JP2013088757A - 反射防止構造体 - Google Patents
反射防止構造体 Download PDFInfo
- Publication number
- JP2013088757A JP2013088757A JP2011231645A JP2011231645A JP2013088757A JP 2013088757 A JP2013088757 A JP 2013088757A JP 2011231645 A JP2011231645 A JP 2011231645A JP 2011231645 A JP2011231645 A JP 2011231645A JP 2013088757 A JP2013088757 A JP 2013088757A
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- light incident
- columnar
- wavelength
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- antireflection
- Prior art date
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- 239000010409 thin film Substances 0.000 abstract description 33
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- 238000004519 manufacturing process Methods 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 238000006243 chemical reaction Methods 0.000 description 12
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- 239000002131 composite material Substances 0.000 description 10
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- 229910000927 Ge alloy Inorganic materials 0.000 description 3
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- 238000004364 calculation method Methods 0.000 description 3
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- 238000010248 power generation Methods 0.000 description 3
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- 238000005229 chemical vapour deposition Methods 0.000 description 2
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- 238000010438 heat treatment Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
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- 150000002739 metals Chemical class 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
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- 238000002834 transmittance Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
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- 238000005530 etching Methods 0.000 description 1
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011231645A JP2013088757A (ja) | 2011-10-21 | 2011-10-21 | 反射防止構造体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011231645A JP2013088757A (ja) | 2011-10-21 | 2011-10-21 | 反射防止構造体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013088757A true JP2013088757A (ja) | 2013-05-13 |
| JP2013088757A5 JP2013088757A5 (https=) | 2014-10-30 |
Family
ID=48532689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011231645A Withdrawn JP2013088757A (ja) | 2011-10-21 | 2011-10-21 | 反射防止構造体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2013088757A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015212809A (ja) * | 2014-04-18 | 2015-11-26 | 王子ホールディングス株式会社 | 光学素子 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS574001A (en) * | 1980-06-10 | 1982-01-09 | Sony Corp | Nonreflective optical element |
| JPH11167003A (ja) * | 1997-12-02 | 1999-06-22 | Nikon Corp | ２波長反射防止膜 |
| JP2010131985A (ja) * | 2008-11-07 | 2010-06-17 | Canon Inc | 光学素子成形用金型及び光学素子の成形方法 |
-
2011
- 2011-10-21 JP JP2011231645A patent/JP2013088757A/ja not_active Withdrawn
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS574001A (en) * | 1980-06-10 | 1982-01-09 | Sony Corp | Nonreflective optical element |
| JPH11167003A (ja) * | 1997-12-02 | 1999-06-22 | Nikon Corp | ２波長反射防止膜 |
| JP2010131985A (ja) * | 2008-11-07 | 2010-06-17 | Canon Inc | 光学素子成形用金型及び光学素子の成形方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015212809A (ja) * | 2014-04-18 | 2015-11-26 | 王子ホールディングス株式会社 | 光学素子 |
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