JP2012532217A - 半導体製造用部品 - Google Patents

半導体製造用部品 Download PDF

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Publication number
JP2012532217A
JP2012532217A JP2012517886A JP2012517886A JP2012532217A JP 2012532217 A JP2012532217 A JP 2012532217A JP 2012517886 A JP2012517886 A JP 2012517886A JP 2012517886 A JP2012517886 A JP 2012517886A JP 2012532217 A JP2012532217 A JP 2012532217A
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JP
Japan
Prior art keywords
mat
polymer
pat
article
fibers
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012517886A
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English (en)
Japanese (ja)
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JP2012532217A5 (zh
Inventor
ジェイ デビッド ブーズ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Publication of JP2012532217A publication Critical patent/JP2012532217A/ja
Publication of JP2012532217A5 publication Critical patent/JP2012532217A5/ja
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
    • C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
    • C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
    • C08L27/18—Homopolymers or copolymers or tetrafluoroethene
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/04—Reinforcing macromolecular compounds with loose or coherent fibrous material
    • C08J5/0405—Reinforcing macromolecular compounds with loose or coherent fibrous material with inorganic fibres
    • C08J5/042—Reinforcing macromolecular compounds with loose or coherent fibrous material with inorganic fibres with carbon fibres
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/04—Reinforcing macromolecular compounds with loose or coherent fibrous material
    • C08J5/06—Reinforcing macromolecular compounds with loose or coherent fibrous material using pretreated fibrous materials
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K7/00—Use of ingredients characterised by shape
    • C08K7/02—Fibres or whiskers
    • C08K7/04—Fibres or whiskers inorganic
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
    • C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
    • C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
    • D—TEXTILES; PAPER
    • D21—PAPER-MAKING; PRODUCTION OF CELLULOSE
    • D21H—PULP COMPOSITIONS; PREPARATION THEREOF NOT COVERED BY SUBCLASSES D21C OR D21D; IMPREGNATING OR COATING OF PAPER; TREATMENT OF FINISHED PAPER NOT COVERED BY CLASS B31 OR SUBCLASS D21G; PAPER NOT OTHERWISE PROVIDED FOR
    • D21H13/00—Pulp or paper, comprising synthetic cellulose or non-cellulose fibres or web-forming material
    • D21H13/36—Inorganic fibres or flakes
    • D21H13/38—Inorganic fibres or flakes siliceous
    • D21H13/44—Flakes, e.g. mica, vermiculite
    • D—TEXTILES; PAPER
    • D21—PAPER-MAKING; PRODUCTION OF CELLULOSE
    • D21H—PULP COMPOSITIONS; PREPARATION THEREOF NOT COVERED BY SUBCLASSES D21C OR D21D; IMPREGNATING OR COATING OF PAPER; TREATMENT OF FINISHED PAPER NOT COVERED BY CLASS B31 OR SUBCLASS D21G; PAPER NOT OTHERWISE PROVIDED FOR
    • D21H13/00—Pulp or paper, comprising synthetic cellulose or non-cellulose fibres or web-forming material
    • D21H13/36—Inorganic fibres or flakes
    • D21H13/46—Non-siliceous fibres, e.g. from metal oxides
    • D21H13/50—Carbon fibres
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2327/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers
    • C08J2327/02—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment
    • C08J2327/12—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2327/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers
    • C08J2327/02—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment
    • C08J2327/12—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
    • C08J2327/18—Homopolymers or copolymers of tetrafluoroethylene
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00—Specific properties of additives
    • C08K2201/014—Additives containing two or more different additives of the same subgroup in C08K

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Reinforced Plastic Materials (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Nonwoven Fabrics (AREA)
JP2012517886A 2009-07-02 2010-06-30 半導体製造用部品 Pending JP2012532217A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US22277009P 2009-07-02 2009-07-02
US61/222,770 2009-07-02
PCT/US2010/040574 WO2011002867A1 (en) 2009-07-02 2010-06-30 Semiconductor manufacture component

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015089342A Division JP2015131976A (ja) 2009-07-02 2015-04-24 半導体製造用部品

Publications (2)

Publication Number Publication Date
JP2012532217A true JP2012532217A (ja) 2012-12-13
JP2012532217A5 JP2012532217A5 (zh) 2013-08-15

Family

ID=42588264

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2012517886A Pending JP2012532217A (ja) 2009-07-02 2010-06-30 半導体製造用部品
JP2015089342A Pending JP2015131976A (ja) 2009-07-02 2015-04-24 半導体製造用部品

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2015089342A Pending JP2015131976A (ja) 2009-07-02 2015-04-24 半導体製造用部品

Country Status (6)

Country Link
EP (1) EP2449004A1 (zh)
JP (2) JP2012532217A (zh)
KR (2) KR20170018479A (zh)
CN (2) CN104844993A (zh)
SG (1) SG177442A1 (zh)
WO (1) WO2011002867A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021079724A1 (ja) * 2019-10-23 2021-04-29 ダイキン工業株式会社 半導体洗浄装置用部材

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109537161A (zh) * 2018-11-19 2019-03-29 扬州超峰汽车内饰件有限公司 一种热塑碳纤维复合板材及生产方法
CN117412862A (zh) 2021-03-04 2024-01-16 杜邦特种产品美国有限公司 复合材料以及用于形成该复合材料的方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6440533A (en) * 1987-08-05 1989-02-10 Nippon Synthetic Chem Ind Surface treating agent for glass fiber
JPH02129229A (ja) * 1988-11-10 1990-05-17 Toho Rayon Co Ltd 炭素繊維チョップドストランド及びその製造法
JPH07503983A (ja) * 1992-01-16 1995-04-27 イー・アイ・デユポン・ドウ・ヌムール・アンド・カンパニー フルオロ重合体複合体の製造方法
JP2002266173A (ja) * 2001-03-09 2002-09-18 Mitsubishi Rayon Co Ltd 炭素繊維および炭素繊維強化複合材料
JP2002531660A (ja) * 1998-12-09 2002-09-24 呉羽化学工業株式会社 合成樹脂組成物
JP2008069474A (ja) * 2006-09-13 2008-03-27 Teijin Ltd 補強材・放熱材に適する炭素繊維集合体

Family Cites Families (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3159526A (en) 1960-11-21 1964-12-01 Hoover Ball & Bearing Co Laminated board and method of making the same
US3458329A (en) 1963-02-13 1969-07-29 Minnesota Mining & Mfg Ceramic greensheets
US3298887A (en) 1964-07-23 1967-01-17 Hoover Ball & Bearing Co Method of manufacturing laminate sheet
CA1000179A (en) * 1971-11-24 1976-11-23 Edwin D. Lowthian Composite structures of knitted glass fabric and thermoplastic resin sheet
US4163742A (en) 1978-02-09 1979-08-07 E. I. Du Pont De Nemours And Company Process and product prepared from tetrafluoroethylene resin and graphite fibers
US4369083A (en) 1980-12-15 1983-01-18 Nazeer Ahmed Method of forming composite laminates
US4455343A (en) 1980-12-29 1984-06-19 Ppg Industries, Inc. Aqueous treating composition for glass fiber strands used to produce mats for thermoplastics
JPS5841973A (ja) 1981-09-07 1983-03-11 東邦レーヨン株式会社 炭素繊維用エマルジヨン型サイジング剤
JPS6047953B2 (ja) 1982-07-05 1985-10-24 東レ株式会社 高次加工性並びにコンポジツト物性に優れた炭素繊維
US4448911A (en) 1983-04-12 1984-05-15 Owens-Corning Fiberglas Corporation Aqueous epoxy sizing composition for glass fibers and fibers sized therewith
US4448910A (en) 1983-04-25 1984-05-15 Owens-Corning Fiberglas Corporation Aqueous compositions for sizing glass fibers containing emulsified epoxy resin and chloropropylsilane
DE3734180C2 (de) 1987-10-09 1998-01-29 Kuesters Eduard Maschf Doppelbandpresse zur Herstellung von Holzspanplatten und dergleichen
US4975321A (en) 1988-06-20 1990-12-04 E. I. Du Pont De Nemours And Company Structural composites of fluoropolymers reinforced with continuous filament fibers
US5227238A (en) 1988-11-10 1993-07-13 Toho Rayon Co., Ltd. Carbon fiber chopped strands and method of production thereof
US5253571A (en) 1990-06-01 1993-10-19 Maschinenfabrik J. Dieffenbacher Gmbh & Co. Method for guiding steel bands about a longitudinal axis of a continuously working press
DE4042531C3 (de) 1990-10-15 2002-02-07 Dieffenbacher Gmbh Maschf Kontinuierlich arbeitende Presse
JP2545171B2 (ja) 1991-12-16 1996-10-16 日東紡績株式会社 樹脂被覆炭素繊維チョップドストランド
US5506052A (en) 1992-01-16 1996-04-09 E. I. Du Pont De Nemours And Company Fluoropolymer material
US5470409A (en) 1992-01-16 1995-11-28 E. I. Du Pont De Nemours And Company Process for making fluoropolymer composites
US5232975A (en) 1992-01-16 1993-08-03 E. I. Du Pont De Nemours And Company Preconsolidation process for making fluoropolymer composites
US5236982A (en) 1992-07-13 1993-08-17 Owens-Corning Fiberglas Technology, Inc. Size composition
DE4301594C2 (de) 1993-01-21 2002-10-31 Dieffenbacher Gmbh Maschf Verfahren und Anlage zur Herstellung von Spanplatten
DE4301844C2 (de) 1993-01-23 1996-10-02 Held Kurt Verfahren und Vorrichtung zur Herstellung bahnförmiger Gemische bzw. Bahnen
US5427731A (en) 1993-01-28 1995-06-27 E. I. Du Pont De Nemours And Company Compression molding of structures
DE9320609U1 (de) 1993-05-18 1994-10-20 Siempelkamp Gmbh & Co Kontinuierlich arbeitende Presse für das Pressen von Preßgutmatten und Preßgutbahnen im Zuge der Herstellung von Spanplatten, Faserplatten, Laminatplatten u.dgl.
CA2130588A1 (en) 1993-08-25 1995-02-26 Masanobu Kobayashi Carbon fibers and process for preparing same
ATA185093A (de) 1993-09-14 2000-06-15 Danubia Petrochem Polymere Doppelbandpresse mit hydrostatischer bandstütze
US5555799A (en) 1994-08-24 1996-09-17 Teledyne Industries, Inc. Non-stick laminating endless belt press
DE4433641C1 (de) 1994-09-21 1995-11-02 Siempelkamp Gmbh & Co Kontinuierliche Presse zum Verpressen von Preßgutmatten zu Preßgutplatten
US5451784A (en) 1994-10-31 1995-09-19 Applied Materials, Inc. Composite diagnostic wafer for semiconductor wafer processing systems
DE19518879A1 (de) 1995-05-28 1996-12-05 Dieffenbacher Gmbh Maschf Verfahren und Anlage zur Herstellung von Spanplatten
JP3496347B2 (ja) 1995-07-13 2004-02-09 株式会社デンソー 半導体装置及びその製造方法
JP3562152B2 (ja) * 1995-07-14 2004-09-08 三菱化学株式会社 炭素短繊維集合体及びその製造方法並びに繊維強化樹脂組成物
US5759927A (en) 1995-07-24 1998-06-02 Meeker; Brian L. Glass-fiber-containing non-woven polymer web, and process for preparing same
US5803968A (en) 1995-08-21 1998-09-08 Schwartz; Vladimir Compact disc spin coater
DE19627024B4 (de) 1996-07-04 2007-08-02 Dieffenbacher Gmbh + Co. Kg Verfahren und Anlage zum kontinuierlichen Zusammenlegen und Verleimen von Furniertafeln zu Furnierschichtplatten
US6066395A (en) 1997-05-23 2000-05-23 Toray Industries, Inc. Chopped carbon fibers and a production process there of
US6032446A (en) 1998-04-06 2000-03-07 Deere & Company Densification method and apparatus for harvested cotton or other similar fibrous material
US6231818B1 (en) 1998-12-08 2001-05-15 Unifrax Corporation Amorphous non-intumescent inorganic fiber mat for low temperature exhaust gas treatment devices
CA2325374C (en) 1999-06-21 2007-11-27 Andrzej Marek Klemarewski System and method for making compressed wood product
US6520843B1 (en) 1999-10-27 2003-02-18 Strasbaugh High planarity chemical mechanical planarization
US20060105164A1 (en) * 2000-06-06 2006-05-18 Nitto Denko Corporation Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them
TW591157B (en) 2001-05-25 2004-06-11 Mitsubishi Rayon Co Sizing agent for carbon fiber, its water dispersing solution, carbon fiber with sizing handling, sheet matter with using the carbon fiber and carbon fiber reinforced composite
TWI220147B (en) 2001-07-24 2004-08-11 Mitsubishi Rayon Co Sizing agent for carbon fibers and water dispersion thereof, sized carbon fibers, sheet-like articles using said carbon fibers, and carbon fiber enhanced composite material
DE60227188D1 (de) 2001-07-31 2008-07-31 Mitsubishi Rayon Co Zum schlichten von carbonfaser, geschlichtete carbonfaser und darauf basierende maschen- oder webware
AT411258B (de) 2001-11-07 2003-11-25 Hoerbiger Kompressortech Serv Dichtelemente für kompressorventile
US20060130767A1 (en) 2004-12-22 2006-06-22 Applied Materials, Inc. Purged vacuum chuck with proximity pins
US20090062426A1 (en) 2005-03-25 2009-03-05 Teijin Techno Products Limited Carbon Fiber Strand for Reinforcing Thermoplastic Resins and Method of Producing the Same
US20090061193A1 (en) * 2005-04-19 2009-03-05 Teijin Limited Carbon fiber composite sheet, use thereof as a heat conductor and pitch-based carbon fiber web sheet for use in the same
US20070082199A1 (en) 2005-10-11 2007-04-12 Schweizer Robert A Fiber size, sized reinforcements, and articles reinforced with such reinforcements
JP4810382B2 (ja) * 2005-11-11 2011-11-09 日信工業株式会社 熱可塑性樹脂組成物及びその製造方法
JP4557309B2 (ja) * 2007-03-16 2010-10-06 日東電工株式会社 クリーニング部材又はシート、及びこれらを用いたクリーニング方法
US8080171B2 (en) 2007-06-01 2011-12-20 Ocv Intellectual Capital, Llc Wet-laid chopped strand fiber mat for roofing mat
JP4900117B2 (ja) 2007-07-30 2012-03-21 東京エレクトロン株式会社 現像装置、現像方法及び記憶媒体

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6440533A (en) * 1987-08-05 1989-02-10 Nippon Synthetic Chem Ind Surface treating agent for glass fiber
JPH02129229A (ja) * 1988-11-10 1990-05-17 Toho Rayon Co Ltd 炭素繊維チョップドストランド及びその製造法
JPH07503983A (ja) * 1992-01-16 1995-04-27 イー・アイ・デユポン・ドウ・ヌムール・アンド・カンパニー フルオロ重合体複合体の製造方法
JP2002531660A (ja) * 1998-12-09 2002-09-24 呉羽化学工業株式会社 合成樹脂組成物
JP2002266173A (ja) * 2001-03-09 2002-09-18 Mitsubishi Rayon Co Ltd 炭素繊維および炭素繊維強化複合材料
JP2008069474A (ja) * 2006-09-13 2008-03-27 Teijin Ltd 補強材・放熱材に適する炭素繊維集合体

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021079724A1 (ja) * 2019-10-23 2021-04-29 ダイキン工業株式会社 半導体洗浄装置用部材
JP2021068891A (ja) * 2019-10-23 2021-04-30 ダイキン工業株式会社 半導体洗浄装置用部材

Also Published As

Publication number Publication date
CN102471501B (zh) 2015-04-29
EP2449004A1 (en) 2012-05-09
KR20170018479A (ko) 2017-02-17
JP2015131976A (ja) 2015-07-23
CN104844993A (zh) 2015-08-19
WO2011002867A1 (en) 2011-01-06
CN102471501A (zh) 2012-05-23
SG177442A1 (en) 2012-02-28
KR20120106712A (ko) 2012-09-26

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