JP2013041948A5 - - Google Patents

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Publication number
JP2013041948A5
JP2013041948A5 JP2011177292A JP2011177292A JP2013041948A5 JP 2013041948 A5 JP2013041948 A5 JP 2013041948A5 JP 2011177292 A JP2011177292 A JP 2011177292A JP 2011177292 A JP2011177292 A JP 2011177292A JP 2013041948 A5 JP2013041948 A5 JP 2013041948A5
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JP
Japan
Prior art keywords
lattice
photonic crystal
slab
substrate
resist
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Application number
JP2011177292A
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English (en)
Japanese (ja)
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JP2013041948A (ja
JP5794687B2 (ja
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Priority to JP2011177292A priority Critical patent/JP5794687B2/ja
Priority claimed from JP2011177292A external-priority patent/JP5794687B2/ja
Priority to US13/571,985 priority patent/US8619830B2/en
Publication of JP2013041948A publication Critical patent/JP2013041948A/ja
Publication of JP2013041948A5 publication Critical patent/JP2013041948A5/ja
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Publication of JP5794687B2 publication Critical patent/JP5794687B2/ja
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JP2011177292A 2011-08-12 2011-08-12 フォトニック結晶面発光レーザ Active JP5794687B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011177292A JP5794687B2 (ja) 2011-08-12 2011-08-12 フォトニック結晶面発光レーザ
US13/571,985 US8619830B2 (en) 2011-08-12 2012-08-10 Photonic crystal surface emission laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011177292A JP5794687B2 (ja) 2011-08-12 2011-08-12 フォトニック結晶面発光レーザ

Publications (3)

Publication Number Publication Date
JP2013041948A JP2013041948A (ja) 2013-02-28
JP2013041948A5 true JP2013041948A5 (enExample) 2014-05-22
JP5794687B2 JP5794687B2 (ja) 2015-10-14

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Family Applications (1)

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JP2011177292A Active JP5794687B2 (ja) 2011-08-12 2011-08-12 フォトニック結晶面発光レーザ

Country Status (2)

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US (1) US8619830B2 (enExample)
JP (1) JP5794687B2 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014136962A1 (ja) 2013-03-07 2014-09-12 浜松ホトニクス株式会社 レーザ素子及びレーザ装置
US9614352B2 (en) 2013-03-07 2017-04-04 Hamamatsu Photonics K.K. Laser element and laser device
US9627850B2 (en) 2013-03-08 2017-04-18 Japan Science And Technology Agency Two-dimensional photonic crystal surface-emitting laser
EP2966737B1 (en) * 2013-03-08 2019-05-01 Japan Science and Technology Agency Two-dimensional photonic crystal surface-emitting laser
CN105143923B (zh) * 2013-04-17 2018-03-09 国立研究开发法人科学技术振兴机构 光子晶体以及利用该光子晶体的光学功能设备
JP6202572B2 (ja) * 2014-02-06 2017-09-27 国立大学法人京都大学 半導体レーザモジュール
JP6305855B2 (ja) * 2014-07-11 2018-04-04 オリンパス株式会社 画像表示装置
US11637409B2 (en) * 2017-03-27 2023-04-25 Hamamatsu Photonics K.K. Semiconductor light-emitting module and control method therefor
US11646546B2 (en) 2017-03-27 2023-05-09 Hamamatsu Photonics K.K. Semiconductor light emitting array with phase modulation regions for generating beam projection patterns
JP6959042B2 (ja) 2017-06-15 2021-11-02 浜松ホトニクス株式会社 発光装置
CN111448725B (zh) 2017-12-08 2023-03-31 浜松光子学株式会社 发光装置及其制造方法
JP6925249B2 (ja) * 2017-12-08 2021-08-25 浜松ホトニクス株式会社 発光装置
CN112272906B (zh) 2018-06-08 2024-03-15 浜松光子学株式会社 发光元件
US11923655B2 (en) * 2018-08-27 2024-03-05 Hamamatsu Photonics K.K. Light emission device
US12184036B2 (en) 2019-08-30 2024-12-31 Kyoto University Two-dimensional photonic-crystal surface-emitting laser
US12489271B2 (en) * 2020-03-31 2025-12-02 Kyoto University Two-dimensional photonic-crystal laser
US20230027930A1 (en) * 2021-07-22 2023-01-26 Epistar Corporation Semiconductor device
CN113644548B (zh) * 2021-08-18 2023-11-07 业成科技（成都）有限公司 光子晶体面射型激光结构
GB2625726B (en) * 2022-12-21 2025-09-24 Vector Photonics Ltd Surface Emitting Laser Devices and Methods for Manufacturing Same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3983933B2 (ja) * 1999-05-21 2007-09-26 進 野田 半導体レーザ、および半導体レーザの製造方法
US6778581B1 (en) * 2002-09-24 2004-08-17 Finisar Corporation Tunable vertical cavity surface emitting laser
KR20080049734A (ko) * 2005-09-05 2008-06-04 고쿠리츠 다이가쿠 호진 교토 다이가쿠 2차원 포토닉 결정 면발광 레이저 광원
JP5070161B2 (ja) * 2007-08-31 2012-11-07 独立行政法人科学技術振興機構 フォトニック結晶レーザ

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