JP2012225912A5 - - Google Patents
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- JP2012225912A5 JP2012225912A5 JP2012089980A JP2012089980A JP2012225912A5 JP 2012225912 A5 JP2012225912 A5 JP 2012225912A5 JP 2012089980 A JP2012089980 A JP 2012089980A JP 2012089980 A JP2012089980 A JP 2012089980A JP 2012225912 A5 JP2012225912 A5 JP 2012225912A5
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- JP
- Japan
- Prior art keywords
- scale
- layer
- substrate
- carrier layer
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000000758 substrate Substances 0.000 claims description 69
- 229910052751 metal Inorganic materials 0.000 claims description 49
- 239000002184 metal Substances 0.000 claims description 49
- 239000000463 material Substances 0.000 claims description 38
- 230000035699 permeability Effects 0.000 claims description 37
- 230000005291 magnetic effect Effects 0.000 claims description 36
- 230000005284 excitation Effects 0.000 claims description 33
- 238000004804 winding Methods 0.000 claims description 30
- 230000005294 ferromagnetic effect Effects 0.000 claims description 14
- 229910000831 Steel Inorganic materials 0.000 claims description 10
- 230000005674 electromagnetic induction Effects 0.000 claims description 10
- 239000010959 steel Substances 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 7
- 238000005097 cold rolling Methods 0.000 claims description 6
- 238000005096 rolling process Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 5
- 230000005672 electromagnetic field Effects 0.000 claims description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- QUQFTIVBFKLPCL-UHFFFAOYSA-L copper;2-amino-3-[(2-amino-2-carboxylatoethyl)disulfanyl]propanoate Chemical compound [Cu+2].[O-]C(=O)C(N)CSSCC(N)C([O-])=O QUQFTIVBFKLPCL-UHFFFAOYSA-L 0.000 claims 1
- 239000003302 ferromagnetic material Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 164
- 238000000034 method Methods 0.000 description 15
- 238000010438 heat treatment Methods 0.000 description 12
- 230000035515 penetration Effects 0.000 description 11
- 239000011230 binding agent Substances 0.000 description 8
- 230000008901 benefit Effects 0.000 description 6
- 229910000595 mu-metal Inorganic materials 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000002390 adhesive tape Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000001953 recrystallisation Methods 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- 241000668842 Lepidosaphes gloverii Species 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000012876 carrier material Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000005098 hot rolling Methods 0.000 description 1
- UGKDIUIOSMUOAW-UHFFFAOYSA-N iron nickel Chemical compound [Fe].[Ni] UGKDIUIOSMUOAW-UHFFFAOYSA-N 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000414 obstructive effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102011007756A DE102011007756A1 (de) | 2011-04-20 | 2011-04-20 | Positionsmesseinrichtung sowie Maßstab und Verfahren zur Herstellung eines Maßstabs |
| DE102011007756.1 | 2011-04-20 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012225912A JP2012225912A (ja) | 2012-11-15 |
| JP2012225912A5 true JP2012225912A5 (enExample) | 2015-05-28 |
| JP6298589B2 JP6298589B2 (ja) | 2018-03-20 |
Family
ID=45528983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012089980A Active JP6298589B2 (ja) | 2011-04-20 | 2012-04-11 | エンコーダ並びにスケール及びスケールを製造するための方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8844152B2 (enExample) |
| EP (1) | EP2515086B1 (enExample) |
| JP (1) | JP6298589B2 (enExample) |
| CN (1) | CN102749023B (enExample) |
| DE (1) | DE102011007756A1 (enExample) |
| ES (1) | ES2567781T3 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011007756A1 (de) * | 2011-04-20 | 2012-10-25 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung sowie Maßstab und Verfahren zur Herstellung eines Maßstabs |
| US8739424B2 (en) * | 2011-06-24 | 2014-06-03 | Mitutoyo Corporation | Structure for protecting scale graduations |
| GB201311856D0 (en) * | 2013-07-02 | 2013-08-14 | Gill Res And Dev Ltd | A position indicator device |
| CN105492872B (zh) * | 2013-07-23 | 2017-11-14 | 巴鲁夫公司 | 用于来自磁条长度测量系统的传感器信号的动态线性化的方法 |
| DE102014217458A1 (de) * | 2014-09-02 | 2016-03-03 | Schaeffler Technologies AG & Co. KG | Encoder und Sensorvorrichtung für ein drehbares Maschinenteil |
| ES2618855T3 (es) * | 2014-10-14 | 2017-06-22 | Dr. Johannes Heidenhain Gmbh | Dispositivo de medición de posición con dispositivo para la compensación de errores por dilatación térmica de una regla graduada |
| DE102017123772B4 (de) * | 2017-10-12 | 2019-06-19 | Paul Tutzu | Elektromagnetisches Messsystem für die Erfassung von Länge und Winkel basierend auf dem Magnetoimpedanzeffekt |
| DE102018211402A1 (de) | 2018-07-10 | 2020-01-16 | Dr. Johannes Heidenhain Gmbh | Induktive Positionsmesseinrichtung |
| DE102020214235A1 (de) * | 2020-11-12 | 2022-05-12 | Robert Bosch Gesellschaft mit beschränkter Haftung | Induktive Positionssensoreinrichtung, Antriebseinrichtung |
| JP2022125006A (ja) * | 2021-02-16 | 2022-08-26 | 株式会社ミツトヨ | スケールおよびその製造方法 |
| DE102022102338A1 (de) * | 2021-02-16 | 2022-08-18 | Mitutoyo Corporation | Skala und Verfahren zu ihrer Herstellung |
| EP4567381A1 (de) | 2023-12-07 | 2025-06-11 | Dr. Johannes Heidenhain GmbH | Induktive positionsmesseinrichtung |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2043919A5 (enExample) * | 1969-05-02 | 1971-02-19 | Cii | |
| DE3347052A1 (de) * | 1983-12-24 | 1985-07-04 | Robert Bosch Gmbh, 7000 Stuttgart | Verfahren und vorrichtung zur messempfindlichkeitserhoehung von beruehrungsfrei arbeitenden wegmesssensoren |
| JPS61159101A (ja) * | 1984-10-19 | 1986-07-18 | コルモーゲン コーポレイション | 位置および速度センサ |
| US4893077A (en) * | 1987-05-28 | 1990-01-09 | Auchterlonie Richard C | Absolute position sensor having multi-layer windings of different pitches providing respective indications of phase proportional to displacement |
| EP0743508A2 (en) | 1995-05-16 | 1996-11-20 | Mitutoyo Corporation | Induced current position transducer |
| DE19947277A1 (de) * | 1999-09-30 | 2001-04-05 | Heidenhain Gmbh Dr Johannes | Positionsmeßsystem mit integriertem Beschleunigungssensor |
| JP3668406B2 (ja) * | 2000-03-13 | 2005-07-06 | 株式会社ミツトヨ | 電磁誘導型位置検出装置 |
| EP1164358B1 (de) * | 2000-06-16 | 2005-08-24 | AMO Automatisierung Messtechnik Optik GmbH | Induktives Längenmesssystem |
| DE20011223U1 (de) * | 2000-06-26 | 2000-10-05 | Kindler, Ulrich, Prof. Dr.-Ing., 22143 Hamburg | Vorrichtung zur berührungslosen Wegmessung, insbesondere zur Stellungs- und Bewegungserfassung |
| JP4435613B2 (ja) * | 2003-10-14 | 2010-03-24 | ハイデルベルガー ドルツクマシーネン アクチエンゲゼルシヤフト | 版の画像付け装置 |
| US7259553B2 (en) * | 2005-04-13 | 2007-08-21 | Sri International | System and method of magnetically sensing position of a moving component |
| JP3128628U (ja) * | 2006-10-31 | 2007-01-18 | 株式会社ミツトヨ | リニアエンコーダ用スケール |
| DE102011007756A1 (de) * | 2011-04-20 | 2012-10-25 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung sowie Maßstab und Verfahren zur Herstellung eines Maßstabs |
| DE102012203193A1 (de) * | 2012-03-01 | 2013-09-05 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
| DE102012203220A1 (de) * | 2012-03-01 | 2013-09-05 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
-
2011
- 2011-04-20 DE DE102011007756A patent/DE102011007756A1/de not_active Withdrawn
-
2012
- 2012-01-26 EP EP12152572.9A patent/EP2515086B1/de active Active
- 2012-01-26 ES ES12152572.9T patent/ES2567781T3/es active Active
- 2012-04-11 JP JP2012089980A patent/JP6298589B2/ja active Active
- 2012-04-17 US US13/448,590 patent/US8844152B2/en active Active
- 2012-04-20 CN CN201210117319.3A patent/CN102749023B/zh active Active
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