JP2012516578A - 酸化窓層を備えた高効率のiii−v族化合物半導体の太陽電池装置 - Google Patents
酸化窓層を備えた高効率のiii−v族化合物半導体の太陽電池装置 Download PDFInfo
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- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 claims description 14
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 13
- 238000009279 wet oxidation reaction Methods 0.000 claims description 13
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 12
- 230000001590 oxidative effect Effects 0.000 claims description 11
- 239000000969 carrier Substances 0.000 claims description 9
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- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 claims description 6
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- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 5
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 claims description 5
- 239000006117 anti-reflective coating Substances 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 5
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 claims description 5
- 229910005540 GaP Inorganic materials 0.000 claims description 4
- AJGDITRVXRPLBY-UHFFFAOYSA-N aluminum indium Chemical compound [Al].[In] AJGDITRVXRPLBY-UHFFFAOYSA-N 0.000 claims description 4
- 229910052732 germanium Inorganic materials 0.000 claims description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 3
- 229910001882 dioxygen Inorganic materials 0.000 claims description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
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- 239000005083 Zinc sulfide Substances 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- -1 steam Chemical compound 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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Abstract
Description
far blue end)すなわち紫外線領域などの第4波長117は窓層109に吸収されてしまい、第4範囲の波長117は装置100のセルユニット103、105、及び107のいずれにも透過されない。従って、従来装置100の効率は窓層109によって減少する。さらに、太陽電池装置における1つの大きな損失の仕組みは、高密度の表面状態によってホールや電子などの光発生キャリアが太陽電池装置の上面において再結合することである。従来の窓層は約2.0
eVのバンドギャップを持つ。バンドギャップがもっと広ければ、光発生キャリアの再結合を減少させることによって太陽電池装置100の効率は向上するはずである。しかし、従来の太陽電池装置100において、GaAs基板に格子整合した2.0
eVを超えるバンドギャップを持つ物質を成長させるのは困難である。
アンチモン化ガリウム(GaSb)、他の任意のIII-V族化合物半導体物質、またはそれら物質の組み合わせから形成できる。
eVのより長い、すなわち拡張したバンドギャップを持つことに気がついた。このより広いバンドギャップにより、電子とホールとが太陽電池装置の上面で再結合するのが防止される。このより広いバンドギャップは、さらに、太陽スペクトルの遠青端すなわち紫外線領域における窓層の光学的透明度を向上させ、従ってこれらの波長の窓層通過を可能とする。以前の装置では、これらの波長は、酸化されていない窓層によって典型的には吸収されてしまう。窓層の酸化は、図2Bを参照して後述する。
結果的に、酸化された窓層209は太陽電池装置200の効率を向上させる。
Claims (28)
- III-V族化合物半導体の太陽電池装置を製造するための方法であって、
太陽スペクトルの所定の波長を吸収するよう構成された少なくとも1つのセルユニットを、III-V族化合物半導体物質から形成する段階と、
前記太陽電池装置の上面における光発生キャリアの再結合を防止するために窓層を前記セルユニットの上に形成する段階と、
前記窓層を酸化された窓層に転換するため前記窓層を酸化させる段階とを含む、方法。 - 前記窓層は湿式酸化処理を用いて酸化される、請求項1に記載の方法。
- 前記酸化された窓層のバンドギャップは前記窓層のバンドギャップより大きい、請求項1に記載の方法。
- 前記酸化された窓層のバンドギャップは約4.0eVである、請求項1に記載の方法。
- 前記窓層はAl含有III-V族化合物半導体物質である、請求項1に記載の方法。
- 前記窓層は、InAlP窓層またはAlGaAs窓層である、請求項1に記載の方法。
- 前記酸化された窓層は、前記太陽スペクトルの第2範囲の波長を前記セルユニットまで透過させて前記セルユニットの光ルミネセンス(PL)強度を増加させ、前記第2範囲の波長は前記窓層に吸収される、請求項1に記載の方法。
- 前記第2範囲の波長は、前記太陽スペクトルの遠青端の波長である、請求項7に記載の方法。
- 前記セルユニットは、ひ化ガリウム(GaAs)と、りん化ガリウムインジウム(Ga1-xInxP)と、ひ化ガリウムインジウム(Ga1-xInxAs)と、りん化インジウム(InP)と、ひ化りん化インジウムガリウム(Ga1-xInxAs1-yPy)と、アルミニウムインジウムガリウムリン((AlxGa1-x)1-yInyP)とのうち任意のものから形成される、請求項1に記載の方法。
- 前記太陽電池装置は複数のセルユニットを含み、それぞれのセルユニットが、前記太陽スペクトルの異なる波長を吸収するよう構成されている、請求項1に記載の方法。
- 前記セルがその上に形成される基板を提供する段階をさらに含み、前記基板がひ化ガリウム(GaAs)、りん化インジウム(InP)、またはゲルマニウム(Ge)で形成される、請求項1に記載の方法。
- 酸化させる前記段階が、
金属導電物質との電気的接触を向上させるために前記窓層の上にキャップ層を設ける段階と、
前記キャップ層をエッチングする段階と、
前記窓層の露出部分を酸化する段階とを含み、前記露出部分は前記キャップ層のエッチングされた部分に対応する、請求項11に記載の方法。 - 前記金属導電物質を前記キャップ層の上に設ける段階と、
反射防止コーティングを前記酸化された窓層に施す段階とをさらに含む、請求項12に記載の方法。 - 前記基板の底面に裏面接点を設ける段階をさらに含む、請求項13に記載の方法。
- 前記窓層を酸化させる前記段階が、
前記窓層を、その選択した部分を酸化させるのに十分な温度で且つ十分な時間にわたって湿った環境に暴露する段階を含む請求項1に記載の方法。 - 前記湿った環境が、水蒸気と、酸素ガスと、不活性ガスとを含む、請求項15に記載の方法。
- 前記十分な温度が約300℃と約600℃との間の範囲である、請求項15に記載の方法。
- 前記十分な時間が約20分から約6時間の範囲である、請求項15に記載の方法。
- 太陽電池装置であって、
III-V族化合物半導体物質から形成されると共に、太陽スペクトルの所定の波長を吸収するよう構成された少なくとも1つのセルユニットと、
前記太陽電池装置の上面における光発生キャリアの再結合を防止するために前記セルユニットの上に設けられた酸化された窓層とを含む、太陽電池装置。 - 前記酸化された窓層のバンドギャップは約4.0eVである、請求項19に記載の太陽電池装置。
- 前記酸化された窓層は、Al含有III-V族化合物半導体物質を含む、請求項19に記載の太陽電池装置。
- 前記窓層は、InAlP物質またはAlGaAs物質を含む、請求項19に記載の太陽電池装置。
- 前記セルユニットは、ひ化ガリウム(GaAs)と、りん化ガリウムインジウム(Ga1-xInxP)と、ひ化ガリウムインジウム(Ga1-xInx
As)と、りん化インジウム(InP)と、ひ化りん化インジウムガリウム(Ga1-xInxAs1-yPy)と、アルミニウムインジウムガリウムリン((AlxGa1-x)1-yInyP)とのうち任意のものから形成される、請求項19に記載の太陽電池装置。 - 前記装置は複数のセルユニットを含み、それぞれのセルユニットが、前記太陽スペクトルの異なる波長を吸収するよう構成されている、請求項19に記載の太陽電池装置。
- 前記セルユニットがその上に形成される基板をさらに含み、前記基板がひ化ガリウム(GaAs)、りん化インジウム(InP)、またはゲルマニウム(Ge)のうち少なくとも1つで形成される、請求項19に記載の太陽電池装置。
- 前記窓層上に設けられたキャップ層であって、その上に設けられた金属導電物質との電気的接触を向上させるキャップ層をさらに含む、請求項19に記載の太陽電池装置。
- 前記基板の底面に設けられた裏面接点をさらに含む、請求項19に記載の太陽電池装置。
- 前記窓層は湿式酸化処理を用いて酸化される、請求項19に記載の太陽電池装置。
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EP2966692A1 (en) | 2014-07-11 | 2016-01-13 | Ricoh Company, Ltd. | Compound-semiconductor photovoltaic cell and manufacturing method of compound-semiconductor photovoltaic cell |
US9243179B2 (en) | 2013-02-18 | 2016-01-26 | Ricoh Company, Ltd. | Reaction material and chemical heat pump |
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Also Published As
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EP2392030A1 (en) | 2011-12-07 |
IL214311A (en) | 2017-04-30 |
US20120227798A1 (en) | 2012-09-13 |
AU2010208225B2 (en) | 2015-11-05 |
EP2392030B1 (en) | 2020-04-15 |
US9356162B2 (en) | 2016-05-31 |
WO2010088370A1 (en) | 2010-08-05 |
CA2750656C (en) | 2016-08-23 |
CA2750656A1 (en) | 2010-08-05 |
US20100186822A1 (en) | 2010-07-29 |
AU2010208225A1 (en) | 2011-08-18 |
IL214311A0 (en) | 2011-09-27 |
EP2392030A4 (en) | 2013-10-30 |
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