system of FIG. b) is an AA line cross-sectional enlarged view of (a). (A) is explanatory drawing which shows the other example of a structure at the time of using a rare gas fluorescent lamp as an ultraviolet-ray light source with the liquid crystal panel material of a blue phase system in the liquid crystal panel manufacturing apparatus of the blue phase system of FIG. (B) is the BB sectional enlarged view of (a). It is explanatory drawing which shows the other example of a structure of the liquid crystal panel manufacturing apparatus of the blue phase system of this invention with the liquid crystal panel material of a blue phase system. FIG. 9 is a flowchart showing an operation procedure of the blue phase type liquid crystal panel manufacturing apparatus for obtaining a blue phase type liquid crystal panel from a blue phase type liquid crystal panel material using the blue phase type liquid crystal panel manufacturing apparatus of FIG. 8; , Shows the steps up to the middle. 10 is a flowchart showing steps subsequent to the flowchart of FIG. 9. It is explanatory drawing which shows the further another example of a structure of the liquid crystal panel manufacturing apparatus of the blue phase system of this invention with the liquid crystal panel material of a blue phase system. It is explanatory drawing which shows an example of the state which immerses the liquid crystal panel material of a blue phase system in a liquid refrigerant, and irradiates the light from a lamp | ramp.

  Embodiments of the present invention will be described below.

[First Embodiment]
FIG. 1 is an explanatory view showing an example of the configuration of a blue phase type liquid crystal panel manufacturing apparatus of the present invention together with a blue phase type liquid crystal panel material.
The blue phase liquid crystal panel manufacturing apparatus (hereinafter also referred to as “first liquid crystal panel manufacturing apparatus”) 10 according to the first embodiment aligns the liquid crystal and the liquid crystal in a spiral structure, and the blue phase appears. A blue phase liquid crystal panel material (hereinafter referred to as a liquid crystal panel material having a liquid crystal layer comprising a liquid crystal composition exhibiting a blue phase at a specific temperature, containing a chiral agent, an ultraviolet curing resin, and an ultraviolet polymerization initiator as required) (Also referred to as “blue phase panel material”) to be processed W, and from this blue phase panel material, an ultraviolet curable resin constituting the liquid crystal layer of the blue phase panel material is applied, and a blue phase appears in the liquid crystal layer. The liquid crystal panel of the blue phase system obtained by hardening in the state which is being manufactured is manufactured.

  The first liquid crystal panel manufacturing apparatus 10 includes a refrigerant tank 11 for containing the liquid refrigerant L and immersing the workpiece W in the liquid refrigerant L in a state where the liquid refrigerant L is filled. The tank 11 contains ultraviolet rays having a wavelength for curing the ultraviolet curable resin constituting the liquid crystal layer of the blue phase panel material, which is the object to be processed W, with respect to the object to be processed W immersed in the liquid refrigerant L. When the ultraviolet light source for irradiating light is filled with the liquid refrigerant L in the refrigerant tank 11, the boundary surface LS between the liquid refrigerant L and the atmosphere exists between the ultraviolet light source and the workpiece W. In order to prevent this, it is provided so as to be immersed in the liquid refrigerant L together with the workpiece W. The ultraviolet light source is composed of a plurality (eight in the illustrated example) of ultraviolet lamps (hereinafter also referred to as “UV lamps”) 20, and the plurality of UV lamps 20 are fixed by an appropriate fixing member. Thus, the workpieces W are arranged in parallel above the arrangement position of the workpieces W (upward in FIG. 1).

In the first liquid crystal panel manufacturing apparatus 10, the refrigerant tank 11 includes an inlet 12 for the liquid refrigerant L and an outlet 13 for the liquid refrigerant L. The inlet 12 and the outlet 13 include A circulation path 14 for the liquid refrigerant L is provided. The circulation path 14 is provided with a liquid refrigerant circulation means 15 for circulating the liquid refrigerant L and a temperature control means 16 made of a chiller. A liquid refrigerant supply source for supplying the liquid refrigerant L from the inlet 12 into the refrigerant tank 11 is formed.
Further, in the refrigerant tank 11, a temperature sensor 17 for measuring the temperature of the liquid refrigerant L in the refrigerant tank 11 and a reflecting mirror 19 common to the plurality of UV lamps 20 constituting the ultraviolet light source are liquid. The refrigerant tank 11 filled with the refrigerant L is provided so as to be immersed in the liquid refrigerant L. Further, outside the refrigerant tank 11, the power supply means 29 common to the plurality of UV lamps 20 constituting the ultraviolet light source, and the power supply means 29, the temperature adjustment means 16, and the liquid refrigerant circulation based on the temperature information from the temperature sensor 17. A control unit 18 having a function of controlling the means 15 is provided.
In the illustrated example, the direction of circulation of the liquid refrigerant L in the circulation path 14 is indicated by an arrow.

As the UV lamp 20 constituting the ultraviolet light source, a discharge lamp is used.
As a discharge lamp, a mercury lamp having a pair of discharge electrodes opposed to each other in a quartz glass arc tube, and high-purity mercury and a rare gas sealed in the arc tube, a quartz glass arc tube A metal halide lamp having a pair of discharge electrodes opposed to each other, in which high-purity mercury and a metal halide (metal halide) are sealed in the arc tube, an excimer lamp that emits light using dielectric barrier discharge, and a rare Examples include gas fluorescent lamps.
In the blue phase liquid crystal panel manufacturing apparatus and the blue phase liquid crystal panel manufacturing method of the present invention, the ultraviolet rays contained in the liquid crystal composition constituting the liquid crystal layer of the blue phase panel material as the object to be processed W. An ultraviolet light source is used because the curing material resin is cured by being irradiated with ultraviolet rays.

Preferable specific examples of the discharge lamp constituting the UV lamp 20 include an excimer lamp and a rare gas fluorescent lamp that have a relatively small calorific value and easily emit light stably in a liquid. That is, the first liquid crystal panel manufacturing apparatus 10 has a liquid crystal layer containing an ultraviolet curable resin in which a polymerization reaction proceeds by ultraviolet rays emitted from an excimer lamp or a rare gas fluorescent lamp, and an ultraviolet polymerization initiator as necessary. It is preferable to use the blue phase panel material as the workpiece W.
In addition, when a discharge lamp that emits light by arc discharge between discharge electrodes, such as a mercury lamp and a metal halide lamp, is used as the UV lamp 20, these discharge lamps generate a large amount of heat from the lamp itself and make the lamp stable. The coldest spot control of the lamp for emitting light is also complicated, which may cause harmful effects. Specifically, in order to control the temperature of the blue phase panel material by the liquid refrigerant L, the influence of heat generation of the lamp itself must be taken into account, and it becomes difficult to realize stable light emission also in the lamp itself. Furthermore, since the lamp itself is cooled by being disposed in the liquid refrigerant L, the vapor pressure of the enclosed matter such as mercury enclosed in the arc tube is regulated, resulting in the lamp There is a possibility that a malfunction may occur in the light emitting operation.

Specific examples of the liquid refrigerant L include pure water having a large heat capacity.
The liquid refrigerant L is not limited to pure water, has a relatively large heat capacity, and does not affect the blue lamp panel 20 constituting the ultraviolet light source and the blue phase panel material to be processed W (for example, the blue phase A liquid that does not chemically react with the panel material can be used.

In the first liquid crystal panel manufacturing apparatus 10, the circulation path 14 provided at the inlet 12 and the outlet 13 of the refrigerant tank 11, the liquid refrigerant circulation means 15 and the temperature adjustment means 16 provided on the circulation path 14. A circulation type cooling medium supply mechanism is formed by the control unit 18 that controls the liquid refrigerant circulation means 15 and the temperature adjustment means 16 based on the temperature information of the temperature sensor 17. In this circulation type cooling medium supply mechanism, the liquid refrigerant L is circulated by the liquid refrigerant circulation means 15 such as a pump. That is, the liquid refrigerant L flows into the refrigerant increase 11 from the inlet 12 provided in the refrigerant tank 11 from the circulation path 14 and is discharged out of the refrigerant tank 11 from the outlet 13. And the liquid refrigerant | coolant L discharged | emitted from the outflow port 13 to the circulation path 14 flows in into the temperature control means 16 which consists of chillers, and after adjusting to predetermined temperature by heat exchange in a chiller, it is again a refrigerant tank from the inflow port 12. 11 flows in.
Here, the “predetermined temperature” associated with the liquid refrigerant L is a temperature at which the blue phase appears in the liquid crystal layer of the blue phase panel material that is the workpiece W and can maintain the blue phase state. .

  In the circulation type cooling medium supply mechanism, the operations of the liquid refrigerant circulation means 15 and the temperature adjustment means 16 are controlled by the control unit 18. The control unit 18 receives a temperature signal related to the temperature of the liquid refrigerant L in the refrigerant tank 11 measured by the temperature sensor 17 provided in the refrigerant tank 11, and obtains temperature information of the liquid refrigerant L in the refrigerant tank 11. The temperature information of the liquid refrigerant L is compared with the temperature target value stored in advance, and the temperature of the liquid refrigerant L in the refrigerant tank 11, that is, the temperature information of the liquid refrigerant L obtained in the control unit 18 (liquid refrigerant) The operation of the temperature adjusting means 16 is adjusted so that the temperature value L) becomes the temperature target value.

  In the first liquid crystal panel manufacturing apparatus 10, by circulating the liquid refrigerant L, the liquid refrigerant L whose temperature has increased due to heat exchange with the object to be processed W that is heated by light irradiation by the ultraviolet light source is the object W to be processed. Temperature distribution on the target object W due to the liquid refrigerant L, whose temperature has been increased by heat exchange with the heated target object W, remaining in the vicinity of the target object W. Is suppressed from becoming non-uniform. Further, even in the lit UV lamp 20 (specifically, for example, an excimer lamp and a rare gas fluorescent lamp), since the temperature of the lamp is prevented from being increased by heat exchange with the liquid refrigerant L, the lamp operation is stabilized. .

Further, in the refrigerant tank 11 constituting the first liquid crystal panel manufacturing apparatus 10, it is preferable that the outlet 13 is provided above the inlet 12 as shown in FIG. 1. .
Since the outlet 13 is positioned above the inlet 12 in the refrigerant tank 11, the liquid refrigerant L flowing from the inlet 12 passes through the region where the workpiece W is disposed in the process until it reaches the outlet 13. After that, the ratio of passing through the arrangement area of the UV lamp 20 increases. That is, most of the liquid refrigerant L introduced from the inlet 12 first reaches the workpiece W and then reaches the UV lamp 20. Therefore, it can suppress that the to-be-processed object W is heated by the liquid refrigerant | coolant L which raised the temperature by the heat exchange with the UV lamp 20 which was in the lighting state and heated up, and a malfunction arises.

Further, in the first liquid crystal panel manufacturing apparatus 10, as shown in FIG. 1, the reflecting mirror 19 includes a liquid refrigerant L and the atmosphere between the reflecting surface 19 </ b> A of the reflecting mirror 19 and the ultraviolet light source. It is preferable that the boundary surface LS is disposed so as not to exist.
In the example of this figure, a common plate-like reflecting mirror 19 is provided for a plurality of UV lamps 20 constituting an ultraviolet light source, and the reflecting mirror 19 is filled with a liquid refrigerant L. In the inside, the state is located above the plurality of UV lamps 20 constituting the ultraviolet light source and between the plurality of UV lamps 20, the boundary surface LS between the liquid refrigerant L and the atmosphere, and is immersed in the liquid refrigerant L. It is said that.

Since the reflecting mirror 19 is provided between the reflecting surface 19A of the reflecting mirror 19 and the ultraviolet light source so that the boundary surface LS between the liquid refrigerant L and the atmosphere does not exist, the liquid refrigerant L from the UV lamp 20 is provided. The light emitted in the direction toward the boundary surface LS between the liquid refrigerant L and the atmosphere is reflected not by the boundary surface LS but by the reflecting mirror 19, so that fluctuation occurs in the boundary surface LS between the liquid refrigerant L and the atmosphere. However, the influence of the fluctuation of the boundary surface LS can be eliminated.
That is, the light emitted from the UV lamp 20 toward the boundary surface LS between the liquid refrigerant L and the atmosphere is reflected by the reflecting mirror 19 as shown in FIG. It is not reflected at the boundary surface LS with the atmosphere, and the shape of the reflecting surface of the reflecting mirror 19 is a case where fluctuation occurs on the boundary surface LS between the liquid refrigerant L and the atmosphere (the surface of the liquid refrigerant L). However, unlike the boundary surface LS between the liquid refrigerant L and the atmosphere, there is no deformation, and thus the light that is reflected by the reflecting mirror 19 and reaches the object to be processed W (the dashed-dotted arrow in FIG. 2A) The irradiance distribution of the light traveling on the optical path indicated by B) on the object W to be processed is constant and does not change with time. Therefore, by appropriately setting the shape of the reflecting mirror 19 (for example, a planar shape as shown in the figure), the light reflected from the reflecting mirror 19 and reaching the object to be processed W is on the object to be processed W. The irradiance distribution at can be made substantially uniform.
On the other hand, when the reflecting mirror 19 is not provided, the cured state of the photocurable resin constituting the liquid crystal layer of the blue phase panel material that is the object to be processed W may be uneven in place. That is, the blue phase state (appearance of the blue phase) in the liquid crystal layer of the blue phase type liquid crystal panel obtained from the workpiece W (blue phase panel material) may be uneven.
That is, the light including ultraviolet rays emitted from the UV lamp 20 and applied to the object W is emitted from the UV lamp 20 toward the object W as shown in FIG. 2B. The direct light irradiated to the body W (light traveling on the optical path indicated by the solid arrow A in FIG. 2B) and the liquid refrigerant L and the atmosphere are emitted in a direction toward the boundary surface LS and are emitted by the boundary surface LS. It consists of the reflected light from the boundary surface LS between the liquid refrigerant L and the atmosphere that is reflected and reaches the workpiece W (light that travels along the optical path indicated by the dashed line arrow B in FIG. 2B). Therefore, when fluctuation occurs on the boundary surface LS between the liquid refrigerant L and the atmosphere (the surface of the liquid refrigerant L), the boundary surface LS between the atmosphere and the liquid refrigerant L is not flat, and the shape is a wave-like state, that is, a curved surface. However, the irradiance distribution on the object to be processed W that is reflected by the boundary surface LS between the curved liquid refrigerant L and the atmosphere and reaches the object to be processed W is the liquid refrigerant L. Depending on the fluctuation of the boundary surface LS between the atmosphere and the atmosphere, the desired irradiance distribution is not always obtained. Although the intensity of the reflected light from the boundary surface LS between the liquid refrigerant L and the atmosphere is smaller than the intensity of the direct light, depending on the type of the blue phase panel material as the workpiece W, the liquid refrigerant L and the atmosphere In some cases, the influence of the reflected light from the boundary surface LS cannot be ignored. In such a case, the curing state of the photocurable resin that constitutes the liquid crystal layer of the blue phase panel material that is the object to be processed W is localized. It becomes non-uniform. That is, unevenness occurs in the blue phase state (appearance of the blue phase) in the liquid crystal layer of the obtained blue phase type liquid crystal panel.

  In the 1st liquid crystal panel manufacturing apparatus 10 of such a structure, in the refrigerant | coolant tank 11 with which the liquid refrigerant | coolant L was satisfy | filled, to-be-processed object in the predetermined position under the ultraviolet light source of the state immersed in the liquid refrigerant | coolant L The refrigerant tank 11 is arranged such that the temperature of the liquid crystal layer of the liquid crystal panel material in a state where the blue phase panel material is W and is immersed in the liquid refrigerant L becomes the blue phase appearance temperature at which the blue phase appears in the liquid crystal layer. The temperature of the liquid refrigerant L in the liquid crystal layer is set, and the ultraviolet curable resin constituting the liquid crystal layer of the liquid crystal panel material is cured by the ultraviolet light source with respect to the liquid crystal panel material in a state where the blue phase appears in the liquid crystal layer. In the blue phase panel material that is the object W to be processed, the liquid crystal layer of the blue phase panel material is subjected to a polymer stabilization treatment process that irradiates light including ultraviolet rays. UV-curable resin to be formed is cured in a state where the blue phase to the liquid crystal layer is appearance, thereby, the blue-phase type liquid crystal panel is manufactured.

Thus, according to the first liquid crystal panel manufacturing apparatus 10, the object W to be processed is immersed in the liquid refrigerant L in the refrigerant tank 11 filled with the liquid refrigerant L. Is irradiated with light from an ultraviolet light source arranged so that there is no boundary surface LS between the liquid refrigerant L and the atmosphere between the two and the object W to be processed so that the temperature distribution of the object to be processed becomes substantially uniform. The temperature can be easily adjusted. Further, even when fluctuation (undulation) occurs at the boundary surface LS between the liquid refrigerant L and the atmosphere, the light emitted from the ultraviolet light source is affected by the state of the boundary surface LS between the liquid refrigerant L and the atmosphere. Therefore, the light irradiance distribution on the light irradiation surface of the target object W can be made substantially uniform only by adjusting the light emitted from the ultraviolet light source.
Therefore, according to the first liquid crystal panel manufacturing apparatus 10, it is possible to uniformly irradiate the entire liquid crystal layer of the blue phase panel material, which is the object W to be processed, immersed in the liquid refrigerant L. Even if the liquid crystal panel material of the phase system is large, an ultraviolet curable resin that constitutes the liquid crystal layer of the liquid crystal panel material with an ultraviolet light source is applied to the liquid crystal panel material in which a blue phase appears in the liquid crystal layer. By irradiating light including ultraviolet rays having a wavelength to be cured, a blue phase liquid crystal panel can be obtained in which the liquid crystal layer can be brought into a blue phase state without unevenness.

  Hereinafter, a case where an excimer lamp and a rare gas fluorescent lamp are used as the UV lamp 20 constituting the ultraviolet light source in the first liquid crystal panel manufacturing apparatus 10 will be described with reference to the drawings.

FIG. 3 shows an example of a configuration in the case where an excimer lamp is used as an ultraviolet light source in the blue phase type liquid crystal panel manufacturing apparatus (first liquid crystal panel manufacturing apparatus 10) of FIG. 1, together with a blue phase type liquid crystal panel material. It is explanatory drawing shown.
FIG. 3 shows an example of the structure of an excimer lamp used as an ultraviolet light source of the blue phase type liquid crystal panel manufacturing apparatus of the present invention and an arrangement state of the excimer lamp. For convenience of explanation, the excimer lamp and Constituent members other than the constituent members required for explaining the arrangement state of the excimer lamp, specifically, a circulating cooling medium supply mechanism including the inlet 12 and the outlet 13 in the refrigerant tank 11, a temperature sensor 17 The reflection mirror 19 and the like are not shown. Further, in the same figure, the excimer lamp 30 is shown in a cross section in a plane including the tube axis of the excimer lamp 30.

An excimer lamp (hereinafter also referred to as “first excimer lamp”) 30 constituting the first liquid crystal panel manufacturing apparatus according to FIG. 3 is made of a light-transmitting dielectric material such as quartz glass. Is provided with a straight tubular discharge vessel 31 that forms a discharge space S, and a rare gas such as xenon, argon, and krypton is enclosed in the discharge space S of the discharge vessel 31 as a discharge medium that generates excimer molecules by discharge. In addition, a halogen gas such as fluorine gas or chlorine gas is sealed as required. The kind of gas sealed as the discharge medium is appropriately selected according to the wavelength of light emitted from the lamp.
The first excimer lamp 30 is provided with a net-like first discharge electrode 32 on the outer surface of the discharge vessel 31, and a second discharge electrode 33 is provided inside the discharge vessel 31, As a result, the first discharge electrode 32 and the second discharge electrode 33 are disposed with the discharge vessel 31 and the discharge space S as dielectrics interposed therebetween, and the dielectrics are connected to the first discharge electrodes 31 and the discharge spaces S. It is located between the electrode 32 and the discharge space S. The first discharge electrode 32 and the second discharge electrode 33 are electrically connected to the power supply means 29 via the lead wire 28, and the high-frequency voltage is supplied to the first discharge electrode 29 by the power supply means 29. By being applied between the electrode 32 and the second discharge electrode 33, a discharge is formed between both electrodes in a state where a dielectric is interposed. As a result, excimer molecules excited in the discharge space S of the discharge vessel 31 are formed, and excimer light is emitted when the excimer molecules transition to the ground state.
Here, when xenon gas and chlorine gas are used as the discharge medium, ultraviolet light having a central wavelength of 308 nm is generated by the discharge.

The first excimer lamp 30 having such a configuration is fixed at a seal portion 35 provided at the refrigerant tank 11 at one end portion (left end portion in FIG. 3). In the seal part 35, an airtight structure between the refrigerant tank 11 and the first excimer lamp 30 is formed by a seal member 36 such as an O-ring, whereby the liquid refrigerant L in the refrigerant tank 11 is discharged from the seal part 35. One end portion of the first excimer lamp 30 is supported by the seal portion 35 without flowing out of the refrigerant tank 11.
In the example of this figure, the end of one end of the first excimer lamp 30 is in a state of protruding to the outside of the refrigerant tank 11. Further, the other end portion (the right end portion in FIG. 3) of the first excimer lamp 30 is supported by a lamp support means 37 provided in the refrigerant tank 11. That is, the first excimer lamp 30 is filled in the refrigerant tank 11 between the first excimer lamp 30 and the workpiece W by the seal portion 35 and the lamp support means 37 provided in the refrigerant tank 11. The liquid refrigerant L is arranged so as to be immersed in the liquid refrigerant L so that the boundary surface LS between the liquid refrigerant L and the atmosphere does not exist.

  Further, the first excimer lamp 30 includes the first excimer lamp in order to prevent light emitted from the first excimer lamp 30 from leaking out of the refrigerant tank 11 through the seal portion 35. A light shielding film 38 may be provided on the outer surface of the discharge vessel 31 in the vicinity of the portion located at the seal portion 35 at one end of the lamp 30 and the vicinity thereof. For example, an aluminum film or the like is used as the light shielding film 38.

Further, in the first excimer lamp 30, it is preferable that the first discharge electrode 32 provided on the outer surface of the discharge vessel 31 is set to the ground potential or grounded.
Since the first discharge electrode 32 is set to the ground potential or grounded, the second discharge electrode 33 provided in the discharge vessel 31 is set to the high voltage side. As shown in FIG. 3, by setting the end of one end of the first excimer lamp 30 to the outside of the refrigerant tank 11, the power feeding means 29 and the second discharge electrode 33 are connected to each other. The lead wire 28 to be connected can be prevented from being exposed to the liquid refrigerant L. Therefore, it is possible to relatively easily take measures against insulation between the power supply means 29 and the second discharge electrode 33.
On the other hand, when the second discharge electrode 33 is set to the ground potential or grounded, and the first discharge electrode 32 is set to the high voltage side, the power supply means 29 and the first discharge Since a part of the lead wire 28 that connects to the electrode 32 is exposed to the liquid refrigerant L in the refrigerant tank 11, an undesired breakdown may occur in the refrigerant tank 11 or the like.

  In the first liquid crystal panel manufacturing apparatus according to FIG. 3 having such a configuration, the first excimer lamp 30 is liquid in the refrigerant tank 11 in which the portion other than the end of one end thereof is filled with the liquid refrigerant L. Located in the refrigerant L. Therefore, since the first excimer lamp 30 is cooled by the liquid refrigerant L circulated by the circulation type cooling medium supply mechanism, the first excimer lamp 30 can emit light with high efficiency.

4 shows another example of the configuration in the case where an excimer lamp is used as an ultraviolet light source in the blue phase type liquid crystal panel manufacturing apparatus (first liquid crystal panel manufacturing apparatus 10) of FIG. It is explanatory drawing shown with a material.
FIG. 4 shows an example of the configuration of the excimer lamp used as the ultraviolet light source of the blue phase type liquid crystal panel manufacturing apparatus of the present invention and an example of the arrangement state of the excimer lamp. Constituent members other than the constituent members required for explaining the arrangement state of the excimer lamp, specifically, a circulating cooling medium supply mechanism including the inlet 12 and the outlet 13 in the refrigerant tank 11, a temperature sensor 17 The reflection mirror 19 and the like are not shown. In the same figure, the excimer lamp 40 is shown in a cross section in a plane including the tube axis of the excimer lamp 40.

  The first liquid crystal panel manufacturing apparatus according to FIG. 4 uses an excimer lamp having a configuration different from that of the first excimer lamp 30 as the excimer lamp constituting the ultraviolet light source in the first liquid crystal panel manufacturing apparatus according to FIG. Except for this, it has the same configuration as the first liquid crystal panel manufacturing apparatus according to FIG.

An excimer lamp (hereinafter, also referred to as “second excimer lamp”) 40 constituting the first liquid crystal panel manufacturing apparatus according to FIG. 4 is an outer side made of a translucent dielectric material such as quartz glass. The tube 42 and the inner tube 43 have a substantially double tube structure having a discharge vessel 41 in which the tube 42 and the inner tube 43 are disposed substantially coaxially. Specifically, the discharge vessel 41 has a substantially cylindrical outer shape, and an outer tube 42 and an inner tube 43 whose one end (the right end in FIG. 4) is sealed and the other end (the left end in FIG. The end of the outer tube 42 on the opening side and the end of the inner tube 43 on the opening side are sealed, whereby a cylindrical discharge space S is formed inside the discharge vessel 41. It is formed. That is, at one end of the discharge vessel 41, the end of the inner tube 43 is sealed independently of the outer tube 42, and the end of the outer tube 42 is sealed independently of the inner tube 43. The sealing portion of the inner tube 43 is disposed inside the sealing portion of the outer tube 42. On the other hand, at the other end of the discharge vessel 41, the end of the inner tube 43 and the end of the outer tube 42 are sealed. Therefore, a cylindrical discharge space S surrounded by the outer surface of the inner tube 43 and the inner surface of the outer tube 42 is formed, and only one end of the inner tube 43 is sealed and the other end is opened to the outside. The inside (inner surface) of the inner tube 43 is open to the outside.
In the discharge space S of the discharge vessel 41 having such a configuration, similarly to the first excimer lamp 30, a discharge medium that generates excimer molecules by discharge and, if necessary, a halogen gas are enclosed.

The second excimer lamp 40 is provided with a net-like first discharge electrode 44 on the outer surface of the outer tube 42 in the discharge vessel 41 (the outer surface of the discharge vessel 41 on the outer tube 42 side). 41 is provided with a second discharge electrode 45 having, for example, a cylindrical shape on the inner surface of the inner tube 43 (the outer surface of the discharge vessel 41 on the inner tube 43 side). The discharge electrode 44 and the second discharge electrode 45 are disposed with a discharge container 41 and a discharge space S as dielectrics interposed between the first discharge electrode 44 and the discharge space. S and between the second discharge electrode 45 and the discharge space S. The first discharge electrode 44 and the second discharge electrode 45 are electrically connected to the power supply means 29 via the lead wire 28, and the high-frequency voltage is supplied to the first discharge electrode 29 by the power supply means 29. By being applied between the electrode 44 and the second discharge electrode 45, a discharge is formed between both electrodes in a state where a dielectric is interposed. As a result, excimer molecules excited in the discharge space S of the discharge vessel 41 are formed, and excimer light is emitted when the excimer molecules transition to the ground state.
Here, when xenon gas and chlorine gas are used as the discharge medium, ultraviolet light having a central wavelength of 308 nm is generated by the discharge.

In the second excimer lamp 40, only the first discharge electrode 44 arranged on the outer surface of the discharge vessel 41 on the outer tube 42 side is in contact with the liquid refrigerant L in the refrigerant tank 11. For the same reason as the first excimer lamp 30 according to FIG. 3, the first discharge electrode 44 provided on the outer surface of the outer tube 42 in the discharge vessel 41 is set to the ground potential or grounded (earth) It is preferable that
Further, for the same reason as the first excimer lamp 30 according to FIG. 3, a light-shielding film is formed on the outer surface of the discharge vessel 41 in a portion located in the seal portion 35 in one end portion of the second excimer lamp 40 and in the vicinity thereof. 38 may be provided.

  In the first liquid crystal panel manufacturing apparatus according to FIG. 4 having such a configuration, the second excimer lamp 40 has an inside of the refrigerant tank 11 in a state where a portion other than the end of one end thereof is filled with the liquid refrigerant L. In the liquid refrigerant L. Therefore, since the second excimer lamp 40 is cooled by the liquid refrigerant L circulated by the circulation type cooling medium supply mechanism, the second excimer lamp 40 can emit light with high efficiency.

FIG. 5 shows another example of the configuration in the case where an excimer lamp is used as the ultraviolet light source in the blue phase type liquid crystal panel manufacturing apparatus (first liquid crystal panel manufacturing apparatus 10) of FIG. It is explanatory drawing shown with a panel material.
FIG. 5 shows an example of the configuration of an excimer lamp used as an ultraviolet light source of the blue phase type liquid crystal panel manufacturing apparatus of the present invention and an arrangement state of the excimer lamp. For convenience of explanation, the excimer lamp and Constituent members other than the constituent members required for explaining the arrangement state of the excimer lamp, specifically, a circulating cooling medium supply mechanism including the inlet 12 and the outlet 13 in the refrigerant tank 11, a temperature sensor 17 The reflection mirror 19 and the like are not shown. In the same figure, the excimer lamp 50 is shown in a cross section in a plane including the tube axis of the excimer lamp 50.

  The first liquid crystal panel manufacturing apparatus according to FIG. 5 uses an excimer lamp having a configuration different from that of the first excimer lamp 30 as an excimer lamp constituting the ultraviolet light source in the first liquid crystal panel manufacturing apparatus according to FIG. Moreover, the lamp support member 37 is not provided in the refrigerant tank 11, and the first exchanging lamp according to FIG. 3 is used except that the excimer lamp is supported by the two seal portions 35 provided in the refrigerant tank 11. It has the same configuration as the liquid crystal panel manufacturing apparatus.

An excimer lamp (hereinafter referred to as “third excimer lamp”) 50 constituting the first liquid crystal panel manufacturing apparatus according to FIG. 5 is an outer side made of a dielectric material having translucency such as quartz glass. The tube 52 and the inner tube 53 have a substantially double tube structure having a discharge vessel 51 in which the tube 52 and the inner tube 53 are disposed substantially coaxially. Specifically, in the discharge vessel 51, an outer tube 52 and an inner tube 53 that are substantially cylindrical in shape and open at both ends are arranged substantially coaxially, and both ends of each of the outer tube 52 and the inner tube 53 are arranged. By sealing the part, a hollow cylindrical discharge space S is formed inside the discharge vessel 51. That is, at both ends of the discharge vessel 51, the end of the inner tube 53 and the end of the outer tube 52 are sealed. Therefore, a hollow cylindrical discharge space S surrounded by the outer surface of the inner tube 53 and the inner surface of the outer tube 52 is formed, and the inside (inner surface) of the inner tube 53 is open to the outside. .
Like the first excimer lamp 30, the discharge space S of the discharge vessel 51 having such a configuration is filled with a discharge medium that generates excimer molecules by discharge and, if necessary, halogen gas.

The third excimer lamp 50 is provided with a net-like first discharge electrode 54 on the outer surface of the outer tube 52 in the discharge vessel 51 (the outer surface of the discharge vessel 51 on the outer tube 52 side). A film-like second discharge electrode 55 is provided, for example, in a cylindrical shape on the inner surface of the inner tube 53 at 51 (the outer surface of the discharge vessel 51 on the inner tube 53 side), whereby the first discharge The electrode for discharge 54 and the second electrode for discharge 55 are arranged with a discharge vessel 51 and a discharge space S as dielectrics interposed between the first discharge electrode 54 and the discharge space S. And between the second discharge electrode 55 and the discharge space S. The first discharge electrode 54 and the second discharge electrode 55 are electrically connected to the power supply means 29 via the lead wire 28, and the high-frequency voltage is supplied to the first discharge electrode 29 by the power supply means 29. By being applied between the electrode 54 and the second discharge electrode 55, a discharge is formed between both electrodes in a state where a dielectric is interposed. As a result, excimer molecules excited in the discharge space S of the discharge vessel 51 are formed, and excimer light is emitted when the excimer molecules transition to the ground state.
Here, when xenon gas and chlorine gas are used as the discharge medium, ultraviolet light having a central wavelength of 308 nm is generated by the discharge.

The third excimer lamp 50 having such a configuration is fixed at seal portions 35 provided at the refrigerant tank 11 at both ends thereof. That is, the third excimer lamp 50 is a liquid refrigerant filled in the refrigerant tank 11 between the third excimer lamp 50 and the object W to be processed by the two seal portions 35 provided in the refrigerant tank 11. It arrange | positions in the state immersed in the liquid refrigerant | coolant L so that the interface LS of L and air | atmosphere may not exist.
In the example of this figure, each end of the third excimer lamp 50 protrudes outside the refrigerant tank 11.

In the third excimer lamp 50, only the first discharge electrode 54 disposed on the outer surface of the discharge vessel 51 on the outer tube 52 side is in contact with the liquid refrigerant L in the refrigerant tank 11. For the same reason as the first excimer lamp 30 according to No. 3, the first discharge electrode 54 provided on the outer surface of the outer tube 52 in the discharge vessel 51 is set to the ground potential or grounded. It is preferable.
Further, for the same reason as the first excimer lamp 30 shown in FIG. 38 may be provided.

  In the first liquid crystal panel manufacturing apparatus according to FIG. 5 having such a configuration, the third excimer lamp 50 includes the refrigerant tank 11 in a state where the liquid refrigerant L is filled in portions other than the ends of both ends. It is located in the liquid refrigerant L inside. Therefore, since the third excimer lamp 50 is cooled by the liquid refrigerant L circulated by the circulation type cooling medium supply mechanism, the third excimer lamp 50 can emit light with high efficiency.

FIG. 6A shows an example of a configuration when a rare gas fluorescent lamp is used as an ultraviolet light source in the blue phase liquid crystal panel manufacturing apparatus (first liquid crystal panel manufacturing apparatus 10) of FIG. FIG. 6B is an enlarged cross-sectional view taken along the line AA of FIG. 6A.
FIG. 6A shows an example of the configuration of a rare gas fluorescent lamp used as an ultraviolet light source of the blue phase type liquid crystal panel manufacturing apparatus of the present invention and an arrangement state of the rare gas fluorescent lamp. For convenience, the rare gas fluorescent lamp and the structural members other than the structural members required for explaining the arrangement state of the rare gas fluorescent lamp, specifically, the inlet 12 and the outlet 13 in the refrigerant tank 11 are provided. The circulating cooling medium supply mechanism including the temperature sensor 17 and the reflecting mirror 19 are not shown. Further, in the drawing, the rare gas fluorescent lamp 60 has a cross section in a plane including the tube axis of the rare gas fluorescent lamp 60 on the right side of the line AA.

A rare gas fluorescent lamp (hereinafter, also referred to as “first double tube type rare gas fluorescent lamp”) 60 constituting the first liquid crystal panel manufacturing apparatus according to FIG. 6 has sealing portions formed at both ends. Further, for example, a discharge vessel 61 made of a cylindrical arc tube made of a translucent dielectric material such as quartz glass is provided, and a rare gas is sealed in the discharge space S in the discharge vessel 61, and the discharge vessel On the inner surface of 61, an ultraviolet reflecting film 65 is provided in a region other than the light emitting aperture 62 extending in the tube axis direction of the discharge vessel 61, and the ultraviolet reflecting film 65 and the light emitting aperture 62 are provided on the inner surface. The inner surface has a rare gas fluorescent lamp main body 60A in which a low softening point glass layer 66 and a phosphor layer 67 are laminated in this order. Here, the low softening point glass layer 66 is made of hard glass such as borosilicate glass or aluminosilicate glass, and the phosphor layer 67 is made of, for example, cerium activated magnesium lanthanum aluminate (La—Mg—Al—O: Ce). ) Made of phosphor.
In the rare gas fluorescent lamp main body 60A, a pair of first external electrodes 63 and a second external electrode 64 are disposed on the outer surface of the discharge vessel 61 so as to be separated from each other along the tube axis direction of the discharge vessel 61. ing.
The first external electrode 63 and the second external electrode 64 are electrically connected to the power supply means 29 via the lead wire 28, and the high-frequency voltage is connected to the first external electrode 63 by the power supply means 29. By being applied to the second external electrode 64, a discharge is formed between both electrodes in a state where a dielectric made of the discharge vessel 61 is interposed. As a result, excimer molecules excited in the discharge space S of the discharge vessel 61 are formed, and excimer light is emitted when the excimer molecules transition to the ground state. Then, the phosphor constituting the phosphor layer 67 is excited by the excimer light, and ultraviolet light is generated from the phosphor layer 67, and the ultraviolet light is reflected directly or by the ultraviolet reflecting film 65, and the light emitting aperture unit Radiated from 62 to the outside.
Note that a protective film (not shown) may be provided on the outer surfaces of the first external electrode 63 and the second external electrode 64 as necessary.

Further, as shown in FIGS. 6A and 6B, the rare gas fluorescent lamp main body 60A has translucency with respect to ultraviolet rays emitted from the rare gas fluorescent lamp main body 60A, and It is preferable that the cylindrical outer tube 68 having electrical insulation and the lid member 69 having heat resistance and electrical insulation that closes the openings at both ends of the outer tube 68 are covered. That is, as the rare gas fluorescent lamp constituting the ultraviolet light source in the first liquid crystal panel manufacturing apparatus, the discharge vessel 61 of the rare gas fluorescent lamp main body 60A is covered with the outer tube 68 whose both ends are closed by the lid members 69. It is preferable to use a double tube type rare gas fluorescent lamp having the following structure.
The reason is that the rare gas fluorescent lamp main body 60A has the first external electrode 63 and the second external electrode 64 provided on the outer surface of the discharge vessel 61. When installed inside, the first external electrode 63 and the second external electrode 64 are immersed in the liquid refrigerant L, and the lead wire 28 connecting the power supply means 29 and the first external electrode 63 is connected. In addition, since a part of the lead wire 28 that connects the power supply means 29 and the second external electrode 64 is exposed to the liquid refrigerant L in the refrigerant tank 11, undesired insulation in the refrigerant tank 11 or the like. This is because destruction may occur.

  Further, from the viewpoint of cooling efficiency of the first double-tube rare gas fluorescent lamp 60 by the liquid refrigerant L, the outer tube 68 has an inner diameter that is equal to the inner surface of the outer tube 68 and the rare gas fluorescent lamp main body 60A. The diameter is preferably small so that the gap with the outer surface of the discharge vessel 61 is small, and the tube axis of the outer tube 68 and the tube axis of the rare gas fluorescent lamp body 60A preferably coincide.

A first double-tube type rare gas fluorescent lamp 60 constituting the first liquid crystal panel manufacturing apparatus according to FIG. 6 has a cylindrical shape in which a rare gas fluorescent lamp main body 60A is closed at both ends by lid members 69. The outer tube 68 is held so as to be entirely covered by the outer tube 68 by holders (not shown) provided at both ends of the outer tube 68. In addition, one feeding member 71 is provided on one (left side in FIG. 6A) of the lid member 69 so as to penetrate the lid member 69 and project outside the outer tube 68. A feeding means 29 is electrically connected to the ends of the projecting portions of the two feeding terminals 71, that is, the ends located outside the outer tube 68 via lead wires 28. The first external electrode 63 and the second external electrode 64 in the rare gas fluorescent lamp 60 are electrically connected to the end located in the tube 68. Here, the lid member 69 and the outer tube 68, and the lid member 69 and the power supply terminal 71 are sealed with, for example, an adhesive having high heat resistance and electrical insulation.
According to the first double-tube type rare gas fluorescent lamp 60 having such a configuration, as shown in FIG. 6 (a), the first double-tube type in which the power supply terminal 71 is provided. By setting the end of one end of the rare gas fluorescent lamp 60 to the outside of the refrigerant tank 11, the lead wire 28 that connects the power supply means 29 to the first external electrode 63 and the second external electrode 64. Can be prevented from being exposed to the liquid refrigerant L. Therefore, insulation measures between the power supply means 29 and the first external electrode 63 and the second external electrode 64 can be relatively easily performed.

One end of the first double-tube type rare gas fluorescent lamp 60 having such a configuration (the left end in FIG. 6A) is fixed at a seal portion 35 provided in the refrigerant tank 11. In the seal portion 35, an airtight structure between the refrigerant tank 11 and the first double tube type rare gas fluorescent lamp 60 is formed by a seal member 36 such as an O-ring, whereby the liquid refrigerant in the refrigerant tank 11 is formed. L does not flow out of the refrigerant tank 11 from the seal portion 35, and one end portion of the first double-tube rare gas fluorescent lamp 60 is supported by the seal portion 35.
In the example of this figure, the end of one end of the first double-tube type rare gas fluorescent lamp 60 is in a state protruding from the refrigerant tank 11. Further, the other end portion (the right end portion in FIG. 6A) of the first double tube type rare gas fluorescent lamp 60 is supported by a lamp support means 37 provided in the refrigerant tank 11. That is, the first double-tube rare gas fluorescent lamp 60 and the object to be processed are sealed by the seal portion 35 and the lamp support means 37 provided in the refrigerant tank 11. Arranged in a state of being immersed in the liquid refrigerant L so that there is no boundary surface LS between the liquid refrigerant L filled with the refrigerant tank 11 and the atmosphere between the blue phase panel material which is W. Has been.

  Further, in the first double tube type rare gas fluorescent lamp 60, light emitted from the first double tube type rare gas fluorescent lamp 60 leaks out of the refrigerant tank 11 through the seal portion 35. In order to prevent this, a light-shielding film 38 is provided on the outer surface of the outer tube 68 at a portion located in the seal portion 35 at one end portion of the first double-tube rare gas fluorescent lamp 60 and in the vicinity thereof. It may be. For example, an aluminum film or the like is used as the light shielding film 38.

  In the first liquid crystal panel manufacturing apparatus according to FIG. 6 having such a configuration, the first double-tube type rare gas fluorescent lamp 60 is filled with the liquid refrigerant L at a portion other than the end of one end thereof. The refrigerant tank 11 is positioned in the liquid refrigerant L. Therefore, the first double tube type rare gas fluorescent lamp 60 is cooled by the liquid refrigerant L circulated by the circulation type cooling medium supply mechanism, and specifically, the first double tube type rare gas fluorescent lamp 60 is configured. Since the rare gas fluorescent lamp main body 60A is indirectly cooled, the rare gas fluorescent lamp main body 60A constituting the first double tube type rare gas fluorescent lamp 60 can emit light with high efficiency.

FIG. 7A shows another example of a configuration in which a rare gas fluorescent lamp is used as an ultraviolet light source in the blue phase type liquid crystal panel manufacturing apparatus (first liquid crystal panel manufacturing apparatus 10) of FIG. It is explanatory drawing shown with a liquid crystal panel material of a phase system, FIG.7 (b) is the BB sectional enlarged view of Fig.7 (a).
FIG. 7 (a) shows an example of the configuration of a rare gas fluorescent lamp used as an ultraviolet light source of the blue phase type liquid crystal panel manufacturing apparatus of the present invention and an arrangement state of the rare gas fluorescent lamp. For convenience, the rare gas fluorescent lamp and the structural members other than the structural members required for explaining the arrangement state of the rare gas fluorescent lamp, specifically, the inlet 12 and the outlet 13 in the refrigerant tank 11 are provided. The circulating cooling medium supply mechanism including the temperature sensor 17 and the reflecting mirror 19 are not shown. Further, in the drawing, a section of the rare gas fluorescent lamp 70 in a plane including the tube axis of the rare gas fluorescent lamp 70 is shown on the right side of the line BB.

  The first liquid crystal panel manufacturing apparatus according to FIG. 7 is different from the first double-tube type rare gas fluorescent lamp 60 as the rare gas fluorescent lamp constituting the ultraviolet light source in the first liquid crystal panel manufacturing apparatus according to FIG. The dual tube type rare gas fluorescent lamps having different configurations are used, the lamp support member 37 is not provided in the refrigerant tank 11, and two seal portions in which the double tube type rare gas fluorescent lamp is provided in the refrigerant tank 11. Except that the first liquid crystal panel manufacturing apparatus according to FIG. 6 has the same configuration.

A rare gas fluorescent lamp (hereinafter referred to as a “second double tube type rare gas fluorescent lamp”) 70 constituting the first liquid crystal panel manufacturing apparatus according to FIG. 7 is a first double tube type rare lamp. Rather than indirectly cooling the rare gas fluorescent lamp main body 60A held in the outer tube 68 by directly cooling the outer tube 68 with the liquid refrigerant L like the gas fluorescent lamp 60, the rare gas is cooled. The fluorescent lamp main body 60A is directly cooled, and the lid member is provided with a cooling gas introduction part and a cooling gas discharge part for introducing and discharging cooling gas into the outer pipe. The structure is the same as that of the first double tube type rare gas fluorescent lamp except that the outer diameter is large.
Specifically, in the second double-tube type rare gas fluorescent lamp 70, one of the lid members 69 (on the left side in FIG. 7) that closes the opening at both ends of the outer tube 68 is cooled. A cooling gas introduction part comprising a gas introduction nozzle 75 is provided, and a cooling gas discharge part comprising a cooling gas discharge nozzle 76 is provided on the other cover member 69 (on the right side in FIG. 7). A cooling gas introduction means 74 is connected to the cooling gas introduction nozzle 75, and a cooling gas such as dry air is introduced into the outer pipe 68 from the cooling gas introduction means 74 through the cooling gas introduction nozzle 75. The cooling gas introduced into the outer tube 68 cools the rare gas fluorescent lamp main body 60A in the outer tube 68 by heat exchange, and is then discharged from the cooling gas discharge nozzle 76 to the outside.
Further, in the second double tube type rare gas fluorescent lamp 70, it is necessary to provide the cooling gas introduction nozzle 75 in one lid member 69 and provide the cooling gas discharge nozzle 76 in the other lid member 69. The outer diameter of the outer tube 68 is larger than the outer diameter of the outer tube 68 constituting the first double tube type rare gas fluorescent lamp 60.
Here, in FIG. 7, for easy understanding, the tube axis of the outer tube 68 and the tube shaft of the rare gas fluorescent lamp main body 60 </ b> A disposed inside the outer tube 68 do not coincide with each other. The gas fluorescent lamp main body 60A is arranged in a state of being biased downward with respect to the inner peripheral surface of the outer tube 68, but the arrangement position of the rare gas fluorescent lamp main body 60A in the outer tube 68 is not limited to this. The position of the outer tube 68 and the position of the rare gas fluorescent lamp main body 60A may be coaxial.

The second double tube type rare gas lamp 70 having such a configuration is fixed at seal portions 35 provided at both ends of the refrigerant tank 11. That is, the second double tube type rare gas lamp 70 is provided with the second double tube by the two seal portions 35 provided in the refrigerant tank 11 as in the case of the third excimer lamp 50 according to FIG. It was immersed in the liquid refrigerant L so that there is no boundary surface LS between the liquid refrigerant L filled with the refrigerant tank 11 and the atmosphere between the type rare gas lamp 70 and the workpiece W. Arranged in a state.
In the example of this figure, each end of the both ends of the second double-tube type rare gas lamp 70 is in a state protruding from the refrigerant tank 11.

  In the second double tube type rare gas lamp 70, for the same reason as the first double tube type rare gas lamp 60, the seal portion 35 at one end of the second double tube type rare gas lamp 70. A light-shielding film 38 may be provided on the outer surface of the outer tube 68 in the portion located in the vicinity and in the vicinity thereof.

  In the first liquid crystal panel manufacturing apparatus according to FIG. 7 having such a configuration, the second double tube type rare gas fluorescent lamp 70 is disposed inside the outer tube 68 in which the rare gas fluorescent lamp body 60A is disposed. Since the rare gas fluorescent lamp main body 60A is directly cooled by the circulating cooling gas, the rare gas fluorescent lamp main body 60A can emit light with higher efficiency.

In the above, specific examples of the excimer lamp and the rare gas fluorescent lamp used as the UV lamp 20 constituting the ultraviolet light source of the first liquid crystal panel manufacturing apparatus have been described with reference to the drawings. The excimer lamp used as the UV lamp 20 is described above. The rare gas fluorescent lamp is not limited to the above embodiment, and various modifications can be made.
For example, the excimer lamp constituting the UV lamp 20 has a surface in which a phosphor layer containing a phosphor that is excited by excimer light generated inside the discharge vessel and emits ultraviolet light surrounds the discharge space of the discharge vessel. In other words, it may have a structure of a fluorescent lamp that emits light (ultraviolet light) generated from a phosphor excited by excimer light.
Specifically, in the first excimer lamp 30 shown in FIG. 3, the inner surface of the discharge vessel 31 contains a phosphor that is excited by excimer light generated inside the discharge vessel 31 and emits ultraviolet light. A fluorescent lamp having a phosphor layer (hereinafter, also referred to as “first fluorescent lamp”) may be used. Further, in the second excimer lamp 40 shown in FIG. 4, the inner surface of the outer tube 42 in the discharge vessel 41 contains a phosphor that is excited by excimer light generated inside the discharge vessel 41 and emits ultraviolet light. 5 may be a fluorescent lamp (hereinafter, also referred to as “second fluorescent lamp”), or in the third excimer lamp 50 shown in FIG. A fluorescent lamp having a phosphor layer containing a phosphor that is excited by excimer light generated inside the discharge vessel 51 and emits ultraviolet light (hereinafter referred to as “a fluorescent lamp”). Also referred to as “third fluorescent lamp”.
In any of the first fluorescent lamp, the second fluorescent lamp, and the third fluorescent lamp, the phosphor is excited by excimer light emitted when the excimer molecules formed in the discharge space S transition to the ground state. Then, ultraviolet light is generated from the phosphor, and the light is emitted to the outside of the discharge vessel.

  In the first fluorescent lamp, the second fluorescent lamp, and the third fluorescent lamp, the discharge space (S) of the discharge vessel (31, 41, 51) has xenon as a discharge medium for generating excimer molecules by discharge. A rare gas such as argon is enclosed.

Here, in this specification, light (ultraviolet light) generated from a phosphor excited by excimer light emitted when excimer molecules formed in the discharge space transition to the ground state is used as radiation light. Among the fluorescent lamps, for example, as shown in FIGS. 6 and 7, only a rare gas is sealed inside a discharge vessel which is a luminous tube, and the discharge vessel tube is separated from the outer surface of the discharge vessel. A fluorescent lamp having a structure in which a pair of external electrodes is disposed along the axial direction is referred to as a “rare gas fluorescent lamp”. Accordingly, the rare gas fluorescent lamp main body 60A, the first double tube type rare gas fluorescent lamp 60, and the second double tube type rare gas fluorescent lamp 70 according to FIGS. This corresponds to an example of a fluorescent lamp.
For the sake of convenience, a fluorescent lamp including a structure other than the rare gas fluorescent lamp is simply “fluorescent lamp” (specifically, for example, “first fluorescent lamp”, “second fluorescent lamp”, and “first fluorescent lamp”). 3 fluorescent lamps)).

[Second Embodiment]
FIG. 8 is an explanatory view showing another example of the configuration of the blue phase type liquid crystal panel manufacturing apparatus of the present invention together with the blue phase type liquid crystal panel material.
The blue-phase liquid crystal panel manufacturing apparatus (hereinafter also referred to as “second liquid crystal panel manufacturing apparatus”) according to the second embodiment is a refrigerant tank in the first liquid crystal panel manufacturing apparatus 10 according to FIG. 11 is provided with two inlets (specifically, the first inlet 12A and the second inlet 12B), and the liquid refrigerant L is supplied to the refrigerant tank 11 in place of the circulating cooling medium supply mechanism. The liquid refrigerant L in the refrigerant tank 11 is adjusted by supplying the liquid refrigerant L having different temperatures to the refrigerant tank 11 from the two liquid refrigerant supply lines. 1 has the same configuration as that of the first liquid crystal panel manufacturing apparatus 10 according to FIG. 1 except that a two-system cooling medium supply mechanism is provided.

In the second liquid crystal panel manufacturing apparatus, one of the two liquid refrigerant supply lines constituting the two-system cooling medium supply mechanism is provided at the first inlet 12A of the refrigerant tank 11. The first liquid refrigerant supply path 83A and the first inflow port 12A have a function of supplying the liquid refrigerant L whose temperature is adjusted to the first temperature T1 higher than the blue phase appearance temperature into the refrigerant tank 11 from the first inlet 12A. One liquid refrigerant supply source 81A, and the liquid refrigerant L provided between the first inlet 12A and the first liquid refrigerant supply source 81A and flowing into the refrigerant tank 11 from the first inlet 12A. The first flow rate control means 82A for controlling the flow rate per unit time. In this liquid refrigerant supply line, the flow rate of the liquid refrigerant L supplied from the first liquid refrigerant supply source 81A is controlled by the first flow rate control means 82A, and the refrigerant is supplied into the refrigerant tank 11 from the first inlet 12A. Flow into. The other liquid refrigerant supply line includes a second liquid refrigerant supply path 83B provided in the second inlet 12B of the refrigerant tank 11, and a second lower than the blue phase appearance temperature from the second inlet 12B. Between the second liquid refrigerant supply source 81B having a function of supplying the liquid refrigerant L adjusted in temperature T2 into the refrigerant tank 11, and the second inlet 12B and the second liquid refrigerant supply source 81B. And a second flow rate control means 82B for controlling the flow rate per unit time of the liquid refrigerant L flowing into the refrigerant tank 11 from the second inlet 12B. In this liquid refrigerant supply line, the flow rate of the liquid refrigerant L supplied from the second liquid refrigerant supply source 81B is controlled by the second flow rate control means 82B, and the refrigerant is supplied into the refrigerant tank 11 from the second inlet 12B. Flow into.
In the example of this figure, the control unit 84 is based on the temperature information from the temperature sensor 17, the power supply means 29, the first liquid refrigerant supply source 81 </ b> A, the second liquid refrigerant supply source 81 </ b> B, the first flow rate control means. It has a function of controlling 82A and the second flow rate control means 82B.

  In the second liquid crystal panel manufacturing apparatus having such a configuration, the blue phase panel material that is the object to be processed W is immersed in the liquid refrigerant L in a state where the liquid tank L is filled in the refrigerant tank 11. At a predetermined position below the ultraviolet light source, and the flow rate per unit time of the liquid refrigerant L at the first temperature T1 flowing into the refrigerant tank 11 and the unit time of the liquid refrigerant L at the second temperature T2 By adjusting the ratio to the flow rate, the temperature of the liquid crystal layer of the liquid crystal panel material immersed in the liquid refrigerant L in the refrigerant tank 11 becomes the blue phase appearance temperature at which the blue phase appears in the liquid crystal layer. The temperature of the liquid refrigerant L in the refrigerant tank is set, and the purple constituting the liquid crystal layer of the liquid crystal panel material by an ultraviolet light source is applied to the liquid crystal panel material in a state where a blue phase appears in the liquid crystal layer. A liquid crystal layer of the blue phase panel material is formed in the blue phase panel material that is the object to be processed W by passing through a polymer stabilization treatment step that irradiates light including ultraviolet rays having a wavelength for curing the linear curable resin. The ultraviolet curable resin is cured in a state where a blue phase appears in the liquid crystal layer, whereby a blue phase type liquid crystal panel is manufactured.

Specifically, regarding a manufacturing process for manufacturing a blue phase type liquid crystal panel from a blue phase panel material using the second liquid crystal panel manufacturing apparatus according to FIG. 8, the second liquid crystal panel manufacturing apparatus shown in FIGS. The operation procedure will be described with reference to a flowchart.
Here, the liquid crystal layer of the blue phase panel material as the object to be processed W is a liquid crystal, a liquid crystal containing a chiral agent for aligning the liquid crystal in a spiral structure and causing a blue phase to appear, an ultraviolet curable resin, and an ultraviolet polymerization initiator. The UV lamp 20 having a liquid crystal layer made of the composition and constituting the ultraviolet light source has a wavelength suitable for curing the ultraviolet curable resin constituting the liquid crystal layer of the blue phase panel material as the workpiece W. It shall emit ultraviolet rays.
Further, it is assumed that the temperature of the liquid refrigerant L, which is said to be able to heat the liquid crystal layer of the blue phase panel material as the object to be processed W to the isotropic phase, is Te, and the blue phase can appear in the liquid crystal layer. In other words, when the temperature of the cold liquid refrigerant L that can be set to the temperature of the liquid crystal layer to be the blue phase appearance temperature is Tb, these temperatures Te and Tb are supplied from the first liquid refrigerant supply source 81A. The temperature of the liquid refrigerant L (first temperature T1) and the temperature of the liquid refrigerant L supplied from the second liquid refrigerant supply source 81B (second temperature T2) are T1>Te>Tb> T2 Satisfy the relationship.
For easy understanding, the flow rate of the liquid refrigerant L flowing into the refrigerant tank 11 per unit time from the first inlet 12A and the refrigerant tank 11 per unit time from the second inlet 12B. It is assumed that the sum total with the flow rate of the flowing liquid refrigerant L is constant.

(Step S101)
A blue phase panel material (indicated as “work” in FIGS. 9 and 10) that is the object to be processed W is disposed in the refrigerant tank 11 in the second liquid crystal panel manufacturing apparatus. The installation position of the workpiece W is within a light irradiation range where light including ultraviolet rays emitted from the UV lamp 20 is irradiated.

(Step S102)
The controller 84 includes a first liquid refrigerant supply source 81A (indicated as “liquid refrigerant supply source A” in FIGS. 9 and 10) and a second liquid refrigerant supply source 81B (in FIGS. 9 and 10 “ The supply of the liquid refrigerant L from the liquid refrigerant supply source B ”) is started, and the first flow rate control means 82A (shown as“ flow rate controller A ”in FIGS. 9 and 10) and the second. The flow rate control means 82B (shown as “flow rate controller B” in FIGS. 9 and 10) is controlled, and the liquid refrigerant L of the first temperature T1 flowing into the refrigerant tank 11 from the first inflow port 12A. The ratio between the flow rate per unit time and the flow rate per unit time of the liquid refrigerant L at the second temperature T2 flowing into the refrigerant tank 11 from the second inlet 12B is set to a specific flow rate ratio Re. To do.
Here, the flow rate per unit time of the liquid refrigerant L at the first temperature T1 flowing into the refrigerant tank 11 from the first inlet 12A is V _T1e, and flows into the refrigerant tank 11 from the second inlet 12B. When the flow rate per unit time of the liquid refrigerant L at the second temperature T2 is V _T2e , these flow rates V _T1e and V _T2e satisfy the relationship of V _T1e + V _T2e = V _s (constant).
In addition, the “specific flow ratio Re” is the temperature of the liquid refrigerant L obtained by mixing the liquid refrigerant L at the first temperature T1 and the liquid refrigerant L at the second temperature T2 in the refrigerant tank 11. , A value set in advance for setting the temperature Te at which the liquid crystal layer of the blue phase panel material, which is the object to be processed W, can be heated to the isotropic phase, and is represented by the equation Re = V _T1e / V _T2e . The value of the specific flow rate ratio Re is stored in the control unit 84 in advance. The values of the flow rate V _T1e and the flow rate V _T2e are also stored in the control unit 84 in advance.

(Step S103)
The liquid refrigerant L flows into the refrigerant tank 11 from the first inlet 12A and the second inlet 12B, the workpiece W, the UV lamp 20 and the reflecting mirror 19 are completely immersed in the liquid refrigerant L, and the outlet When the liquid refrigerant L flows out from the refrigerant tank 11 to the outside from the control unit 13, the control unit 84 receives a temperature signal related to the temperature of the liquid refrigerant L in the refrigerant tank 11 from the temperature sensor 17.

(Step S104)
The controller 84 obtains the temperature Te ′ of the liquid refrigerant L in the refrigerant tank 11 from the received temperature signal.

(Step S105)
The controller 84 examines the value of the temperature Te and the value of the temperature Te ′ stored in advance.
Here, the value of the allowable range width of the temperature Te of the liquid refrigerant L in the cooling tank 11 capable of heating the liquid crystal layer of the blue phase panel material, which is the workpiece W, to the isotropic phase is denoted by ΔTe. That is, in the case of | Te−Te ′ | ≦ ΔTe, the liquid crystal layer of the blue phase panel material that is the workpiece W is heated to the isotropic phase.

  If Te−Te ′> ΔTe, the process proceeds to step S106. If Te−Te ′ <− ΔTe, the process proceeds to step S108. In other cases (specifically, when | Te−Te ′ | ≦ ΔTe), the process proceeds to step S110.

(Step S106)
If Te−Te ′> ΔTe in step S105, the temperature Te ′ of the liquid refrigerant L in the refrigerant tank 11 is to heat the liquid crystal layer of the blue phase panel material, which is the workpiece W, to the isotropic phase. It is too low. That is, the flow rate of the liquid refrigerant L at the second temperature T2 supplied from the second liquid refrigerant supply source 81B and flowing into the refrigerant tank 11 from the second inlet 12B is excessive.
Therefore, the control unit 84 controls the first flow rate control means 82A or the second flow rate control means 82B, and the liquid refrigerant L at the first temperature T1 flowing into the refrigerant tank 11 from the first inflow port 12A. the flow rate per unit time and _{V T1e '(V T1e <V} T1e') to change from V _T1e, the second temperature T2 flowing from the second inlet 12B into the coolant vessel 11 of the liquid coolant L of and _{V T2e '(V T2e> V} T2e') the flow rate per unit time is changed from V _T2e, by changing the ratio of these flow rates from a particular flow rate ratio Re flow ratio Re '(Re' = V _T1e '/ V _T2e '). Note that V _T1e + V _T2e = V _T1e '+ V _T2e ' = V _s (constant).

(Step S107)
After the time until the temperature distribution of the liquid refrigerant L in the refrigerant tank 11 becomes uniform to some extent by setting the flow rate ratio Re ′, the control unit 84 sets the liquid refrigerant L in the refrigerant tank 11 from the temperature sensor 17. Receive a temperature signal for the temperature of Thereafter, the process proceeds to step S104 in order to test again the magnitude of the temperature value of the liquid refrigerant L in the refrigerant tank 11 and the value of the temperature Te.

(Step S108)
If Te−Te ′ <− ΔTe in step S105, the temperature Te ′ of the liquid refrigerant L in the refrigerant tank 11 heats the liquid crystal layer of the blue phase panel material, which is the object to be processed W, to the isotropic phase. Is too high. That is, the flow rate of the liquid refrigerant L at the first temperature T1 supplied from the first liquid refrigerant supply source 81A and flowing into the refrigerant tank 11 from the first inflow port 12A is excessive.
Therefore, the control unit 84 controls the first flow rate control means 82A and the second flow rate control means 82B, so that the liquid refrigerant L having the first temperature T1 flowing into the refrigerant tank 11 from the first inflow port 12A. and _{V T1e '' (V T1e>} V T1e '') the flow rate per unit time is changed from V _T1e, the liquid coolant L of the second temperature T2 flowing into the refrigerant vessel 11 from the second inlet 12B flow rate V _T2e changed from _{V T2e '' (V T2e <} V T2e '') per unit time and, these flow ratio was changed from a certain flow rate ratio Re flow ratio Re '' (Re '' (= V _T1e '' / V _T2e '') where V _T1e + V _T2e = V _T1e '' + V _T2e '' = V _s (constant).

(Step S109)
After the time until the temperature distribution of the liquid refrigerant L in the refrigerant tank 11 becomes uniform to some extent after the control unit 84 sets the flow rate ratio Re ″, the liquid refrigerant L in the refrigerant tank 11 is transferred from the temperature sensor 17. Receive a temperature signal for the temperature of Thereafter, the process proceeds to step S104 in order to test again the magnitude of the temperature value of the liquid refrigerant L in the tank and the value of the temperature Te.

(Step S110)
If | Te−Te ′ | ≦ ΔTe in step S105, the temperature Te ′ of the liquid refrigerant L in the refrigerant tank 11 heats the liquid crystal layer of the blue phase panel material, which is the object W, to the isotropic phase. It is in a state suitable for the temperature. Therefore, the process proceeds to step S110 without passing through other steps (specifically, step S106 and step S107, or step S108 and step S109).
The controller 84 waits until the temperature of the liquid crystal layer in the blue phase panel material that is the object to be processed W rises and the liquid crystal layer transitions to the isotropic phase.
Here, the waiting time required for the liquid crystal layer of the blue phase panel material to transition to the isotropic phase is, for example, verified in the step S105 as | Te−Te ′ | ≦ ΔTe, and then in the refrigerant tank 11. The temperature distribution of the liquid refrigerant L is uniform to some extent, and the liquid crystal layer of the blue phase panel material, which is the object to be processed W, transitions to the isotropic phase almost uniformly (locally). It is assumed that the value is stored in the control unit 84 in advance. The waiting time is counted using, for example, a timing means such as a counter (not shown). In addition, since a time measuring means and a time measuring method are well-known techniques, description is abbreviate | omitted here.

  The liquid crystal layer of the blue phase panel material is heated to the isotropic phase through the above steps S102 to S110.

(Step S111)
The control unit 84 controls the first flow rate control means 81A and the second flow rate control means 81B, and the unit of the liquid refrigerant L having the first temperature T1 flowing into the refrigerant tank 11 from the first inflow port 12A. The ratio between the flow rate per time and the flow rate per unit time of the liquid refrigerant L at the second temperature T2 flowing into the tank from the second inlet 12B is set to a specific flow rate ratio Rb.
Here, the flow rate per unit time of the liquid refrigerant L at the 41st temperature T1 flowing into the refrigerant tank 11 from the first inflow port 12A is V _T1b, and the second inflow into the tank from the second inflow port B is made. When the flow rate per unit time of the liquid refrigerant L at the temperature T2 of ₂ is V _T2b , these flow rates V _T1b and V _T2b satisfy the relationship of V _T1b + V _T2b = V _S (constant).
The “specific flow rate ratio Rb” is the temperature of the liquid refrigerant L obtained by mixing the liquid refrigerant L at the first temperature T1 and the liquid refrigerant L at the second temperature T2 in the refrigerant tank 11. This is a value set in advance to obtain a temperature Tb at which the blue phase can appear in the liquid crystal layer of the blue phase panel material that is the object to be processed W, and is represented by the formula Rb = V _T1b / V _T2b . The value of the specific flow rate ratio Rb is stored in the control unit 84 in advance. Further, the values of the flow rates V _T1b and V _T2b are also stored in the control unit 84 in advance.

(Step S112)
After the time until the temperature distribution of the liquid refrigerant L in the refrigerant tank 11 becomes uniform to some extent (standby time) by setting the flow rate ratio Rb, the control unit 84 sets the flow ratio Rb from the temperature sensor 17 to the inside of the refrigerant tank 11. A temperature signal related to the temperature of the liquid refrigerant L is received.

(Step S113)
The controller 84 obtains the temperature Tb ′ of the liquid refrigerant L in the refrigerant tank 11 from the received temperature signal.

(Step S114)
The controller 84 examines the value of the temperature Tb and the value of the temperature Tb ′ stored in advance.
Here, the value of the allowable range width of the temperature Tb of the liquid refrigerant L that can cause the blue phase to appear in the liquid crystal layer of the blue phase panel material W is denoted by ΔTb. That is, when | Tb−Tb ′ | ≦ ΔTb, a blue phase appears in the liquid crystal layer of the blue phase panel material that is the object to be processed W.

  If Tb−Tb ′> ΔTb, the process proceeds to step S115. If Tb−Tb ′ <− ΔTb, the process proceeds to step S117. In other cases (specifically, when | Tb−Tb ′ | ≦ ΔTb), the process proceeds to step S119.

(Step S115)
If Tb−Tb ′> ΔTb in step S114, the temperature Tb ′ of the liquid refrigerant L in the refrigerant tank 11 is low to cause the blue phase to appear in the liquid crystal layer of the blue phase panel material that is the workpiece W. It is too much. That is, the flow rate of the liquid refrigerant L at the temperature T2 supplied from the second liquid refrigerant supply source 81B and flowing into the refrigerant tank 11 through the second inlet 12B is excessive.
Therefore, the controller 84 controls the first flow rate control means 82A and the second flow rate control means 82B, and the liquid refrigerant L at the first temperature T1 flowing into the refrigerant tank 11 from the first inflow port 12A. the flow rate per unit time and _{V T1b '(V T1b <V} T1b') to change from V _T1b, the second temperature T2 flowing from the second inlet 12B into the coolant vessel 11 of the liquid coolant L of the flow rate per unit time as V _T2b changed from _{V T2b '(V T1b> V} T2b'), by changing the ratio of these flow rates from a particular flow rate ratio Rb flow ratio Rb '(Rb' = V _T1b '/ V _T2b '). Note that V _T1b + V _T2b = V _T1b '+ V _T2b ' = V _s (constant).

(Step S116)
After the time until the temperature distribution of the liquid refrigerant L in the refrigerant tank 11 becomes uniform to some extent by setting a specific flow rate ratio Re ′, the control unit 84 sets the liquid in the refrigerant tank 11 from the temperature sensor 17. A temperature signal related to the temperature of the refrigerant L is received. Thereafter, in order to test again the magnitude of the temperature value of the liquid refrigerant L in the refrigerant tank 11 and the value of the temperature Tb, the process proceeds to step S114.

(Step S117)
If Tb−Tb ′ <− ΔTb in step S114, the temperature Tb ′ of the liquid refrigerant L in the refrigerant tank 11 is the object W to be processed, but the blue phase appears in the liquid crystal layer of the blue phase panel material. Is too high. That is, the flow rate of the liquid refrigerant L at the temperature T1 supplied from the first liquid refrigerant supply source 81A and flowing into the tank from the first inlet A is in an excessive state.
Therefore, the control unit 84 controls the first flow rate control unit 81A and the second flow rate control unit 81B, and the liquid refrigerant L at the first temperature T1 flowing into the refrigerant tank 11 from the first inflow port 12A. and _{V T1b '' (V T1b>} V T1b '') the flow rate per unit time changed from V _T1b, liquid refrigerant in the second temperature T2 flowing into the refrigerant vessel 11 from the second inlet 12B V _T2b flow changed from V _T2b per amount unit time L _{'as' (V T2b <V T2b '} '), by changing the ratio of these flow rates from a particular flow rate ratio Rb flow ratio Rb '' (Rb ′ ′ = V _T1b ′ ′ / V _T2b ′ ′). Note that V _T1b + V _T2b = V _T1b '' + V _T2b '' = V _s (constant).

(Step S118)
After the time until the temperature distribution of the liquid refrigerant L in the refrigerant tank 11 becomes uniform to some extent by setting the flow rate ratio Rb ″, the control unit 84 sets the liquid refrigerant in the refrigerant tank 11 from the temperature sensor 17. A temperature signal relating to the temperature of L is received. Thereafter, in order to test again the magnitude of the temperature value of the liquid refrigerant L in the refrigerant tank 11 and the value of the temperature Tb, the process proceeds to step S114.

(Step S119)
If | Tb−Tb ′ | ≦ ΔTb in step S114, the temperature Tb ′ of the liquid refrigerant L in the refrigerant tank 11 causes the blue phase to appear in the liquid crystal layer of the blue phase panel material that is the workpiece W. It is in a state suitable for the temperature. Therefore, the process proceeds to step S119 without passing through other steps (specifically, step S115 and step S116, or step S117 and step S118).
The control unit 84 waits until the temperature of the liquid crystal layer in the blue phase panel material that is the workpiece W changes and the liquid crystal layer transitions to the blue phase.
Here, the waiting time required for the liquid crystal layer of the blue phase panel material to transition to the blue phase is, for example, verified in step S114 as | Tb−Tb ′ | ≦ ΔTb, and then in the refrigerant tank 11. This is the time until the temperature distribution of the liquid refrigerant L becomes uniform to some extent, and the liquid crystal layer of the blue phase panel material, which is the object to be processed W, is (locally) almost uniformly transferred to the blue phase. It is assumed that it is stored in the control unit 84 in advance. The waiting time is counted using, for example, a timing means such as a counter (not shown). In addition, since a time measuring means and a time measuring method are well-known techniques, description is abbreviate | omitted here.

  By going through the procedure from step S111 to step S119, a blue phase appears in the liquid crystal layer of the blue phase panel material.

(Step S120)
The control unit 84 passes the time (waiting time) until the temperature distribution of the liquid refrigerant L in the refrigerant tank 11 becomes uniform to some extent, and the liquid crystal layer of the blue phase panel material that is the object to be processed W is almost uniformly blue. After the phase appears, a power supply start signal to the UV lamp 20 is transmitted to the power supply unit 29.

(Step 121)
The power supply unit 29 that has received the power supply start signal supplies power to the UV lamp 20 to turn on the UV lamp 20.

(Step S122)
After a predetermined time has elapsed, the control unit 84 transmits a power supply end signal to the UV lamp 20 to the power supply unit 29.
Here, the “predetermined time” means that the ultraviolet curable resin constituting the liquid crystal layer of the blue phase panel material W after the irradiation of light including ultraviolet rays from the UV lamp 20 to the blue phase panel material W is started. This is the time from curing to completion of the polymer stabilization treatment step.

(Step S123)
The power supply means 29 that has received the power supply end signal stops the power supply to the UV lamp 20 and turns off the UV lamp 20.

  Through the procedure from step S120 to step S123, the blue phase panel material is irradiated with light including ultraviolet rays from the UV lamp 20 over a predetermined time in a state where the blue phase appears in the liquid crystal layer of the blue phase panel material. As a result, the ultraviolet curable resin is cured in the liquid crystal layer of the blue phase panel material, whereby a blue phase type liquid crystal panel is manufactured.

As described above, according to the second liquid crystal panel manufacturing apparatus, the object to be processed is compared with the object W to be processed immersed in the liquid refrigerant L in the refrigerant tank 11 filled with the liquid refrigerant L. Since the light from the ultraviolet light source arranged so that the boundary surface LS between the liquid refrigerant L and the atmosphere does not exist between W and W, the temperature distribution on the workpiece W is substantially uniform. It is easy to adjust the temperature of the processing body W. Further, even when fluctuation (undulation) occurs at the boundary surface LS between the liquid refrigerant L and the atmosphere, the light emitted from the ultraviolet light source is affected by the state of the boundary surface LS between the liquid refrigerant L and the atmosphere. Therefore, the light irradiance distribution on the light irradiation surface of the target object W can be made substantially uniform only by adjusting the light emitted from the ultraviolet light source.
Therefore, according to the second liquid crystal panel manufacturing apparatus, uniform light irradiation can be performed on the entire surface of the liquid crystal layer of the blue phase panel material that is the object to be processed W immersed in the liquid refrigerant L. Even if the liquid crystal panel material of the system is large, the ultraviolet curable resin that constitutes the liquid crystal layer of the liquid crystal panel material is cured by an ultraviolet light source to the liquid crystal panel material in which the blue phase appears in the liquid crystal layer By irradiating light including ultraviolet light having a wavelength to be emitted, a blue phase liquid crystal panel can be obtained in which the liquid crystal layer can be brought into a uniform blue phase state.

Moreover, in the second liquid crystal panel manufacturing apparatus, the liquid refrigerant L flowing into the refrigerant tank 11 from the first inlet 12A and the liquid refrigerant L flowing into the refrigerant tank 11 from the second inlet 12B are Since the temperatures are different from each other, the temperature of the liquid refrigerant L in the refrigerant tank 11 is controlled to an arbitrary temperature between the first temperature T1 and the second temperature T2 by controlling these flow ratios. It becomes possible to set. And the temperature of the liquid refrigerant | coolant L in the refrigerant tank 11 is adjusted by supplying the liquid refrigerant | coolant L from which temperature differs mutually in the refrigerant tank 11 by making the inflows per unit time differ, and mixing. Therefore, as compared with the first liquid crystal panel device 10 according to FIG. 1, the temperature of the liquid refrigerant L in the refrigerant tank 11 can be adjusted in a short time. In this case, it is possible to shorten the time until the blue layer appears in the liquid crystal layer of the blue phase panel material.
Specifically, for example, after the liquid crystal layer in the blue phase panel material, which is the object to be processed, is first heated to the isotropic phase, the temperature is gradually lowered to the blue phase to maintain the temperature at which the blue phase appears. In this case, the flow rate per unit time of the liquid refrigerant L flowing into the refrigerant tank 11 from the first inlet 12A by controlling the first flow rate control means 82A and the second flow rate control means 82B by the control unit 84. By appropriately adjusting the ratio between the flow rate per unit time of the liquid refrigerant L flowing into the refrigerant tank 11 from the second inlet 12B, the temperature control of the liquid crystal layer in the blue phase panel material can be performed in a relatively short time. Can be done.

  Here, in the first liquid crystal panel manufacturing apparatus 10, when a large blue phase panel material is used as the object to be processed W, the liquid refrigerant L has a large heat capacity as described above, so that the refrigerant tank 11. Since the deviation of the temperature distribution of the liquid refrigerant L in the inside is small, by immersing a large blue phase panel material in the liquid refrigerant L, the blue phase so that the local temperature distribution of the blue phase panel material becomes substantially uniform It is relatively easy to adjust the temperature of the panel material. However, since the temperature of the liquid refrigerant L having a large heat capacity is adjusted by temperature control means such as a chiller in the circulation type cooling medium supply mechanism, it takes a long time to adjust the temperature of the liquid refrigerant L in the refrigerant tank 11. Resulting in. Therefore, in the first liquid crystal panel manufacturing apparatus according to FIG. 1, it takes a long time for the blue layer to appear in the liquid crystal layer of the large blue phase panel material that is the workpiece W.

[Third Embodiment]
FIG. 11 is an explanatory view showing still another example of the configuration of the blue phase type liquid crystal panel manufacturing apparatus of the present invention together with the blue phase type liquid crystal panel material.
A blue-phase liquid crystal panel manufacturing apparatus (hereinafter also referred to as “third liquid crystal panel manufacturing apparatus”) according to the third embodiment is a processing target in the first liquid crystal panel manufacturing apparatus 10 according to FIG. The body W is conveyed from the outside of the refrigerant tank 11 into the refrigerant tank 11, passes through the region irradiated with light including ultraviolet rays emitted from the ultraviolet light source, and is conveyed from the inside of the refrigerant tank 11 to the outside of the refrigerant tank 11. A transport mechanism is provided, and the refrigerant tank 11 is provided with two inlets and is not provided with an outlet. The refrigerant tank 11 is provided with a refrigerant along a side surface of the refrigerant tank 11. A buffer tank 93 for collecting the liquid refrigerant L overflowing from the opening edge of the refrigerant tank 11 is provided so as to go around the tank 11, and two liquid refrigerant outlets provided in the buffer tank 93 are provided. 94 and the two streams Except that the circulation path 95 of the liquid coolant L is provided in the mouth 12, in which the first relating to the Figure 1 has the same configuration as that of the liquid crystal panel manufacturing apparatus 10.
Here, the blue phase panel material that is the object to be processed W passes through a region irradiated with light including ultraviolet rays that are conveyed from the outside of the refrigerant tank 11 into the refrigerant tank 11 by the conveyance mechanism and emitted from the ultraviolet light source. In the process of being transported from the inside of the refrigerant tank 11 to the outside of the refrigerant tank 11, the ultraviolet curable resin is irradiated with light in the refrigerant tank 11 so that a blue phase appears in the liquid crystal layer of the liquid crystal panel material. Is cured into a blue phase liquid crystal panel.

In the third liquid crystal panel manufacturing apparatus, the transport mechanism includes a plurality of transport rollers 91 and transport roller drive control means 92 common to the plurality of transport rollers 91, and the plurality of transport rollers. 91 has the structure arrange | positioned according to the conveyance path which should convey the to-be-processed object W. FIG. According to the transport mechanism having such a configuration, the blue phase panel material W is placed on the transport roller 91 located outside the refrigerant tank 11, and the transport roller drive control unit 92 controls the plurality of transport rollers 91. By performing drive control, the blue phase panel material W can be transported.
In the example of this figure, the operation of the transport roller drive control unit 92 is controlled by the control unit 96 based on the temperature information of the temperature sensor 17. The control unit 96 has a function of controlling the transport roller drive control unit 92 and also has a function of controlling the liquid refrigerant circulation unit 15 and the temperature adjustment unit 16 based on the temperature information of the temperature sensor 17. is there.

  Further, in the third liquid crystal panel manufacturing apparatus, the circulation path 95 having a branch structure provided at the two inlets 12 of the refrigerant tank 11 and the two liquid refrigerant outlets 94 of the buffer tank 93, A circulation type cooling medium supply mechanism is formed by the liquid refrigerant circulation means 15 and the control unit 96 that controls the temperature adjustment means based on the temperature information of the liquid refrigerant circulation means 15, the temperature adjustment means 16, and the temperature sensor 17. Yes. In this circulation type cooling medium supply mechanism, the liquid refrigerant L is circulated by the liquid refrigerant circulation means 15 such as a pump, and flows into the refrigerant tank 11 from the inlet 12 provided in the refrigerant tank 11 from the circulation path 95. The refrigerant is discharged from the opening edge of the tank 11 to the outside of the refrigerant tank 11 and collected by the buffer tank 93. Then, the liquid refrigerant L recovered by the buffer tank is discharged from the liquid refrigerant outlet 94 of the buffer tank 93 to the circulation path 95 and flows into the temperature control means 16 made of a chiller, and reaches a predetermined temperature by heat exchange in the chiller. After the adjustment, the refrigerant flows into the refrigerant tank 11 again from the inlet 12.

  In the third liquid crystal panel manufacturing apparatus 10 having such a configuration, a predetermined position below the ultraviolet light source that is immersed in the liquid refrigerant L by the transport mechanism in the refrigerant tank 11 that is filled with the liquid refrigerant L. The blue phase panel material, which is the object to be processed W, is transported to the liquid crystal layer, and the temperature of the liquid crystal layer of the liquid crystal panel material immersed in the liquid refrigerant L is the blue phase appearance temperature at which the blue phase appears in the liquid crystal layer. The temperature of the liquid refrigerant L in the refrigerant tank 11 is set so that the liquid crystal panel material of the liquid crystal panel material is formed by the ultraviolet light source with respect to the liquid crystal panel material in a state where a blue phase appears in the liquid crystal layer. The blue phase panel material, which is the object to be processed W, is subjected to a polymer stabilization treatment step of irradiating light including ultraviolet rays having a wavelength for curing the curable resin. Te, ultraviolet curing resin constituting the liquid crystal layer of the blue phase panel material is cured in a state in which the blue phase to the liquid crystal layer is appearance, thereby, the blue-phase type liquid crystal panel is manufactured.

Thus, according to the third liquid crystal panel manufacturing apparatus, the object to be processed is compared with the object W to be processed immersed in the liquid refrigerant L in the refrigerant tank 11 filled with the liquid refrigerant L. Since light from an ultraviolet light source arranged so that there is no boundary surface LS between the liquid refrigerant L and the atmosphere does not exist between W and W, the temperature distribution on the object to be processed is substantially uniform. It is easy to adjust the temperature of the body W. Further, for example, when the object to be processed W is transferred into the liquid refrigerant L by the transfer mechanism and when the object to be processed W is transferred outside the liquid refrigerant L, fluctuations in the boundary surface LS between the liquid refrigerant L and the atmosphere ( However, even in such a case, the light emitted from the ultraviolet light source is not affected by the state of the boundary surface LS between the liquid refrigerant L and the atmosphere, and is to be processed on the workpiece W. Therefore, only by adjusting the light emitted from the ultraviolet light source, the irradiance distribution of light on the light irradiation surface of the workpiece W can be made substantially uniform.
Therefore, according to the third liquid crystal panel manufacturing apparatus, since the entire liquid crystal layer of the blue phase panel material, which is the object to be processed W immersed in the liquid refrigerant L, can be irradiated with light, the blue phase Even if the liquid crystal panel material of the system is large, the ultraviolet curable resin that constitutes the liquid crystal layer of the liquid crystal panel material is cured by an ultraviolet light source to the liquid crystal panel material in which the blue phase appears in the liquid crystal layer By irradiating light including ultraviolet light having a wavelength to be emitted, a blue phase liquid crystal panel can be obtained in which the liquid crystal layer can be brought into a uniform blue phase state.

The blue-phase liquid crystal panel manufacturing apparatus and the blue-phase liquid crystal panel manufacturing method of the present invention are not limited to the above-described embodiments, and various modifications can be made.
For example, in the blue phase liquid crystal panel manufacturing apparatus of the present invention, the ultraviolet light source and the blue phase panel material as the object to be processed are the ultraviolet light source and the blue phase panel material in a refrigerant tank filled with a liquid refrigerant. Between the ultraviolet light source and the blue phase panel material, there is a boundary surface between the liquid refrigerant and other than the atmosphere. You may do it. Specifically, for example, a plate-like body having transparency to ultraviolet rays is interposed between the ultraviolet light source and the blue phase panel material, and there is a boundary surface between the plate-like body and the liquid refrigerant. Also good.

10 Blue phase liquid crystal panel manufacturing equipment (first liquid crystal panel manufacturing equipment)
DESCRIPTION OF SYMBOLS 11 Refrigerant tank 12, 12A, 12B Inlet 13 Outlet 14 Circulation path 15 Liquid refrigerant circulation means 16 Temperature control means 17 Temperature sensor 18 Control part 19 Reflecting mirror 19A Reflecting surface 20 Ultraviolet lamp (UV lamp)
28 Lead wire 29 Power supply means 30 Excimer lamp (first excimer lamp)
31 discharge vessel 32 first discharge electrode 33 second discharge electrode 35 seal portion 36 seal member 37 lamp support means 38 light shielding film 40 excimer lamp (second excimer lamp)
41 discharge vessel 42 outer tube 43 inner tube 44 first discharge electrode 45 second discharge electrode 50 excimer lamp (third excimer lamp)
51 discharge vessel 52 outer tube 53 inner tube 54 first discharge electrode 55 second discharge electrode 60 rare gas fluorescent lamp (first double tube type rare gas fluorescent lamp)
60A Noble gas fluorescent lamp main body 61 Discharge vessel 62 Aperture part 63 First external electrode 64 Second external electrode 65 Ultraviolet reflective film 66 Low softening point glass layer 67 Phosphor layer 68 Outer tube 69 Lid member 70 Noble gas fluorescent lamp ( Second double tube type rare gas fluorescent lamp)
71 Power supply terminal 74 Cooling gas introduction means 75 Cooling gas introduction nozzle 76 Cooling gas discharge nozzle 81A First liquid refrigerant supply source 81B Second liquid refrigerant supply source 82A First flow control means 82B Second flow control means 83A One liquid refrigerant supply path 83B Second liquid refrigerant supply path 84 Control unit 90 Lamp 91 Transport roller 92 Transport roller drive control means 93 Buffer tank 94 Liquid refrigerant outlet 95 Circulation path 96 Control unit

Claims (22)

A liquid crystal panel material of a blue phase system having a liquid refrigerant inside, and having a liquid crystal layer comprising a liquid crystal composition containing a liquid crystal, a chiral agent, and an ultraviolet curable material resin, and exhibiting a blue phase at a specific temperature. A refrigerant tank for soaking,
An ultraviolet light source for irradiating the liquid crystal panel material immersed in a liquid refrigerant in the refrigerant tank with light containing ultraviolet light having a wavelength for curing the ultraviolet curable resin constituting the liquid crystal layer of the liquid crystal panel material;
Power supply means for supplying power to the ultraviolet light source;
Adjust the temperature of the liquid refrigerant in the refrigerant tank so that the temperature of the liquid crystal panel material immersed in the liquid refrigerant in the refrigerant tank becomes the blue phase appearance temperature at which the blue phase appears in the liquid crystal layer of the liquid crystal panel material. A blue phase liquid crystal panel manufacturing apparatus comprising a temperature control means for
The apparatus for producing a liquid crystal panel of a blue phase system, wherein the ultraviolet light source is arranged so that there is no interface between the liquid refrigerant and the atmosphere between the ultraviolet light source and the liquid crystal panel material. A reflector that reflects light including ultraviolet rays emitted from the ultraviolet light source;
2. The blue phase system according to claim 1, wherein the reflecting mirror is disposed such that a boundary surface between the liquid refrigerant and the atmosphere does not exist between the reflecting surface of the reflecting mirror and the ultraviolet light source. Liquid crystal panel manufacturing equipment. The refrigerant tank includes an inlet and an outlet for liquid refrigerant, and is provided so that the outlet is located above the inlet.
3. The blue phase liquid crystal panel manufacturing apparatus according to claim 1, further comprising a liquid refrigerant supply source that supplies liquid refrigerant into the refrigerant tank from the inflow port. 4.   The liquid refrigerant supply source constitutes a part of liquid refrigerant circulation means for circulating the liquid refrigerant discharged from the outlet and allowing the liquid refrigerant to flow into the refrigerant tank from the inlet. The blue phase liquid crystal panel manufacturing apparatus described. A temperature sensor for measuring the temperature of the liquid refrigerant in the refrigerant tank, and a control unit;
The control unit operates the temperature control unit based on temperature information of the liquid refrigerant from the temperature sensor, so that the temperature of the liquid crystal panel material immersed in the liquid refrigerant in the refrigerant tank is the blue phase appearance temperature. The apparatus for producing a liquid crystal panel of a blue phase system according to any one of claims 1 to 4, wherein the temperature of the liquid refrigerant in the refrigerant tank is controlled so as to be. The inlet comprises a first inlet and a second inlet,
The liquid refrigerant supply source includes a first liquid refrigerant supply source that supplies a liquid refrigerant having a first temperature higher than the blue phase appearance temperature from the first inlet into the refrigerant tank, and a first temperature lower than the blue phase appearance temperature. A second liquid refrigerant supply source for supplying liquid refrigerant at a temperature of 2 into the refrigerant tank from the second inlet,
Between the first inlet and the first liquid refrigerant supply source, a first flow rate control for controlling a flow rate per unit time of the liquid refrigerant flowing into the refrigerant tank from the first inlet. Means are provided,
Between the second inlet and the second liquid refrigerant supply source, a second flow rate control for controlling the flow rate per unit time of the liquid refrigerant flowing into the refrigerant tank from the second inlet. 4. The apparatus for manufacturing a liquid crystal panel of a blue phase system according to claim 3, further comprising means. A temperature sensor for measuring the temperature of the liquid refrigerant in the refrigerant tank, and a control unit;
The controller controls the flow rate per unit time of the liquid refrigerant flowing into the refrigerant tank from the first inlet and the refrigerant tank from the second inlet based on the temperature information of the liquid refrigerant from the temperature sensor. By adjusting the ratio of the liquid refrigerant flowing into the unit to the flow rate per unit time, the temperature of the liquid crystal panel material immersed in the liquid refrigerant in the refrigerant tank becomes the blue phase appearance temperature. The apparatus of claim 6, wherein the temperature of the liquid refrigerant inside is controlled.   The liquid crystal panel material is conveyed from the outside of the refrigerant tank into the refrigerant tank, passes through a region irradiated with light including ultraviolet rays emitted from the ultraviolet light source, and irradiated with light in the refrigerant tank. A transport mechanism is provided for transporting a blue phase liquid crystal panel obtained by curing an ultraviolet curable resin in a state where a blue phase appears in the liquid crystal layer of the material from the inside of the refrigerant tank to the outside of the refrigerant tank. 8. The blue phase liquid crystal panel manufacturing apparatus according to claim 1, wherein the blue phase liquid crystal panel manufacturing apparatus is a liquid crystal panel manufacturing apparatus.   9. The blue phase liquid crystal panel manufacturing apparatus according to claim 1, wherein the ultraviolet light source has a configuration in which a plurality of excimer lamps are arranged in parallel. The excimer lamp constituting the ultraviolet light source is made of a dielectric material, and one discharge electrode is disposed on the outer surface of the discharge container filled with a discharge medium, and the other discharge electrode is disposed inside the discharge container. These discharge electrodes are electrically connected to the power supply means,
10. The blue phase liquid crystal panel manufacturing apparatus according to claim 9, wherein the discharge electrode disposed on the outer surface of the discharge vessel has a ground potential or is grounded.   The excimer lamp is characterized in that a phosphor layer containing a phosphor that is excited by excimer light generated inside the discharge vessel and emits ultraviolet light is provided on the inner surface of the discharge vessel. The blue phase type liquid crystal panel manufacturing apparatus according to claim 10. The excimer lamp that constitutes the ultraviolet light source is made of a dielectric material filled with a discharge medium. The outer tube and the inner tube that are substantially cylindrical in shape and sealed at one end and opened at the other end are substantially coaxial. It has a discharge vessel in which the end on the opening side of the outer tube and the end on the opening side of the inner tube are sealed,
One discharge electrode is disposed on the outer surface of the discharge vessel on the outer tube side, and the other discharge electrode is disposed on the outer surface of the discharge vessel on the inner tube side. Connected,
The discharge electrode disposed on the outer surface of the discharge vessel on the outer tube side is at a ground potential or grounded, and only the discharge electrode disposed on the outer surface of the discharge vessel on the outer tube side The liquid crystal panel manufacturing apparatus of a blue phase system according to claim 9, wherein the liquid tank is in contact with a liquid refrigerant in the refrigerant tank.   In the excimer lamp, a phosphor layer containing a phosphor that is excited by excimer light generated inside the discharge vessel and emits ultraviolet light is provided on the inner surface of the discharge vessel on the outer tube side. The blue phase type liquid crystal panel manufacturing apparatus according to claim 12. The excimer lamp that constitutes the ultraviolet light source is made of a dielectric material filled with a discharge medium, and an outer tube and an inner tube that are substantially cylindrical in outer shape are arranged substantially coaxially, and the outer tube and It has a hollow cylindrical discharge vessel formed by sealing both ends of the inner tube,
One discharge electrode is disposed on the outer surface of the discharge vessel on the outer tube side, and the other discharge electrode is disposed on the outer surface of the discharge vessel on the inner tube side, and these discharge electrodes are electrically connected to the power supply means. Connected to
The discharge electrode disposed on the outer surface of the discharge vessel on the outer tube side is at a ground potential or grounded, and only the discharge electrode disposed on the outer surface of the discharge vessel on the outer tube side The liquid crystal panel manufacturing apparatus of a blue phase system according to claim 9, wherein the liquid tank is in contact with a liquid refrigerant in the refrigerant tank.   In the excimer lamp, a phosphor layer containing a phosphor that is excited by excimer light generated inside the discharge vessel and emits ultraviolet light is provided on the inner surface of the discharge vessel on the outer tube side. The blue phase type liquid crystal panel manufacturing apparatus according to claim 14.   In the ultraviolet light source, a rare gas is sealed inside a discharge vessel that is an arc tube, and a pair of external electrodes are disposed along the tube axis direction of the discharge vessel at a distance from each other on the outer surface of the discharge vessel. 9. A structure according to claim 1, wherein a plurality of rare gas fluorescent lamps each having a pair of external electrodes connected to power supply terminals are arranged in parallel. A blue phase liquid crystal panel manufacturing apparatus according to claim 1.   The rare gas fluorescent lamp includes a light-transmitting cylindrical outer tube that covers the discharge vessel as a whole, and an insulating lid member that closes both end openings of the outer tube. The power supply terminal connected to the external electrode provided on the outer surface passes through the lid member and protrudes to the outside of the outer tube, and the protruding portion of the power supply terminal is electrically connected to the power supply means. The apparatus for manufacturing a liquid crystal panel of a blue phase system according to claim 16.   The blue phase type liquid crystal panel manufacturing apparatus according to claim 17, wherein the protruding portion of the power supply terminal is exposed to the outside of the refrigerant tank. The rare gas fluorescent lamp further comprises cooling gas introduction means,
A lid member that closes the opening at both ends of the outer pipe is positioned outside the refrigerant tank, and one of the lid members is a cooling gas that introduces the cooling gas supplied from the reject gas introduction means into the outer pipe. The introduction portion is provided, and the other lid member is provided with a cooling gas discharge portion for discharging the cooling gas introduced into the outer pipe. A liquid crystal panel manufacturing apparatus of the blue phase method described in 1. The liquid crystal panel manufacturing apparatus according to any one of claims 1 to 19, wherein the liquid crystal composition includes a liquid crystal, a chiral agent, and an ultraviolet curable resin, and exhibits a blue phase at a specific temperature. A blue phase liquid crystal panel manufacturing method for obtaining a blue phase liquid crystal panel from a blue phase liquid crystal panel material having a liquid crystal layer comprising:
Set the temperature of the liquid refrigerant in the refrigerant tank so that the temperature of the liquid crystal layer of the liquid crystal panel material immersed in the liquid refrigerant in the refrigerant tank becomes the blue phase appearance temperature at which the blue phase appears in the liquid crystal layer,
A step of irradiating the liquid crystal panel material in a state where a blue phase appears in the liquid crystal layer with light including ultraviolet rays having a wavelength for curing the ultraviolet curable resin constituting the liquid crystal layer of the liquid crystal panel material by an ultraviolet light source. A manufacturing method of a liquid crystal panel of a blue phase system characterized by the above. A liquid crystal panel manufacturing apparatus according to any one of claims 6 to 19, comprising a liquid crystal composition containing a liquid crystal, a chiral agent and an ultraviolet curable resin and exhibiting a blue phase at a specific temperature. A method for producing a blue phase liquid crystal panel for obtaining a blue phase liquid crystal panel from a blue phase liquid crystal panel material having a liquid crystal layer,
The liquid refrigerant is immersed in the liquid refrigerant in the refrigerant tank by adjusting the ratio between the flow rate per unit time of the liquid refrigerant at the first temperature flowing into the refrigerant tank and the flow rate per unit time of the liquid refrigerant at the second temperature. The temperature of the liquid refrigerant in the refrigerant tank is set so that the temperature of the liquid crystal layer of the liquid crystal panel material in the state becomes the blue phase appearance temperature at which the blue phase appears in the liquid crystal layer,
A step of irradiating the liquid crystal panel material in a state where a blue phase appears in the liquid crystal layer with light including ultraviolet rays having a wavelength for curing the ultraviolet curable resin constituting the liquid crystal layer of the liquid crystal panel material by an ultraviolet light source. A manufacturing method of a liquid crystal panel of a blue phase system characterized by the above.   The temperature of the liquid refrigerant in the refrigerant tank is measured, and the flow rate per unit time of the liquid refrigerant at the first temperature and the unit of the liquid refrigerant at the second temperature based on the obtained temperature value of the liquid refrigerant. The method for manufacturing a liquid crystal panel of a blue phase method according to claim 21, wherein a ratio to a flow rate per hour is adjusted.