JP2006224256A - Suction nozzle device - Google Patents

Suction nozzle device Download PDF

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JP2006224256A
JP2006224256A JP2005042234A JP2005042234A JP2006224256A JP 2006224256 A JP2006224256 A JP 2006224256A JP 2005042234 A JP2005042234 A JP 2005042234A JP 2005042234 A JP2005042234 A JP 2005042234A JP 2006224256 A JP2006224256 A JP 2006224256A
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vacuum
switching
path
suction nozzle
suction
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JP4500703B2 (en
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Yoji Ise
養治 伊勢
Kazunari Suzuki
一成 鈴木
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Convum Ltd
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Myotoku Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a suction nozzle device which can quickly perform the movement and response of the suction and release of an object to be sucked, and which is small-sized and lightweight. <P>SOLUTION: In the suction nozzle device for the suction and carriage of the object, a suction port, a switching control supply port, a vacuum supply port, and a vacuum breaking supply port are opened on the outside peripheral portion of the suction nozzle device, and a switching device for switching the communication or the closure of a vacuum passage and/or a breakage passage is formed inside the suction nozzle device, wherein the switching device is composed of a piston B which slides inside a cylinder A by a compressive fluid supplied from the switching control supply port and an elastic member A, a valve seal A for switching the opening and closing of the vacuum passage by the slide of the piston B, and a valve seal B for switching the breakage passage by opening and closing the breakage passage by a positive pressure fluid supplied from the vacuum breaking supply port. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、物品の吸着搬送に用いられる吸着ノズル装置に関する。   The present invention relates to a suction nozzle device used for suction conveyance of articles.

従来技術は、吸着搬送装置のヘッド部に吸着ノズルを取り付け、該吸着ノズルの吸着孔が該吸着ノズルに接続される配管チューブにより切換装置、真空源、切換装置と真空源が一体化されたエジェクタ式真空発生装置、等へと導通されていて、吸着ノズルへの物品の吸着、解放の切換が、遠隔の場所にある切換装置により成されている。   In the prior art, an adsorption nozzle is attached to the head portion of the adsorption conveyance device, and an ejector in which an adsorption hole of the adsorption nozzle is integrated with a switching device, a vacuum source, a switching device and a vacuum source by a pipe tube connected to the adsorption nozzle Switching between suction and release of articles to the suction nozzle is performed by a switching device at a remote location.

吸着搬送装置のヘッド部は、超高速で稼働するために重量を軽くすることが求められ、物品・被吸着物の吸着、解放の動作・応答に高速化が求められている。これらの吸着、解放の動作の開始時、停止時に配管チューブの経路長の内容積に相当する量の空気が排出されて吸着ノズルに物品が吸着され、同量以上の空気が配管チューブに供給されて後に吸着ノズルから物品が解放される動作モデルであり、吸着ノズルと真空源の間の配管チューブの経路長が動作・応答の高速化を妨げている。即ち、吸着、解放の動作時には配管チューブ内の容積分の空気を排出するのに長い時間を要する、配管チューブ内の真空状態を解除するために空気を供給するのに長い時間を要する。以下の文献には、吸着パッドを取り付けるアダプタユニットをマニホールドユニットに係着させ該マニホールドユニットに真空供給弁部及び電磁弁を配設した吸着用パッド付真空供給ユニットが記載されている。
特開平5−69365号公報
The head portion of the adsorption / conveyance device is required to reduce the weight in order to operate at an ultra-high speed, and high speed is required for the operation and response of the adsorption / release of the article / object to be adsorbed. At the start and stop of these adsorption and release operations, an amount of air corresponding to the internal volume of the path length of the piping tube is exhausted, the article is adsorbed by the suction nozzle, and the same amount or more of air is supplied to the piping tube. This is an operation model in which articles are released from the suction nozzle later, and the path length of the piping tube between the suction nozzle and the vacuum source hinders speeding up of the operation and response. That is, it takes a long time to discharge the volume of air in the pipe tube during the adsorption and release operations, and it takes a long time to supply air to release the vacuum state in the pipe tube. The following documents describe a vacuum supply unit with a suction pad in which an adapter unit for attaching a suction pad is engaged with a manifold unit, and a vacuum supply valve portion and an electromagnetic valve are provided on the manifold unit.
Japanese Patent Laid-Open No. 5-69365

吸着搬送装置のヘッド部に取り付けられる吸着ノズルと該吸着ノズルの吸着、解放を駆動させる切換装置が離れた位置に配置されているために物品・被吸着物の吸着、解放の動作・応答が遅いという問題がある。物品・被吸着物の吸着、解放の動作、応答の高速化のために小型、軽量であり吸着、解放の切換を行う切換装置を吸着ノズルに組み込んだ問題を解決した吸着ノズル装置を提供することである。   Since the suction nozzle attached to the head part of the suction conveyance device and the switching device that drives the suction and release of the suction nozzle are arranged at separate positions, the operation and response of the suction and release of articles and objects to be adsorbed is slow. There is a problem. To provide a suction nozzle device that solves the problem of incorporating a switching device for switching between suction and release into a suction nozzle that is compact and lightweight for speeding up the operation of suctioning and releasing articles and objects. It is.

吸着搬送する吸着ノズルにおいて、吸着口、切換制御用供給口、真空供給口及び真空破壊用供給口が吸着ノズル装置の外周部に開口形成され、並びに、真空路及び/または破壊路の導通・閉鎖を切換えする切換装置が吸着ノズル装置の内部に形成されている吸着ノズル装置であり、真空供給口から真空路に常に真空が供給されていおりノズルヘッドの近傍にある切換装置により導通・閉鎖を切り換えるために被吸着物の吸着、解放の動作、応答が高速化されて小型、軽量である。    In the suction nozzle to be sucked and transported, a suction port, a switching control supply port, a vacuum supply port, and a vacuum break supply port are formed in the outer peripheral portion of the suction nozzle device, and the vacuum path and / or breakage path is connected and closed. Is a suction nozzle device formed inside the suction nozzle device, and vacuum is always supplied to the vacuum path from the vacuum supply port, and switching between conduction and closure is performed by the switching device in the vicinity of the nozzle head. Therefore, the operation of adsorbing and releasing the object to be adsorbed, the response speed is increased, and it is small and lightweight.

更に、真空路の導通・閉鎖を切換えする切換装置が、切換制御用供給口からの圧縮流体及び弾性体AによりシリンダAの内部を往復摺動するピストンB並びに該ピストンBの摺動により真空路及び吸着口の導通・閉鎖を切換えする弁シールAより成る吸着ノズル装置であり、更に、破壊路の導通・閉鎖を切換えする切換装置が、真空破壊用供給口からの正圧流体によりピストンBと接触開閉して破壊路及び吸着口の導通・閉鎖を切換えする弁シールBより成る吸着ノズル装置であり、常に真空が供給されている真空路を圧縮流体による弁シールAで導通・閉鎖し、また正圧流体で破壊路を切り換えるために被吸着物の吸着、解放の動作、応答が高速化されて小型、軽量である。   Further, a switching device for switching between conduction and closing of the vacuum path includes a piston B that reciprocally slides inside the cylinder A by a compressed fluid and an elastic body A from a switching control supply port, and a sliding path of the piston B to the vacuum path. And a suction nozzle device comprising a valve seal A for switching conduction / closing of the suction port, and a switching device for switching conduction / closing of the breakage path are connected to the piston B by the positive pressure fluid from the vacuum breaking supply port. A suction nozzle device comprising a valve seal B that opens and closes contact and switches conduction and closing of the breakage path and suction port. The vacuum path that is always supplied with vacuum is connected and closed by the valve seal A with compressed fluid. In order to switch the destruction path with a positive pressure fluid, the adsorption and release operations and response of the object to be adsorbed are speeded up, and it is small and lightweight.

以下に本発明に係る吸着ノズル装置に関して詳細な説明をする。なお、以下の説明は本発明に係る吸着ノズル装置の一構成を示すものであり記載内容のみに特に限定されるものでない。   The suction nozzle device according to the present invention will be described in detail below. In addition, the following description shows one structure of the suction nozzle apparatus which concerns on this invention, and is not specifically limited only to description content.

本発明に係る吸着ノズル装置は、吸着搬送する吸着ノズルにおいて、吸着口、切換制御用供給口、真空供給口及び真空破壊用供給口が吸着ノズル装置の外周部に開口形成され、並びに、真空路及び/または破壊路の導通・閉鎖を切換えする切換装置が吸着ノズル装置の内部に形成されていて、真空路の導通・閉鎖を切換えする切換装置が切換制御用供給口からの圧縮流体及び弾性体AによりシリンダAの内部を往復摺動するピストンB並びに該ピストンBの摺動により真空路及び吸着口の導通・閉鎖を切換えする弁シールAより成り、破壊路の導通・閉鎖を切換えする切換装置が真空破壊用供給口からの正圧流体によりピストンBと接触開閉して破壊路及び吸着口の導通・閉鎖を切換えする弁シールBより成る。好ましい配置は、シリンダAの内部にピストンBかあり該ピストンBの内部に弁シールBがあり該弁シールB、該ピストンB及び該シリンダAが同軸にあることである。   In the suction nozzle device according to the present invention, in the suction nozzle for sucking and conveying, a suction port, a switching control supply port, a vacuum supply port and a vacuum breaking supply port are formed in the outer peripheral portion of the suction nozzle device, and a vacuum path And / or a switching device for switching conduction / closing of the breakage path is formed inside the suction nozzle device, and the switching device for switching conduction / closing of the vacuum path is compressed fluid and elastic body from the switching control supply port. A switching device which comprises a piston B which reciprocally slides inside the cylinder A by A and a valve seal A which switches conduction / closing of the vacuum path and the suction port by sliding of the piston B, and which switches conduction / closing of the breaking path. Consists of a valve seal B that opens and closes contact with the piston B by a positive pressure fluid from the vacuum break supply port to switch the breakage path and the suction port between conduction and closure. A preferred arrangement is that there is a piston B inside the cylinder A, a valve seal B inside the piston B, and the valve seal B, the piston B and the cylinder A are coaxial.

前記ノズルヘッド2は、被吸着物の吸着、解放が成される真空、破壊正圧流体を導通する吸着口3の穴が形成されており吸着補助具としての吸着パッド26が取り付けられることがありまたは吸着パッドを兼ね備えた一体の構造であることもあり、該ノズルヘッド2及びシリンダA7(筐体を兼ねることもある)をネジ固定、圧入、接着、等で固着してもよくまたは該ノズルヘッド及び該シリンダAを一体加工してもよい。該ノズルヘッド2は、鉄、真鍮、ステンレス、アルミニウム、等の金属、セラミック、プラスチック、ゴムなどの材料であり円柱形、多角柱形、などの小径な形状であり、好ましくは、外径が50mm以下の円柱形である。更に好ましくは、該ノズルヘッドの吸着口にゴム材料による吸着パッドを同時に成形したものである。   The nozzle head 2 is formed with a hole of the suction port 3 through which a vacuum and a positive pressure fluid that breaks the object to be sucked and released is formed, and a suction pad 26 as a suction assisting tool may be attached. Alternatively, the nozzle head 2 and the cylinder A7 (which may also serve as a housing) may be fixed by screwing, press-fitting, bonding, or the like. The cylinder A may be integrally processed. The nozzle head 2 is made of a metal such as iron, brass, stainless steel, aluminum, etc., ceramic, plastic, rubber, etc., and has a small diameter such as a cylindrical shape or a polygonal column shape, and preferably has an outer diameter of 50 mm. It is the following cylindrical shape. More preferably, a suction pad made of a rubber material is simultaneously formed in the suction port of the nozzle head.

前記シリンダA7は、前記ノズルヘッド2と固着または一体であり、内部にはピストンB18が往復摺動する空洞が形成され、周壁の少なくとも一個所に真空路20が形成され、弁シールA6(ゴム、樹脂、O−リング、弾性体、などより成る)と接触、解放して真空路を開閉する段差部が形成され、供給ユニット11と固着されて前記空洞を封緘した鉄、真鍮、ステンレス、アルミニウム、等の金属、セラミック、プラスチック、ゴムなどの材料であり円柱形、四角柱などの多角柱形などの形状であり、好ましくは50mm以下の円柱形、四角柱形の形状である。更に好ましくは30mm以下の円柱形、四角柱形である。   The cylinder A7 is fixed or integral with the nozzle head 2, and a cavity in which the piston B18 reciprocally slides is formed. A vacuum path 20 is formed in at least one part of the peripheral wall, and a valve seal A6 (rubber, A step portion that opens and closes the vacuum path by contact with and release from the resin, an O-ring, an elastic body, etc., and is fixed to the supply unit 11 to seal the cavity, such as iron, brass, stainless steel, aluminum, It is a material such as metal, ceramic, plastic, rubber, etc., and has a shape such as a cylindrical column or a polygonal column such as a quadrangular column, preferably a columnar or rectangular column shape of 50 mm or less. More preferably, it is a cylindrical shape or a quadrangular prism shape of 30 mm or less.

前記ピストンB18は、前記シリンダA7の内部をピストンとして往復移動動作する構造またはジャバラ、ベローズのような鼓動体による鼓動動作をする構造のものである。往復移動動作、鼓動動作により弁シールA6を自在に該シリンダA7の段差部に接触、解放して真空路を開閉する。   The piston B18 has a structure that reciprocates using the inside of the cylinder A7 as a piston, or a structure that performs a beating operation using a beating body such as a bellows or bellows. The valve seal A6 is freely brought into contact with and released from the stepped portion of the cylinder A7 by a reciprocating movement operation and a beating operation to open and close the vacuum path.

往復移動動作の場合には供給ユニット11が摺動用パッキンB16と摺動用パッキンA9でシールドされて該供給ユニット11側で該供給ユニット11との間にシリンダ室10が設けられ、シリンダA7との間に弾性体A8(スプリング、ゴム、などの弾性体)を包含して真空路20と弁シールA6を導通する真空経路が設けられ、ほぼ中心軸位置で破壊路B17に弁シールB19を押接する弾性体B21(スプリング、ゴム、などの弾性体)による破壊経路が設けられている。鼓動動作による場合は鼓動体がシリンダA7にシール取り付けされていて弁シールA、破壊路B、弁シールB、などが形成されている。   In the case of reciprocating movement, the supply unit 11 is shielded by the sliding packing B16 and the sliding packing A9, and the cylinder chamber 10 is provided between the supply unit 11 and the supply unit 11 on the supply unit 11 side. Includes an elastic body A8 (an elastic body such as a spring, rubber, etc.) and is provided with a vacuum path that conducts the vacuum path 20 and the valve seal A6, and elastically presses the valve seal B19 against the fracture path B17 at substantially the center axis position. A fracture path is provided by the body B21 (an elastic body such as a spring or rubber). In the case of the beating operation, the beating body is attached to the cylinder A7 as a seal, and the valve seal A, the destruction path B, the valve seal B, and the like are formed.

前記供給ユニット11は、ピストンB18との間のシリンダ室10に圧縮流体を導通する切換制御経路22、切換制御用供給口12を設け、破壊路B17に正圧流体を導通する破壊路A14,真空破壊用供給口13を設け、該ピストンB18が摺動する摺動用パッキンB16を設け、シリンダA7に固着されている。   The supply unit 11 is provided with a switching control path 22 for conducting compressed fluid in the cylinder chamber 10 between the piston B18 and a supply port 12 for switching control, and a breaking path A14 for conducting positive pressure fluid to the breaking path B17, vacuum. A breaking supply port 13 is provided, a sliding packing B16 through which the piston B18 slides is provided, and is fixed to the cylinder A7.

ノズルヘッド、シリンダA、ピストンB、供給ユニット、などから成る吸着ノズル装置は、真空源からの真空が常に真空路に供給されていて切換制御用供給口からの圧縮流体の制御によりピストンBを作動させて弁シールAによるシリンダAの段差部との接触、解放により真空路および吸着口との導通、閉鎖する。また真空破壊用供給口からの真空破壊用の正圧流体の制御により弁シールBを介して吸着口に真空破壊用の正圧流体を供給して真空破壊を行わせる。   The suction nozzle device, consisting of the nozzle head, cylinder A, piston B, supply unit, etc., operates the piston B by controlling the compressed fluid from the supply port for switching control, while the vacuum from the vacuum source is always supplied to the vacuum path. Then, the valve seal A is brought into contact with and released from the stepped portion of the cylinder A, and is connected to and closed from the vacuum path and the suction port. Further, by controlling the positive pressure fluid for vacuum break from the vacuum break supply port, the positive pressure fluid for vacuum break is supplied to the suction port via the valve seal B to cause the vacuum break.

即ち、切換制御用供給口12に圧縮流体を供給すると圧縮流体が切換制御経路22を通りシリンダ室10に供給され、該シリンダ室に加わる圧縮流体の力がスプリングA8の反発力以上となりピストンB18を摺動し、弁座C5及び弁シールA6が該ピストンB18と同時に摺動して該弁シールA6及びシリンダA7との間に隙間を作り真空路20と吸着口3を導通する真空経路を構築して吸着口3に被吸着物を真空吸着を行い(図3参照、吸着時の実線、破線による真空経路)切換制御用供給口12に圧縮流体の供給を停止するとシリンダ室に加わる力がなくなりスプリングA8の力によりピストンB18が押し戻されて同時に弁シールA6がシリンダA7に押接して真空経路を閉鎖する。また、真空破壊用供給口13から供給した真空破壊用の正圧流体の力が弾性体B21の力に勝って弁シールB19を押して(解放して)正圧流体を流動させて弁座C孔4を通し吸着口3に正圧流体を供給し真空破壊を行い、真空破壊用供給口13への正圧流体の供給を停止して該弁シールB19が該破壊路B17に常時押接されていることにより真空破壊を停止すると共に吸着時の真空漏れを防いでいる。   That is, when the compressed fluid is supplied to the switching control supply port 12, the compressed fluid is supplied to the cylinder chamber 10 through the switching control path 22, and the force of the compressed fluid applied to the cylinder chamber becomes greater than the repulsive force of the spring A8, and the piston B18 is moved. The valve seat C5 and the valve seal A6 slide at the same time as the piston B18 to create a gap between the valve seal A6 and the cylinder A7, thereby establishing a vacuum path that connects the vacuum path 20 and the suction port 3. Then, the object to be adsorbed is vacuum-adsorbed to the adsorbing port 3 (see FIG. 3, vacuum path by solid line and broken line at the time of adsorbing). When the supply of compressed fluid to the switching control supply port 12 is stopped, the force applied to the cylinder chamber disappears and the spring The piston B18 is pushed back by the force of A8, and at the same time, the valve seal A6 is pressed against the cylinder A7 to close the vacuum path. Further, the force of the positive pressure fluid for vacuum break supplied from the vacuum break supply port 13 overcomes the force of the elastic body B21 to push (release) the valve seal B19 to cause the positive pressure fluid to flow, thereby opening the valve seat C hole. 4, a positive pressure fluid is supplied to the suction port 3 to break the vacuum, the supply of the positive pressure fluid to the vacuum break supply port 13 is stopped, and the valve seal B 19 is always pressed against the break passage B 17. Therefore, the vacuum break is stopped and the vacuum leakage at the time of adsorption is prevented.

このような本発明に係る吸着ノズル装置は、真空路に常時真空が供給されており圧縮流体によるピストンBの作動により高速度で被吸着物を吸着口に吸着することができ、正圧流体を真空破壊用供給口に供給することにより真空破壊用の正圧流体を吸着口に供給して被吸着物を高速度で吸着口から解放することができ、被吸着物の吸着、解放の動作、応答が高速であり小型、軽量である。   In such a suction nozzle device according to the present invention, a vacuum is constantly supplied to the vacuum path, and the object to be adsorbed can be adsorbed to the suction port at a high speed by the operation of the piston B by the compressed fluid. By supplying the vacuum breaking supply port to the suction port, positive pressure fluid for vacuum breaking can be supplied to the suction port to release the object to be adsorbed from the adsorption port at a high speed. The response is fast, small and light.

本発明に係る吸着ノズル装置は、以下の実施例の説明事項に限定されるものでなく、図においては、説明を安易にするためのものであり形状、縮尺、位置、等を特に限定するものでない。   The suction nozzle device according to the present invention is not limited to the description items of the following embodiments, but is for limiting the shape, scale, position, etc., for ease of explanation in the drawings. Not.

(実施例1)
本発明に係る吸着ノズル装置の一実施態様を説明する。本発明に係る吸着ノズル装置1は、吸着口3の穴を貫通する略円柱状でアルミニウム製のノズルヘッド2(外径がφ15mmで先端部に吸着パッドを取り付けるためのM6のネジが切られている。)が略四角柱状でアルミニウム製のシリンダA7(20*25mmで長さが40mmの角柱形状)の円柱取付部に嵌合され、該シリンダA7が内部に流体経路の切換装置を有し、並びに、該シリンダA7の該ノズルヘッド2との反対端には切換制御用供給口12、真空破壊用供給口13、破壊経路A14及び切換制御経路22を有するアルミニウム製の供給ユニット11がシリンダA7に嵌合されている。(図1参照)
Example 1
An embodiment of the suction nozzle device according to the present invention will be described. The suction nozzle device 1 according to the present invention includes a substantially cylindrical nozzle head 2 made of aluminum that penetrates the hole of the suction port 3 (the outer diameter is φ15 mm and an M6 screw for attaching a suction pad to the tip is cut off. Is fitted in a cylindrical mounting portion of an aluminum cylinder A7 (20 * 25 mm and 40 mm long prismatic shape), and the cylinder A7 has a fluid path switching device inside. In addition, an aluminum supply unit 11 having a switching control supply port 12, a vacuum breaking supply port 13, a breaking path A14, and a switching control path 22 is connected to the cylinder A7 at the opposite end of the cylinder A7 from the nozzle head 2. It is mated. (See Figure 1)

吸着ノズル装置の配管接続の例は(図2参照)、該吸着ノズル装置1の前記真空供給口15がチューブ配管されてエジェクタ式の真空発生装置(真空源25)に接続され、前記真空破壊用供給口13がチューブ配管されて真空破壊制御用電磁弁24に接続され該真空破壊制御用電磁弁が正圧流体源に接続され、切換制御用供給口12がチューブ配管されて真空切換制御用電磁弁23に接続され該真空切換制御用切換弁が圧縮流体源に接続されている。   An example of the pipe connection of the suction nozzle device (see FIG. 2) is that the vacuum supply port 15 of the suction nozzle device 1 is piped and connected to an ejector-type vacuum generator (vacuum source 25). The supply port 13 is tubed and connected to a vacuum break control solenoid valve 24, the vacuum break control solenoid valve is connected to a positive pressure fluid source, and the switching control supply port 12 is tubed to provide a vacuum switching control solenoid. The vacuum switching control switching valve connected to the valve 23 is connected to the compressed fluid source.

前記シリンダA7内部の切換装置は、常時供給されている真空供給口15からの真空を真空路20及び吸着口3の経路を弁シールA6で導通、遮断する機構、並びに、真空破壊用供給口13からの正圧流体を破壊路A14、破壊路B17及び吸着口3の経路を弁シールB19で導通、遮断する機構より成る。   The switching device inside the cylinder A7 includes a mechanism for conducting and blocking the vacuum path 20 and the suction port 3 through the valve seal A6, and the vacuum breaking supply port 13 from the vacuum supply port 15 that is always supplied. It consists of a mechanism for connecting and blocking the positive pressure fluid from the breakage path A14, the breakage path B17 and the suction port 3 with a valve seal B19.

真空路の前記切換装置は、シリンダA内部を摺動用パッキンA9でエアーシールドされて摺動するポリアミド樹脂製のピストンB18(最大部位の径がφ12mm)、該ピストンB18の供給ユニット11側に動作時に圧縮流体が供給される切換制御用供給口12、切換制御経路22と導通するシリンダ室10が設けられ、該ピストンBのシリンダ室10と反対側端に略中心部に弁座C孔4を有する弁座C5がピストンB18と嵌合され、該弁座C5とシリンダA7の接触面にNBR製のOリングより成る弁シールA6が形成され、シリンダA7とピストンB18の間のスプリングより成る弾性体A8によりピストンBが供給ユニット11側に押しつけられて弁座C5とシリンダA7が接触状態(図1参照)となり弁シールA6で真空路20と吸着口3の導通を遮断する。切換制御用供給口12に圧縮流体を供給すると圧縮流体が切換制御経路22を通りシリンダ室10に供給され、圧縮流体のシリンダ力がスプリングA8の反発力以上となりピストンB18を摺動し、弁座C5とシリンダA7の間の弁シールA6に隙間を作って真空路20と吸着口3の導通を解放して吸着口3に被吸着物を真空吸着し(図3参照、吸着時の実線、破線による真空経路)、圧縮流体の供給を停止すると弾性体A8の復元力によりピストンB18が押し戻されて弁シールA6及びシリンダA7により真空経路が閉鎖される切換装置を有する。   The switching device for the vacuum path is a polyamide resin piston B18 (the maximum part diameter is 12 mm) that slides inside the cylinder A with the air-shielded sliding packing A9, and moves to the supply unit 11 side of the piston B18 during operation. A switching control supply port 12 to which a compressed fluid is supplied and a cylinder chamber 10 that communicates with the switching control path 22 are provided, and a valve seat C hole 4 is provided at a substantially central portion at the end opposite to the cylinder chamber 10 of the piston B. The valve seat C5 is fitted to the piston B18, a valve seal A6 made of an NBR O-ring is formed on the contact surface of the valve seat C5 and the cylinder A7, and an elastic body A8 made of a spring between the cylinder A7 and the piston B18. As a result, the piston B is pressed against the supply unit 11 side, and the valve seat C5 and the cylinder A7 are brought into contact with each other (see FIG. 1). Interrupting the continuity of the suction port 3. When compressed fluid is supplied to the switching control supply port 12, the compressed fluid is supplied to the cylinder chamber 10 through the switching control path 22, the cylinder force of the compressed fluid exceeds the repulsive force of the spring A8, slides on the piston B18, and the valve seat. A clearance is created in the valve seal A6 between C5 and the cylinder A7 to release the conduction between the vacuum path 20 and the suction port 3, and the object to be adsorbed is vacuum-sucked to the suction port 3 (see FIG. 3, solid line and broken line during suction). When the supply of the compressed fluid is stopped, the piston B18 is pushed back by the restoring force of the elastic body A8 and the vacuum path is closed by the valve seal A6 and the cylinder A7.

前記ピストンB18の内部には、供給ユニット11と摺動用パッキンB16でシールドされて摺動する部位、破壊路A14と導通する破壊路B17が形成され、該破壊路B17を開閉するゴム製の弁シールB19、該弁シールB19がスプリング製の弾性体B21により破壊路B17に押しつけられて破壊経路を閉鎖し(図1参照)、破壊経路の開放は真空破壊用供給口13に供給される正圧流体が破壊路A14、破壊路B17を経由して弾性体B21のスプリング力に抗して弁シールB19を開放するように押して真空破壊用の流体が弁座C孔4を通り吸着口3に供給し被吸着物を吸着解放(図4の矢印を参照、真空破壊の実線による正圧流体の経路)し、正圧流体の供給を停止すると弾性体B21により弁シールB19が破壊路B17に押接されて破壊経路を閉鎖する切換装置を有する。   Inside the piston B18 is formed a part that is shielded and slid by the supply unit 11 and the sliding packing B16, and a breaking path B17 that is electrically connected to the breaking path A14, and a rubber valve seal that opens and closes the breaking path B17. B19, the valve seal B19 is pressed against the breaking path B17 by the spring elastic body B21 to close the breaking path (see FIG. 1), and the breaking path is opened by the positive pressure fluid supplied to the vacuum breaking supply port 13 Is pushed through the breaking path A14 and the breaking path B17 to open the valve seal B19 against the spring force of the elastic body B21, and the vacuum breaking fluid is supplied to the suction port 3 through the valve seat C hole 4. When the object to be adsorbed is released (see the arrow in FIG. 4, the path of the positive pressure fluid by the solid line of the vacuum break) and the supply of the positive pressure fluid is stopped, the valve seal B19 is moved to the break path B17 by the elastic body B21. Having a switching device for closing the fracture path is contact.

外部の真空切換制御用電磁弁23で切り換えられた圧縮流体が切換制御用供給口12に供給、非供給されることによりピストンB18が弾性体A8のスプリング力、流体圧力により摺動して弁座C5の弁シールA6がシリンダA7と接触、開放して真空経路が開閉されて吸着口3に被吸着物の吸着、開放が行われる。吸着口3に被吸着物が密着している場合には、切換制御用供給口12の正圧流体の供給を停止しても弾性体A8により押し戻されたピストンB18が弁シールA6とシリンダA7で真空路を閉鎖するために吸着口3内部が負圧状態であり非吸着物の吸着された状態が継続される。この残留継続吸着の状態を解消するために真空破壊制御用電磁弁24の切換により真空破壊用供給口13に破壊用の正圧流体を供給して弁シールB19を作動させて弁座C孔4を介して吸着口3に流体を供給することにより負圧状態が早急に解消されて被吸着物がノズルヘッド2から開放、脱着される。   When the compressed fluid switched by the external vacuum switching control electromagnetic valve 23 is supplied to or not supplied to the switching control supply port 12, the piston B18 slides due to the spring force and fluid pressure of the elastic body A8, and the valve seat. The C5 valve seal A6 comes into contact with and opens the cylinder A7, the vacuum path is opened and closed, and the object to be adsorbed is released from the suction port 3. When the object to be adsorbed is in close contact with the suction port 3, the piston B18 pushed back by the elastic body A8 is stopped by the valve seal A6 and the cylinder A7 even if the supply of the positive pressure fluid to the switching control supply port 12 is stopped. In order to close the vacuum path, the inside of the suction port 3 is in a negative pressure state, and the state in which the non-adsorbed substance is adsorbed is continued. In order to eliminate this residual continuous adsorption state, the vacuum break control solenoid valve 24 is switched to supply a vacuum positive pressure fluid to the vacuum break supply port 13 to actuate the valve seal B19, thereby opening the valve seat C hole 4 By supplying the fluid to the suction port 3 via the negative pressure state, the negative pressure state is quickly eliminated, and the object to be adsorbed is opened and detached from the nozzle head 2.

外部の真空源からの真空状態が真空供給口15、真空路20、弁シールA6の近傍まで常時供給されていて該弁シールA6の開閉により高速度で吸着口3への被吸着物の吸着、開放を行うことができる。本発明による方法での吸着のスピードは、外部の電磁弁等で真空源を開閉する方法に比べて高速度である。これは、圧縮流体を経路に供給して経路を充満する速度が経路を真空に排気する速度より速いことによるものである。   The vacuum state from the external vacuum source is constantly supplied to the vicinity of the vacuum supply port 15, the vacuum path 20, and the valve seal A6, and the adsorption of the object to be adsorbed to the adsorption port 3 at a high speed by opening and closing the valve seal A6. Opening can be performed. The suction speed in the method according to the present invention is higher than that in the method of opening and closing the vacuum source with an external solenoid valve or the like. This is because the speed at which the compressed fluid is supplied to the path to fill the path is faster than the speed at which the path is evacuated to vacuum.

この様な実施例による吸着ノズルは、真空経路の外部での開閉による被吸着物の吸着、開放のスピードに比べて、外部での圧縮流体の開閉により行うために高速度で切換動作をさせることができる。   The suction nozzle according to such an embodiment has a switching operation at a higher speed because it is performed by opening / closing the compressed fluid outside than the suction / release speed of the object to be adsorbed by opening / closing outside the vacuum path. Can do.

本発明に係る吸着ノズル装置は、内部に弁シールAによる真空切換機構及び弁シールBによる破壊切換機構を組み込んだものであり、被吸着物の吸着、解放の動作、応答が高速化された小型、軽量であり、有用である。   The suction nozzle device according to the present invention incorporates a vacuum switching mechanism using a valve seal A and a destruction switching mechanism using a valve seal B inside, and is a small-sized device that speeds up the operation of adsorbing and releasing the object to be adsorbed and the response. Lightweight and useful.

本発明に係る吸着ノズル装置の一実施態様の静止時の状態を示す図である。It is a figure which shows the state at the time of stationary of one embodiment of the suction nozzle apparatus which concerns on this invention. 本発明に係る吸着ノズル装置の一実施態様の外部接続の配管を示す図である。It is a figure which shows the piping of the external connection of one embodiment of the suction nozzle apparatus which concerns on this invention. 本発明に係る吸着ノズル装置の一実施態様の吸着動作時の状態を示す図である。It is a figure which shows the state at the time of adsorption | suction operation | movement of one embodiment of the adsorption nozzle apparatus which concerns on this invention. 本発明に係る吸着ノズル装置の一実施態様の真空破壊動作時の状態を示す図である。It is a figure which shows the state at the time of the vacuum breaking operation | movement of one embodiment of the suction nozzle apparatus which concerns on this invention. 本発明に係る吸着ノズル装置の他の態様を示す図である。It is a figure which shows the other aspect of the suction nozzle apparatus which concerns on this invention.

符号の説明Explanation of symbols

1 吸着ノズル装置
2 ノズルヘッド
3 吸着口
4 弁座C孔
5 弁座C
6 弁シールA
7 シリンダA
8 弾性体A
9 摺動用パッキンA
10 シリンダ室
11 供給ユニット
12 切換制御用供給口
13 真空破壊用供給口
14 破壊路A
15 真空供給口
16 摺動用パッキンB
17 破壊路B
18 ピストンB
19 弁シールB
20 真空路
21 弾性体B
22 切換制御経路
23 真空切換制御用電磁弁
24 真空破壊制御用電磁弁
25 真空源
26 吸着パッド
1 Adsorption nozzle device 2 Nozzle head 3 Adsorption port 4 Valve seat C hole 5 Valve seat C
6 Valve seal A
7 Cylinder A
8 Elastic body A
9 Sliding packing A
10 Cylinder chamber 11 Supply unit 12 Supply port for switching control 13 Supply port for vacuum break 14 Break path A
15 Vacuum supply port 16 Sliding packing B
17 Destruction Path B
18 Piston B
19 Valve seal B
20 Vacuum path 21 Elastic body B
22 Switching control path 23 Vacuum switching control solenoid valve 24 Vacuum break control solenoid valve 25 Vacuum source 26 Suction pad

Claims (3)

吸着搬送する吸着ノズルにおいて、吸着口、切換制御用供給口、真空供給口及び真空破壊用供給口が吸着ノズル装置の外周部に開口形成され、並びに、真空路及び/または破壊路の導通・閉鎖を切換えする切換装置が吸着ノズル装置の内部に形成されていることを特徴とする吸着ノズル装置。  In the suction nozzle to be sucked and transported, a suction port, a switching control supply port, a vacuum supply port, and a vacuum break supply port are formed in the outer peripheral portion of the suction nozzle device, and the vacuum path and / or breakage path is connected and closed. A suction nozzle device, characterized in that a switching device for switching between the two is formed inside the suction nozzle device. 真空路の導通・閉鎖を切換えする切換装置が、切換制御用供給口からの圧縮流体及び弾性体AによりシリンダAの内部を往復摺動するピストンB、該ピストンBの摺動により真空路及び吸着口の導通・閉鎖を切換えする弁シールAより成ることを特徴とする請求項1に記載の吸着ノズル装置。   The switching device for switching between conduction and closing of the vacuum path is a piston B that reciprocally slides inside the cylinder A by the compressed fluid and the elastic body A from the switching control supply port, and the vacuum path and adsorption by the sliding of the piston B 2. The suction nozzle device according to claim 1, comprising a valve seal A for switching between opening and closing of the mouth. 破壊路の導通・閉鎖を切換えする切換装置が、真空破壊用供給口からの正圧流体によりピストンBと接触開閉して破壊路及び吸着口の導通・閉鎖を切換えする弁シールBより成ることを特徴とする請求項1または2に記載の吸着ノズル装置。   The switching device for switching between conduction and closing of the breaking path comprises a valve seal B that opens and closes contact with the piston B by a positive pressure fluid from the vacuum breaking supply port and switches between conduction and closing of the breaking path and the suction port. The suction nozzle device according to claim 1, wherein the suction nozzle device is characterized.
JP2005042234A 2005-02-18 2005-02-18 Suction nozzle device Expired - Fee Related JP4500703B2 (en)

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JP2007030139A (en) * 2005-07-29 2007-02-08 Seiko Instruments Inc Vacuum chuck
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TWI711572B (en) * 2015-12-01 2020-12-01 荷蘭商耐克創新有限合夥公司 Pickup tool, material pickup system and method of moving material with pickup tool
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Publication number Priority date Publication date Assignee Title
JP2007030139A (en) * 2005-07-29 2007-02-08 Seiko Instruments Inc Vacuum chuck
JP4544529B2 (en) * 2005-07-29 2010-09-15 セイコーインスツル株式会社 Vacuum chuck
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JP5610658B1 (en) * 2014-03-31 2014-10-22 アキム株式会社 Nozzle structure and adsorption method
TWI711572B (en) * 2015-12-01 2020-12-01 荷蘭商耐克創新有限合夥公司 Pickup tool, material pickup system and method of moving material with pickup tool
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CN114653494A (en) * 2022-04-08 2022-06-24 中南大学 Wash and adsorb multi-purpose shower nozzle, arm and washing operation platform

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