JP2012195096A5 - - Google Patents

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Publication number
JP2012195096A5
JP2012195096A5 JP2011056813A JP2011056813A JP2012195096A5 JP 2012195096 A5 JP2012195096 A5 JP 2012195096A5 JP 2011056813 A JP2011056813 A JP 2011056813A JP 2011056813 A JP2011056813 A JP 2011056813A JP 2012195096 A5 JP2012195096 A5 JP 2012195096A5
Authority
JP
Japan
Prior art keywords
region
charged particle
particle beam
beam lens
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2011056813A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012195096A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011056813A priority Critical patent/JP2012195096A/ja
Priority claimed from JP2011056813A external-priority patent/JP2012195096A/ja
Priority to KR1020137026268A priority patent/KR20130135335A/ko
Priority to PCT/JP2012/001773 priority patent/WO2012124319A1/en
Priority to US14/004,845 priority patent/US20140151570A1/en
Publication of JP2012195096A publication Critical patent/JP2012195096A/ja
Publication of JP2012195096A5 publication Critical patent/JP2012195096A5/ja
Abandoned legal-status Critical Current

Links

JP2011056813A 2011-03-15 2011-03-15 荷電粒子線レンズおよびそれを用いた露光装置 Abandoned JP2012195096A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2011056813A JP2012195096A (ja) 2011-03-15 2011-03-15 荷電粒子線レンズおよびそれを用いた露光装置
KR1020137026268A KR20130135335A (ko) 2011-03-15 2012-03-14 하전 입자 빔 렌즈 및 이를 사용한 노광 장치
PCT/JP2012/001773 WO2012124319A1 (en) 2011-03-15 2012-03-14 Charged particle beam lens and exposure apparatus using the same
US14/004,845 US20140151570A1 (en) 2011-03-15 2012-03-14 Charged particle beam lens and exposure apparatus using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011056813A JP2012195096A (ja) 2011-03-15 2011-03-15 荷電粒子線レンズおよびそれを用いた露光装置

Publications (2)

Publication Number Publication Date
JP2012195096A JP2012195096A (ja) 2012-10-11
JP2012195096A5 true JP2012195096A5 (enExample) 2014-05-08

Family

ID=45932473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011056813A Abandoned JP2012195096A (ja) 2011-03-15 2011-03-15 荷電粒子線レンズおよびそれを用いた露光装置

Country Status (4)

Country Link
US (1) US20140151570A1 (enExample)
JP (1) JP2012195096A (enExample)
KR (1) KR20130135335A (enExample)
WO (1) WO2012124319A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6720861B2 (ja) * 2016-12-28 2020-07-08 株式会社ニューフレアテクノロジー マルチビーム用アパーチャセット及びマルチ荷電粒子ビーム描画装置
CN115053320B (zh) 2020-02-04 2025-08-12 卡尔蔡司MultiSEM有限责任公司 多光束数字扫描以及图像获取
TW202220012A (zh) 2020-09-30 2022-05-16 德商卡爾蔡司多重掃描電子顯微鏡有限公司 在可調工作距離附近具快速自動對焦之多重粒子束顯微鏡及相關方法

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3899711A (en) * 1973-05-09 1975-08-12 Gen Electric Laminated multi-apertured electrode
US4200794A (en) * 1978-11-08 1980-04-29 Control Data Corporation Micro lens array and micro deflector assembly for fly's eye electron beam tubes using silicon components and techniques of fabrication and assembly
JPS58500306A (ja) * 1981-02-27 1983-02-24 ベ−コ　インスツルメンツ　インコ−ポレイテツド スクリ−ンレンズアレ−板の製造方法
US4533794A (en) * 1983-05-23 1985-08-06 Beveridge Harold N Electrode for electrostatic transducer
US4902898A (en) * 1988-04-26 1990-02-20 Microelectronics Center Of North Carolina Wand optics column and associated array wand and charged particle source
US5155412A (en) * 1991-05-28 1992-10-13 International Business Machines Corporation Method for selectively scaling a field emission electron gun and device formed thereby
JPH0562611A (ja) * 1991-09-05 1993-03-12 Hitachi Ltd 電子銃用板状電極を備えた陰極線管
DE69204629T2 (de) * 1991-11-29 1996-04-18 Motorola Inc Herstellungsverfahren einer Feldemissionsvorrichtung mit integraler elektrostatischer Linsenanordnung.
JPH0814881A (ja) * 1994-06-28 1996-01-19 Nippon Steel Corp 三次元測定機による直径値算出方法
JPH08241688A (ja) * 1995-03-03 1996-09-17 Hitachi Ltd パターンイオンビーム投射装置
JP2000188068A (ja) * 1998-12-22 2000-07-04 Hitachi Ltd カラー陰極線管
JP2001283756A (ja) * 2000-03-31 2001-10-12 Canon Inc 電子光学系アレイ、これを用いた荷電粒子線露光装置ならびにデバイス製造方法
US6741016B2 (en) * 2001-06-14 2004-05-25 Hewlett-Packard Development Company, L.P. Focusing lens for electron emitter with shield layer
KR100496643B1 (ko) * 2003-10-25 2005-06-20 한국전자통신연구원 마이크로칼럼 전자빔 장치의 자체정렬 적층 금속 박막전자빔 렌즈 및 그 제작방법
US7045794B1 (en) * 2004-06-18 2006-05-16 Novelx, Inc. Stacked lens structure and method of use thereof for preventing electrical breakdown
JP4625317B2 (ja) * 2004-12-03 2011-02-02 ナガヤマ アイピー ホールディングス リミテッド ライアビリティ カンパニー 位相差電子顕微鏡用位相板及びその製造方法並びに位相差電子顕微鏡
US7515253B2 (en) * 2005-01-12 2009-04-07 Kla-Tencor Technologies Corporation System for measuring a sample with a layer containing a periodic diffracting structure
DE602006020899D1 (de) * 2005-09-06 2011-05-05 Applied Materials Israel Ltd Teilchenoptische Anordnung mit teilchenoptischer Komponente
JP5159035B2 (ja) 2005-10-28 2013-03-06 キヤノン株式会社 レンズアレイ及び該レンズアレイを含む荷電粒子線露光装置
EP2126955A1 (en) * 2007-01-25 2009-12-02 NFAB Limited Improved particle beam generator
CN102232237B (zh) * 2008-10-01 2014-09-24 迈普尔平版印刷Ip有限公司 静电透镜构件
JP5428682B2 (ja) 2009-09-10 2014-02-26 株式会社リコー 画像形成装置ならびに画像形成システム
KR101041369B1 (ko) * 2009-11-19 2011-06-15 한국기초과학지원연구원 초고속 대량 시료 분석을 위한 장치 및 방법
JP5669636B2 (ja) * 2011-03-15 2015-02-12 キヤノン株式会社 荷電粒子線レンズおよびそれを用いた露光装置
JP5744579B2 (ja) * 2011-03-15 2015-07-08 キヤノン株式会社 荷電粒子線レンズおよびそれを用いた露光装置
JP2012195097A (ja) * 2011-03-15 2012-10-11 Canon Inc 荷電粒子線レンズおよびそれを用いた露光装置
JP5886663B2 (ja) * 2012-03-21 2016-03-16 株式会社日立ハイテクノロジーズ 電子線応用装置およびレンズアレイ
JP2013239667A (ja) * 2012-05-17 2013-11-28 Canon Inc 荷電粒子線静電レンズにおける電極とその製造方法、荷電粒子線静電レンズ、及び荷電粒子線露光装置

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