JP2012187679A - Chucking device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To handle a sheet-like workpiece without damaging it at high speed.SOLUTION: A chucking device includes: a chuck body 10 where a workpiece suction surface 13 with which a sheet-like electrode plate W comes in contact, a vacuum suction cavity 12a sucked by vacuum, and a suction opening communicating from the workpiece suction surface to the vacuum suction cavity; and a three-way valve 20 having a valve case 24 where first to third openings 21 to 23 are formed and a flow path for interconnecting the openings is formed and having a valve body 25 moving in the valve case. The chuck body 10 and the valve case 24 of the three-way valve 20 are integrally formed.

Description

  The present invention relates to a chuck device that adsorbs a workpiece.

  As the chuck device, for example, there is a device described in Patent Document 1 below.

  The chuck device includes a chuck body that adsorbs a plate-shaped workpiece, a vacuum suction source for sucking gas in a vacuum suction chamber of the chuck body, a suction pipe that connects the chuck body and the vacuum suction source, and the suction An electromagnetic valve provided in the pipe, a gas compression source for sending compressed gas into the vacuum suction chamber of the chuck body, a compressed gas pipe for connecting the chuck body and the gas compression source, and provided in the compressed gas pipe A solenoid valve.

JP 2003-62730 A

  In the above chuck device, since the work adsorbed on the chuck body is transported to a target position, the suction pipe and the compressed gas pipe are both formed of a long flexible resin tube or the like. It is done. In addition, the solenoid valve provided in the suction pipe or compressed gas pipe should be separated from the chuck body in order to prevent it from shaking greatly due to shaking or deformation of the suction pipe or compressed gas pipe caused by the movement of the chuck body. It is thought that it is fixed to the bracket etc.

  By the way, in a non-aqueous electrolyte secondary battery represented by a lithium ion secondary battery, a large number of sheet-like electrode plates obtained by applying an active material to a very thin current collector are accommodated in a container. For this reason, in the manufacturing site of a nonaqueous electrolyte secondary battery, in order to improve manufacturability, it is required to handle such a large number of electrode plates at high speed.

  However, in the above chuck device, the response time from when the solenoid valve provided in the suction pipe is opened to when the vacuum suction chamber of the chuck body is in a vacuum state is relatively slow, and the time required for workpiece handling is compared. There is a problem that it becomes longer.

  Thus, as one method of shortening the response time until the vacuum suction chamber of the chuck body is in a vacuum state, a method of increasing the vacuum degree of the vacuum suction source can be considered. However, when this method is adopted, the pressure difference between the vacuum suction chamber of the chuck body and the external environment increases, and when the above-described sheet-like electrode plate is adsorbed, the edge mark of the suction port remains on the electrode plate, or the electrode In some cases, wrinkles may remain around the plate (hereinafter, the edge trace of the suction port remaining on the electrode plate and the surrounding wrinkles will be referred to as “scratches”). If the electrode plate with such a scratch is used as it is, a battery with a partially different electrode plate interval is formed, and there arises a problem that deposits are deposited there and the battery performance deteriorates. End up.

  Therefore, an object of the present invention is to provide a chuck device that can be handled at high speed without damaging a sheet-like workpiece.

The chuck device according to the invention for solving the above problems is
In a chuck device for sucking a sheet-like workpiece, a workpiece suction surface that contacts the workpiece, a vacuum suction cavity that is vacuum-sucked, and a suction opening that communicates from the workpiece suction surface to the vacuum suction cavity are formed. A chuck body, a valve case in which a first opening, a second opening, and a third opening are formed and a flow path that connects the openings is formed, and the first opening and the second opening. Communicating, communicating the first opening and the third opening, communicating the first opening and the third opening, and not communicating the first opening and the second opening. A three-way valve having a valve body that moves in the valve case between the second communication position, and
The chuck body and the valve case of the three-way valve are integrated, and the chuck body is formed with a connection flow path that communicates the vacuum suction cavity and the first opening of the valve case. Features.

  In the chuck device, since the chuck body and the valve case of the three-way valve are integrated, the second opening of the three-way valve and the vacuum suction cavity are compared with the case where the chuck body and the valve are connected by a tube or the like. The flow path between them is extremely short, and the volume of the flow path between them is extremely small. For this reason, the time from when the valve body is positioned at the first continuous position to when the vacuum suction cavity of the chuck body is vacuumed is shortened.

  Therefore, in the chuck device, the response time from when the position of the valve body of the three-way valve is switched to when the vacuum suction cavity of the chuck body is vacuumed can be shortened, that is, the time for chucking the workpiece with the chuck body. As a result, the time required to handle the workpiece can be shortened. In addition, in the chuck device, since the vacuum suction response time is shortened without increasing the degree of vacuum of the vacuum suction source, the possibility that the workpiece is damaged can be suppressed.

  Here, in the chuck device, the chuck body has a partition wall in which one surface forms an inner surface of the vacuum suction cavity and the other surface forms the work suction surface. A plurality of holes communicating from the surface to the vacuum suction cavity may be formed, and the plurality of holes may form the suction opening.

  In the chuck device, since the workpiece is supported in contact with the workpiece suction surface in a wide area, the workpiece can be prevented from being damaged due to bending of the workpiece.

  Further, in the chuck device, a valve body driving source for moving the valve body of the three-way valve between the first communication position and the second communication position, and a control for controlling driving of the valve body driving source. And the second opening of the three-way valve is an opening connected to a vacuum suction source for sucking gas through a suction pipe, and the controller adsorbs the work to the chuck body When the valve body is driven, the valve body is positioned at the first continuous position by the valve body driving source, and the valve body is moved by the valve body driving source when the workpiece is separated from the chuck body. It may be located at the communication position.

  In the chuck device, the adsorption and separation of the workpiece can be automated.

  Further, in the chuck device, a valve body driving source for moving the valve body of the three-way valve between the first communication position and the second communication position, and a control for controlling driving of the valve body driving source. The second opening of the three-way valve is an opening connected to a vacuum suction source for sucking gas through a suction pipe, and the third opening of the three-way valve is a compressed gas pipe An opening connected to a gas compression source that discharges compressed gas, and the controller causes the valve body to be driven by the valve body driving source when the work is attracted to the chuck body. The valve body may be positioned at the second communication position by the valve body driving source when the workpiece is separated from the chuck body by being positioned at the communication position.

  In the chuck device, the adsorption and separation of the workpiece can be automated. Further, in the chuck device, the compressed gas is sent from the gas compression source into the vacuum suction cavity of the chuck body, and the force for separating the workpiece from the chuck body is positively applied to the workpiece. The time to leave can be shortened.

  In the chuck device, the controller may temporarily move the valve body to the second communication position by the valve body drive source during the movement in a state where the chuck body does not attract the workpiece. It may be located.

  In the chuck device, even if foreign matter is clogged in the hole of the partition wall when the workpiece is attracted, this can be eliminated.

  The chuck device further includes a suction accumulator in which a pressure accumulator having a volume equal to or larger than the volume of the vacuum suction cavity is formed, and the pressure accumulator of the suction accumulator communicates with the second opening of the three-way valve. At the same time, it may be connected to the vacuum suction source.

  In the chuck device, it is possible to suppress a temporary decrease in the degree of vacuum of the connection flow channel immediately after the vacuum suction cavity of the chuck body starts to be sucked, and to increase the work suction speed.

  In this case, it is preferable that the suction accumulator is integral with the valve case of the three-way valve.

  In the chuck device, the flow path between the pressure accumulator chamber of the suction accumulator and the vacuum suction cavity is extremely short, and the volume of the flow path between them is extremely small. Therefore, the responsiveness of the pressure accumulation effect by the pressure accumulation chamber can be enhanced.

  The chuck device further includes a compressed gas accumulator in which a pressure accumulating chamber having a volume equal to or larger than the volume of the vacuum suction cavity is formed, and the pressure accumulating chamber of the compressed gas accumulator communicates with the third opening of the three-way valve. And may be connected to the gas compression source.

  In the chuck device, it is possible to suppress a temporary decrease in the pressure in the connection channel immediately after the compressed gas starts to be fed into the vacuum suction cavity of the chuck body, and to increase the workpiece separation speed.

  In this case, the compressed gas accumulator is preferably integral with the valve case of the three-way valve.

  In the chuck device, the flow path between the pressure accumulation chamber of the compressed gas accumulator and the vacuum suction cavity is extremely short, and the volume of the flow path between the pressure accumulator is extremely small, so that the responsiveness of the pressure accumulation effect by the pressure accumulation chamber can be enhanced. .

  In the present invention, the sheet-like workpiece can be handled at a high speed without being damaged.

It is explanatory drawing which shows the chuck | zipper apparatus (state in which a valve body is a 1st continuous passage position) in 1st embodiment which concerns on this invention. It is explanatory drawing which shows the chuck | zipper apparatus (state in which a valve body is a 2nd communication position) in 1st embodiment which concerns on this invention. It is explanatory drawing which shows the movement of the chuck body in 1st embodiment which concerns on this invention. It is an operation | movement timing chart of the chuck apparatus in 1st embodiment which concerns on this invention. It is explanatory drawing which shows the chuck | zipper apparatus (state in which a valve body is a 1st continuous passage position) in 2nd embodiment which concerns on this invention. It is explanatory drawing which shows the chuck | zipper apparatus (state in which a valve body is a 2nd communication position) in 2nd embodiment which concerns on this invention. It is explanatory drawing which shows the chuck | zipper apparatus (state in which a valve body is a neutral position) in 2nd embodiment which concerns on this invention. It is an operation | movement timing chart of the chuck apparatus in 2nd embodiment which concerns on this invention. It is explanatory drawing which shows the structure of the chuck | zipper apparatus in 3rd embodiment which concerns on this invention.

  Hereinafter, an embodiment of a chuck device according to the present invention will be described with reference to the drawings.

"First embodiment"
First, a first embodiment of a chuck device according to the present invention will be described with reference to FIGS.

  The chuck device of this embodiment is a device that adsorbs a sheet-like electrode plate W accommodated in a container of a lithium ion secondary battery. This electrode plate W is obtained by applying an active material to a current collector, and its thickness is extremely thin.

  As shown in FIG. 1, the chuck device includes a chuck body 10 that attracts an electrode plate W that is a workpiece, and a three-way valve 20 for switching the pressure state in a vacuum suction passage (vacuum suction cavity) 12 a of the chuck body 10. Electromagnetic drive source (valve drive source) 30 for driving the three-way valve 20, chuck controller 60 (controller) for controlling the electromagnetic drive source 30, and vacuum suction passage 12a of the chuck body 10 are vacuumed. And a suction pipe 71 that connects the vacuum pump 70 and the three-way valve 20.

  The chuck body 10 has a plurality of vacuum suction passages 12a formed therein. One end of each of the plurality of vacuum suction passages 12 a is formed up to one surface of the chuck body 10, and the suction opening 11 is formed by this one surface portion. This one surface of the chuck body 10 forms a workpiece suction surface 13 with which the electrode plate W comes into contact. The other ends of the plurality of vacuum suction passages 12a are gathered in one place.

  The three-way valve 20 moves in the valve case 24, in which a first opening 21, a second opening 22, and a third opening 23 are formed and a flow path that connects the openings is formed. And a valve body 25. The valve body 25 allows the first opening 21 and the second opening 22 to communicate with each other, and does not allow the first opening 21 and the third opening 23 to communicate with each other. And the third opening 23 are communicated, and the valve case 24 is moved between a second communication position (position shown in FIG. 2) where the first opening 21 and the second opening 22 are not communicated.

  The valve case 24 of the three-way valve 20 is fixed to the chuck body 10 and is integrated with the chuck body 10. The chuck body 10 is formed with a connection flow path 14 for communicating the first opening 21 of the valve case 24 with the other end of the vacuum suction passage 12a.

  The electromagnetic drive source 30 includes an electromagnetic coil (not shown), a drive rod 31 that moves by driving the electromagnetic coil, and a coil case 32 that houses the electromagnetic coil. The valve body 25 of the three-way valve 20 is attached to the end of the drive rod 31. The coil case 31 is fixed to one or both of the valve case 24 of the three-way valve 20 and the chuck body 10.

  One end of the suction pipe 71 is connected to the second opening 22 of the valve case 24, and the other end is connected to the suction port of the vacuum pump 70. The suction pipe 71 is formed of, for example, a flexible resin tube.

  As shown in FIG. 3, the chuck body 10 is held by a moving mechanism 80 such as a robot, and by this moving mechanism 80, a suction position A for attracting the electrode plate W and a separation position B for separating the attracted electrode plate W are provided. Is reciprocated between. The movement controller 81 of the movement mechanism 80 transmits a signal indicating the operation content to the chuck controller 60. The chuck controller 60 controls the electromagnetic drive source 30 of the three-way valve 20 based on this signal from the movement controller 81.

  Next, the operation of the chuck device of this embodiment will be described with reference to the timing chart of FIG.

  The vacuum pump 70 is always operated (ON) during a series of operation processes in which the chuck device performs the adsorption and detachment operations of the electrode plate W.

  When the chuck body 10 exists at the suction position A, the chuck controller 60 gives an instruction to the electromagnetic drive source 30 to position the valve body 25 of the three-way valve 20 at the first continuous position (shown in FIG. 1). (T1). When the valve body 25 is positioned at the first continuous position, the first opening 21 (opening on the vacuum suction passage 12a side) and the second opening 22 (opening on the vacuum pump 70 side) of the valve case 24 communicate with each other, and the chuck The inside of the vacuum suction passage 12 a of the body 10 is vacuumed by the vacuum pump 70. For this reason, the chuck body 10 existing at the suction position A sucks the electrode plate W (t2).

  When the valve body 25 of the three-way valve 20 is located at the second communication position, that is, when the first opening 21 and the second opening 22 are not in communication, the second of the three-way valve 20 from the vacuum pump 70 is obtained. Until the opening 22, a certain degree of vacuum is maintained. When the valve body 25 of the three-way valve 20 moves from the second communication position to the first communication position (t1), as described above, the first opening 21 (opening on the vacuum suction passage 12a side) of the valve case 24 and The second opening 22 (opening on the vacuum pump 70 side) communicates, and the vacuum suction passage 12a of the chuck body 10 is vacuumed. In this embodiment, since the chuck body 10 and the valve case 24 of the three-way valve 20 are integrated, the second of the three-way valve 20 is compared with the case where the chuck body 10 and the valve are connected by a tube or the like. The flow path between the opening 22 (opening on the vacuum pump 70 side) and the vacuum suction passage 12a is extremely short, and the volume of the flow path between them is extremely small. For this reason, the time from when the valve body 25 reaches the first communication position from the second communication position to when the vacuum suction passage 12a of the chuck body 10 is vacuumed is shortened.

  Therefore, in this embodiment, the response time from when the position of the valve body 25 of the three-way valve 20 is switched to when the vacuum suction passage 12a of the chuck body 10 is vacuumed can be shortened. As a result of shortening the time for adsorbing the electrode plate W, the time required for handling the electrode plate W can be shortened. In addition, in this embodiment, since the vacuum suction response time is shortened without increasing the degree of vacuum of the vacuum pump 70, the possibility of the electrode plate W being damaged can be suppressed.

  When the chuck body 10 sucks the electrode plate W (t2), the moving body 80 starts to move the chuck body 10 from the suction position A to the separation position B (t3), and stops when it reaches the separation position B (t4).

  When the movement controller 81 moves the chuck body 10 from the suction position A to the separation position B by the movement mechanism 80, the movement controller 81 gives a signal to the chuck controller 60 that the chuck body 10 has been moved to the separation position B. 60. Upon receiving this signal, the chuck controller 60 gives an instruction to the electromagnetic drive source 30 to move the valve body 25 of the three-way valve 20 from the first communication position to the second communication position (t5). When the valve body 25 reaches the second communication position, the first opening 21 (opening on the vacuum suction passage 12a side) and the third opening 23 (opening on the atmosphere opening side) of the valve case 24 communicate with each other. The air enters the vacuum suction passage 12a, and the electrode plate W is separated from the chuck body 10 (t6).

  When the electrode plate W is separated from the chuck body 10 (t6), the moving body 80 starts to move the chuck body 10 from the separation position B to the suction position A (t7), and stops when it returns to the suction position A (t8).

  When the movement controller 80 moves the chuck body 10 from the separation position B to the suction position A by the movement mechanism 80, the movement controller 81 sends a signal to the chuck controller 60 that the chuck body 10 has been moved to the suction position A. Upon receiving this signal, the chuck controller 60 gives an instruction to the electromagnetic drive source 30 to move the valve body 25 of the three-way valve 20 from the second communication position to the first series communication position (t1). Hereinafter, similarly to the above, the chuck body 10 sucks the electrode plate W (t2), the chuck body 10 starts moving from the suction position A to the separation position B (t3), and the chuck body 10 reaches the separation position B (t4). ), The movement of the valve body 25 of the three-way valve 20 from the first continuous position to the second communication position (t5), the separation of the electrode plate W from the chuck body 10 (t6), and the adsorption position from the separation position B of the chuck body 10 The movement start to A (t7) and the arrival of the chuck body 10 to the suction position A (t8) are repeated.

  As described above, in this embodiment, the electrode plate W can be handled at high speed without damaging the electrode plate W.

"Second embodiment"
Next, a second embodiment of the chuck device according to the present invention will be described with reference to FIGS.

  As shown in FIG. 5, the chuck device of this embodiment includes a chuck body 10a, a three-way valve 20, an electromagnetic drive source 30, a chuck controller 60, a vacuum pump 70, and a suction pipe 71, as in the first embodiment. . The chuck device of the present embodiment further includes a gas compressor 75 for sending compressed gas into the vacuum suction chamber 12 of the chuck body 10a, and a compressed gas pipe 76 connecting the gas compressor 75 and the three-way valve 20. It is equipped with.

  The chuck body 10a of the present embodiment has a vacuum suction chamber (vacuum suction cavity) 12 formed therein, one partition forming the inner surface of the vacuum suction chamber 12, and the other surface forming a workpiece suction surface 13a. 15. A large number of holes 16 communicating with the vacuum suction chamber 12 from the workpiece suction surface 13a are formed in the partition wall 15. In the present embodiment, these many holes 16 form suction openings.

  One end of the compressed gas pipe 76 is connected to the third opening 23 of the valve case 24, and the other end is connected to the discharge port of the gas compressor 75. The compressed gas pipe 76 is formed of, for example, a flexible resin tube.

  Next, the operation of the chuck device of this embodiment will be described with reference to the timing chart of FIG.

  The vacuum pump 70 and the gas compressor 75 are always operated (ON) during a series of operation processes in which the chuck device performs the adsorption and detachment operations of the electrode plate W.

  When the chuck body 10a exists at the suction position A, the chuck controller 60 gives an instruction to the electromagnetic drive source 30 as in the first embodiment, and moves the valve body 25 of the three-way valve 20 from the second communication position to the second communication position. The electrode plate W is moved to the continuous position (t1), and the electrode plate W is attracted by the chuck body 10a (t2).

  At this time, as shown in FIG. 5, since the electrode plate W is supported in contact with the work suction surface 13a, a wide region including the outer edge side region and further the inner region of the outer edge side region is supported. The electrode plate W can be prevented from being damaged by scissors or the like. In the present embodiment, as described above, in order to prevent the electrode plate W from being damaged when adsorbing the electrode plate W, the partition wall 15 is provided, and a large number of holes 16 are formed therein. The diameter of the holes 16 formed in the partition wall 15 and the interval between the holes 16 are the degree of vacuum in the vacuum suction chamber 12 at the time of adsorption, the rigidity of the electrode plate W, the current collector and the active material that are constituent elements of the electrode plate W It is determined appropriately depending on the adhesion strength between the two.

  When the electrode plate W is attracted to the chuck body 10a (t2), as in the first embodiment, the movement of the chuck body 10a from the adsorption position A to the separation position B starts (t3), and the chuck body 10a reaches the separation position B ( t4) is executed.

  Similarly to the first embodiment, when the movement controller 81 moves the chuck body 10a from the suction position A to the separation position B, the movement controller 81 gives a signal to the chuck controller 60 that the chuck body 10a has been moved to the separation position B. send. Upon receiving this signal, the chuck controller 60 gives an instruction to the electromagnetic drive source 30 to move the valve body 25 of the three-way valve 20 from the first continuous position to the second communication position (t5), Immediately, the valve body 25 is moved from the second communication position to the neutral position (t10). As shown in FIG. 7, the neutral position means that the valve body 25 is located in the middle of the first communication position and the second communication position in the valve case 24, and the first opening 21 of the valve case 24 is This is a position where neither the second opening 22 nor the third opening 23 communicates.

  As shown in FIG. 6, when the valve body 25 reaches the second communication position (t5), the first opening 21 (opening on the vacuum suction chamber 12 side) and the third opening 23 (the gas compressor 75 of the valve compressor 75) of the valve case 24. The compressed gas from the gas compressor 75 enters the vacuum suction chamber 12 of the chuck body 10a, and the electrode plate W moves away from the chuck body 10a (t11).

  In the present embodiment, when the electrode plate W is detached from the chuck body 10a, the compressed gas is sent from the gas compressor 75 into the vacuum suction chamber 12 of the chuck body 10a as described above, and the electrode plate W is then discharged from the chuck body 10a. Since the force that releases the valve is positively applied to the electrode plate W, the time point when the valve body 25 of the three-way valve 20 reaches the second communication position from the first continuous position as compared with the first embodiment (t5). Thus, the time until the electrode plate W is separated from the chuck body 10a can be shortened. In addition, in the present embodiment, the chuck body 10a and the valve case 24 of the three-way valve 20 are integrated, so that the three-way valve 20 is compared with the case where the chuck body 10a and the valve are connected by a tube or the like. Since the flow path between the third opening 23 (opening on the gas compressor 75 side) and the vacuum suction chamber 12 is extremely short and the volume of the flow path between the third opening 23 and the vacuum suction chamber 12 is extremely small, the valve body 25 is moved from the first continuous position to The time from when the second communication position is reached (t5) until the compressed gas flows into the vacuum suction chamber 12 of the chuck body 10a is shortened.

  Therefore, in this embodiment, the response time from when the position of the valve body 25 of the three-way valve 20 is switched to when the compressed gas flows into the vacuum suction chamber 12 of the chuck body 10a can be shortened, that is, the first embodiment. As a result, the time required to separate the electrode plate W from the chuck body 10a can be shortened. As a result, the time required for handling the electrode plate W can be further shortened.

  When the electrode plate W is separated from the chuck body 10a (t11), the movement controller 81 starts to move the chuck body 10a from the separation position B to the suction position A by the movement mechanism 80 (t12). When the movement controller 81 causes the movement mechanism 80 to start moving the chuck body 10a, the movement controller 81 sends a signal to the chuck controller 60 that the movement of the chuck body 10a has started. The chuck controller 60 gives an instruction to the electromagnetic drive source 30 after elapse of a predetermined time after receiving this signal, and moves the valve body 25 of the three-way valve 20 from the neutral position to the second communication position (t13). Further, the valve body 25 is returned to the neutral position after a predetermined time has elapsed (t14).

  In the present embodiment, as described above, when adsorbing the electrode plate W, the electrode plate W is provided with a partition wall 15 to prevent bending, wrinkles, etc., and a large number of holes 16 are formed therein. When adsorbing the electrode plate W, a part of the active material adhering to the current collector of the electrode plate W is peeled off from the current collector by the suction force toward the vacuum suction chamber 12 side, and a large number of holes 16 There is a risk of clogging. Therefore, in the present embodiment, the chuck body 10a does not suck the electrode plate W, and the valve body 25 of the three-way valve 20 is moved to the second position while the chuck body 10a is moving from the separation position B to the suction position A. The compressed gas from the gas compressor 75 is sent to the vacuum suction chamber 12 of the chuck body 10a, and the compressed gas is sprayed to the outside from the hole 16 of the partition wall 15, thereby clogging the hole 16 of the partition wall 15. I try to eliminate it. The reason why the compressed gas is injected from the hole 16 of the partition wall 15 while the chuck body 10a is moving from the separation position B to the adsorption position A is that the hole 16 of the partition wall 15 is clogged with an active material or the like. In this case, the active material is prevented from being sprayed to the outside together with the compressed gas and scattered to the adsorption position A and the separation position B.

  After the valve body 25 of the three-way valve 20 returns to the neutral position (t14), when the chuck body 10a returns to the suction position A (t15), the movement controller 81 moves the chuck body 10a to the chuck controller 60. Send a signal to A. Upon receiving this signal, the chuck controller 60 gives an instruction to the electromagnetic drive source 30 to move the valve body 25 of the three-way valve 20 from the neutral position to the first continuous position (t1). Hereinafter, similarly to the above, the chuck body 10a attracts the electrode plate W (t2), the chuck body 10a starts moving from the suction position A to the separation position B (t3), and the chuck body 10a reaches the separation position B (t4). ), Movement of the valve body 25 from the first communication position to the second communication position (t5), movement of the valve body 25 from the second communication position to the neutral position (t10), and detachment of the electrode plate W from the chuck body 10a. (T11), start of movement of the chuck body 10a from the separation position B to the suction position A (t12), movement of the valve body 25 from the neutral position to the second communication position (t13), from the second communication position of the valve body 25 The movement to the neutral position (t14) and the arrival of the chuck body 10a to the suction position A (t15) are repeated.

  As described above, in the present embodiment, the time required to separate the electrode plate W from the chuck body 10a can be shortened. As a result, the time required for handling the electrode plate W can be further shortened compared to the first embodiment. . Moreover, in this embodiment, since the wide area | region of the electrode plate W is supported in contact with the workpiece | work adsorption | suction surface 13a, a bending, wrinkles, etc. of the electrode plate W can be prevented and possibility that the electrode plate W will be damaged is low. can do.

  In this embodiment and the first embodiment, the chuck controller 60 receives a signal from the movement controller 81 and controls the electromagnetic drive source 30 based on this signal. Since the operation of the valve body 25 moved in this manner is a periodic operation, the electromagnetic drive source 30 may be controlled by time management without being based on a signal from the movement controller 81.

"Third embodiment"
Next, a third embodiment of the chuck device according to the present invention will be described with reference to FIG.

  As shown in FIG. 9, the chuck device of this embodiment is obtained by adding a suction accumulator 50 and a compressed gas accumulator 55 to the chuck device of the second embodiment.

Both the suction accumulator 50 and the compressed gas accumulator 55 are formed with pressure accumulation chambers 51 and 55 having a volume larger than the volume of the vacuum suction chamber 12 of the chuck body 10a, and are fixed to the valve case 24 of the three-way valve 20, and this valve case 24 and one.
ing.

  The pressure accumulator 51 of the suction accumulator 50 is connected to the vacuum pump 70 via the suction pipe 71 and communicates with the second opening 22 of the valve case 24 of the three-way valve 20. The pressure accumulation chamber 56 of the compressed gas accumulator 55 is connected to the gas compressor 75 via the compressed gas pipe 76 and communicates with the third opening 23 of the valve case 24 of the three-way valve 20.

  If the suction accumulator 50 is not provided, the valve body 25 of the three-way valve 20 reaches the first continuous position, and immediately after the vacuum suction chamber 12 of the chuck body 10a starts to be vacuumed, the chuck passes through the vacuum suction chamber 12. Since the atmosphere flows into the connection flow path 14 of the body 10a at once, the degree of vacuum of the connection flow path 14 is temporarily reduced, and the adsorption speed of the electrode plate W is reduced. Therefore, in the present embodiment, by providing the suction accumulator 50 in which the pressure accumulating chamber 51 having a volume larger than the volume of the vacuum suction chamber 12 of the chuck body 10a is provided, the vacuum suction chamber 12 of the chuck body 10a is vacuum-sucked. Immediately after the start, the temporary lowering of the degree of vacuum of the connection channel 14 is suppressed, and the adsorption speed of the electrode plate W is increased.

  Further, when the compressed gas accumulator 55 is not provided, the valve body 25 of the three-way valve 20 reaches the second communication position, and immediately after the compressed gas starts to be fed into the vacuum suction chamber 12 of the chuck body 10a, it passes through the vacuum suction chamber 12. Since the compressed gas flows out from the connection flow path 14 of the chuck body 10a, the pressure of the connection flow path 14 temporarily decreases, and the separation speed of the electrode plate W becomes slow. Therefore, in the present embodiment, the compressed gas accumulator 55 in which the pressure accumulation chamber 56 having a volume larger than the volume of the vacuum suction chamber 12 of the chuck body 10a is provided, so that the compressed gas is contained in the vacuum suction chamber 12 of the chuck body 10a. Immediately after starting to feed, the pressure drop in the connection flow path 14 is suppressed temporarily, and the separation speed of the electrode plate W is increased.

  Furthermore, in this embodiment, since the suction accumulator 50 and the compressed gas accumulator 55 are integrated with the valve case 24, the flow path between the accumulator chambers 51, 56 of each accumulator 50, 55 and the vacuum suction chamber 12 is extremely small. It is short and the volume of the flow path between them is extremely small. For this reason, in this embodiment, the responsiveness of the pressure accumulation effect by the pressure accumulation chambers 51 and 56 can be improved. That is, in the present embodiment, it is possible to cope with a temporary decrease in the degree of vacuum and a temporary pressure decrease in the connection flow path 14 of the chuck body 10a without delay.

  In the present embodiment, the suction accumulator 50 is provided in the chuck device of the second embodiment, but the suction accumulator 50 may be provided in the same manner in the chuck device of the first embodiment.

  10, 10a: chuck body, 11: suction opening, 12: vacuum suction chamber (vacuum suction cavity), 12a: vacuum suction passage (vacuum suction cavity), 13, 13a: work suction surface, 14: connection flow path, 15: Septum, 16: hole, 20: three-way valve, 21: first opening, 22: second opening, 23: third opening, 24: valve case, 25: valve body, 30: electromagnetic drive source, 60: chuck controller, 70: vacuum pump, 71: suction pipe, 75: gas compressor, 76: compressed gas pipe, 80: moving mechanism, 81: moving controller, W: electrode plate

Claims (9)

In a chuck device that adsorbs a sheet-like workpiece,
A chuck body in which a workpiece suction surface that is in contact with the workpiece, a vacuum suction cavity to be vacuum-sucked, and a suction opening communicating with the vacuum suction cavity from the workpiece suction surface;
A valve case in which a first opening, a second opening, and a third opening are formed and a flow path connecting the openings is formed; and the first opening and the second opening are communicated with each other; A first continuous position where the first opening and the third opening are not communicated; a second communication position where the first opening and the third opening are communicated; and the first opening and the second opening are not communicated A three-way valve having a valve body that moves in the valve case between
With
The chuck body and the valve case of the three-way valve are integral, and the chuck body is formed with a connection flow path that communicates the vacuum suction cavity and the first opening of the valve case.
A chuck device characterized by that. The chuck device according to claim 1,
The chuck body has a partition having one surface forming the inner surface of the vacuum suction cavity and the other surface forming the workpiece suction surface, and the partition communicates with the vacuum suction cavity from the workpiece suction surface. A plurality of holes are formed, and the plurality of holes form the suction opening,
A chuck device characterized by that. The chuck device according to claim 1 or 2,
A valve body drive source for moving the valve body of the three-way valve between the first communication position and the second communication position;
A controller for controlling the driving of the valve body drive source;
With
The second opening of the three-way valve is an opening connected to a vacuum suction source for sucking gas through a suction pipe,
The controller is configured to position the valve body in the first continuous position by the valve body driving source when the work is attracted to the chuck body, and to separate the work from the chuck body. The valve body is positioned at the second communication position by a valve body drive source;
A chuck device characterized by that. The chuck device according to claim 2,
A valve body drive source for moving the valve body of the three-way valve between the first communication position and the second communication position;
A controller for controlling the driving of the valve body drive source;
With
The second opening of the three-way valve is an opening that is connected to a vacuum suction source that sucks gas through a suction pipe, and the third opening of the three-way valve receives compressed gas through a compressed gas pipe. An opening connected to a gas compression source to be discharged;
The controller is configured to position the valve body in the first continuous position by the valve body driving source when the work is attracted to the chuck body, and to separate the work from the chuck body. The valve body is positioned at the second communication position by a valve body drive source;
A chuck device characterized by that. The chuck device according to claim 4,
The controller temporarily positions the valve body at the second communication position by the valve body drive source during movement in a state where the chuck body does not attract the workpiece.
A chuck device characterized by that. The chuck device according to any one of claims 3 to 5,
A suction accumulator in which a pressure accumulating chamber having a volume equal to or larger than the volume of the vacuum suction cavity is formed;
The pressure accumulator chamber of the suction accumulator communicates with the second opening of the three-way valve and is connected to the vacuum suction source.
A chuck device characterized by that. The chuck device according to claim 6,
The suction accumulator is integral with the valve case of the three-way valve;
A chuck device characterized by that. In the chuck device according to claim 4 or 5,
A compressed gas accumulator in which a pressure accumulating chamber having a volume equal to or larger than the volume of the vacuum suction cavity is formed;
The pressure accumulation chamber of the compressed gas accumulator communicates with the third opening of the three-way valve and is connected to the gas compression source.
A chuck device characterized by that. The chuck device according to claim 8, wherein
The compressed gas accumulator is integral with the valve case of the three-way valve;
A chuck device characterized by that.

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