JP2012518183A5 - - Google Patents
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- Publication number
- JP2012518183A5 JP2012518183A5 JP2011551078A JP2011551078A JP2012518183A5 JP 2012518183 A5 JP2012518183 A5 JP 2012518183A5 JP 2011551078 A JP2011551078 A JP 2011551078A JP 2011551078 A JP2011551078 A JP 2011551078A JP 2012518183 A5 JP2012518183 A5 JP 2012518183A5
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- silicon substrate
- network
- sensor network
- storage element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 29
- 229910052710 silicon Inorganic materials 0.000 claims description 29
- 239000010703 silicon Substances 0.000 claims description 29
- 239000000758 substrate Substances 0.000 claims description 23
- 238000004891 communication Methods 0.000 claims description 22
- 238000012544 monitoring process Methods 0.000 claims description 9
- 239000004020 conductor Substances 0.000 claims description 8
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 4
- 238000000926 separation method Methods 0.000 claims description 3
- 239000002070 nanowire Substances 0.000 claims 1
- 239000011787 zinc oxide Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 7
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/389,196 | 2009-02-19 | ||
| US12/389,196 US7948147B2 (en) | 2009-02-19 | 2009-02-19 | Sensor network incorporating stretchable silicon |
| PCT/US2010/020301 WO2010096209A1 (en) | 2009-02-19 | 2010-01-07 | Sensor network incorporating stretchable silicon |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012518183A JP2012518183A (ja) | 2012-08-09 |
| JP2012518183A5 true JP2012518183A5 (enExample) | 2012-12-27 |
| JP5568099B2 JP5568099B2 (ja) | 2014-08-06 |
Family
ID=42060535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011551078A Active JP5568099B2 (ja) | 2009-02-19 | 2010-01-07 | ストレッチャブルシリコンが組み込まれたセンサネットワーク |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US7948147B2 (enExample) |
| EP (1) | EP2399114B1 (enExample) |
| JP (1) | JP5568099B2 (enExample) |
| CN (1) | CN102326064B (enExample) |
| WO (1) | WO2010096209A1 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8201773B1 (en) * | 2008-07-02 | 2012-06-19 | The United States Of America As Represented By Secretary Of The Navy | Flexible self-erecting substructures for sensor networks |
| US8510234B2 (en) * | 2010-01-05 | 2013-08-13 | American Gnc Corporation | Embedded health monitoring system based upon Optimized Neuro Genetic Fast Estimator (ONGFE) |
| FR2971054B1 (fr) * | 2011-01-31 | 2014-01-17 | Eads Europ Aeronautic Defence | Dispositif de surveillance de l'integrite et de la sante d'une structure mecanique et procede de fonctionnement d'un tel dispositif |
| WO2015037350A1 (ja) * | 2013-09-10 | 2015-03-19 | 株式会社村田製作所 | センサ |
| US10022073B2 (en) * | 2015-03-20 | 2018-07-17 | Intel Corproation | Wearable apparatus with a stretch sensor |
| US9838436B2 (en) * | 2015-03-30 | 2017-12-05 | Gulfstream Aerospace Corporation | Aircraft data networks |
| EP3839032A1 (en) | 2019-12-20 | 2021-06-23 | Imec VZW | A semiconductor cell culture device and a system for three-dimensional cell culture |
| US12492003B2 (en) | 2021-08-27 | 2025-12-09 | Goodrich Corporation | Integrated ice protection with prognostics and health management |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4849668A (en) * | 1987-05-19 | 1989-07-18 | Massachusetts Institute Of Technology | Embedded piezoelectric structure and control |
| US5374011A (en) * | 1991-11-13 | 1994-12-20 | Massachusetts Institute Of Technology | Multivariable adaptive surface control |
| US6420819B1 (en) * | 1994-01-27 | 2002-07-16 | Active Control Experts, Inc. | Packaged strain actuator |
| US6404107B1 (en) * | 1994-01-27 | 2002-06-11 | Active Control Experts, Inc. | Packaged strain actuator |
| US6831017B1 (en) * | 2002-04-05 | 2004-12-14 | Integrated Nanosystems, Inc. | Catalyst patterning for nanowire devices |
| US6952042B2 (en) * | 2002-06-17 | 2005-10-04 | Honeywell International, Inc. | Microelectromechanical device with integrated conductive shield |
| US6870236B2 (en) * | 2003-05-20 | 2005-03-22 | Honeywell International, Inc. | Integrated resistor network for multi-functional use in constant current or constant voltage operation of a pressure sensor |
| US7231180B2 (en) * | 2004-03-24 | 2007-06-12 | Honeywell International, Inc. | Aircraft engine sensor network using wireless sensor communication modules |
| JP4701451B2 (ja) * | 2004-09-24 | 2011-06-15 | 独立行政法人物質・材料研究機構 | 炭化珪素膜で被覆された硫化亜鉛ナノケーブルおよびその製造方法 |
| JP5031313B2 (ja) * | 2005-11-01 | 2012-09-19 | シャープ株式会社 | 外部環境ナノワイヤセンサおよび外部環境ナノワイヤセンサの製造方法 |
| US7278319B2 (en) * | 2005-11-10 | 2007-10-09 | Honeywell International Inc. | Pressure and temperature sensing element |
| US7276703B2 (en) * | 2005-11-23 | 2007-10-02 | Lockheed Martin Corporation | System to monitor the health of a structure, sensor nodes, program product, and related methods |
| US20070125176A1 (en) * | 2005-12-02 | 2007-06-07 | Honeywell International, Inc. | Energy harvesting device and methods |
| KR101074779B1 (ko) * | 2005-12-29 | 2011-10-19 | 삼성에스디아이 주식회사 | 탄소나노튜브를 이용하는 반도체 전극, 그의 제조방법 및그를 포함하는 태양전지 |
| US7834424B2 (en) * | 2006-09-12 | 2010-11-16 | The Board Of Trustees Of The Leland Stanford Junior University | Extendable connector and network |
| KR20080064004A (ko) * | 2007-01-03 | 2008-07-08 | 삼성전자주식회사 | 초음파 에너지를 이용한 ＺｎＯ 나노와이어의 제조방법 |
| WO2008156606A2 (en) * | 2007-06-12 | 2008-12-24 | Adrian Pelkus | Thin film piezoelectric wave power generation system |
-
2009
- 2009-02-19 US US12/389,196 patent/US7948147B2/en active Active
-
2010
- 2010-01-07 CN CN201080008438.4A patent/CN102326064B/zh active Active
- 2010-01-07 JP JP2011551078A patent/JP5568099B2/ja active Active
- 2010-01-07 WO PCT/US2010/020301 patent/WO2010096209A1/en not_active Ceased
- 2010-01-07 EP EP10701948.1A patent/EP2399114B1/en active Active
-
2011
- 2011-04-12 US US13/084,729 patent/US8966730B1/en active Active
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