JP2012531044A - 亜臨界剪断減粘性iv族系ナノ粒子流体 - Google Patents
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- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
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- H01L21/02381—Silicon, silicon germanium, germanium
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Abstract
Description
本出願は、その全開示内容が参照によって組み込まれる、2009年6月17日に出願された米国仮特許出願第61/187,731号、および2009年6月29日に出願された米国非仮特許出願第12/493,946号の利点を請求する。
K=Hugins係数である。
一般に、Kは、粒子間の凝集度および電気化学力によって変化し、5.0=K=15である。粘度の測定されたデータは、ということが比較後に見出される。2007年8月21〜24日の8th Asian Thermophysical Properties Conferenceにおいて提出されたHuaqing Xie, Lifei ChenおよびQingRen Wu著, Measurements of the viscosity of suspensions (nanofluids)containing nanosized Al2O3 particles。
図1をここで参照すると、本発明によって、一群のペーストについて粘度が剪断速度と比較される。1/sec単位の剪断速度102が水平軸に沿って示され、一方KcP単位の粘度104が縦軸に沿って示される。粘度は剪断速度の関数として測定され、シリコンナノ粒子の影響を示す。
図3をここで参照すると、本発明によって粘度と一群のシリコンナノ粒子配合量とを比較する簡略図が示される。mg/ml単位のシリコンナノ粒子配合量302が水平軸に沿って示され、一方cP単位の粘度304が縦軸に沿って示される。
Claims (28)
- シリコンナノ粒子流体であって、
一群のシリコンナノ粒子を含み、前記一群のシリコンナノ粒子が前記シリコンナノ粒子流体の約1重量%〜約20重量%の量で存在し、
一群のHMW分子を含み、前記一群のHMW分子が前記シリコンナノ粒子流体の約0重量%〜約10重量%の量で存在し、
一群のキャッピング剤分子を含み、前記一群のキャッピング剤分子の少なくとも一部のキャッピング剤分子が前記一群のシリコンナノ粒子に結合している、シリコンナノ粒子流体。 - 前記一群のシリコンナノ粒子が、前記シリコンナノ粒子流体の約2重量%〜約15重量%の量で存在する、請求項1に記載のシリコンナノ粒子流体。
- 前記一群のシリコンナノ粒子が、前記シリコンナノ粒子流体の約4重量%〜約10重量%の量で存在する、請求項1に記載のシリコンナノ粒子流体。
- 前記一群のHMW分子が、前記シリコンナノ粒子流体の約0重量%〜約4重量%の量で存在する、請求項1に記載のシリコンナノ粒子流体。
- 前記一群のHMW分子が、前記シリコンナノ粒子流体の約0.5重量%〜約2重量%の量で存在する、請求項1に記載のシリコンナノ粒子流体。
- 前記一群のキャッピング剤分子が、一群のアルコール分子および一群のケトン分子の少なくとも一方を含む、請求項1に記載のシリコンナノ粒子流体。
- 前記一群のアルコール分子が、前記シリコンナノ粒子流体の90重量%までの量で存在する、請求項6に記載のシリコンナノ粒子流体。
- 前記一群のアルコール分子が、前記シリコンナノ粒子流体の80重量%までの量で存在する、請求項6に記載のシリコンナノ粒子流体。
- 前記一群のアルコール分子が、シリコンナノ粒子流体の70重量%までの量で存在する、請求項6に記載のシリコンナノ粒子流体。
- 前記一群のアルコール分子が、一群の環状アルコール分子、一群の直鎖状アルコール分子、および一群の分枝状アルコール分子の少なくとも1つを含む、請求項6に記載のシリコンナノ粒子流体。
- 前記一群のケトン分子が、一群の環状ケトン分子、一群の直鎖状ケトン分子、および一群の分枝状ケトン分子の少なくとも一方を含む、請求項6に記載のシリコンナノ粒子流体。
- 前記一群のナノ粒子が、ドープされたおよびドープされていないナノ粒子の一方である、請求項1に記載のシリコンナノ粒子流体。
- 前記一群のナノ粒子がホウ素およびリンの一方でドープされる、請求項1に記載のシリコンナノ粒子流体。
- 前記一群のHMW分子がエチルセルロースを含む、請求項1に記載のシリコンナノ粒子流体。
- 前記シリコンナノ粒子流体が約10sec-1の剪断速度において約5KcP〜約20KcPの粘度を有する、請求項1に記載のシリコンナノ粒子流体。
- IV族系ナノ粒子流体であって、
一群のナノ粒子を構成する一群のIV族原子を含み、前記一群のナノ粒子が前記ナノ粒子流体の約1重量%〜約20重量%の量で存在し、
一群のHMW分子を含み、前記一群のHMW分子が前記ナノ粒子流体の約0重量%〜約5重量%の量で存在し、
一群のキャッピング剤分子を含み、前記一群のキャッピング剤分子の少なくとも一部のキャッピング剤分子が前記一群のナノ粒子に結合している、IV族系ナノ粒子流体。 - 亜臨界剪断減粘性ナノ粒子流体を用いてシリコン基板上にデュアルドープトエミッターを形成するための方法であって、前記シリコン基板が前面と裏面とを含み、前記方法が、
前記シリコン基板をテキスチャー化する工程と、
前記シリコン基板を清浄化する工程と、
前記亜臨界剪断減粘性ナノ粒子流体を前記前面上に堆積する工程と、
約150℃〜約800℃の第1の温度においておよび約1分〜約60分の第1の時間の間前記シリコン基板を焼成する工程と、
前記シリコン基板を約800℃〜約950℃の第2の温度においておよび約30分〜約180分の第2の時間の間POCl3、N2、およびO2の雰囲気を有する拡散炉内のドーパント源に暴露して、PSG層が形成される工程と、
前記PSG層を除去する工程と、
反射防止コーティングを前記前面上に堆積する工程と、
一群の前部金属コンタクトを前記前面上におよび一群の裏部金属コンタクトを前記裏面上に堆積する工程と
を含む方法。 - 前記シリコン基板をテキスチャー化する前に、前記シリコン基板を硫酸溶液中で予備清浄化する工程をさらに含む、請求項17に記載の方法。
- 前記亜臨界剪断減粘性ナノ粒子流体を前記シリコン基板上に堆積する前に、前記シリコン基板をHF/HClまたはBOEの一方で予備清浄化する工程をさらに含む、請求項17に記載の方法。
- 前記シリコン基板をテキスチャー化する前記工程が、前記シリコン基板をH2O、IPA、およびKOHを含む溶液に暴露する工程を含む、請求項17に記載の方法。
- 前記シリコン基板を清浄化する前記工程が、前記シリコン基板をSC−2、ピラニア、BOE、およびH2Oの溶液に暴露する工程を含む、請求項17に記載の方法。
- 前記シリコン基板を前記ドーパント源に暴露する前に、前記シリコン基板をHF、HF/HCl、BOE、SC−1、SC−2、およびHClの少なくとも1つで清浄化する工程をさらに含む、請求項17に記載の方法。
- 前記亜臨界剪断減粘性ナノ粒子流体を前記前面上に堆積する前記工程が、スクリーン印刷機を使用する工程を含む、請求項17に記載の方法。
- 前記シリコン基板を前記第1の温度において焼成する工程が、ベルト炉、管状炉、または対流炉の1つで行なわれる、請求項17に記載の方法。
- 前記シリコン基板を前記第1の温度において焼成する工程が、空気、酸素と窒素との混合物、および窒素の1つを含む環境内で行なわれる、請求項17に記載の方法。
- 前記亜臨界剪断減粘性ナノ粒子流体を堆積する工程が、約0.04mg/cm2〜約3.0mg/cm2の単位基板表面績当りの質量を堆積する工程を包含する、請求項17に記載の方法。
- 前記亜臨界剪断減粘性ナノ粒子流体を堆積する工程が、約0.2mg/cm2〜約2.0mg/cm2の単位基板表面績当りの質量を堆積する工程を包含する、請求項17に記載の方法。
- 前記亜臨界剪断減粘性ナノ粒子流体を堆積する工程が、約0.4mg/cm2〜約1.5mg/cm2の単位基板表面績当りの質量を堆積する工程を包含する、請求項17に記載の方法。
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PCT/US2010/038596 WO2010147931A1 (en) | 2009-06-17 | 2010-06-15 | Sub-critical shear thinning group iv based nanoparticle fluid |
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JP (1) | JP2012531044A (ja) |
KR (1) | KR101433482B1 (ja) |
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US7910393B2 (en) | 2011-03-22 |
US9496136B2 (en) | 2016-11-15 |
WO2010147931A1 (en) | 2010-12-23 |
TWI538939B (zh) | 2016-06-21 |
KR101433482B1 (ko) | 2014-08-22 |
CN102460601A (zh) | 2012-05-16 |
KR20120047907A (ko) | 2012-05-14 |
EP2443631A1 (en) | 2012-04-25 |
US20100136771A1 (en) | 2010-06-03 |
US20110012066A1 (en) | 2011-01-20 |
TW201114818A (en) | 2011-05-01 |
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CN102460601B (zh) | 2016-05-11 |
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