JP2012195368A5 - - Google Patents
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- Publication number
- JP2012195368A5 JP2012195368A5 JP2011056811A JP2011056811A JP2012195368A5 JP 2012195368 A5 JP2012195368 A5 JP 2012195368A5 JP 2011056811 A JP2011056811 A JP 2011056811A JP 2011056811 A JP2011056811 A JP 2011056811A JP 2012195368 A5 JP2012195368 A5 JP 2012195368A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- charged particle
- particle beam
- beam lens
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 claims description 18
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 230000007423 decrease Effects 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000000611 regression analysis Methods 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011056811A JP5744579B2 (ja) | 2011-03-15 | 2011-03-15 | 荷電粒子線レンズおよびそれを用いた露光装置 |
| PCT/JP2012/001779 WO2012124322A1 (en) | 2011-03-15 | 2012-03-14 | Charged particle beam lens and exposure apparatus using the same |
| US14/005,187 US20140166894A1 (en) | 2011-03-15 | 2012-03-14 | Charged particle beam lens and exposure apparatus using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011056811A JP5744579B2 (ja) | 2011-03-15 | 2011-03-15 | 荷電粒子線レンズおよびそれを用いた露光装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012195368A JP2012195368A (ja) | 2012-10-11 |
| JP2012195368A5 true JP2012195368A5 (enExample) | 2014-05-01 |
| JP5744579B2 JP5744579B2 (ja) | 2015-07-08 |
Family
ID=45932475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011056811A Expired - Fee Related JP5744579B2 (ja) | 2011-03-15 | 2011-03-15 | 荷電粒子線レンズおよびそれを用いた露光装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20140166894A1 (enExample) |
| JP (1) | JP5744579B2 (enExample) |
| WO (1) | WO2012124322A1 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5669636B2 (ja) * | 2011-03-15 | 2015-02-12 | キヤノン株式会社 | 荷電粒子線レンズおよびそれを用いた露光装置 |
| JP2012195096A (ja) * | 2011-03-15 | 2012-10-11 | Canon Inc | 荷電粒子線レンズおよびそれを用いた露光装置 |
| WO2021180365A1 (en) * | 2020-03-12 | 2021-09-16 | Carl Zeiss Multisem Gmbh | Certain improvements of multi-beam generating and multi-beam deflecting units |
| EP3937205A1 (en) * | 2020-07-06 | 2022-01-12 | ASML Netherlands B.V. | Charged-particle multi-beam column, charged-particle multi-beam column array, inspection method |
| EP4383308A1 (en) * | 2022-12-05 | 2024-06-12 | ASML Netherlands B.V. | Electron-optical stack, module, assessment apparatus, method of manufacturing an electron-optical stack |
| EP4564396A1 (en) * | 2023-11-30 | 2025-06-04 | ASML Netherlands B.V. | Electron-optical system, method of manufacturing an electron beam element |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3899711A (en) * | 1973-05-09 | 1975-08-12 | Gen Electric | Laminated multi-apertured electrode |
| US4200794A (en) * | 1978-11-08 | 1980-04-29 | Control Data Corporation | Micro lens array and micro deflector assembly for fly's eye electron beam tubes using silicon components and techniques of fabrication and assembly |
| US4419182A (en) * | 1981-02-27 | 1983-12-06 | Veeco Instruments Inc. | Method of fabricating screen lens array plates |
| CA2492835A1 (en) * | 2002-06-15 | 2003-12-24 | Nfab Limited | Charged particle beam generator |
| JP4252813B2 (ja) * | 2003-01-30 | 2009-04-08 | キヤノン株式会社 | 荷電ビーム用レンズ、荷電ビーム露光装置及びデバイス製造方法 |
| KR100496643B1 (ko) * | 2003-10-25 | 2005-06-20 | 한국전자통신연구원 | 마이크로칼럼 전자빔 장치의 자체정렬 적층 금속 박막전자빔 렌즈 및 그 제작방법 |
| GB2412232A (en) * | 2004-03-15 | 2005-09-21 | Ims Nanofabrication Gmbh | Particle-optical projection system |
| US7045794B1 (en) * | 2004-06-18 | 2006-05-16 | Novelx, Inc. | Stacked lens structure and method of use thereof for preventing electrical breakdown |
| JP2006049703A (ja) * | 2004-08-06 | 2006-02-16 | Canon Inc | 荷電粒子線レンズアレイ、及び該荷電粒子線レンズアレイを用いた荷電粒子線露光装置 |
| JP2006139958A (ja) | 2004-11-10 | 2006-06-01 | Toshiba Corp | 荷電ビーム装置 |
| JP4745739B2 (ja) | 2005-07-06 | 2011-08-10 | キヤノン株式会社 | 静電レンズ装置、露光装置、及びデバイス製造方法 |
| JP5293518B2 (ja) | 2009-09-10 | 2013-09-18 | 株式会社リコー | 画像形成装置及びその組み立て方法 |
-
2011
- 2011-03-15 JP JP2011056811A patent/JP5744579B2/ja not_active Expired - Fee Related
-
2012
- 2012-03-14 US US14/005,187 patent/US20140166894A1/en not_active Abandoned
- 2012-03-14 WO PCT/JP2012/001779 patent/WO2012124322A1/en not_active Ceased