JP2013084763A5 - - Google Patents

Download PDF

Info

Publication number
JP2013084763A5
JP2013084763A5 JP2011223613A JP2011223613A JP2013084763A5 JP 2013084763 A5 JP2013084763 A5 JP 2013084763A5 JP 2011223613 A JP2011223613 A JP 2011223613A JP 2011223613 A JP2011223613 A JP 2011223613A JP 2013084763 A5 JP2013084763 A5 JP 2013084763A5
Authority
JP
Japan
Prior art keywords
light
sensor substrate
protective insulating
insulating film
photoelectric conversion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011223613A
Other languages
English (en)
Japanese (ja)
Other versions
JP5948783B2 (ja
JP2013084763A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2011223613A external-priority patent/JP5948783B2/ja
Priority to JP2011223613A priority Critical patent/JP5948783B2/ja
Priority to TW101133370A priority patent/TWI577001B/zh
Priority to CN201280045395.6A priority patent/CN103797579B/zh
Priority to PCT/JP2012/074945 priority patent/WO2013051462A1/ja
Priority to CN201610686559.3A priority patent/CN106169493B/zh
Priority to KR1020147006318A priority patent/KR102051155B1/ko
Priority to US14/346,607 priority patent/US9184205B2/en
Priority to EP19177082.5A priority patent/EP3561873B1/en
Priority to EP12838953.3A priority patent/EP2747139B1/en
Priority to DE202012013576.7U priority patent/DE202012013576U1/de
Publication of JP2013084763A publication Critical patent/JP2013084763A/ja
Publication of JP2013084763A5 publication Critical patent/JP2013084763A5/ja
Priority to US14/871,345 priority patent/US9374511B2/en
Priority to US15/087,729 priority patent/US9576998B2/en
Publication of JP5948783B2 publication Critical patent/JP5948783B2/ja
Application granted granted Critical
Priority to US15/411,470 priority patent/US10312281B2/en
Priority to US16/413,045 priority patent/US11329091B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011223613A 2011-10-04 2011-10-11 固体撮像装置、および電子機器 Active JP5948783B2 (ja)

Priority Applications (14)

Application Number Priority Date Filing Date Title
JP2011223613A JP5948783B2 (ja) 2011-10-11 2011-10-11 固体撮像装置、および電子機器
TW101133370A TWI577001B (zh) 2011-10-04 2012-09-12 固體攝像裝置、固體攝像裝置之製造方法及電子機器
EP19177082.5A EP3561873B1 (en) 2011-10-04 2012-09-27 Solid-state image pickup unit, method of manufacturing solid-state image pickup unit, and electronic apparatus
DE202012013576.7U DE202012013576U1 (de) 2011-10-04 2012-09-27 Festkörper-Bildaufnahmeeinheit und elektronische Vorrichtung
PCT/JP2012/074945 WO2013051462A1 (ja) 2011-10-04 2012-09-27 固体撮像装置、固体撮像装置の製造方法、および電子機器
CN201610686559.3A CN106169493B (zh) 2011-10-04 2012-09-27 固态图像拾取单元和电子设备
KR1020147006318A KR102051155B1 (ko) 2011-10-04 2012-09-27 고체 촬상 장치, 고체 촬상 장치의 제조 방법 및 전자 기기
US14/346,607 US9184205B2 (en) 2011-10-04 2012-09-27 Solid-state image pickup unit, method of manufacturing solid-state image pickup unit, and electronic apparatus
CN201280045395.6A CN103797579B (zh) 2011-10-04 2012-09-27 固态图像拾取单元、制造固态图像拾取单元的方法和电子设备
EP12838953.3A EP2747139B1 (en) 2011-10-04 2012-09-27 Semiconductor image pickup device, method for making semiconductor image pickup device, and electronic device
US14/871,345 US9374511B2 (en) 2011-10-04 2015-09-30 Solid-state image pickup unit, method of manufacturing solid-state image pickup unit, and electronic apparatus
US15/087,729 US9576998B2 (en) 2011-10-04 2016-03-31 Solid-state image pickup unit, method of manufacturing solid-state image pickup unit, and electronic apparatus
US15/411,470 US10312281B2 (en) 2011-10-04 2017-01-20 Solid-state image pickup unit, method of manufacturing solid-state image pickup unit, and electronic apparatus
US16/413,045 US11329091B2 (en) 2011-10-04 2019-05-15 Solid-state image pickup unit, method of manufacturing solid-state image pickup unit, and electronic apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011223613A JP5948783B2 (ja) 2011-10-11 2011-10-11 固体撮像装置、および電子機器

Publications (3)

Publication Number Publication Date
JP2013084763A JP2013084763A (ja) 2013-05-09
JP2013084763A5 true JP2013084763A5 (enrdf_load_stackoverflow) 2014-11-20
JP5948783B2 JP5948783B2 (ja) 2016-07-06

Family

ID=48529661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011223613A Active JP5948783B2 (ja) 2011-10-04 2011-10-11 固体撮像装置、および電子機器

Country Status (1)

Country Link
JP (1) JP5948783B2 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015076569A (ja) * 2013-10-11 2015-04-20 ソニー株式会社 撮像装置およびその製造方法ならびに電子機器
US10121812B2 (en) 2015-12-29 2018-11-06 Taiwan Semiconductor Manufacturing Co., Ltd. Stacked substrate structure with inter-tier interconnection
JP2018006443A (ja) * 2016-06-29 2018-01-11 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
JP7038494B2 (ja) * 2017-06-15 2022-03-18 ルネサスエレクトロニクス株式会社 固体撮像素子
WO2021199680A1 (ja) * 2020-03-31 2021-10-07 ソニーセミコンダクタソリューションズ株式会社 受光素子および電子機器
JP7494728B2 (ja) * 2020-12-23 2024-06-04 Ｔｏｐｐａｎホールディングス株式会社 固体撮像素子および製造方法
JP2022187526A (ja) * 2021-06-08 2022-12-20 ソニーセミコンダクタソリューションズ株式会社 撮像素子パッケージおよび電子機器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1168074A (ja) * 1997-08-13 1999-03-09 Sony Corp 固体撮像素子
JP2003209235A (ja) * 2002-01-16 2003-07-25 Sony Corp 固体撮像素子及びその製造方法
JP2007201266A (ja) * 2006-01-27 2007-08-09 Fujifilm Corp マイクロレンズ、その製造方法、これを用いた固体撮像素子およびその製造方法
JP2009071182A (ja) * 2007-09-14 2009-04-02 Sony Corp 固体撮像装置及びその製造方法、並びにカメラ
JP4900876B2 (ja) * 2007-09-14 2012-03-21 カシオ計算機株式会社 表示装置の製造方法
KR101648200B1 (ko) * 2009-10-22 2016-08-12 삼성전자주식회사 이미지 센서 및 그 제조 방법
JP5442394B2 (ja) * 2009-10-29 2014-03-12 ソニー株式会社 固体撮像装置とその製造方法、及び電子機器

Similar Documents

Publication Publication Date Title
JP2013080838A5 (enrdf_load_stackoverflow)
JP2013084763A5 (enrdf_load_stackoverflow)
JP2021108399A5 (ja) 撮像装置および電子機器
JP2012084693A5 (enrdf_load_stackoverflow)
JP2013033786A5 (ja) 半導体装置、半導体装置の製造方法、および電子機器
JP2009176777A5 (enrdf_load_stackoverflow)
JP2009158863A5 (enrdf_load_stackoverflow)
US9343597B2 (en) Image pickup apparatus and camera module
JP2012209542A5 (enrdf_load_stackoverflow)
KR102356695B1 (ko) 광 유도 부재를 가지는 이미지 센서
JP2014229810A5 (enrdf_load_stackoverflow)
JP2015115420A5 (enrdf_load_stackoverflow)
JP2014060203A5 (ja) 固体撮像装置及び電子機器
JP2010067827A5 (enrdf_load_stackoverflow)
TW201130120A (en) Solid-state imaging device, method of manufacturing the same, and electronic apparatus
TW201523912A (zh) 小型光電模組
JP2013175494A5 (enrdf_load_stackoverflow)
JP2011216865A5 (enrdf_load_stackoverflow)
EP2228826A3 (en) Solid-state image pickup device and a method of manufacturing the same
JP2013089880A5 (enrdf_load_stackoverflow)
TWI573258B (zh) 光學感測器封裝及光學感測器總成
JP2012191005A5 (enrdf_load_stackoverflow)
JP2013124976A5 (enrdf_load_stackoverflow)
JP2008118142A5 (enrdf_load_stackoverflow)
JP2009252983A5 (enrdf_load_stackoverflow)