JP2012255774A5 - - Google Patents

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Publication number
JP2012255774A5
JP2012255774A5 JP2012113991A JP2012113991A JP2012255774A5 JP 2012255774 A5 JP2012255774 A5 JP 2012255774A5 JP 2012113991 A JP2012113991 A JP 2012113991A JP 2012113991 A JP2012113991 A JP 2012113991A JP 2012255774 A5 JP2012255774 A5 JP 2012255774A5
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array
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fiducial
interest
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JP2012113991A
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Japanese (ja)
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JP6108684B2 (ja
JP2012255774A (ja
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JP2012113991A 2011-06-08 2012-05-18 局所領域ナビゲーション用の高精度ビーム配置 Active JP6108684B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161494828P 2011-06-08 2011-06-08
US61/494,828 2011-06-08

Publications (3)

Publication Number Publication Date
JP2012255774A JP2012255774A (ja) 2012-12-27
JP2012255774A5 true JP2012255774A5 (enExample) 2015-07-09
JP6108684B2 JP6108684B2 (ja) 2017-04-05

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JP2012113991A Active JP6108684B2 (ja) 2011-06-08 2012-05-18 局所領域ナビゲーション用の高精度ビーム配置

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EP (1) EP2533278A3 (enExample)
JP (1) JP6108684B2 (enExample)
CN (1) CN102820238B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9601303B2 (en) * 2015-08-12 2017-03-21 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device and method for inspecting and/or imaging a sample
US9576772B1 (en) * 2015-08-31 2017-02-21 Fei Company CAD-assisted TEM prep recipe creation
US10409171B2 (en) * 2017-01-25 2019-09-10 Kla-Tencor Corporation Overlay control with non-zero offset prediction
CN110340877B (zh) * 2019-07-11 2021-02-05 深圳市杉川机器人有限公司 移动机器人及其定位方法和计算机可读存储介质
US10903044B1 (en) * 2020-02-12 2021-01-26 Applied Materials Israel Ltd. Filling empty structures with deposition under high-energy SEM for uniform DE layering
US11645831B2 (en) * 2020-07-07 2023-05-09 Applied Materials Israel Ltd. Identification of an array in a semiconductor specimen
CN114494028B (zh) * 2020-11-12 2022-12-09 生物岛实验室 粒子束成像降噪方法及装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5401972A (en) * 1993-09-02 1995-03-28 Schlumberger Technologies, Inc. Layout overlay for FIB operations
JP2003016988A (ja) * 2001-06-27 2003-01-17 Fujitsu Ltd フォーカストイオンビーム装置及びそれを利用したフォーカストイオンビーム加工方法
US7002513B2 (en) * 2004-03-26 2006-02-21 Topcon Gps, Llc Estimation and resolution of carrier wave ambiguities in a position navigation system
JP4571053B2 (ja) * 2005-09-29 2010-10-27 株式会社日立ハイテクノロジーズ 荷電粒子ビーム装置
JP5069904B2 (ja) * 2006-03-28 2012-11-07 株式会社日立ハイテクノロジーズ 指定位置特定方法及び指定位置測定装置
US7351966B1 (en) * 2006-05-23 2008-04-01 International Business Machines Corporation High-resolution optical channel for non-destructive navigation and processing of integrated circuits
US7442916B2 (en) * 2006-08-25 2008-10-28 Avago Technologies General Ip (Singapore) Pte. Ltd. Lift detection adapted for navigation on a transparent structure
WO2010042916A2 (en) * 2008-10-12 2010-04-15 Fei Company High accuracy beam placement for local area navigation
JP2010123354A (ja) * 2008-11-18 2010-06-03 Hitachi High-Technologies Corp 荷電粒子線装置

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