JP2013038255A - Sheet for processing of plate like member and manufacturing method of the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sheet for wafer processing which easily reduces the costs and enables easy disposal, and to provide a manufacturing method of the sheet for the wafer processing.SOLUTION: An adhesive sheet S1 is applied to a wafer W and a ring frame RF and thereby causing the ring frame RF to hold the wafer W. The adhesive sheet S1 includes: a base material sheet BS; a magnetic recording layer ML laminated on one surface of the base material sheet BS and recording predetermined information; and an adhesive layer AD laminated on the base material sheet BS so as to cover the magnetic recording layer ML.

Description

  The present invention relates to a plate-like member processing sheet and a method for manufacturing the same.

2. Description of the Related Art Conventionally, a configuration in which a data carrier is provided on an adhesive sheet used when a semiconductor wafer as a plate-like member (hereinafter sometimes simply referred to as a wafer) is supported by a ring frame is known (see, for example, Patent Document 1). ).
In the configuration described in Patent Document 1, a so-called RF memory including an IC chip and a transmission / reception conductive coil connected to the IC chip is used as a data carrier, and the data carrier is bonded to an adhesive sheet. It is affixed on the drug layer.

JP 2008-293508 A

  However, in the configuration described in Patent Document 1, a data carrier such as an RF memory is expensive, and thus the cost cannot be easily reduced. Further, the data carrier needs to be discarded separately from the adhesive sheet, and the sorting work is troublesome.

  The objective of this invention is providing the sheet | seat for processing of the plate-shaped member which can reduce cost and discard easily, and its manufacturing method.

  In order to achieve the above object, the plate-like member processing sheet of the present invention is a plate-like member processing sheet to be affixed to a plate-like member subjected to predetermined processing, and a base sheet A configuration is adopted in which a magnetic recording layer capable of recording predetermined information and an adhesive layer are provided.

At this time, in the sheet for processing a plate-like member of the present invention, it is preferable that the magnetic recording layer is laminated between the base sheet and the adhesive layer.
Furthermore, in the sheet for processing a plate-shaped member of the present invention, a plurality of the magnetic recording layers are provided, and the plurality of magnetic recording layers are provided in a straight line extending in different directions in a plan view of the base sheet. It is preferable.

  Moreover, the sheet for processing a plate-shaped member of the present invention is a sheet for processing a plate-shaped member that is affixed to a plate-shaped member that is subjected to predetermined processing, and is one of the base sheet and the base sheet. And a magnetic adhesive layer that is laminated on the surface and can record predetermined information.

On the other hand, the manufacturing method of the sheet for processing a plate-shaped member of the present invention is a method for manufacturing a sheet for processing a plate-shaped member to be attached to a plate-shaped member to be subjected to predetermined processing, A step of laminating a magnetic recording layer capable of recording predetermined information on the surface, and a step of laminating an adhesive layer so as to cover the magnetic recording layer on one surface side of the base sheet. The configuration is adopted.
In addition, the method for manufacturing a sheet for processing a plate-shaped member according to the present invention is a method for manufacturing a sheet for processing a plate-shaped member to be affixed to a plate-shaped member subjected to predetermined processing, And a step of laminating an adhesive layer on the surface and a step of laminating a magnetic recording layer capable of recording predetermined information on the adhesive layer.
Furthermore, the manufacturing method of the sheet for processing a plate-shaped member of the present invention is a method for manufacturing a sheet for processing a plate-shaped member to be attached to a plate-shaped member to be subjected to predetermined processing, The structure of having a step of laminating a magnetic adhesive layer capable of recording predetermined information on the surface is adopted.

  According to the present invention as described above, since a magnetic recording layer or a magnetic adhesive layer is employed as a structure for providing a recording function of predetermined information on the processing sheet, a data carrier such as an RF memory is used. Compared to a configuration that employs, cost reduction can be easily achieved. Further, it is not necessary to separate the base sheet from the magnetic recording layer or the magnetic adhesive layer, and the processing sheet can be easily discarded.

At this time, if the magnetic recording layer is provided between the base sheet and the adhesive layer, even if the processing sheet comes into contact with the foreign matter, the magnetic recording layer can be prevented from being damaged, and recorded on the magnetic recording layer. Problems such as failure to read predetermined information or failure to record predetermined information in the magnetic recording layer can be suppressed. In particular, when the magnetic recording layer is affixed between the base sheet and the plate-like member, damage to the magnetic recording layer can be more effectively suppressed.
Further, if a plurality of magnetic recording layers are provided in a straight line extending in different directions in a plan view of the base material sheet, for example, the processing sheet attached to the plate-like member due to the different conveying direction of the processing sheet It is possible to prevent the predetermined information from being recorded or read from the magnetic recording layer.

(A) is a perspective view which shows the usage example of the adhesive sheet which concerns on 1st Embodiment of this invention, (B) is sectional drawing of (A). FIG. 3 is a side view of the sheet manufacturing apparatus according to the first embodiment. (A) is sectional drawing which shows the usage example of the adhesive sheet which concerns on 2nd Embodiment of this invention, (B) is a side view of the sheet manufacturing apparatus. (A) is sectional drawing which shows the usage example of the adhesive sheet which concerns on 3rd Embodiment of this invention, (B) is a side view of the sheet manufacturing apparatus. (A) is sectional drawing which shows the usage example of the adhesive sheet which concerns on 4th Embodiment of this invention, (B) is a side view of the sheet manufacturing apparatus. (A), (B) is a top view of the adhesive sheet which concerns on the modification of this invention.

Hereinafter, each embodiment of the present invention will be described with reference to the drawings.
In the second to fourth embodiments, the same components as those described in the next first embodiment and components having the same functions are denoted by the same reference numerals as those of the first embodiment. These descriptions are omitted or simplified. Moreover, in each figure, in order to make the content of the present invention easy to understand, the shape and arrangement state of each component are exaggerated.

[First Embodiment]

Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.
First, the adhesive sheet S1 as a processing sheet will be described. 1A and 1B, an adhesive sheet S1 is attached to a wafer W as a plate-like member and a ring frame RF to hold the wafer W with the ring frame RF. A base sheet BS, a magnetic recording layer ML laminated on one surface of the base sheet BS, and an adhesive layer AD laminated so as to cover the magnetic recording layer ML on the base sheet BS are provided. . The magnetic recording layer ML extends parallel to the radial direction of the base sheet BS on the outer side of the wafer W when the wafer W is attached to the center of the base sheet BS, and on the outer edge of the base sheet BS Are provided in a straight line connecting the two predetermined points.

  Predetermined information can be recorded on the magnetic recording layer ML by a magnetic writer, and the predetermined information recorded on the magnetic recording layer ML can be read by a magnetic reader. The predetermined information recorded on the magnetic recording layer ML includes, for example, the type, material, product name, code, thickness, length, width, diameter, and other standard dimensions of the adhesive sheet S1, as well as the adhesive sheet S1 and the peeling. The lot number of the second raw fabric R2 composed of the sheet RL, the quality guarantee time limit of the adhesive sheet S1, the recommended feeding speed at which the adhesive sheet S1 can be optimally delivered, and the recommended application that can optimally apply the adhesive sheet S1. The sticking conditions of the adhesive sheet S1, such as tension and recommended pressing force, and the contact information of the consultation counter for the adhesive sheet S1 and the second original fabric R2 can be exemplified.

Here, the magnetic recording layer ML is, for example, formed by uniformly dispersing magnetic powder in a binder, and examples of the binder include polyester resin, vinyl chloride resin, polyurethane resin, and vinyl chloride / vinyl acetate copolymer. However, it is not limited to these. These resins may be used alone or in combination of two or more.
On the other hand, examples of the magnetic powder include ferromagnetic materials such as γ-Fe ₂ O ₃ , barium ferrite, and strontium ferrite. In order to prevent recorded information from being erased or attenuated by a normal permanent magnet. However, it is preferable to use a high coercive force material having a coercive force of 1500 to 5000 oersted, such as barium ferrite and strontium ferrite, but the present invention is not limited thereto.

  The paint or ink for forming the magnetic recording layer ML (hereinafter sometimes referred to as a magnetic recording agent) includes, for example, the above-described binder, magnetic powder, and, if necessary, a dispersant, a curing agent, and a pigment. In addition, although obtained by dispersing in a suitable solvent, it is not limited thereto. The obtained paint or ink can be applied by any printing method such as rotary screen printing, solvent coating method, gravure printing, screen printing, and letterpress printing, intaglio printing, planographic printing, stencil printing, etc. There is no limitation as long as the ink can be laminated (coated) on the base sheet BS.

Next, the sheet manufacturing apparatus 1 for the adhesive sheet S1 will be described.
As shown in FIG. 2, the sheet manufacturing apparatus 1 includes a base sheet feeding means 10 for feeding the base sheet BS, a magnetic recording layer stacking means 20 for stacking the magnetic recording layer ML on the base sheet BS, and a magnetic recording layer. Curing means 30 for curing ML, adhesive layer forming means 40 for forming the original adhesive sheet S0 by laminating the adhesive layer AD on the base sheet BS on which the magnetic recording layer ML is laminated, and a release sheet RL Release sheet feeding means 50 for feeding, temporary attachment means 60 for temporarily attaching the release sheet RL to the original adhesive sheet S0, cutting means 70 for cutting the original adhesive sheet S0 into a predetermined shape to form the adhesive sheet S1, and an adhesive sheet Winding means 80 for winding up the unnecessary sheet S2 formed around S1, and a collecting means 90 for collecting the second original fabric R2 having a plurality of adhesive sheets S1 temporarily attached to the release sheet RL. .

  The base sheet feeding means 10 winds and supports the base sheet BS in a roll shape and is driven by a rotation motor 14 as a drive device, and the base sheet BS drawn from the support roller 11. And a driving roller 12 that is driven by a rotation motor 15 as a driving device, and a pinch roller 13 that sandwiches the base sheet BS between the driving roller 12.

The magnetic recording layer laminating means 20 is a rotary screen printer, and is provided below the base sheet BS conveyed in the left-right direction in FIG. 2, and is a cylinder that is rotatably provided by a rotation motor 23 as a driving device. A rotary screen 21, a squeegee (not shown) provided inside the rotary screen 21, and a rotary screen 21 that is disposed to face the rotary screen 21 with a base sheet BS interposed therebetween, and are rotatably provided by a rotary motor 24 as a drive device. The impression cylinder 22 is provided. The magnetic recording layer laminating means 20 rotates the rotary screen 21 and the impression cylinder 22, and squeegees the magnetic recording agent stored in the rotary screen 21 through holes (not shown) formed on the surface of the rotary screen 21. It is comprised so that it may extrude by.
The curing unit 30 is provided on the downstream side of the rotary screen 21 in the conveyance direction of the base sheet BS, and blows hot air, ultraviolet rays, infrared rays, microwaves, cold air, or the like according to the curing characteristics of the magnetic recording layer ML. ML is cured or dried.

The adhesive layer forming means 40 is a rotary screen printing machine similar to the magnetic recording layer laminating means 20, and is provided below the base sheet BS conveyed in the left-right direction in FIG. A rotary screen 41 rotatably provided by 43, a squeegee (not shown), and a rotary drum 41 disposed so as to be opposed to the rotary screen 41 with the base sheet BS interposed therebetween, and provided to be rotatable by a rotation motor 44 as a driving device. 42. The adhesive layer forming means 40 is configured to push out the adhesive stored inside the rotary screen 41 with a squeegee.
The release sheet feeding means 50 includes a support roller 51 that is wound around and supported by the release sheet RL in a roll shape and that can be rotated by a rotation motor 52 as a drive device.
The temporary attachment means 60 is rotatably provided by a rotation motor 63 as a driving device, and guides the release sheet RL delivered from the release sheet delivery means 50 in the left direction, and faces the induction roller 61. And a pinch roller 62 provided.

  The cutting means 70 includes a die cut roller 72 having a cutting blade 71 for forming a circular cut CU in the original adhesive sheet S0, and a platen roller disposed opposite to the die cut roller 72 with the original adhesive sheet S0 and the release sheet RL interposed therebetween. 73. The cutting blade 71 forms a cut CU having a depth that does not penetrate the release sheet RL from the base sheet BS side, and forms a circular adhesive sheet S1 inside the cut CU. The die cut roller 72 and the platen roller 73 are rotatably provided in synchronization with rotation motors 74 and 75 as drive devices. The cutting blade 71 is preferably subjected to non-adhesion treatment such as a fluororesin coating so that the adhesive of the original adhesive sheet S0 does not adhere.

The winding means 80 is rotatably provided by a peeling roller 81 that peels the strip-shaped unnecessary sheet S2 formed outside the cut CU by the cutting means 70 from the peeling sheet RL, and a rotation motor 83 as a driving device. A take-up roller 82 for taking up the unnecessary sheet S2 is provided.
The collection means 90 is provided with a drive roller 91 rotatably provided by a rotation motor 93 as a drive device, and a collection roller provided rotatably with a rotation motor 94 as a drive device and collecting the second original fabric R2. 92. In addition, tension applying means for applying tension to the original adhesive sheet S0 is configured by the rotation motors 15, 63, and 93.

In the above sheet manufacturing apparatus 1, as a procedure for manufacturing the second original fabric R2, first, as shown in FIG. 2, the wound base material sheet BS is set on the support roller 11 and wound. The release sheet RL is set on the support roller 51.
In this state, the rotation motors 14 and 15 are driven to rotate the support roller 11 and the drive roller 12 to feed the base sheet BS, and the rotation motors 23, 24 and 43 are synchronized with the rotation motors 14 and 15. , 44, 52, 63, 74, 75, 83, 93, 94 to drive the rotary screen 21, the pressure drum 22, the rotary screen 41, the pressure drum 42, the support roller 51, the guide roller 61, the die cut roller 72, the platen. The roller 73, the winding roller 82, the driving roller 91, and the collecting roller 92 are rotated.

When each roller rotates, the base sheet BS fed from the support roller 11 passes between the driving roller 12 and the pinch roller 13 and is sandwiched between the rotary screen 21 and the impression cylinder 22 by the magnetic recording layer laminating means 20, A magnetic recording layer ML that is a partial region and extends along the conveying direction of the base sheet BS is applied and laminated (see FIG. 1). Thus, the magnetic recording layer ML can be easily laminated by using the printing method.
Next, the base sheet BS on which the magnetic recording layer ML is laminated is conveyed to the curing means 30, and the magnetic recording layer ML is cured. The predetermined information may or may not be recorded on the magnetic recording layer ML on the upstream side or the downstream side in the conveying direction of the base sheet BS in the curing unit 30.
Thereafter, the base sheet BS on which the magnetic recording layer ML is laminated is sandwiched between the rotary screen 41 and the impression cylinder 42 by the adhesive layer forming means 40, and is applied to the base sheet BS in almost the entire area. The adhesive layer AD is applied and laminated so as to cover the magnetic recording layer ML. Thereby, the original adhesive sheet S0 having the base sheet BS, the magnetic recording layer ML, and the adhesive layer AD is formed.
Thus, by sandwiching the magnetic recording layer ML between the base sheet BS and the adhesive layer AD, even if the adhesive sheet S1 comes into contact with foreign matter, the magnetic recording layer ML can be prevented from being damaged, and magnetic recording can be performed. Problems such as failure to read the predetermined information recorded in the layer ML or failure to record the predetermined information in the magnetic recording layer ML can be suppressed.

  The formed original adhesive sheet S0 is sandwiched between the guide roller 61 and the pinch roller 62 by the temporary attachment means 60 and temporarily attached to the release sheet RL fed from the release sheet feed means 50. Thereafter, the original adhesive sheet S0 temporarily attached to the release sheet RL is formed with a cut CU by the cutting means 70 to form a circular adhesive sheet S1 and an unnecessary sheet S2. Then, the unnecessary sheet R2 of the original adhesive sheet S0 cut by the cutting means 70 is wound up by the winding means 80, and the second original fabric R2 in which a plurality of adhesive sheets S1 are temporarily attached on the release sheet RL is collected. Collected by means 90. In addition, application | coating of adhesive bond layer AD by the adhesive bond layer formation means 40 is on the surface side (upper surface side of peeling sheet RL conveyed in the left-right direction in FIG. 2) temporarily attached to original adhesive sheet S0 in peeling sheet RL. It may be configured to do. In addition, the magnetic recording layer ML may be applied by the magnetic recording layer stacking unit 20 on the adhesive layer AD applied on the release sheet RL. Furthermore, the width of the magnetic recording layer ML stacked between the base sheet BS and the adhesive layer AD is larger than the width of the magnetic recording layer ML from the adhesive layer AD side so as to be sandwiched between the base sheet BS. A wide other adhesive sheet or sheet material may be attached to protect the magnetic recording layer ML.

  According to the first embodiment as described above, since the magnetic recording layer ML is adopted as a configuration for providing the adhesive sheet S1 with a predetermined information recording function, the cost can be easily reduced. The separation of the base sheet BS and the magnetic recording layer ML is not necessary, and the adhesive sheet S1 can be easily discarded.

[Second Embodiment]
Next, 2nd Embodiment of this invention is described based on drawing.
As shown in FIG. 3A, an adhesive sheet S11 as a processing sheet according to the second embodiment includes a circular base sheet BS and an adhesive layered on the entire area of one surface of the base sheet BS. Layer AD and a magnetic recording layer ML laminated on the adhesive layer AD, and the position of the magnetic recording layer ML with respect to the base sheet BS in plan view is the magnetic recording layer of the adhesive sheet S1 of the first embodiment It is the same position as ML.

Next, the sheet manufacturing apparatus 1A for the adhesive sheet S11 will be described.
As shown in FIG. 3 (B), the sheet manufacturing apparatus 1A has a strip-shaped release sheet RL in which a strip-shaped adhesive sheet S4 having an adhesive layer AD on one surface of the strip-shaped base sheet is interposed through the adhesive layer AD. The delivery means 10A for feeding the first original fabric R11 temporarily attached to one surface of the sheet, the peeling roller 100A for peeling the release sheet RL from the belt-like adhesive sheet S4, and the release sheet RL peeled from the belt-like adhesive sheet S4 are bypassed. A detouring unit 110A including a pair of detouring rollers 111A, a magnetic recording layer laminating unit 20 for laminating the magnetic recording layer ML on the adhesive layer AD of the strip-shaped adhesive sheet S4, and a curing unit. 30 and original adhesion to a release sheet RL detoured by a guide roller 121A and a pinch roller 122A that are rotatably provided by a rotating motor 123A as a driving device And re temporary adhesion means 120A for temporary wearing over preparative S10, the cutting means 70, and a winding means 80, and a recovery unit 90.
Then, the first original fabric R11 is set as shown in FIG. In this state, when each roller is rotated to feed the first original fabric R11, the strip-shaped adhesive sheet S4 is peeled from the release sheet RL by the release roller 100A. Next, the magnetic recording layer ML is applied and stacked on the adhesive layer AD of the strip-shaped adhesive sheet S4 by the magnetic recording layer stacking means 20. Thereafter, the magnetic recording layer ML is cured by the curing means 30, whereby the original adhesive sheet S10 is formed. Then, the original adhesive sheet S10 is re-temporarily attached to the delamination release sheet RL by the re-temporary attaching means 120A.
The original adhesive sheet S10 temporarily attached to the release sheet RL is formed with a cut CU by the cutting means 70, a circular adhesive sheet S11 and an unnecessary sheet S12 are formed, and the unnecessary sheet S12 is wound by the winding means 80. The second original fabric R12 on which the plurality of adhesive sheets S11 are temporarily attached on the release sheet RL is recovered by the recovery means 90. Note that the application of the magnetic recording layer ML by the magnetic recording layer stacking means 20 is performed on the release surface side of the strip-shaped adhesive sheet S4 peeled from the strip-shaped adhesive sheet S4 (the release sheet RL conveyed in the left-right direction in FIG. 3). May be configured to be performed on the upper surface side). Also, another adhesive sheet or sheet material wider than the width of the magnetic recording layer ML is pasted so that the magnetic recording layer ML laminated on the adhesive layer AD is sandwiched between the adhesive layer AD, The magnetic recording layer ML may be protected.

[Third Embodiment]
Next, 3rd Embodiment of this invention is described based on drawing.
As shown in FIG. 4A, an adhesive sheet S21 as a processing sheet of the third embodiment is an adhesive layered on a circular base sheet BS and the entire area of one surface of the base sheet BS. A layer AD and a magnetic recording layer ML laminated on the other surface of the base sheet BS, and the position of the magnetic recording layer ML with respect to the base sheet BS in plan view is the position of the adhesive sheet S1 of the first embodiment. The position is the same as that of the magnetic recording layer ML.

Next, the sheet manufacturing apparatus 1B for the adhesive sheet S21 will be described.
As shown in FIG. 4B, the sheet manufacturing apparatus 1B includes a feeding unit 10A, a magnetic recording layer laminating unit 20B in which a rotary screen 21 is provided on the base sheet BS side of the first original fabric R11, and a rotary screen. 21 includes a curing means 30B, a cutting means 70, a winding means 80, and a collecting means 90 provided on the downstream side in the conveying direction of the base sheet BS.
Then, the first original fabric R11 is set as shown in FIG. In this state, when each roller is rotated to feed out the first original fabric R11, the magnetic recording layer ML is laminated on the base sheet BS of the belt-like adhesive sheet S4 by the magnetic recording layer laminating means 20B. Next, the magnetic recording layer ML is cured by the curing unit 30B, whereby the original adhesive sheet S20 in which the magnetic recording layer ML is laminated on the base sheet BS of the belt-shaped adhesive sheet S4 is formed. Thereafter, the original adhesive sheet S20 is formed with a cut CU by the cutting means 70, a circular adhesive sheet S21 and an unnecessary sheet S22 are formed, and the unnecessary sheet S22 is taken up by the winding means 80, and the release sheet RL The second original fabric R22 on which the plurality of adhesive sheets S21 are temporarily attached is collected by the collecting means 90. In addition, another magnetic sheet wider than the width of the magnetic recording layer ML is pasted so that the magnetic recording layer ML laminated on the base sheet BS is sandwiched between the magnetic recording layer ML, and the magnetic recording layer You may comprise so that ML may be protected.

[Fourth Embodiment]
Next, 4th Embodiment of this invention is described based on drawing.
As shown in FIG. 5A, an adhesive sheet S31 as a processing sheet according to the fourth embodiment is a circular base sheet BS and a magnetic bond laminated on the entire region of one surface of the base sheet BS. And an agent layer AML.
The magnetic adhesive layer AML has a function of bonding the base sheet BS and the ring frame RF and a function of recording predetermined information by a magnetic writer, and the predetermined information recorded on the magnetic adhesive layer AML is magnetic. It can be read by a reader. The predetermined information recorded on the magnetic adhesive layer AML can be exemplified by the same information recorded on the magnetic recording layer ML.

  Here, as a magnetic adhesive for forming the magnetic adhesive layer AML, a solvent containing a metal nitrate complex of Fe (iron), Mn (manganese), and Zn (zinc) and an amino acid is heated. The obtained spinel type Mn—Zn ferrite powder is mixed with at least one of thermosetting silicone resin, epoxy resin, moisture curable resin, acrylic resin, and ultraviolet curable resin at a volume fraction of 25 mass% to 70 mass%. Can be illustrated. In the above mixing, the average particle size of the magnetic powder is 15 μm or less, preferably 10 μm or less, so that it has smooth fluidity and coating properties, and the magnetic flux leakage is reduced. Magnetic adhesive is obtained.

Next, the sheet manufacturing apparatus 1C for the adhesive sheet S31 will be described.
As shown in FIG. 5 (B), the sheet manufacturing apparatus 1C laminates the base sheet feeding means 10 and the magnetic adhesive layer AML on one surface of the base sheet BS fed from the base sheet feeding means 10. Magnetic adhesive layer laminating means 130C, curing means 30C for curing the magnetic adhesive layer AML, release sheet feeding means 50, temporary attachment means 60, cutting means 70, winding means 80, and recovery means 90 And.
The magnetic adhesive layer laminating means 130C has the same configuration as the adhesive layer forming means 40, and the only difference is that the material applied to the base sheet BS is different between the adhesive and the magnetic adhesive.
The curing means 30C has the same configuration as the curing means 30, and the only object to be cured is the magnetic recording layer ML and the magnetic adhesive layer AML.
Then, the base sheet BS and the release sheet RL are set as shown in FIG. In this state, when each roller is rotated to feed the base sheet BS, the magnetic adhesive layer AML is stacked on the base sheet BS by the magnetic adhesive layer stacking means 130C. Next, the magnetic adhesive layer AML is cured by the curing means 30C, thereby forming the original adhesive sheet S30 in which the magnetic adhesive layer AML is laminated on the base sheet BS. Thereafter, the release sheet RL is temporarily attached to the original adhesive sheet S30 by the temporary attachment means 60, the cut CU is formed by the cutting means 70, the circular adhesive sheet S31 and the unnecessary sheet S32 are formed, and the winding means 80 Then, the unnecessary sheet S32 is wound up, and the second original fabric R32 in which the plurality of adhesive sheets S31 are temporarily attached onto the release sheet RL is collected by the collecting means 90. The magnetic adhesive layer AML is applied by the magnetic adhesive layer laminating means 130C on the surface side temporarily attached to the original adhesive sheet S0 in the release sheet RL (upper side of the release sheet RL conveyed in the left-right direction in FIG. 5). ). In addition, an adhesive sheet or a sheet material is applied so that the magnetic adhesive layer AML in the entire region or a partial region where the adherend such as the wafer W or the ring frame RF is not attached is sandwiched between the base sheet BS. Then, the magnetic adhesive layer AML may be protected.

  According to the fourth embodiment as described above, since the magnetic adhesive layer AML is adopted as the configuration in which the information recording function and the adhesive function are provided in the adhesive sheet S31, the cost can be easily reduced. The separation between the base sheet BS and the magnetic adhesive layer AML becomes unnecessary, and the adhesive sheet S31 can be easily discarded.

As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

For example, as shown in FIG. 6A, the arrangement position of the magnetic recording layer ML of the first to third embodiments may be only one place so as to extend linearly within the surface of the adhesive sheet S1. As shown in FIG. 6 (B), four locations may be provided so as to extend in the tangential direction of the wafer W and surround the wafer W. In particular, as shown in FIG. 6B, the plurality of magnetic recording layers ML are provided in a straight line extending in different directions in a plan view of the adhesive sheet S1, so that the conveyance direction of the adhesive sheet S1 is different. It is possible to prevent the predetermined information from being recorded or read from the magnetic recording layer ML of the sheet S1.
Further, a plurality of magnetic recording layers ML may be formed in parallel.
Further, the shape of the magnetic recording layer ML is not limited to a linear shape, and is not limited to a circular shape, an elliptical diameter, a polygonal shape, a shape obtained by combining these shapes, or the like. That is, since the magnetic recording layer ML is formed by a printing method, the magnetic recording layer ML can have a more complicated and fine shape.
Furthermore, although the cutting means 70 is provided in the sheet manufacturing apparatuses 1, 1A, 1B, and 1C, the cutting means 70 may not be provided.
Further, the adhesive layer AD and the magnetic adhesive layer AML may be made of an energy ray curable material that is cured with energy rays such as ultraviolet rays and microwaves.
Further, the magnetic recording layer ML may be provided at a position overlapping the wafer W.
Further, the magnetic recording layer laminating means 20, 20B, the adhesive layer forming means 40, and the magnetic adhesive layer laminating means 130C can adopt a coating method other than rotary screen printing, for example, solvent coating method, gravure printing, Any printing method such as screen printing, letterpress printing, intaglio printing, lithographic printing, stencil printing, etc. can be adopted, and there is no limitation as long as the material to be laminated can be laminated (coated) on the laminate. .
Furthermore, the adhesive sheets S1, S11, S21, and S31 are not limited to those that hold the wafer W with the ring frame RF, and may be attached only to the wafer W or other things. The planar shape is not limited to a circle, and can be appropriately changed according to the shape and demand of the adherend, such as a polygon or an ellipse.

  In addition, the types and materials of the adhesive sheets S1, S11, S21, and S31 in the present invention are not particularly limited. For example, those having an intermediate layer between the base sheet BS and the adhesive layer AD, Three or more layers such as having layers may be used. Further, the adhesive sheets S1, S11, S21, and S31 may be a protective sheet, a dicing tape, a die attach film, or the like. Examples of the semiconductor wafer include a silicon semiconductor wafer and a compound semiconductor wafer. The adhesive sheet to be attached to such a semiconductor wafer is not limited to a protective sheet, a dicing tape, and a die attach film, but any other sheet, film, or tape. An adhesive sheet having an arbitrary use and shape can be applied. Further, the plate member may be an optical disk substrate, and the adhesive sheet may have a resin layer constituting the recording layer. As described above, as a plate-like member, not only a glass plate, a steel plate, a resin plate, a substrate, and other members, but also other forms of members and articles can be targeted.

  The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 1,1A, 1B, 1C ... Sheet manufacturing apparatus AD ... Adhesive layer AML ... Magnetic adhesive layer BS ... Base material sheet ML ... Magnetic recording layer S1, S11, S21, S31 ... Adhesive sheet (sheet for processing)
W ... Wafer (plate member)

Claims (7)

A sheet for processing a plate-like member to be attached to a plate-like member to be subjected to predetermined processing,
A base sheet;
A magnetic recording layer capable of recording predetermined information;
A sheet for processing a plate-like member, comprising an adhesive layer.   The sheet for processing a plate-like member according to claim 1, wherein the magnetic recording layer is laminated between the base sheet and the adhesive layer. A plurality of the magnetic recording layers are provided,
3. The sheet for processing a plate-like member according to claim 1, wherein the plurality of magnetic recording layers are provided in a straight line extending in different directions in a plan view of the base material sheet. . A sheet for processing a plate-like member to be attached to a plate-like member to be subjected to predetermined processing,
A base sheet;
A sheet for processing a plate-like member, comprising: a magnetic adhesive layer that is laminated on one surface of the base sheet and capable of recording predetermined information. A method for manufacturing a sheet for processing a plate-like member to be affixed to a plate-like member subjected to predetermined processing,
Laminating a magnetic recording layer capable of recording predetermined information on one surface of the base sheet;
And a step of laminating an adhesive layer on one surface side of the base sheet so as to cover the magnetic recording layer. A method for manufacturing a sheet for processing a plate-like member to be affixed to a plate-like member subjected to predetermined processing,
A step of laminating an adhesive layer on one surface of the base sheet;
And a step of laminating a magnetic recording layer capable of recording predetermined information on the adhesive layer. A method for manufacturing a sheet for processing a plate-like member to be affixed to a plate-like member subjected to predetermined processing,
A method for producing a sheet for processing a plate-like member, comprising a step of laminating a magnetic adhesive layer capable of recording predetermined information on one surface of a base sheet.

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