JP2013084606A5 - - Google Patents

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Publication number
JP2013084606A5
JP2013084606A5 JP2012253728A JP2012253728A JP2013084606A5 JP 2013084606 A5 JP2013084606 A5 JP 2013084606A5 JP 2012253728 A JP2012253728 A JP 2012253728A JP 2012253728 A JP2012253728 A JP 2012253728A JP 2013084606 A5 JP2013084606 A5 JP 2013084606A5
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Japan
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frequency
signal
measurement system
sensor
signals
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JP2012253728A
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Japanese (ja)
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JP2013084606A (ja
JP5635059B2 (ja
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Priority claimed from US11/763,298 external-priority patent/US8055203B2/en
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Expired - Fee Related legal-status Critical Current
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JP2012253728A 2007-03-14 2012-11-19 高周波電力を監視する計測システム及び方法 Expired - Fee Related JP5635059B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US89473807P 2007-03-14 2007-03-14
US60/894,738 2007-03-14
US11/763,298 2007-06-14
US11/763,298 US8055203B2 (en) 2007-03-14 2007-06-14 Multipoint voltage and current probe system

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2007317737A Division JP5378678B2 (ja) 2007-03-14 2007-12-07 多点電圧電流プローブを用いた計測システム及び監視方法

Publications (3)

Publication Number Publication Date
JP2013084606A JP2013084606A (ja) 2013-05-09
JP2013084606A5 true JP2013084606A5 (https=) 2013-11-07
JP5635059B2 JP5635059B2 (ja) 2014-12-03

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JP2007317737A Expired - Fee Related JP5378678B2 (ja) 2007-03-14 2007-12-07 多点電圧電流プローブを用いた計測システム及び監視方法
JP2012253728A Expired - Fee Related JP5635059B2 (ja) 2007-03-14 2012-11-19 高周波電力を監視する計測システム及び方法

Family Applications Before (1)

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JP2007317737A Expired - Fee Related JP5378678B2 (ja) 2007-03-14 2007-12-07 多点電圧電流プローブを用いた計測システム及び監視方法

Country Status (5)

Country Link
US (2) US8055203B2 (https=)
EP (2) EP1995759B8 (https=)
JP (2) JP5378678B2 (https=)
CN (1) CN101267707B (https=)
TW (1) TWI467941B (https=)

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