JP2012525681A5 - - Google Patents

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Publication number
JP2012525681A5
JP2012525681A5 JP2012508468A JP2012508468A JP2012525681A5 JP 2012525681 A5 JP2012525681 A5 JP 2012525681A5 JP 2012508468 A JP2012508468 A JP 2012508468A JP 2012508468 A JP2012508468 A JP 2012508468A JP 2012525681 A5 JP2012525681 A5 JP 2012525681A5
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JP
Japan
Prior art keywords
light beam
light
base
array
beam alignment
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JP2012508468A
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English (en)
Japanese (ja)
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JP5432368B2 (ja
JP2012525681A (ja
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Priority claimed from US12/432,999 external-priority patent/US8066389B2/en
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Publication of JP2012525681A publication Critical patent/JP2012525681A/ja
Publication of JP2012525681A5 publication Critical patent/JP2012525681A5/ja
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Publication of JP5432368B2 publication Critical patent/JP5432368B2/ja
Expired - Fee Related legal-status Critical Current
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JP2012508468A 2009-04-30 2010-04-21 拡散補正機能付ビーム整列室 Expired - Fee Related JP5432368B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/432,999 US8066389B2 (en) 2009-04-30 2009-04-30 Beam alignment chamber providing divergence correction
US12/432,999 2009-04-30
PCT/US2010/001181 WO2010126573A1 (en) 2009-04-30 2010-04-21 Beam alignment chamber providing divergence correction

Publications (3)

Publication Number Publication Date
JP2012525681A JP2012525681A (ja) 2012-10-22
JP2012525681A5 true JP2012525681A5 (enExample) 2013-06-06
JP5432368B2 JP5432368B2 (ja) 2014-03-05

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JP2012508468A Expired - Fee Related JP5432368B2 (ja) 2009-04-30 2010-04-21 拡散補正機能付ビーム整列室

Country Status (6)

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US (1) US8066389B2 (enExample)
EP (1) EP2425292B1 (enExample)
JP (1) JP5432368B2 (enExample)
CN (1) CN102414599A (enExample)
TW (1) TWI456258B (enExample)
WO (1) WO2010126573A1 (enExample)

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