JP2012202799A - バイアス安定性に優れた振動型ジャイロ - Google Patents
バイアス安定性に優れた振動型ジャイロ Download PDFInfo
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- JP2012202799A JP2012202799A JP2011067201A JP2011067201A JP2012202799A JP 2012202799 A JP2012202799 A JP 2012202799A JP 2011067201 A JP2011067201 A JP 2011067201A JP 2011067201 A JP2011067201 A JP 2011067201A JP 2012202799 A JP2012202799 A JP 2012202799A
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- 238000001514 detection method Methods 0.000 claims abstract description 149
- 239000000758 substrate Substances 0.000 claims description 41
- 230000008878 coupling Effects 0.000 claims description 17
- 238000010168 coupling process Methods 0.000 claims description 17
- 238000005859 coupling reaction Methods 0.000 claims description 17
- 238000013016 damping Methods 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 abstract description 31
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
- 230000008859 change Effects 0.000 description 15
- 230000035945 sensitivity Effects 0.000 description 15
- 229910052710 silicon Inorganic materials 0.000 description 15
- 239000010703 silicon Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 11
- 230000001133 acceleration Effects 0.000 description 9
- 239000011521 glass Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 238000005459 micromachining Methods 0.000 description 6
- 230000005284 excitation Effects 0.000 description 5
- 230000004044 response Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 244000126211 Hericium coralloides Species 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011067201A JP2012202799A (ja) | 2011-03-25 | 2011-03-25 | バイアス安定性に優れた振動型ジャイロ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011067201A JP2012202799A (ja) | 2011-03-25 | 2011-03-25 | バイアス安定性に優れた振動型ジャイロ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012202799A true JP2012202799A (ja) | 2012-10-22 |
| JP2012202799A5 JP2012202799A5 (enrdf_load_stackoverflow) | 2014-03-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| JP2011067201A Pending JP2012202799A (ja) | 2011-03-25 | 2011-03-25 | バイアス安定性に優れた振動型ジャイロ |
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| JP (1) | JP2012202799A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160117464A (ko) * | 2014-02-05 | 2016-10-10 | 로베르트 보쉬 게엠베하 | 센서 장치 및 적어도 하나의 진동 질량을 포함하는 센서 장치의 작동 방법 |
| CN106525017A (zh) * | 2016-11-09 | 2017-03-22 | 刘亚婷 | 抗环境振动影响的微机械陀螺仪 |
| US10670401B2 (en) | 2016-10-26 | 2020-06-02 | Seiko Epson Corporation | Gyro sensor, method of manufacturing gyro sensor, electronic apparatus, and vehicle |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006242730A (ja) * | 2005-03-03 | 2006-09-14 | Toyota Motor Corp | センサ及び物理量検出装置 |
| JP2007071677A (ja) * | 2005-09-07 | 2007-03-22 | Hitachi Ltd | コンバインドセンサとその製造方法 |
| JP2009002834A (ja) * | 2007-06-22 | 2009-01-08 | Hitachi Ltd | 角速度検出装置 |
| JP2010060372A (ja) * | 2008-09-02 | 2010-03-18 | Denso Corp | 角速度センサ |
| JP2011053185A (ja) * | 2009-09-04 | 2011-03-17 | Denso Corp | 振動型角速度センサ |
-
2011
- 2011-03-25 JP JP2011067201A patent/JP2012202799A/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006242730A (ja) * | 2005-03-03 | 2006-09-14 | Toyota Motor Corp | センサ及び物理量検出装置 |
| JP2007071677A (ja) * | 2005-09-07 | 2007-03-22 | Hitachi Ltd | コンバインドセンサとその製造方法 |
| JP2009002834A (ja) * | 2007-06-22 | 2009-01-08 | Hitachi Ltd | 角速度検出装置 |
| JP2010060372A (ja) * | 2008-09-02 | 2010-03-18 | Denso Corp | 角速度センサ |
| JP2011053185A (ja) * | 2009-09-04 | 2011-03-17 | Denso Corp | 振動型角速度センサ |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160117464A (ko) * | 2014-02-05 | 2016-10-10 | 로베르트 보쉬 게엠베하 | 센서 장치 및 적어도 하나의 진동 질량을 포함하는 센서 장치의 작동 방법 |
| JP2017506337A (ja) * | 2014-02-05 | 2017-03-02 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ | センサ装置、及び、少なくとも一つのサイズモ系質量要素を有するセンサ装置の動作方法 |
| US10260879B2 (en) | 2014-02-05 | 2019-04-16 | Robert Bosch Gmbh | Sensor device and method for operating a sensor device having at least one seismic mass |
| KR102242082B1 (ko) * | 2014-02-05 | 2021-04-20 | 로베르트 보쉬 게엠베하 | 센서 장치 및 적어도 하나의 진동 질량을 포함하는 센서 장치의 작동 방법 |
| US10670401B2 (en) | 2016-10-26 | 2020-06-02 | Seiko Epson Corporation | Gyro sensor, method of manufacturing gyro sensor, electronic apparatus, and vehicle |
| CN106525017A (zh) * | 2016-11-09 | 2017-03-22 | 刘亚婷 | 抗环境振动影响的微机械陀螺仪 |
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