JP2018126834A - Rotation device, double side polishing device and single side polishing device comprising the rotation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a rotation device which can stably transmit a rotation torque from a drive shaft to a driven shaft, and improve durability even in a situation in which, there is restriction to a clearance, and there is a slight declination between the drive shaft and the driven shaft.SOLUTION: A rotation device 100 of the invention comprises: a drive plate 6; a casing 8 on which plural storage holes 10 are formed; plural drive balls 14 each of which is stored in each storage hole 10; a driven plate 16 which has a groove 20 comprising an open hole 18 and a recess 22 for storing a part protruded from the storage hole 10 on the drive ball 14 in a radial direction of the driven plate 16 with a gap, in the groove 20, the casing 8 is stored with a gap; and bearings 26, 28 comprising a convex surface 26R and a concave surface 28R, and having on a plane X formed of all center points O1 of the drive balls 14, an axial length center and curvature centers of the convex surface 26R and concave surface 28R.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a rotating device, and a double-side polishing device and a single-side polishing device provided with the rotating device.

  The rotation device generally includes a drive plate connected to a drive shaft connected to a drive mechanism such as a motor, and a driven plate connected to a rotating object. In order to transmit the rotational torque transmitted from the drive mechanism to the drive plate to the driven plate, the rotating device includes, for example, a universal joint as shown in FIG. 6B between the drive plate and the driven plate. Yes.

  Referring to FIG. 6B, this universal joint includes a pair of cross-axis cross pins 102 and a pair of first pins 102a of the cross-axis cross pins 102 at diagonal positions (axis a) of the cross-axis. A first bearing case 104a and a pair of second bearing cases 104b for accommodating another pair of second pins 102b at the other diagonal position (axis b) perpendicular to the diagonal position. Have. The drive plate 6 and the cross shaft cross pin 102 are fixed via the first bearing case 104a, and the driven plate 16 and the cross shaft cross pin 102 are fixed via the second bearing case 104b. Referring also to FIG. 6A, when the drive plate 6 rotates about the drive axis X as a central axis, the rotational torque is transmitted to the cross shaft cross pin 102 via the first bearing case 104a and the first pin 102a. The Then, the rotational torque transmitted to the cross shaft pin 102 is transmitted to the driven plate 16 via the second pin 102b and the second bearing case 104b, and as a result, the driven plate 16 rotates.

  Such a universal joint can be used in a situation where the height of the driven plate 16 is limited as shown in FIG. 6A. For example, in the wafer double-side polishing apparatus described in Patent Document 1 Commonly seen. That is, in the double-side polishing apparatus, as shown in FIG. 7, the upper surface plate 50 is fixed to the driven plate 16 of the rotating device 400 provided with the universal joint. As a result, the upper surface plate 50 can rotate in the same manner as the driven plate 16. Such a rotating device having a universal joint is also commonly found in a wafer single-side polishing apparatus described in Patent Document 2, and the rotational torque of the drive shaft is transmitted to the polishing head by the universal joint.

JP 2008-36770 A JP-A-11-221756

  However, as described in Patent Document 1 and Patent Document 2, there is a problem that a high polishing accuracy cannot be obtained in a polishing apparatus including a rotating device having a universal joint. In other words, due to the structure of the universal joint, the transmission of rotational torque from the drive shaft to the driven shaft becomes unstable, resulting in a problem that high polishing accuracy cannot be obtained. Further, the conventional universal joint has a problem that durability is insufficient due to its structure.

  Therefore, in view of the above problems, the present invention stably transmits rotational torque from the drive shaft to the driven shaft even in a situation where the height is strictly limited and there is a minute declination between the drive shaft and the driven shaft. An object of the present invention is to provide a rotating device that can be used and has improved durability.

  In order to solve the above-mentioned problems, the present inventors paid attention to the rotational movements of the drive shaft and the driven shaft of the rotating device and analyzed this. As shown in FIG. 7, in the conventional double-side polishing apparatus, when the parallelism of the lower surface plate 52 is changed due to insufficient rigidity of the support structure (not shown), the upper surface plate 50 and the lower surface plate 52 pass through the wafer. Since the structure is always parallel, the upper surface plate 50 may tilt following the lower surface plate 52. As a result, a minute declination α may occur between the drive axis X of the drive plate 6 and the driven axis Y of the driven plate 16. When the declination α occurs, the driven plate 16 connected to the drive plate 6 is driven by the driven joint 6 even if the drive plate 6 rotates around the drive axis X at a constant speed. Acceleration and deceleration are repeated with a period of 1/2 rotation around Y, and the peripheral speed of the rotational motion becomes unequal. When the FEM (Finite Element Method) analysis is performed, the driven plate 16 is more strongly pressed downward at an angle at which the peripheral speed is slow due to the non-uniform rotational motion of the driven plate 16, thereby It was found that the board 50 pressed the lower surface plate 52 more strongly downward, and the pressure between the upper and lower surface plates (hereinafter also referred to as “surface pressure”) was increased. On the other hand, it was found that when the peripheral speed is high, the force for pressing the driven plate 16 is weakened. As a result, the upper surface plate 50 is retracted upward with respect to the lower surface plate 52, and the surface pressure is lowered. Further, it has been found that the surface pressure applied to the upper surface plate 50 and the lower surface plate 52 becomes non-uniform due to these phenomena, so that the polishing accuracy is deteriorated. These phenomena are not limited to the double-side polishing apparatus. For example, even in a single-side polishing apparatus, the same phenomenon may occur when the polishing head tilts following the parallelism of the surface plate.

  Further, according to the FEM analysis, in the conventional universal joint shown in FIG. 6B, the first pin 102a and the second pin 102b, and the minimum ball bearing in the first bearing case 104a and the second bearing case 104b. It was found that a large stress is applied to the transmission of the rotational torque (not shown). And it turned out that the universal joint part is plastically deformed due to the stress, and as a result, the durability of the rotating device is insufficient.

  Based on this knowledge, the present inventors examined using a conventional constant velocity ball joint instead of the universal joint shown in FIG. However, in the conventional constant velocity ball joint, the curvature radius of the outer raceway surface must be designed to be larger by the diameter of the drive ball than the curvature radius of the inner raceway surface. For this reason, it has been found that the conventional constant velocity ball joint is not suitable for a situation in which the height of the joint portion is increased and the height limit is severe.

  Therefore, the present inventors diligently studied to make a bearing in which the drive side and the driven side directly rub, match the intersection of the drive shaft and the driven shaft with the center of the bearing, and the drive shaft and the driven shaft. The structure of the conventional constant velocity ball joint has been modified so that the center of the drive ball passes through the center of the bearing, regardless of the angle of deviation between the axes. As a result, the present inventors have strict height restrictions, and even in a situation where there is a minute declination between the drive shaft and the driven shaft, the driven shaft is equal in speed as long as the drive shaft rotates at a constant speed. As a result, it has been found that a rotating device capable of stably transmitting rotational torque from the drive shaft to the driven shaft and having improved durability can be realized.

The present invention has been completed based on the above findings, and the gist of the present invention is as follows.
(1) a plate-like drive plate body that is connected to the drive mechanism and rotates together with the drive mechanism, and a drive plate having a cylindrical body that shares a central axis with a drive shaft that is a rotation axis of the drive plate body;
A ring concentric with the cylindrical body disposed on the cylindrical body side surface of the drive plate and outside the cylindrical body, and a plurality of receiving holes penetrating in the radial direction of the ring are provided around the ring. A casing formed at intervals in the direction;
A plurality of drive balls accommodated in each of the accommodation holes;
A plate-like body connected to the drive plate and rotating together with the drive plate, wherein a through-hole in which the cylindrical body is accommodated and a portion of the drive ball that protrudes from the accommodation hole is a gap in a radial direction of the plate-like body And the recesses are formed at intervals in the circumferential direction, and the casing is between the bottom surface of the casing and the bottom surface of the groove, and the radially outer surface of the casing and the outer periphery of the groove. A driven plate having a groove accommodated with a gap between the surface and between the radially inner side surface of the casing and the inner peripheral surface of the groove;
A convex curved surface having a constant curvature that protrudes radially outward and interposed between the side surface of the cylindrical body of the drive plate and the inner peripheral surface of the through hole of the driven plate, and a concave curved surface that receives the convex curved surface; And a bearing having a center of axial length and a center of curvature of each of the concave curved surface and the convex curved surface on a plane composed of all the center points of the drive balls accommodated in the accommodating hole;
A rotating device comprising:

  (2) Each of the recesses has a first recess inner wall on the radially outer side of the plate-like body and a second recess inner wall on the radially inner side of the plate-like body. When the bottom surface and the bottom surface of the groove are parallel, the distance along the radial direction of the plate-like body between the inner wall of the first recess and the inner wall of the second recess is the diameter of the driving ball. The rotating device according to (1) above, which is larger by 40 μm or more and 105 μm or less.

  (3) When the bottom surface of the casing and the bottom surface of the groove are parallel, the height of the gap between the bottom surface of the casing and the bottom surface of the groove is 1.50 mm or more and 1.63 mm or less, The radial width of the gap between the radially outer surface of the casing and the outer peripheral surface of the groove is 1.0 mm or more and 2.0 mm or less, and the radial inner surface of the casing and the inner peripheral surface of the groove The rotating device according to (1) or (2) above, wherein a radial width of the gap between them is 1.0 mm or more and 2.0 mm or less.

(4) The rotating device according to any one of (1) to (3) above, a rotating surface plate having an upper surface plate and a lower surface plate, a sun gear provided at the center of the rotating surface plate, An internal gear provided on the outer periphery of the rotating platen, and a carrier plate provided between the upper platen and the lower platen and provided with one or more holding holes for holding a wafer. A wafer double-side polishing apparatus in which a polishing cloth is applied to each surface on the carrier plate side of the upper surface plate and the lower surface plate,
The double-side polishing apparatus, wherein the upper surface plate and the driven plate included in the rotating device are connected.

(5) The rotating device according to any one of (1) to (3), a polishing head that holds the other surface of the wafer, and a polishing cloth that polishes one surface of the wafer are attached. A wafer single-side polishing apparatus comprising a surface plate,
The single-side polishing apparatus, wherein the polishing head and the driven plate included in the rotating device are connected.

  According to the present invention, the driven shaft rotates at the same speed as the drive shaft as long as the drive shaft rotates at a constant speed even in a situation where the height is strictly limited and there is a minute declination between the drive shaft and the driven shaft. It is possible to provide a rotating device that can be improved in durability.

(A) is a schematic cross-sectional view showing a rotating device 100 according to an embodiment of the present invention, and (B) is a rotating device in the case where a declination α is generated between the drive shaft X and the driven shaft Y. FIG. 4 is a schematic cross-sectional view showing the positional relationship between members in 100. It is a disassembled perspective view of the rotation apparatus 100 by one Embodiment of this invention. (A) is an exploded perspective view showing the casing 8, the plurality of drive balls 14, and the driven plate 16 included in the rotating device, and (B) is a plurality of drive balls 14 accommodated in the grooves 20 of the driven plate 16. FIG. It is a schematic cross section which shows the double-side polish apparatus 200 by one Embodiment of this invention. 1 is a schematic cross-sectional view showing a single-side polishing apparatus 300 according to an embodiment of the present invention. (A) is a schematic cross-sectional view showing a conventional rotating device 400 including a universal joint, and (B) is a drive plate 6, a driven plate 16, a cross shaft cross pin 102, and a first casing provided in the conventional rotating device. It is a disassembled perspective view of 104a and the 2nd casing 104b. It is a schematic cross section which shows the double-side polish apparatus by a comparative example.

(Rotating device)
With reference to FIGS. 1-3, the rotation apparatus 100 by one Embodiment of this invention is demonstrated. Referring to FIG. 2, rotating device 100 includes drive plate 6, casing 8, first bolt 12, drive ball 14, driven plate 16, bearing inner ring portion 26, first bearing outer ring portion 28 </ b> A, and second bearing. The outer ring portion 28 </ b> B, the first ring member 30, the second bolt 32, the second ring member 34, the fixing pin 36, and the fixing plate 38 are included.

  Referring to FIG. 1A, a drive plate 6 is a plate-like drive plate body 2 that rotates together with the drive shaft X, and a cylindrical body that shares a central axis with the drive axis X that is the rotation axis of the drive plate body 2. 4. The drive plate 6 is connected to a drive mechanism (not shown) such as a motor having the drive shaft X and the rotation shaft in common at the upper portion thereof. In the present embodiment, as shown in FIG. 2, the drive plate body 2 is a circular plate member. Further, as shown in FIG. 1A, the fixing pin 36 is fixed to the drive plate 6. Further, ten holes are provided concentrically around the drive shaft X on the surface of the drive plate body 2 on the cylindrical body side, and these holes are used for fixing the drive plate 6 and a casing 8 to be described later. Is done.

  With reference to FIG. 2, the casing 8 is a ring concentric with the cylindrical body 4. Further, as shown in FIG. 3A, a plurality of receiving holes 10 penetrating in the radial direction of the ring from the radially inner side surface 8B of the casing toward the radially outer side surface 8A are provided on the side surface of the casing. Ten pieces are formed at equal intervals in the direction. A drive ball 14 is accommodated in each of the accommodation holes 10. The drive ball 14 can rotate within the accommodation hole 10. As shown in FIG. 1A, the casing 8 is a surface on the cylindrical body side of the drive plate 6 and is disposed outside the cylindrical body 4. Here, the casing 8 and the drive plate 6 are fixed as follows. On the surface of the casing 8 on the cylindrical body side, ten bolt through holes are provided concentrically around the central axis of the cylindrical body 4. As shown in FIG. 1A, the first bolt 12 is inserted into the hole of the drive plate body 2 from the bolt through hole of the casing 8. The casing 8 is fixed to the drive plate 6 by a combination of a male screw portion provided on the first bolt 12 and a female screw portion provided inside the hole of the drive plate body 2. Accordingly, when the drive plate 6 rotates about the drive axis X, the casing 8 also rotates at the same speed as the drive plate 6 about the drive axis X. Note that the method for fixing the casing 8 and the drive plate 6 and the numbers and intervals of the drive balls 14 and the accommodation holes 10 are not limited to these and can be changed as appropriate.

  The driven plate 16 is a plate-like body that is connected to the drive plate 6 and rotates together with the drive plate 6 as shown in FIG. In this embodiment, as shown in FIG. 2, the driven plate 16 is a circular plate member. Further, the driven plate 16 has a through hole 18 at the center thereof. As shown in FIG. 1A, the through hole 18 has a fixing pin 36, a cylindrical body 4, a bearing inner ring portion 26, a second inner ring portion 26, The first bearing outer ring portion 28A, the second bearing outer ring portion 28B, the first ring member 30, and the second ring member 34 are accommodated. A fixed plate 38 is attached and fixed to the lower portion of the driven plate 16.

  3 (A) and 3 (B), the driven plate 16 has an outer peripheral surface 20A and an inner peripheral surface 20B concentrically positioned on the casing side surface with the central axis of the through hole 18 as the center. An annular groove 20 is provided. Further, in the groove 20, recesses 22 for accommodating the portions of the driving ball 14 protruding from the accommodation hole 10 with a gap in the radial direction of the driven plate 16 that is a plate-like body are equally spaced in the circumferential direction of the groove 20. Ten locations are formed. Further, as shown in FIGS. 3A and 3B, each recess 22 has a first recess inner wall 22 </ b> A on the radially outer side of the driven plate 16, and the radially inner side of the driven plate 16. Has a second recess inner wall 22B. Here, when the bottom surface of the casing 8 and the bottom surface of the groove 20 are parallel, the distance along the radial direction of the driven plate 16 between the first recess inner wall 22A and the second recess inner wall 22B is: It is preferable to design the driving ball 14 to be larger than the diameter of the driving ball 14 by 40 μm or more and 105 μm or less. With this structure, the drive ball 14 is restricted from rolling along the circumferential direction of the groove 20, and the drive ball 14 is allowed to move about several μm in the radial direction of the casing 8. 1 (A), 3 (A), and 3 (B), the casing 8 includes a gap defined by a space between the bottom surface of the casing 8 and the bottom surface of the groove 20, and the radial direction of the casing. A gap defined by a space between the outer side surface 8A and the outer peripheral surface 20A of the groove and a gap defined by a space between the radially inner side surface 8B of the casing and the inner peripheral surface 20B of the groove are accommodated in the groove 20. Is done. Here, when the bottom surface of the casing 8 and the bottom surface of the groove 20 are parallel, the height h of the gap between the bottom surface of the casing 8 and the bottom surface of the groove 20 is set to 1.50 mm to 1.63 mm. The radial width w1 of the gap between the radially outer surface 8A and the outer peripheral surface 20A of the groove is 1.0 mm or more and 2.0 mm or less, and between the radially inner side surface 8B of the casing and the inner peripheral surface 20B of the groove The radial width w2 of the gap is preferably 1.0 mm or more and 2.0 mm or less. The technical significance of adopting these configurations will be described later. The shape of the first recess inner wall 22A and the second recess inner wall 22B is not particularly limited as long as it does not hinder the movement of the drive ball 14. In the present embodiment, the shape of the first recess inner wall 22A and the second recess inner wall 22B is a shape formed of a part of a semi-cylindrical side surface. The number and interval of the recesses 22 are not limited to this, and can be appropriately designed according to the number and interval of the drive balls 14 and the accommodation holes 10.

  Referring to FIG. 1A, the bearing constituted by the bearing inner ring portion 26, the first bearing outer ring portion 28 </ b> A, and the second bearing outer ring portion 28 </ b> B includes the side surface of the cylindrical body 4 of the drive plate 6 and the driven plate 16. Between the through hole 18 and the inner peripheral surface. The bearing inner ring portion 26 has a convex curved surface 26R having a constant curvature that is convex outward in the radial direction. Further, the radially inner side surface of the first bearing outer ring portion 28A and the radially inner side surface of the second bearing outer ring portion 28B constitute a concave curved surface 28R that receives the convex curved surface 26R as shown in FIG. Although details will be described later, the axial length center O2 of the bearing, the curvature center O3 of the concave curved surface 28R, and the curvature center O4 of the convex curved surface 26R are positioned on a plane Z formed of all the central points O1 of the drive ball 14. It is important to. With this configuration, the intersection of the drive shaft X and the driven shaft Y coincides with the axial center O2 of the bearing, and regardless of the magnitude of the deviation angle α between the drive shaft X and the driven shaft Y, all The center point O1 of the drive ball 14 passes through the axial center O2 of the bearing.

  Referring to FIG. 1 (A), the first bearing outer ring portion 28A and the second bearing outer ring portion 28B have their outer peripheral surfaces in contact with the inner peripheral surface of the through hole 18 of the driven plate 16, and the first ring. The member 30 is fixed to the driven plate 16. Accordingly, the first bearing outer ring portion 28A and the second bearing outer ring portion 28B rotate at the same speed as the driven plate 16 about the driven shaft Y. Further, the bearing inner ring portion 26 has an inner peripheral surface thereof in contact with the outer peripheral surface of the cylindrical body 4 and is supported by a second ring member 34 fixed to the cylindrical body 4 as shown in FIG. As a result, the bearing inner ring portion 26 rotates at the same speed as the drive plate 6 around the drive shaft X. The method for fixing the bearing inner ring portion 26, the first bearing outer ring portion 28A, and the second bearing outer ring portion 28B is not particularly limited. For example, the method similar to the method described above for fixing the drive plate 6 and the casing 8 is used. The method can be used.

  Below, the characteristic part of this invention is demonstrated in detail with an effect. In the present invention, it is important that the structure of the conventional constant velocity ball joint is modified so that it can be applied to a situation where the height restriction is strict and there is a minute declination between the drive shaft and the driven shaft.

  With reference to FIGS. 1A and 1B, in this embodiment, the tolerance of the deflection angle α between the drive shaft X and the driven shaft Y belongs to the convex curved surface 26R belonging to the drive system and the driven system. This is performed by directly rubbing with the concave curved surface 28R. That is, as shown in FIG. 1B, when a declination α is generated between the drive shaft X and the driven shaft Y, the driven concave surface 28R is driven into a drive-side convex curve according to the declination α. Slide on 26R. Here, between the casing 8 and the driven plate 16, a gap defined by a space between the bottom surface of the casing 8 and the bottom surface of the groove 20, a radially outer surface 8 </ b> A of the casing and an outer peripheral surface 20 </ b> A of the groove. There are gaps defined by the space between them and a gap defined by the space between the radially inner side surface 8B of the casing and the inner peripheral surface 20B of the groove. In addition, the portion of the drive ball 14 that protrudes from the receiving hole 10 is accommodated in the recess 22 with a gap in the radial direction of the driven plate 16, and the drive ball 14 moves by about several μm in the radial direction of the casing 8. Permissible. Accordingly, each drive ball 14 moves up and down relative to the driven plate 16 on the first inner wall 22 </ b> A and the second inner wall 22 </ b> B of the groove 20 formed in the driven plate 16 with the sliding. In addition, the inside of the accommodation hole 10 can be moved in and out along the radial direction. As a result, the driven plate 16 swings smoothly with respect to the plane Z, and a highly accurate deviation angle α can be allowed.

  Further, in the present embodiment, the drive ball 14 not only plays a role of allowing the deviation angle α between the driven shaft X and the drive shaft Y described above, but also the rotational torque of the driven shaft X remains constant. It also plays a role of transmitting to the driven shaft Y. That is, the portion of the drive ball 14 that protrudes from the accommodation hole 10 is accommodated in the recess 22. Therefore, the rolling of the drive ball 14 along the circumferential direction of the groove 20 is limited, and the rotational torque of the drive shaft X is reliably transmitted to the driven shaft Y. Furthermore, as described above, in the present embodiment, the intersection of the drive shaft X and the driven shaft Y coincides with the shaft length center O2 of the bearing, and the deviation angle α between the drive shaft X and the driven shaft Y is large. Regardless, the center point O1 of all the drive balls 14 passes through the axial center O2 of the bearing. Therefore, the center O1 of each drive ball 14 is always kept at an equal distance from the drive shaft X and the driven shaft Y regardless of the magnitude of the deflection angle α, and the driven shaft Y is also driven by the drive shaft X as long as the drive shaft X rotates at a constant speed. Can rotate at the same speed.

  Moreover, it has confirmed that the following effects were obtained by FEM analysis. That is, the conventional universal joint is accompanied by transmission of rotational torque to the first pin 102a and the second pin 102b, and to the minimum ball bearing (not shown) in the first bearing case 104a and the second bearing case 104b. Since a large stress is applied, plastic deformation occurs, and the following function and durability between the driving plate 6 and the driven plate 16 are inferior. On the other hand, in the rotating device 100, the torque transmission mechanism has a large-diameter driving ball 14 that is tens of times larger than that of the conventional miniature ball bearing in the universal joint, and the rigidity is increased. be able to. Therefore, according to the rotating device 100, plastic deformation can be suppressed as compared with a rotating device having a conventional universal joint, and the follow-up function and durability between the drive plate 6 and the driven plate 16 can be improved. it can.

  As described above, in the conventional constant velocity ball joint, the drive ball is interposed between the arc-shaped outer raceway surface and the inner raceway surface. For this reason, the radius of curvature of the outer raceway surface must be designed to be larger than the radius of curvature of the inner raceway surface by the diameter of the drive ball, which increases the size of the joint portion. On the other hand, in the present embodiment, as shown in FIGS. 1A and 1B, the convex curved surface 26R and the concave curved surface 28R directly rub against each other, and therefore, the curvature radius of the convex curved surface 26R and the concave curved surface 28R. Can be designed to have the same radius of curvature. Further, the height of the bearing and the height of the first recess inner wall 22A and the second recess inner wall 22B can be designed independently. Since the degree of freedom of design can be increased in this way, the height of the bearing having the concave curved surface 28R and the convex curved surface 26R and the height of the first concave inner wall 22A and the second concave inner wall 22B are plate-like driven plates. A thin design with a thickness of 16 or less is also possible. Therefore, the rotating device of the present invention can be used even under severe conditions. For example, the height of the bearing and the height of the first recess inner wall 22A and the second recess inner wall 22B can be set to be substantially the same height and can be designed to be equal to or less than the thickness of the driven plate 16. In addition, the thin shape in this specification means that the ratio (thickness / diameter) of the thickness of the driven plate to the diameter of the driven plate is 0.067 or less.

  From the viewpoint of stably transmitting rotational torque and ensuring durability, it is preferable that the material of the drive ball 14 is a high strength alloy steel. Further, from the viewpoint of smooth sliding between the concave curved surface 28R and the convex curved surface 26R, the surface material of the convex curved surface 26R and the concave curved surface 28R is preferably a fluororesin having a low frictional resistance. The material of the other members is not particularly limited as long as an arbitrary or known material is suitably used.

  The rotating device 100 according to one embodiment of the present invention has been described above. However, the present invention is not limited to the above-described embodiment. For example, the first bearing outer ring portion 28A and the second bearing outer ring portion 28B may be integrally formed. Good.

(Double-side polishing machine)
A double-side polishing apparatus 200 according to an embodiment of the present invention will be described with reference to FIG. The double-side polishing apparatus 200 includes a rotating surface plate 54 having an upper surface plate 50 and a lower surface plate 52, a sun gear 56 provided at the center of the rotating surface plate 54, and an internal gear provided on the outer periphery of the rotating surface plate 54. 58 and a carrier plate 60 provided between the upper surface plate 50 and the lower surface plate 52 and provided with one or more holding holes (not shown) for holding the wafer. Here, although not shown, a polishing cloth is applied to each surface of the upper surface plate 50 and the lower surface plate 52 on the carrier plate 60 side.

  The double-side polishing apparatus 200 includes a rotating device 100, and the driven plate 16 of the rotating device 100 is connected to the upper surface of the upper surface plate 50. Thereby, the upper surface plate 50 can rotate at a constant speed with the driven plate 16. In addition, the method of connection is not specifically limited, For example, the method similar to the method already described about fixation with the drive plate 6 and the casing 8 can be used.

  The sun gear 56 is provided at the center of rotation of the upper surface plate 50 and the lower surface plate 52 and meshes with a gear (not shown) provided on the outer periphery of the carrier plate 60. The internal gear 58 includes a plurality of gears (not shown) provided in a ring shape on the outer periphery of the upper surface plate 50 and the lower surface plate 52, and each gear is a gear (not illustrated) provided on the outer periphery of the carrier plate 60. (Not shown).

  The sun gear 56 is rotated about a rotation axis by a motor (not shown). The internal gear 58 is also rotated by a motor (not shown). As the sun gear 56 and the internal gear 58 rotate, the carrier plate 60 rotates about its center as a central axis (hereinafter referred to as “spinning”) by meshing the gears, while the upper surface plate 50 and the lower surface plate. Rotate around the sun gear 56 around the center of 52 (hereinafter referred to as “revolution”). At the same time, the upper surface plate 50 is also rotated by the rotating device 100 shown in FIG. 4, and the lower surface plate 52 is also rotated in the opposite direction to the upper surface plate 50 by a motor (not shown).

  In this way, the double-side polishing apparatus 200 rotates the upper surface plate 50 and the lower surface plate 52 while rotating the sun gear 56 and the internal gear 58 to rotate and revolve the carrier plate 60. Here, the polishing slurry flows in the hollow region of the fixed pin 36 included in the rotating device 100 and is dispersed in the circumferential direction from the center of the upper surface plate 50. Then, both surfaces of the wafer are simultaneously chemically mechanically polished by the polishing action of the polishing cloth affixed to each surface on the carrier plate 60 side of the upper surface plate 50 and the lower surface plate 52 and the dispersed polishing slurry.

  Below, the effect of this embodiment is demonstrated. As described above, since the rotating device 100 can be used even in a situation where the height is severely limited, it is possible to replace the rotating device having a conventional universal joint in the double-side polishing apparatus. In addition, even in a situation where there is a small deflection angle α between the drive shaft X and the driven shaft Y, the driven shaft Y can rotate at the same speed as the drive shaft X as long as the drive shaft X rotates at a constant speed. Therefore, according to the double-side polishing apparatus 200, the surface pressure applied to the upper and lower surface plates can be made uniform, so that high polishing accuracy can be obtained. Furthermore, as described above, since the rotation device 100 is less stressed than the conventional rotation device having a universal joint, the durability of the double-side polishing apparatus 200 is also improved.

  The double-side polishing apparatus 200 according to one embodiment of the present invention has been described above, but the present invention is not limited to the above embodiment.

(Single-side polishing equipment)
With reference to FIG. 5, the single-side polish apparatus 300 by one Embodiment of this invention is demonstrated. The single-side polishing apparatus 300 includes a polishing head 80 that holds the other surface of the wafer, and a surface plate 82 to which a polishing cloth for polishing one surface of the wafer W is attached.

  The single-side polishing apparatus 300 includes a rotating device 100, and the driven plate 16 included in the rotating device 100 is connected to the upper surface of the polishing head 80. As a result, the polishing head 80 can rotate at the same speed as the driven plate 16. In addition, the method of connection is not specifically limited, For example, the method similar to the method already described about fixation with the drive plate 6 and the casing 8 can be used.

  The wafer W fixed to the polishing head 80 is brought into contact with the polishing cloth, the polishing head 80 and the surface plate 82 are rotated together, and the polishing head 80 and the surface plate 82 are relatively moved. At this time, the polishing slurry flows in the hollow region of the fixed pin 36 included in the rotating device 100 and is dispersed in the circumferential direction from the center of the polishing head 80. Then, one surface of the wafer W is polished by the polishing action of the polishing cloth and the dispersed polishing slurry.

  Below, the effect of this embodiment is demonstrated. As described above, since the rotating device 100 can be used even in a situation where the height is severely limited, it is possible to replace the rotating device having a conventional universal joint in a single-side polishing device. In addition, even in a situation where there is a small deflection angle α between the drive shaft X and the driven shaft Y, the driven shaft Y can rotate at the same speed as the drive shaft X as long as the drive shaft X rotates at a constant speed. Therefore, according to the single-side polishing apparatus 300, the surface pressure applied to the surface plate can be made uniform, so that high polishing accuracy can be obtained. Furthermore, as described above, the rotation device 100 is less stressed than the conventional rotation device having a universal joint, so that the durability of the single-side polishing device 300 is improved.

  The single-side polishing apparatus 300 in one embodiment of the present invention has been described above, but the present invention is not limited to the above embodiment.

  According to the present invention, the driven shaft rotates at the same speed as the drive shaft as long as the drive shaft rotates at a constant speed even in a situation where the height is strictly limited and there is a minute declination between the drive shaft and the driven shaft. It is possible to provide a rotating device that can be improved in durability.

DESCRIPTION OF SYMBOLS 100 Rotating device 2 Drive plate main body 4 Cylindrical body 6 Drive plate 8 Casing 8A Casing radial outer surface 8B Casing radial inner surface 10 Housing hole 12 First bolt 14 Drive ball 16 Drive plate 18 Drive plate through hole 20 Groove 20A Groove outer surface 20B Groove inner surface 22 Recess 22A First recess inner wall 22B Second recess inner wall 26 Bearing inner ring portion 26R Convex surface 28A First bearing outer ring portion 28B Second bearing outer ring portion 28R Concave surface 30 First ring member 32 Second bolt 34 Second ring member 36 Fixing pin 38 Fixing plate 200 Double-side polishing device 50 Upper surface plate 52 Lower surface plate 54 Rotating surface plate 56 Sun gear 58 Internal gear 60 Carrier plate 300 Single-side polishing machine 80 Polishing head 82 Surface plate X Drive shaft Y Drive shaft The plane where the center of the driving ball and the axial center of the bearing exist W Wafer h The height of the gap between the bottom surface of the casing and the bottom surface of the groove w1 The gap between the radially outer surface of the casing and the outer peripheral surface of the groove Radial width w2 radial width of the gap between the radial inner surface of the casing and the inner peripheral surface of the groove O1 center of rotation of the driving ball O2 center of axial length of the bearing O3 center of curvature of the concave surface O4 center of curvature of the convex surface

Claims (5)

A plate-like drive plate body connected to the drive mechanism and rotating together with the drive mechanism, and a drive plate having a cylindrical body that shares a central axis with a drive shaft that is a rotation axis of the drive plate body;
A ring concentric with the cylindrical body disposed on the cylindrical body side surface of the drive plate and outside the cylindrical body, and a plurality of receiving holes penetrating in the radial direction of the ring are provided around the ring. A casing formed at intervals in the direction;
A plurality of drive balls accommodated in each of the accommodation holes;
A plate-like body connected to the drive plate and rotating together with the drive plate, wherein a through-hole in which the cylindrical body is accommodated and a portion of the drive ball that protrudes from the accommodation hole is a gap in a radial direction of the plate-like body A recess formed in a circumferentially spaced manner, wherein the casing is disposed between a radially outer surface of the casing and a groove between the bottom surface of the casing and the bottom surface of the groove. A driven plate having a groove accommodated with a gap between the outer peripheral surface and between the radially inner side surface of the casing and the inner peripheral surface of the groove;
A convex curved surface having a constant curvature that protrudes radially outward and interposed between the side surface of the cylindrical body of the drive plate and the inner peripheral surface of the through hole of the driven plate, and a concave curved surface that receives the convex curved surface; And a bearing having a center of axial length and a center of curvature of each of the concave curved surface and the convex curved surface on a plane composed of all the center points of the drive balls accommodated in the accommodating hole;
A rotating device comprising:   The recess has a first recess inner wall on the radially outer side of the plate-like body and a second recess inner wall on the radially inner side of the plate-like body, respectively, and the bottom surface of the casing and the When the bottom surface of the groove is parallel, the distance along the radial direction of the plate-like body between the inner wall of the first recess and the inner wall of the second recess is 40 μm than the diameter of the drive ball. The rotating device according to claim 1, wherein the rotating device is larger by 105 μm or less.   When the bottom surface of the casing and the bottom surface of the groove are parallel, the height of the gap between the bottom surface of the casing and the bottom surface of the groove is 1.50 mm or more and 1.63 mm or less, and the diameter of the casing The radial width of the gap between the outer side surface of the groove and the outer peripheral surface of the groove is 1.0 mm or more and 2.0 mm or less, and the gap between the radial inner surface of the casing and the inner peripheral surface of the groove is The rotating device according to claim 1 or 2, wherein a radial width is 1.0 mm or more and 2.0 mm or less. The rotating device according to any one of claims 1 to 3, a rotating surface plate having an upper surface plate and a lower surface plate, a sun gear provided at a central portion of the rotating surface plate, and an outer periphery of the rotating surface plate An internal gear provided in a section, and a carrier plate provided between the upper surface plate and the lower surface plate and provided with one or more holding holes for holding a wafer, and the upper surface plate and A wafer double-side polishing apparatus in which a polishing cloth is applied to each surface of the lower surface plate on the carrier plate side,
The double-side polishing apparatus, wherein the upper surface plate and a driven plate included in the rotating device are connected. A rotating device according to any one of claims 1 to 3, a polishing head for holding the other surface of the wafer, and a surface plate to which a polishing cloth for polishing one surface of the wafer is attached. A single-side polishing apparatus for wafers,
A single-side polishing apparatus, wherein the polishing head and a driven plate included in the rotating device are connected.

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