JP2013056405A - Polishing apparatus, method for manufacturing glass substrate for magnetic recording medium, and method for manufacturing magnetic recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a polishing apparatus that can stably polish an object to be polished.SOLUTION: The polishing apparatus includes: a hanging mechanism 80; an upper platen 40 hung on the hanging mechanism 80; a lower platen 30 facing the upper platen 40; and an elevating mechanism 50 including a piston rod 54 and a cylinder 52 for lifting and lowering the upper platen 40 and the hanging mechanism 80 via a shaft joint 55. The polishing apparatus polishes an object to be polished that is placed between the upper platen 40 and the lower platen 30. The polishing apparatus further includes: a flange 120 operable in conjunction with the piston rod 54; and a vibration damping mechanism 100 interposed between the hanging mechanism 80 and the flange 120.

Description

  The present invention relates to a polishing apparatus that polishes an object to be polished disposed between an upper surface plate and a lower surface plate. The present invention also relates to a method for manufacturing a glass substrate for a magnetic recording medium and a method for manufacturing a magnetic recording medium, which include a step of using a polishing apparatus.

  Flat polishing that includes an upper surface plate suspended from a surface plate suspension that can be raised and lowered by a cylinder, and a lower surface plate that faces the upper surface plate, and polishes the object to be polished held by the carrier with the upper surface plate and the lower surface plate. An apparatus is known (see, for example, Patent Document 1). In this flat surface polishing apparatus, the upper surface plate is suspended from the surface plate suspension via a vibration isolator in order to absorb the vibration of the upper surface plate during polishing.

  On the other hand, there is known a flat polishing apparatus in which an upper surface plate lifting tool attached to an upper surface plate is connected to a piston rod of a pneumatic cylinder through a universal joint (see, for example, Patent Document 2). This universal joint is for making the upper surface plate parallel to the lower surface plate.

JP-A-6-262514 JP 2002-355552 A

  However, as shown in FIG. 1A, even if the cylinder 152 is positioned so that the axis of the rod 154 of the cylinder 152 coincides with the vertical direction, a structural problem of the shaft joint 155 (for example, the spherical surface inside the shaft joint 155). In actuality, the upper surface plate 140 may not be parallel to the lower surface plate 130 due to uneven wear and play of the slide bearing.

  In this case, for example, as shown in FIG. 1B, when the parallelism between the upper surface plate 140 and the lower surface plate 130 and the concentricity between the upper surface plate 140 and the lower surface plate 130 are adjusted to desired values, the rod 154 and the cylinder There is a problem that the axis of 152 is inclined with respect to the vertical direction.

  As shown in FIG. 1B, when the object to be polished is polished while the axes of the rod 154 and the cylinder 152 are inclined with respect to the vertical direction, the vibrations of the upper surface plate 140 and the lower surface plate 130 during the polishing process are shown in FIG. 1A. Since it becomes larger than the case, it was not easy to stably polish the object to be polished.

  Then, this invention aims at provision of the grinding | polishing apparatus which can grind | polish a to-be-polished body stably. Another object of the present invention is to provide a method for producing a glass substrate for a magnetic recording medium and a method for producing a magnetic recording medium, which include a step of using the polishing apparatus.

In order to achieve the above object, a polishing apparatus according to the present invention comprises:
A suspension mechanism;
An upper surface plate suspended by the suspension mechanism;
A lower surface plate facing the upper surface plate,
An elevating mechanism having a rod for elevating and lowering the upper surface plate and the suspension mechanism through a shaft joint;
A polishing apparatus for polishing an object to be polished disposed between the upper surface plate and the lower surface plate,
A flange portion interlocked with the rod;
And a vibration control mechanism interposed between the suspension mechanism and the flange portion.

In order to achieve the above object, a method for producing a glass substrate for a magnetic recording medium according to the present invention comprises:
A main surface polishing step for polishing the main surface of the glass substrate;
In the manufacturing method of the glass substrate for magnetic recording media provided with the washing process of the glass substrate,
The main plane polishing step is characterized by polishing the main plane of the glass substrate using the polishing apparatus according to the present invention.

In order to achieve the above object, a method of manufacturing a magnetic recording medium according to the present invention includes:
A main surface polishing step of polishing the main surface of the glass substrate using the polishing apparatus according to the present invention;
And a film forming process for forming a thin film on the glass substrate after the main surface polishing process.

  According to the present invention, the object to be polished can be stably polished.

It is the figure which showed the state in which the upper surface plate 140 inclined when the cylinder 152 was attached vertically. It is the figure which showed the state where the cylinder 152 inclined when the upper surface plate 140 was adjusted in parallel with respect to the lower surface plate 130. FIG. It is a typical longitudinal section of double-side polish device 11 which is one embodiment of the present invention. It is a longitudinal cross-sectional view which shows the state which raised the upper surface plate 40 typically. It is a longitudinal cross-sectional view which shows the state which lowered | hung the upper surface plate 40 typically. 5 is a perspective view showing a specific example of a flange portion 120 and a vibration damping mechanism 100. FIG. 2 is a front view of a suspension 100A that is a specific example of a vibration control mechanism 100. FIG. It is a side view of suspension 100A.

  Hereinafter, although the form for implementing this invention is demonstrated, this invention is not restricted to embodiment described below.

  FIG. 2 is a schematic longitudinal sectional view of a double-side polishing apparatus 11 that is an embodiment of the present invention. The double-side polishing apparatus 11 simultaneously polishes the upper and lower surfaces of a plurality of plate-like objects to be polished disposed between the upper surface plate 40 and the lower surface plate 30. As a specific example of the plate-like object to be polished, a glass substrate can be given. The double-side polishing apparatus 11 includes a suspension mechanism 80, an upper surface plate 40, a lower surface plate 30, and an elevating mechanism 50.

  The suspension mechanism 80 includes a plurality of support columns 80a, an inner plate 80b, and an upper wheel 80c. The support 80 a is a support that extends in the vertical direction of the double-side polishing apparatus 11. It is preferable that a plurality of (for example, eight) support columns 80a are provided at equal intervals around the rotation center of the upper surface plate 40 so that the suspension mechanism 80 can suspend the upper surface plate 40 stably. The inner plate 80b is an annular mounting member fixed to the lower end portion of each column 80a. The upper wheel 80c is a disc-shaped suspension plate member fixed to the upper end portion of each column 80a.

  The upper surface plate 40 is fixed to and suspended from the suspension mechanism 80. The upper surface of the upper surface plate 40 is fixed to the lower surface of the inner plate 80b. In addition, it is preferable that the upper surface of the upper surface plate 40 is fixed to the lower surface of the inner plate 80b via a damper because vibration of the rotating upper surface plate 40 can be effectively suppressed. An upper polishing pad for polishing the upper surfaces of a plurality of plate-like objects to be polished disposed on the lower surface plate 30 is attached to the lower surface of the upper surface plate 40.

  The lower surface plate 30 is disposed below the upper surface plate 40 so as to face the upper surface plate 40. Moreover, the upper surface of the lower surface plate 30 is arrange | positioned so that it may become parallel with respect to a horizontal surface. On the upper surface of the lower surface plate 30, a carrier for holding a plurality of plate-like objects to be polished and a lower polishing pad for polishing the lower surfaces of the plurality of plate-like objects to be polished are attached. The lower surface plate 30 is rotatably supported on the upper part of the base 20 so as to have the same rotation center line as the rotation line center line of the upper surface plate 40. The lower surface plate 30 may be a surface plate that is fixed and supported on the upper portion of the base 20 so as not to rotate.

  A drive unit having a plurality of drive motors for rotating the upper surface plate 40 and the like is disposed inside the base 20. For example, a drive motor that rotates the upper surface plate 40 together with the suspension mechanism 80, a drive motor that rotates the lower surface plate 30, a drive motor that rotates a sun gear having external teeth that mesh with the outer periphery of the carrier, and an internal tooth that meshes with the outer periphery of the carrier. Examples include a drive motor that rotates an internal gear. This drive unit is controlled according to a control signal from the control unit 90.

  The double-side polishing apparatus 11 includes a rotation transmission mechanism 60 that transmits a driving force of a driving motor that rotates the upper surface plate 40 to the upper surface plate 40. The rotation transmission mechanism 60 includes a cylindrical coupling portion 62 provided at the upper end of a drive shaft 61 that is rotated by a drive motor that rotates the upper surface plate 40, and an upper side of the coupling portion 62 that passes through the center hole of the upper surface plate 40. And a key (claw) 81 that can be fitted in a key groove (concave portion) 62a formed on the side surface. The key 81 projecting to the inner peripheral side of the upper surface plate 40 is swingably attached to the inner plate 80b by the support shaft 82 with the support shaft 82 as the center of swing.

  The elevating mechanism 50 includes a piston rod 54 that elevates and lowers the upper surface plate 40 and the suspension mechanism 80 via a shaft joint 55, and a cylinder 52 that supports the piston rod 54. The lifting mechanism 50 lifts and lowers the upper surface plate 40 together with the suspension mechanism 80 by the piston rod 54 and the cylinder 52 when changing the carrier. The cylinder 52 is arranged so that the axis of the piston rod 54 coincides with the vertical direction (in other words, the axis of the piston rod 54 coincides with the rotation center line of the lower surface plate 30 and the upper surface plate 40). It is fixed to a beam 72 of a gate-shaped frame 70 that stands upward. The cylinder 52 is fastened to a central portion of the beam 72 with a fixing member 53 such as a bolt. Further, if the cylinder 52 is attached to the beam 72 with a fixing member 53 such as a bolt with a shim sandwiched between the cylinder 52 and the beam 72, it is easy to adjust the degree of attachment of the cylinder 52 to the beam 72. Therefore, it becomes easy to make the axis of the piston rod 54 coincide with the vertical direction.

  The shaft joint 55 is a member that joins the piston rod 54 of the elevating mechanism 50 and the upper wheel 80c of the suspension mechanism 80. The shaft joint 55 is connected to the lower end portion of the piston rod 54 and the center of the upper wheel 80c. And an output unit 57 connected to the unit. The input unit 56 may be connected to the center of a flange unit 120 described later. As the shaft joint 55, a universal shaft joint (universal joint), a fluid shaft joint, a flexible shaft joint, and a fixed shaft joint can be used, and a universal shaft joint and a flexible shaft joint are more preferably used. By using the shaft joint 55, the parallelism between the upper surface plate 40 and the lower surface plate 30 can be increased.

  Therefore, the upper surface plate 40 connected to the piston rod 54 via the shaft joint 55 and the suspension mechanism 80 moves up or down in conjunction with the upward or downward stroke movement of the piston rod 54.

  FIG. 3A is a longitudinal sectional view schematically showing a state where the upper surface plate 40 is raised. The upper surface plate 40 is raised above the lower surface plate 30 (Za direction) by the elevating mechanism 50 after the key 81 is separated from the key groove 62a during carrier replacement or pad replacement. In this raised state, the plurality of objects to be polished and the carrier 160 that have been mounted on the upper surface of the lower platen 30 are removed, and the carrier 160 and the unpolished object to be used in the next polishing process are settled. It can be mounted on the upper surface of the board 30.

  FIG. 3B is a longitudinal sectional view schematically showing a state where the upper surface plate 40 is lowered. By reducing the supply pressure P1 of the compressed air to the lower chamber of the cylinder 52 (at this time, the upper chamber of the cylinder 52 is open to the atmosphere and P2 is atmospheric pressure), the piston rod 54 When driven downward (Zb direction), the upper surface plate 40 is lowered together with the suspension mechanism 80. When the upper surface plate 40 is lowered, the lower surface of the upper surface plate 40 comes into contact with the upper surfaces of the plurality of objects to be polished placed on the lower surface plate 30 by the weight of the upper surface plate 40 or under a predetermined pressure. . In the state where the key 81 and the key groove 62a are fitted, the driving torque of the drive motor that rotates the upper surface plate 40 is transmitted to the coupling portion 62 via the drive shaft 61, so that the upper surface plate 40 is coupled to the coupling portion 62. Rotate with.

  Further, as shown in FIG. 2, the double-side polishing apparatus 11 includes a flange portion 120 and a vibration damping mechanism 100.

  The flange portion 120 is a member that is attached to the piston rod 54 so as to protrude in a direction perpendicular to the axis of the piston rod 54 and interlocks with the stroke movement of the piston rod 54. The flange portion 120 is connected and fixed to the lower portion of the piston rod 54. The flange portion 120 is preferably connected to the piston rod 54 above the position where the input portion 56 of the shaft joint 55 is connected to the piston rod 54.

  The vibration damping mechanism 100 is a damper that is interposed between the upper wheel 80 c of the suspension mechanism 80 and the flange portion 120. The upper end portion of the vibration damping mechanism 100 is fixed to the flange portion 120 so that, for example, the lower end portion of the vibration damping mechanism 100 comes into contact with the upper surface of the upper wheel 80c and can slide on the upper surface.

  The vibration damping mechanism 100 includes a pressing mechanism using an elastic body such as a coil spring 104 described later. The pressing mechanism includes a shaft (for example, a shaft 111 described later) that is interlocked with the movement of at least one of the suspension mechanism 80 and the flange portion 120. The stroke of the shaft is adjusted in advance so that the upper surface plate 40 and the lower surface plate 30 are parallel to each other at the stroke end of the shaft.

  When the upper surface plate 40 tilts and the parallelism between the upper surface plate 40 and the lower surface plate 30 deteriorates, the vibration control mechanism 100 pushes back the tilted upper surface plate 40 to the stroke end of the shaft. The board 30 is corrected in parallel.

  By providing such a flange portion 120 and the vibration control mechanism 100, the upper surface plate 40 and the suspension mechanism 80 can be corrected so as not to be inclined with respect to the lower surface plate 30, so that the parallelism between the upper surface plate 40 and the lower surface plate 30 is achieved. The axial lines of the piston rod 54 and the cylinder 52 caused by problems in the structure of the shaft joint 55 (for example, uneven wear and play of the spherical plain bearing inside the shaft joint 55) are perpendicular to the vertical direction. The problem of tilting does not occur. The cylinder 52 can be positioned so that the axis of the piston rod 54 coincides with the vertical direction while improving the parallelism between the upper surface plate 40 and the lower surface plate 30. Vibration can be reliably suppressed. Therefore, since the plate-like object can be stably polished, the quality of the plate-like object after polishing is improved. For example, if the plate-like object to be polished is a glass substrate, it is possible to reduce variations in the plate thickness within the same batch, or to reduce the surface waviness Wa on the main plane and its variations.

  Further, in order to improve the parallelism between the upper surface plate 40 and the lower surface plate 30 and the vibration damping effect, a tensile force in the direction of widening the gap between the upper surface of the upper wheel 80c of the suspension mechanism 80 and the lower surface of the flange portion 120 is applied. It is preferable that the vibration damping mechanism 100 is interposed between the upper wheel 80c and the flange portion 120 in a state where the vibration damping mechanism 100 is applied in advance.

  FIG. 4 is a perspective view showing a specific example of the flange portion 120 and the vibration damping mechanism 100. The flange portion 120 has an upper plate 121 and an arm 107. The vibration damping mechanism 100 is interposed between the upper plate 121 and the upper wheel 80 c of the suspension mechanism 80 via the arm 107.

  The upper plate 121 is a circular plate having an opening at the center to which the lower part of the piston rod 54 is connected. The lower part of the piston rod 54 is fastened to the center of the upper plate 121 with a bolt so that the upper plate 121 moves up and down in conjunction with the piston rod 54. The arm 107 is a member for attaching the vibration control mechanism 100 to the upper plate 121. The arm 107 may be shared with a slurry arm for attaching a slurry supply pipe. A plurality of damping mechanisms 100 fixed to the upper plate 121 by the arm 107 are preferable from the viewpoint of improving the parallelism and damping effect between the upper surface plate 40 and the lower surface plate 30, and at least three or more. Preferably there is. FIG. 4 shows a case where there are six arms 107 and six damping mechanisms 100, respectively. The arm 107 and the vibration damping mechanism 100 are arranged at equal intervals in the circumferential direction of the upper plate 121.

  FIG. 5A is a front view of a suspension 100 </ b> A that is a specific example of the vibration damping mechanism 100. FIG. 5B is a side view of the suspension 100A. The arm 107 is configured as a component of the suspension 100A.

  The suspension 100 </ b> A has a coil spring 104 as an elastic body for elastically connecting the suspension mechanism 80 and the flange portion 120. The suspension 100 </ b> A includes a shaft 111 that interlocks with at least one movement of the suspension mechanism 80 and the flange portion 120, and a linear motion bearing 125 that supports the shaft 111. By the linear motion bearing 125, the vertical movement of the shaft 111 caused by the vibration of the upper surface plate 40 and the suspension mechanism 80 can be smoothed. Specific examples of the linear bearing 125 include a spline bearing (particularly, a ball spline bearing), a linear bearing (linear motion), and the like. The linear bearing 125 is fixed to the arm 107 by a nut 106, a stud 108, a shim ring 109 and a nut 110. The upper end of the coil spring 104 abuts on the upper support portion 105 interlocked with the arm 107 and the linear motion bearing 125, and the lower end of the coil spring 104 is a lower side connected to a contact portion with the upper surface of the upper wheel 80 c of the suspension mechanism 80. It abuts on the support part 103.

  Further, the vibration damping mechanism 100 includes a roller 101 and a caster main body 102 as a contact portion with the upper surface of the upper wheel 80 c of the suspension mechanism 80. The roller 101 is a rotating body having an axle 112 attached to the caster main body 102 as a rotation axis. Such a rotating body rolls on the upper surface of the upper wheel 80c, so that the suspension mechanism 80 can rotate smoothly with the upper surface plate 40 even when the lower end portion of the vibration damping mechanism 100 is in contact with the upper surface of the upper wheel 80c. As a result, the parallelism between the upper surface plate 40 and the lower surface plate 30 and the vibration damping effect can be enhanced. Further, since the caster main body 102 can rotate 360 ° in a plane parallel to the upper surface of the upper wheel 80 c, the suspension mechanism 80 can rotate more smoothly together with the upper surface plate 40. As a result, the parallelism between the upper surface plate 40 and the lower surface plate 30 and the vibration damping effect can be further enhanced.

Further, the rotating body provided at the contact portion with the upper surface of the upper wheel 80c is not limited to the tire shape like the roller 101, and may be a sphere. In addition, the material of such a rotating body is preferably a resin such as rubber rather than metal in order to suppress generation of scraps by contact with the upper wheel 80c.
[About the manufacturing method of the glass substrate for magnetic recording media]
Generally, a manufacturing process of a glass substrate for a magnetic recording medium and a magnetic disk (an example of a magnetic recording medium) includes the following processes.
(Step 1) After processing a glass substrate formed by the float method, fusion method, press molding method, downdraw method or redraw method into a disk-shaped glass substrate having a circular hole in the center, Chamfer the outer peripheral side.
(Step 2) The side surface portion and the chamfered portion of the glass substrate are end-polished.
(Step 3) Using a polishing apparatus, the upper and lower main planes of the glass substrate are simultaneously polished while supplying the polishing liquid to the main plane of the glass substrate. The polishing step may be primary polishing only, primary polishing and secondary polishing may be performed, or tertiary polishing may be performed after secondary polishing.
(Step 4) The glass substrate is precisely cleaned and dried to obtain a glass substrate for a magnetic recording medium.
(Step 5) A thin film such as a magnetic layer is formed on a glass substrate for a magnetic recording medium to manufacture a magnetic disk.

  In the manufacturing process of the glass substrate for magnetic recording medium and the magnetic disk, (step 2) wrapping of the main plane (for example, loose abrasive wrap, fixed abrasive wrap, etc.) is performed at least one of before and after the end face polishing step. Alternatively, glass substrate cleaning (inter-process cleaning) and glass substrate surface etching (inter-process etching) may be performed between the processes. Note that main surface lap (for example, loose abrasive wrap, fixed abrasive wrap, etc.) is polishing of the main surface in a broad sense.

  In addition, the above step 5 (that is, the film forming step) is not limited to the step of forming a magnetic layer on the surface of the glass substrate for magnetic recording media, but also other layers such as an underlayer, an intermediate layer, a protective layer, and a lubricating film. It may include a step of forming a thin film. The underlayer is made of, for example, a soft magnetic material that plays a role of circulating a recording magnetic field from a magnetic head. The intermediate layer is, for example, a nonmagnetic intermediate layer formed between the soft magnetic underlayer and the perpendicular recording magnetic layer. This nonmagnetic intermediate layer has, for example, a function of facilitating the epitaxial growth of the perpendicular recording magnetic layer and a function of breaking the magnetic exchange coupling with the soft magnetic underlayer and the perpendicular recording magnetic layer. The protective layer is formed on the magnetic layer, for example, to prevent corrosion and damage. The lubricating film is formed on the surface of the protective film, for example, in order to reduce friction between the magnetic head and the recording medium.

  Furthermore, when high mechanical strength is required for the glass substrate for magnetic recording media, a strengthening step (for example, a chemical strengthening step) for forming a reinforcing layer on the surface layer of the glass substrate is performed before or after the polishing step You may carry out between.

  In the present invention, the glass substrate for a magnetic recording medium may be amorphous glass, crystallized glass, or tempered glass (for example, chemically tempered glass) having a tempered layer on the surface layer of the glass substrate. In the present invention, the glass substrate may be a float method, a fusion method, a press molding method, or a downdraw method. However, it may be made by the redraw method.

  The present invention relates to a step of polishing a main surface of a glass substrate using, for example, a double-side polishing apparatus, and relates to polishing of a glass substrate for a magnetic recording medium. The present invention can be applied in the step of polishing the main plane of the glass substrate, and the main plane is lapped (for example, loose abrasive wrap, fixed abrasive wrap, etc.), primary polishing, secondary polishing, and tertiary polishing. Applicable to process.

  Specific examples of glass substrates to which the present invention can be applied include glass substrates for magnetic recording media, photomasks, displays such as liquid crystals and organic EL, and optical components such as optical pickup elements and optical filters. As mentioned.

  In order to confirm the effect of stabilizing the polishing process, a glass substrate for a magnetic recording medium is used for the double-side polishing apparatus 11 of the embodiment of the present invention and the conventional double-side polishing apparatus (type without the flange portion 120 and the vibration damping mechanism 100). The surface undulations Wa of the main planes were compared. The surface waviness Wa was measured using an optical interference type surface shape measuring instrument (product name: Opti-FLATII manufactured by KLA-Tencor). The measurement area of the surface waviness Wa was set to 10 mm to 32.5 mm from the center of the disk so as to include the recording / reproducing area of the glass substrate for magnetic recording medium having an outer diameter of 65 mm and an inner diameter of 20 mm. In the double-side polishing apparatus 11 of the embodiment of the present invention, a universal shaft joint (universal joint) is used as the shaft joint 55.

  As a result of polishing the main plane of the glass substrate for magnetic recording medium using the double-side polishing apparatus 11 of the embodiment of the present invention, the surface waviness Wa is improved, and the defective product incidence of the glass substrate for magnetic recording medium is halved compared to the conventional one. It can be confirmed that the polishing apparatus provided with the vibration damping mechanism 100 has a high effect of stabilizing the polishing process.

  The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the above-described embodiments, and various modifications, improvements, and modifications can be made to the above-described embodiments without departing from the scope of the present invention. Substitutions can be added.

  For example, the suspension 100A is exemplified as the vibration suppression mechanism interposed between the suspension mechanism and the flange portion, but other vibration suppression mechanisms such as a pressure cylinder and an actuator may be used as long as they have a vibration suppression function. Further, although the coil spring is exemplified as the elastic body for elastically connecting the suspension mechanism and the flange portion, other elastic bodies such as air with a stroke adjustment mechanism, a hydraulic cylinder, a leaf spring, and rubber may be used.

  Moreover, although the above-mentioned embodiment is a double-side polish apparatus, this invention is applicable also to a single-side polish apparatus.

DESCRIPTION OF SYMBOLS 11 Double-side polish apparatus 20 Base 30 Lower surface plate 40 Upper surface plate 50 Lifting mechanism 52 Cylinder 53 Fixing member 54 Piston rod 55 Shaft joint 56 Input part 57 Output part 60 Rotation transmission mechanism 61 Drive shaft 62 Coupling part 62a Key groove 70 Frame 72 Beam 80 Suspension mechanism 80a Strut 80b Inner plate 80c Upper wheel 81 Key 82 Support shaft 90 Control unit 100 Damping mechanism 100A Suspension 101 Roller 102 Caster body 103 Lower support 104 Coil spring 105 Upper support 106 Nut 107 Arm 108 Stud 109 Shim ring 110 Nut 111 Shaft 112 Axle 120 Flange part 121 Upper plate 122 Arm 125 Linear motion bearing 130 Lower surface plate 140 Upper surface plate 152 Cylinder 154 Rod 155 Shaft joint 1 0 carrier 180 above the surface plate lifting device

Claims (6)

A suspension mechanism;
An upper surface plate suspended by the suspension mechanism;
A lower surface plate facing the upper surface plate,
An elevating mechanism having a rod for elevating and lowering the upper surface plate and the suspension mechanism through a shaft joint;
A polishing apparatus for polishing an object to be polished disposed between the upper surface plate and the lower surface plate,
A flange portion interlocked with the rod;
A polishing apparatus comprising: a vibration damping mechanism interposed between the suspension mechanism and the flange portion.   The polishing apparatus according to claim 1, wherein the vibration suppression mechanism includes an elastic body for elastically connecting the suspension mechanism and the flange portion. The vibration damping mechanism is
A shaft interlocking with the movement of at least one of the suspension mechanism and the flange portion;
The polishing apparatus according to claim 2, further comprising a bearing that supports the shaft.   The polishing apparatus according to any one of claims 1 to 3, wherein the vibration suppression mechanism includes a rotating body at a contact portion with the suspension mechanism. A main surface polishing step for polishing the main surface of the glass substrate;
In the manufacturing method of the glass substrate for magnetic recording media provided with the washing process of the glass substrate,
The said main plane grinding | polishing process is a manufacturing method of the glass substrate for magnetic recording media which grind | polishes the main plane of a glass substrate using the grinding | polishing apparatus as described in any one of Claims 1-4. A main surface polishing step of polishing a main surface of the glass substrate using the polishing apparatus according to claim 1;
A method of manufacturing a magnetic recording medium, comprising: a film forming step of forming a thin film on the glass substrate after the main plane polishing step.

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