JP2012253269A5 - - Google Patents

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Publication number
JP2012253269A5
JP2012253269A5 JP2011126442A JP2011126442A JP2012253269A5 JP 2012253269 A5 JP2012253269 A5 JP 2012253269A5 JP 2011126442 A JP2011126442 A JP 2011126442A JP 2011126442 A JP2011126442 A JP 2011126442A JP 2012253269 A5 JP2012253269 A5 JP 2012253269A5
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JP
Japan
Prior art keywords
receiving
substrate
substrate holder
portions
receiving unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011126442A
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English (en)
Japanese (ja)
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JP2012253269A (ja
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Publication date
Application filed filed Critical
Priority to JP2011126442A priority Critical patent/JP2012253269A/ja
Priority claimed from JP2011126442A external-priority patent/JP2012253269A/ja
Publication of JP2012253269A publication Critical patent/JP2012253269A/ja
Publication of JP2012253269A5 publication Critical patent/JP2012253269A5/ja
Pending legal-status Critical Current

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JP2011126442A 2011-06-06 2011-06-06 基板ホルダ及び基板貼り合わせ装置 Pending JP2012253269A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011126442A JP2012253269A (ja) 2011-06-06 2011-06-06 基板ホルダ及び基板貼り合わせ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011126442A JP2012253269A (ja) 2011-06-06 2011-06-06 基板ホルダ及び基板貼り合わせ装置

Publications (2)

Publication Number Publication Date
JP2012253269A JP2012253269A (ja) 2012-12-20
JP2012253269A5 true JP2012253269A5 (https=) 2014-07-31

Family

ID=47525800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011126442A Pending JP2012253269A (ja) 2011-06-06 2011-06-06 基板ホルダ及び基板貼り合わせ装置

Country Status (1)

Country Link
JP (1) JP2012253269A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6731805B2 (ja) * 2016-07-12 2020-07-29 東京エレクトロン株式会社 接合システム
JP7678099B2 (ja) * 2021-02-01 2025-05-15 エーファウ・グループ・エー・タルナー・ゲーエムベーハー 基板ホルダおよび接合のための基板ホルダを製造する方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5305220B2 (ja) * 2007-11-12 2013-10-02 株式会社ニコン 基板張り合わせ装置
JP2010045071A (ja) * 2008-08-08 2010-02-25 Nikon Corp 検知装置、基板保持部材、搬送装置および接合装置
JP5493713B2 (ja) * 2009-10-30 2014-05-14 株式会社ニコン 基板ホルダ、基板貼り合わせ装置、基板ホルダ対および搬送装置

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