CN102749023B - 位置测量设备以及标尺和用于制造标尺的方法 - Google Patents
位置测量设备以及标尺和用于制造标尺的方法 Download PDFInfo
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- CN102749023B CN102749023B CN201210117319.3A CN201210117319A CN102749023B CN 102749023 B CN102749023 B CN 102749023B CN 201210117319 A CN201210117319 A CN 201210117319A CN 102749023 B CN102749023 B CN 102749023B
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- 238000000034 method Methods 0.000 title claims abstract description 30
- 238000005259 measurement Methods 0.000 title claims abstract description 27
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 64
- 229910052751 metal Inorganic materials 0.000 claims abstract description 55
- 239000002184 metal Substances 0.000 claims abstract description 55
- 239000000463 material Substances 0.000 claims abstract description 40
- 230000005291 magnetic effect Effects 0.000 claims abstract description 32
- 238000000576 coating method Methods 0.000 claims abstract description 21
- 230000035699 permeability Effects 0.000 claims abstract description 21
- 239000011248 coating agent Substances 0.000 claims abstract description 20
- 238000005097 cold rolling Methods 0.000 claims abstract description 9
- 238000001514 detection method Methods 0.000 claims abstract description 3
- 230000005284 excitation Effects 0.000 claims description 16
- 238000005096 rolling process Methods 0.000 claims description 15
- 229910000831 Steel Inorganic materials 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 9
- 239000010959 steel Substances 0.000 claims description 9
- 230000000694 effects Effects 0.000 claims description 8
- 230000005294 ferromagnetic effect Effects 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 230000008485 antagonism Effects 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 239000003302 ferromagnetic material Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 144
- 230000035515 penetration Effects 0.000 description 10
- 238000000137 annealing Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 7
- 230000008093 supporting effect Effects 0.000 description 7
- 229910000595 mu-metal Inorganic materials 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000003801 milling Methods 0.000 description 3
- 230000010363 phase shift Effects 0.000 description 3
- 241000208340 Araliaceae Species 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 2
- 235000003140 Panax quinquefolius Nutrition 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000005489 elastic deformation Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 235000008434 ginseng Nutrition 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 230000005389 magnetism Effects 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000010408 sweeping Methods 0.000 description 2
- 229910001374 Invar Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 241000168254 Siro Species 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000004696 coordination complex Chemical class 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005098 hot rolling Methods 0.000 description 1
- 230000001976 improved effect Effects 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
- G01D5/2013—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by a movable ferromagnetic element, e.g. a core
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49826—Assembling or joining
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102011007756A DE102011007756A1 (de) | 2011-04-20 | 2011-04-20 | Positionsmesseinrichtung sowie Maßstab und Verfahren zur Herstellung eines Maßstabs |
| DE102011007756.1 | 2011-04-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102749023A CN102749023A (zh) | 2012-10-24 |
| CN102749023B true CN102749023B (zh) | 2016-12-14 |
Family
ID=45528983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210117319.3A Active CN102749023B (zh) | 2011-04-20 | 2012-04-20 | 位置测量设备以及标尺和用于制造标尺的方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8844152B2 (enExample) |
| EP (1) | EP2515086B1 (enExample) |
| JP (1) | JP6298589B2 (enExample) |
| CN (1) | CN102749023B (enExample) |
| DE (1) | DE102011007756A1 (enExample) |
| ES (1) | ES2567781T3 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011007756A1 (de) * | 2011-04-20 | 2012-10-25 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung sowie Maßstab und Verfahren zur Herstellung eines Maßstabs |
| US8739424B2 (en) * | 2011-06-24 | 2014-06-03 | Mitutoyo Corporation | Structure for protecting scale graduations |
| GB201311856D0 (en) * | 2013-07-02 | 2013-08-14 | Gill Res And Dev Ltd | A position indicator device |
| CN105492872B (zh) * | 2013-07-23 | 2017-11-14 | 巴鲁夫公司 | 用于来自磁条长度测量系统的传感器信号的动态线性化的方法 |
| DE102014217458A1 (de) * | 2014-09-02 | 2016-03-03 | Schaeffler Technologies AG & Co. KG | Encoder und Sensorvorrichtung für ein drehbares Maschinenteil |
| ES2618855T3 (es) * | 2014-10-14 | 2017-06-22 | Dr. Johannes Heidenhain Gmbh | Dispositivo de medición de posición con dispositivo para la compensación de errores por dilatación térmica de una regla graduada |
| DE102017123772B4 (de) * | 2017-10-12 | 2019-06-19 | Paul Tutzu | Elektromagnetisches Messsystem für die Erfassung von Länge und Winkel basierend auf dem Magnetoimpedanzeffekt |
| DE102018211402A1 (de) | 2018-07-10 | 2020-01-16 | Dr. Johannes Heidenhain Gmbh | Induktive Positionsmesseinrichtung |
| DE102020214235A1 (de) * | 2020-11-12 | 2022-05-12 | Robert Bosch Gesellschaft mit beschränkter Haftung | Induktive Positionssensoreinrichtung, Antriebseinrichtung |
| JP2022125006A (ja) * | 2021-02-16 | 2022-08-26 | 株式会社ミツトヨ | スケールおよびその製造方法 |
| DE102022102338A1 (de) * | 2021-02-16 | 2022-08-18 | Mitutoyo Corporation | Skala und Verfahren zu ihrer Herstellung |
| EP4567381A1 (de) | 2023-12-07 | 2025-06-11 | Dr. Johannes Heidenhain GmbH | Induktive positionsmesseinrichtung |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3685029A (en) * | 1969-05-02 | 1972-08-15 | Intern Pour L Inf Comp | Magnetic memory member |
| US6545461B1 (en) * | 2000-03-13 | 2003-04-08 | Mitutoyo Corporation | Electro magnetic induction position detector using metal foil to reduce temperature-based variations in position detection |
| CN1439092A (zh) * | 2000-06-26 | 2003-08-27 | 乌尔里希·金德勒 | 用于非接触式行程测量特别是位置和运动测量的装置 |
| US6736009B1 (en) * | 1999-09-30 | 2004-05-18 | Johannes Heidenhain Gmbh | Measurement system comprising an acceleration sensor and a position sensor |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3347052A1 (de) * | 1983-12-24 | 1985-07-04 | Robert Bosch Gmbh, 7000 Stuttgart | Verfahren und vorrichtung zur messempfindlichkeitserhoehung von beruehrungsfrei arbeitenden wegmesssensoren |
| JPS61159101A (ja) * | 1984-10-19 | 1986-07-18 | コルモーゲン コーポレイション | 位置および速度センサ |
| US4893077A (en) * | 1987-05-28 | 1990-01-09 | Auchterlonie Richard C | Absolute position sensor having multi-layer windings of different pitches providing respective indications of phase proportional to displacement |
| EP0743508A2 (en) | 1995-05-16 | 1996-11-20 | Mitutoyo Corporation | Induced current position transducer |
| EP1164358B1 (de) * | 2000-06-16 | 2005-08-24 | AMO Automatisierung Messtechnik Optik GmbH | Induktives Längenmesssystem |
| JP4435613B2 (ja) * | 2003-10-14 | 2010-03-24 | ハイデルベルガー ドルツクマシーネン アクチエンゲゼルシヤフト | 版の画像付け装置 |
| US7259553B2 (en) * | 2005-04-13 | 2007-08-21 | Sri International | System and method of magnetically sensing position of a moving component |
| JP3128628U (ja) * | 2006-10-31 | 2007-01-18 | 株式会社ミツトヨ | リニアエンコーダ用スケール |
| DE102011007756A1 (de) * | 2011-04-20 | 2012-10-25 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung sowie Maßstab und Verfahren zur Herstellung eines Maßstabs |
| DE102012203193A1 (de) * | 2012-03-01 | 2013-09-05 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
| DE102012203220A1 (de) * | 2012-03-01 | 2013-09-05 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
-
2011
- 2011-04-20 DE DE102011007756A patent/DE102011007756A1/de not_active Withdrawn
-
2012
- 2012-01-26 EP EP12152572.9A patent/EP2515086B1/de active Active
- 2012-01-26 ES ES12152572.9T patent/ES2567781T3/es active Active
- 2012-04-11 JP JP2012089980A patent/JP6298589B2/ja active Active
- 2012-04-17 US US13/448,590 patent/US8844152B2/en active Active
- 2012-04-20 CN CN201210117319.3A patent/CN102749023B/zh active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3685029A (en) * | 1969-05-02 | 1972-08-15 | Intern Pour L Inf Comp | Magnetic memory member |
| US6736009B1 (en) * | 1999-09-30 | 2004-05-18 | Johannes Heidenhain Gmbh | Measurement system comprising an acceleration sensor and a position sensor |
| US6545461B1 (en) * | 2000-03-13 | 2003-04-08 | Mitutoyo Corporation | Electro magnetic induction position detector using metal foil to reduce temperature-based variations in position detection |
| CN1439092A (zh) * | 2000-06-26 | 2003-08-27 | 乌尔里希·金德勒 | 用于非接触式行程测量特别是位置和运动测量的装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US8844152B2 (en) | 2014-09-30 |
| DE102011007756A1 (de) | 2012-10-25 |
| US20120266478A1 (en) | 2012-10-25 |
| JP6298589B2 (ja) | 2018-03-20 |
| ES2567781T3 (es) | 2016-04-26 |
| EP2515086A3 (de) | 2013-12-25 |
| JP2012225912A (ja) | 2012-11-15 |
| CN102749023A (zh) | 2012-10-24 |
| EP2515086A2 (de) | 2012-10-24 |
| EP2515086B1 (de) | 2016-04-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: German Te Rauen Rohit Applicant after: John Nei Si Heidenhain doctor company limited Address before: German Te Rauen Rohit Applicant before: Dr. Johannes Heidenhain GmbH |
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| COR | Change of bibliographic data |
Free format text: CORRECT: APPLICANT; FROM: DR. JOHANNES HEIDENHAIN GMBH TO: HEIDENHAIN GMBH. DOCTOR JOHANNES |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |