JP2013033028A5 - - Google Patents
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- JP2013033028A5 JP2013033028A5 JP2012129946A JP2012129946A JP2013033028A5 JP 2013033028 A5 JP2013033028 A5 JP 2013033028A5 JP 2012129946 A JP2012129946 A JP 2012129946A JP 2012129946 A JP2012129946 A JP 2012129946A JP 2013033028 A5 JP2013033028 A5 JP 2013033028A5
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- 238000007689 inspection Methods 0.000 claims description 5
- 238000005286 illumination Methods 0.000 description 7
- 239000006059 cover glass Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
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Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012129946A JP6032696B2 (ja) | 2011-06-30 | 2012-06-07 | 貼り合せ板状体検査装置及び方法 |
| KR1020120063026A KR101374440B1 (ko) | 2011-06-30 | 2012-06-13 | 첩합 판상체 검사 장치 및 방법 |
| TW101121770A TWI485358B (zh) | 2011-06-30 | 2012-06-18 | Closure plate body inspection apparatus and method |
| CN201210217090.0A CN102866157B (zh) | 2011-06-30 | 2012-06-27 | 贴合板状体检查装置以及方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011146833 | 2011-06-30 | ||
| JP2011146833 | 2011-06-30 | ||
| JP2012129946A JP6032696B2 (ja) | 2011-06-30 | 2012-06-07 | 貼り合せ板状体検査装置及び方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013033028A JP2013033028A (ja) | 2013-02-14 |
| JP2013033028A5 true JP2013033028A5 (enExample) | 2014-07-24 |
| JP6032696B2 JP6032696B2 (ja) | 2016-11-30 |
Family
ID=47789012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012129946A Expired - Fee Related JP6032696B2 (ja) | 2011-06-30 | 2012-06-07 | 貼り合せ板状体検査装置及び方法 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6032696B2 (enExample) |
| KR (1) | KR101374440B1 (enExample) |
| TW (1) | TWI485358B (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017224670A (ja) * | 2016-06-14 | 2017-12-21 | 株式会社ディスコ | 保護部材形成装置 |
| JP7137439B2 (ja) * | 2018-11-02 | 2022-09-14 | 株式会社安永 | 検査装置、検査方法、及び検査プログラム |
| TWI779268B (zh) | 2019-02-28 | 2022-10-01 | 日商Ihi股份有限公司 | 超音波探傷裝置 |
| JP7709877B2 (ja) * | 2021-09-15 | 2025-07-17 | 株式会社Screenホールディングス | 端部状態確認装置 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH055710A (ja) * | 1991-06-18 | 1993-01-14 | Fuji Electric Co Ltd | 瓶口天面の外観検査における2値化用しきい値の決定方法 |
| JP3332096B2 (ja) * | 1992-11-17 | 2002-10-07 | 株式会社東芝 | 欠陥検査方法および装置 |
| JP3342143B2 (ja) * | 1993-03-19 | 2002-11-05 | オリンパス光学工業株式会社 | プリズム異物検出方法 |
| JPH08189903A (ja) * | 1995-01-10 | 1996-07-23 | Sekisui Chem Co Ltd | 気泡検査装置 |
| JPH08285789A (ja) * | 1995-04-18 | 1996-11-01 | Nippon Sheet Glass Co Ltd | 欠点検出方法における2値化レベルの決定方法 |
| JP3048342B2 (ja) * | 1997-08-19 | 2000-06-05 | 三菱化学株式会社 | 透明板中の気泡検出装置 |
| JP3551188B2 (ja) * | 2002-01-10 | 2004-08-04 | オムロン株式会社 | 表面状態検査方法および基板検査装置 |
| JP4044770B2 (ja) | 2002-02-22 | 2008-02-06 | 芝浦メカトロニクス株式会社 | 基板貼合装置および基板貼合方法 |
| JP2004170329A (ja) * | 2002-11-22 | 2004-06-17 | Nippon Steel Corp | バンプ電極およびバンプ電極用ボール検査方法 |
| JP2004257776A (ja) | 2003-02-25 | 2004-09-16 | Kiyousera Opt Kk | 光透過体検査装置 |
| JP4581424B2 (ja) * | 2004-02-24 | 2010-11-17 | パナソニック電工株式会社 | 外観検査方法及び画像処理装置 |
| JP2007013112A (ja) * | 2005-06-01 | 2007-01-18 | Technos Kk | 基板検査装置及び検査方法 |
| TWI277719B (en) * | 2005-08-03 | 2007-04-01 | Chi-Cheng Ye | Image inspection method and structure for attachment machine |
-
2012
- 2012-06-07 JP JP2012129946A patent/JP6032696B2/ja not_active Expired - Fee Related
- 2012-06-13 KR KR1020120063026A patent/KR101374440B1/ko not_active Expired - Fee Related
- 2012-06-18 TW TW101121770A patent/TWI485358B/zh not_active IP Right Cessation
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