JP2012195096A5 - - Google Patents
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- Publication number
- JP2012195096A5 JP2012195096A5 JP2011056813A JP2011056813A JP2012195096A5 JP 2012195096 A5 JP2012195096 A5 JP 2012195096A5 JP 2011056813 A JP2011056813 A JP 2011056813A JP 2011056813 A JP2011056813 A JP 2011056813A JP 2012195096 A5 JP2012195096 A5 JP 2012195096A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- charged particle
- particle beam
- beam lens
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000002245 particle Substances 0.000 claims description 18
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 238000000611 regression analysis Methods 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011056813A JP2012195096A (ja) | 2011-03-15 | 2011-03-15 | 荷電粒子線レンズおよびそれを用いた露光装置 |
| US14/004,845 US20140151570A1 (en) | 2011-03-15 | 2012-03-14 | Charged particle beam lens and exposure apparatus using the same |
| PCT/JP2012/001773 WO2012124319A1 (en) | 2011-03-15 | 2012-03-14 | Charged particle beam lens and exposure apparatus using the same |
| KR1020137026268A KR20130135335A (ko) | 2011-03-15 | 2012-03-14 | 하전 입자 빔 렌즈 및 이를 사용한 노광 장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011056813A JP2012195096A (ja) | 2011-03-15 | 2011-03-15 | 荷電粒子線レンズおよびそれを用いた露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012195096A JP2012195096A (ja) | 2012-10-11 |
| JP2012195096A5 true JP2012195096A5 (enExample) | 2014-05-08 |
Family
ID=45932473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011056813A Abandoned JP2012195096A (ja) | 2011-03-15 | 2011-03-15 | 荷電粒子線レンズおよびそれを用いた露光装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20140151570A1 (enExample) |
| JP (1) | JP2012195096A (enExample) |
| KR (1) | KR20130135335A (enExample) |
| WO (1) | WO2012124319A1 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6720861B2 (ja) | 2016-12-28 | 2020-07-08 | 株式会社ニューフレアテクノロジー | マルチビーム用アパーチャセット及びマルチ荷電粒子ビーム描画装置 |
| EP4100986A1 (en) | 2020-02-04 | 2022-12-14 | Carl Zeiss MultiSEM GmbH | Multi-beam digital scan and image acquisition |
| TW202220012A (zh) | 2020-09-30 | 2022-05-16 | 德商卡爾蔡司多重掃描電子顯微鏡有限公司 | 在可調工作距離附近具快速自動對焦之多重粒子束顯微鏡及相關方法 |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3899711A (en) * | 1973-05-09 | 1975-08-12 | Gen Electric | Laminated multi-apertured electrode |
| US4200794A (en) * | 1978-11-08 | 1980-04-29 | Control Data Corporation | Micro lens array and micro deflector assembly for fly's eye electron beam tubes using silicon components and techniques of fabrication and assembly |
| JPS58500306A (ja) * | 1981-02-27 | 1983-02-24 | ベ−コ インスツルメンツ インコ−ポレイテツド | スクリ−ンレンズアレ−板の製造方法 |
| US4533794A (en) * | 1983-05-23 | 1985-08-06 | Beveridge Harold N | Electrode for electrostatic transducer |
| US4902898A (en) * | 1988-04-26 | 1990-02-20 | Microelectronics Center Of North Carolina | Wand optics column and associated array wand and charged particle source |
| US5155412A (en) * | 1991-05-28 | 1992-10-13 | International Business Machines Corporation | Method for selectively scaling a field emission electron gun and device formed thereby |
| JPH0562611A (ja) * | 1991-09-05 | 1993-03-12 | Hitachi Ltd | 電子銃用板状電極を備えた陰極線管 |
| EP0545621B1 (en) * | 1991-11-29 | 1995-09-06 | Motorola, Inc. | Method of forming a field emission device with integrally formed electrostatic lens |
| JPH0814881A (ja) * | 1994-06-28 | 1996-01-19 | Nippon Steel Corp | 三次元測定機による直径値算出方法 |
| JPH08241688A (ja) * | 1995-03-03 | 1996-09-17 | Hitachi Ltd | パターンイオンビーム投射装置 |
| JP2000188068A (ja) * | 1998-12-22 | 2000-07-04 | Hitachi Ltd | カラー陰極線管 |
| JP2001283756A (ja) * | 2000-03-31 | 2001-10-12 | Canon Inc | 電子光学系アレイ、これを用いた荷電粒子線露光装置ならびにデバイス製造方法 |
| US6741016B2 (en) * | 2001-06-14 | 2004-05-25 | Hewlett-Packard Development Company, L.P. | Focusing lens for electron emitter with shield layer |
| KR100496643B1 (ko) * | 2003-10-25 | 2005-06-20 | 한국전자통신연구원 | 마이크로칼럼 전자빔 장치의 자체정렬 적층 금속 박막전자빔 렌즈 및 그 제작방법 |
| US7045794B1 (en) * | 2004-06-18 | 2006-05-16 | Novelx, Inc. | Stacked lens structure and method of use thereof for preventing electrical breakdown |
| JP4625317B2 (ja) * | 2004-12-03 | 2011-02-02 | ナガヤマ アイピー ホールディングス リミテッド ライアビリティ カンパニー | 位相差電子顕微鏡用位相板及びその製造方法並びに位相差電子顕微鏡 |
| US7515253B2 (en) * | 2005-01-12 | 2009-04-07 | Kla-Tencor Technologies Corporation | System for measuring a sample with a layer containing a periodic diffracting structure |
| ATE545147T1 (de) * | 2005-09-06 | 2012-02-15 | Zeiss Carl Smt Gmbh | Untersuchungsverfahren und system für geladene teilchen |
| JP5159035B2 (ja) | 2005-10-28 | 2013-03-06 | キヤノン株式会社 | レンズアレイ及び該レンズアレイを含む荷電粒子線露光装置 |
| JP2010517233A (ja) * | 2007-01-25 | 2010-05-20 | エヌエフエイビー・リミテッド | 改良された粒子ビーム発生装置 |
| EP2406810B1 (en) * | 2008-10-01 | 2014-09-17 | Mapper Lithography IP B.V. | Electrostatic lens structure |
| JP5428682B2 (ja) | 2009-09-10 | 2014-02-26 | 株式会社リコー | 画像形成装置ならびに画像形成システム |
| KR101041369B1 (ko) * | 2009-11-19 | 2011-06-15 | 한국기초과학지원연구원 | 초고속 대량 시료 분석을 위한 장치 및 방법 |
| JP5669636B2 (ja) * | 2011-03-15 | 2015-02-12 | キヤノン株式会社 | 荷電粒子線レンズおよびそれを用いた露光装置 |
| JP5744579B2 (ja) * | 2011-03-15 | 2015-07-08 | キヤノン株式会社 | 荷電粒子線レンズおよびそれを用いた露光装置 |
| JP2012195097A (ja) * | 2011-03-15 | 2012-10-11 | Canon Inc | 荷電粒子線レンズおよびそれを用いた露光装置 |
| JP5886663B2 (ja) * | 2012-03-21 | 2016-03-16 | 株式会社日立ハイテクノロジーズ | 電子線応用装置およびレンズアレイ |
| JP2013239667A (ja) * | 2012-05-17 | 2013-11-28 | Canon Inc | 荷電粒子線静電レンズにおける電極とその製造方法、荷電粒子線静電レンズ、及び荷電粒子線露光装置 |
-
2011
- 2011-03-15 JP JP2011056813A patent/JP2012195096A/ja not_active Abandoned
-
2012
- 2012-03-14 WO PCT/JP2012/001773 patent/WO2012124319A1/en not_active Ceased
- 2012-03-14 KR KR1020137026268A patent/KR20130135335A/ko not_active Ceased
- 2012-03-14 US US14/004,845 patent/US20140151570A1/en active Granted