JP2012237909A5 - - Google Patents

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Publication number
JP2012237909A5
JP2012237909A5 JP2011107731A JP2011107731A JP2012237909A5 JP 2012237909 A5 JP2012237909 A5 JP 2012237909A5 JP 2011107731 A JP2011107731 A JP 2011107731A JP 2011107731 A JP2011107731 A JP 2011107731A JP 2012237909 A5 JP2012237909 A5 JP 2012237909A5
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JP
Japan
Prior art keywords
layer
microlens
pattern
forming
alignment
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Application number
JP2011107731A
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English (en)
Japanese (ja)
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JP2012237909A (ja
JP5836637B2 (ja
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Priority to JP2011107731A priority Critical patent/JP5836637B2/ja
Priority claimed from JP2011107731A external-priority patent/JP5836637B2/ja
Priority to US13/113,230 priority patent/US8283192B2/en
Publication of JP2012237909A publication Critical patent/JP2012237909A/ja
Publication of JP2012237909A5 publication Critical patent/JP2012237909A5/ja
Application granted granted Critical
Publication of JP5836637B2 publication Critical patent/JP5836637B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011107731A 2010-06-02 2011-05-13 パターン形成方法、固体撮像装置及び固体撮像装置の製造方法 Expired - Fee Related JP5836637B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011107731A JP5836637B2 (ja) 2011-05-13 2011-05-13 パターン形成方法、固体撮像装置及び固体撮像装置の製造方法
US13/113,230 US8283192B2 (en) 2010-06-02 2011-05-23 Method of forming pattern and method of producing solid-state image pickup device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011107731A JP5836637B2 (ja) 2011-05-13 2011-05-13 パターン形成方法、固体撮像装置及び固体撮像装置の製造方法

Publications (3)

Publication Number Publication Date
JP2012237909A JP2012237909A (ja) 2012-12-06
JP2012237909A5 true JP2012237909A5 (zh) 2014-06-26
JP5836637B2 JP5836637B2 (ja) 2015-12-24

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ID=47460845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011107731A Expired - Fee Related JP5836637B2 (ja) 2010-06-02 2011-05-13 パターン形成方法、固体撮像装置及び固体撮像装置の製造方法

Country Status (1)

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JP (1) JP5836637B2 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6222989B2 (ja) * 2013-05-22 2017-11-01 キヤノン株式会社 電子装置の製造方法
JP6266402B2 (ja) * 2014-03-27 2018-01-24 株式会社ディスコ 積層デバイスの製造方法
JP6595788B2 (ja) * 2015-04-06 2019-10-23 キヤノン株式会社 固体撮像装置の製造方法及び固体撮像装置ならびにカメラ
JP7356184B2 (ja) 2022-02-18 2023-10-04 有限会社アキュラス 光吸収体の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000002805A (ja) * 1998-06-16 2000-01-07 Citizen Watch Co Ltd カラーフィルタ基板とカラーフィルタ基板の製造方法
JP4497076B2 (ja) * 2005-10-14 2010-07-07 凸版印刷株式会社 固体撮像素子及びその製造方法
JP2008032912A (ja) * 2006-07-27 2008-02-14 Dainippon Printing Co Ltd マイクロレンズの製造方法
JP4167707B2 (ja) * 2006-08-08 2008-10-22 エルピーダメモリ株式会社 半導体装置の製造方法
JP4927024B2 (ja) * 2008-04-28 2012-05-09 シャープ株式会社 マイクロレンズの形成方法、アライメントマーク最適化方法、固体撮像装置の製造方法、および電子情報機器

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