JP2012181036A - 塗布装置および塗布方法 - Google Patents
塗布装置および塗布方法 Download PDFInfo
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- JP2012181036A JP2012181036A JP2011042439A JP2011042439A JP2012181036A JP 2012181036 A JP2012181036 A JP 2012181036A JP 2011042439 A JP2011042439 A JP 2011042439A JP 2011042439 A JP2011042439 A JP 2011042439A JP 2012181036 A JP2012181036 A JP 2012181036A
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- 238000000576 coating method Methods 0.000 title claims abstract description 79
- 239000011248 coating agent Substances 0.000 title claims abstract description 72
- 238000000034 method Methods 0.000 title description 7
- 239000007788 liquid Substances 0.000 claims abstract description 29
- 238000001514 detection method Methods 0.000 claims abstract description 21
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 6
- 239000000758 substrate Substances 0.000 claims description 67
- 238000007599 discharging Methods 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 6
- 230000015556 catabolic process Effects 0.000 abstract 1
- 238000006731 degradation reaction Methods 0.000 abstract 1
- 230000007246 mechanism Effects 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- 239000000126 substance Substances 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000011324 bead Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
- B05C9/12—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed after the application
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/007—After-treatment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
- G01N2021/945—Liquid or solid deposits of macroscopic size on surfaces, e.g. drops, films, or clustered contaminants
Landscapes
- Coating Apparatus (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
【解決手段】シート状基板と相対的に移動することにより基板を走査し、基板表面に塗布液を吐出する塗布装置において、塗布液の吐出装置の走査方向上流側に配置され、基板上の異物を検知する検知装置を少なくとも有し、前記検知装置はレーザー光を基板表面と平行に照射する投光装置と、前記投光されたレーザー光を受光する受光装置と、少なくとも前記投光領域直下の空気流れを遮蔽する装置を設ける。
【選択図】図1
Description
10 基板
11 基台
21 ステージ
30 吐出装置
31 口金
32 側板
33 ステー
34 口金上昇機構
40 異物検知装置
43a 投光器
43b 受光器
45a 遮蔽装置(投光側)
45b 遮蔽装置(受光側)
49a 異物(上)
49b 異物(下)
50 塗布液補給機構
51 バッファタンク
52 制御弁
53 配管
54 塗布液補給タンク
Claims (4)
- シート状基板と相対的に移動することにより基板を走査し、基板表面に塗布液を吐出することにより基板表面に塗布膜を形成する吐出装置と、前記吐出装置の前記走査方向上流側に配置され、基板上の異物を検知する検知装置を少なくとも有する塗布装置であって、前記検知装置はレーザー光を基板表面と平行に照射する投光装置と、前記投光されたレーザー光を受光する受光装置と、少なくとも前記投光装置から投光された直後のレーザー光の空気流れを遮蔽する遮蔽装置を有することを特徴とする塗布装置。
- 前記遮蔽装置は、前記投光された直後のレーザー光の直下の領域を遮蔽することを特徴とする請求項1に記載の塗布装置。
- 前記遮蔽装置は、投光されたレーザー光の拡散範囲外に設置されることを特徴とする請求項1ないし請求項2に記載の塗布装置。
- シート状基板と相対的に移動することにより前記シート状基板を走査し、前記シート状基板表面に塗布液を吐出することにより前記シート状基板表面に塗布膜を形成する吐出工程と、前記吐出工程において前記走査方向上流側の前記シート状基板上の異物を検知する検知工程であって、前記検知工程はレーザー光を基板表面と平行に照射する投光し、前記投光されたレーザー光を受光する受光工程を含み、少なくとも前記投光領域直下の空気流れを遮蔽することを特徴とする塗布方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011042439A JP5679866B2 (ja) | 2011-02-28 | 2011-02-28 | 塗布装置および塗布方法 |
TW100144300A TWI541075B (zh) | 2011-02-28 | 2011-12-02 | Coating apparatus and coating method |
KR1020120001378A KR101850361B1 (ko) | 2011-02-28 | 2012-01-05 | 도포 장치 및 도포 방법 |
CN201210012000.4A CN102649624B (zh) | 2011-02-28 | 2012-01-16 | 涂布装置和涂布方法 |
Applications Claiming Priority (1)
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JP2011042439A JP5679866B2 (ja) | 2011-02-28 | 2011-02-28 | 塗布装置および塗布方法 |
Publications (2)
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JP2012181036A true JP2012181036A (ja) | 2012-09-20 |
JP5679866B2 JP5679866B2 (ja) | 2015-03-04 |
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JP2011042439A Active JP5679866B2 (ja) | 2011-02-28 | 2011-02-28 | 塗布装置および塗布方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5679866B2 (ja) |
KR (1) | KR101850361B1 (ja) |
CN (1) | CN102649624B (ja) |
TW (1) | TWI541075B (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104487262A (zh) * | 2013-03-29 | 2015-04-01 | 得立鼎工业株式会社 | 部件的加饰方法和加饰部件 |
CN112354807A (zh) * | 2020-11-23 | 2021-02-12 | 上海应用技术大学 | 一种带检测平台的自动涂胶装置 |
WO2021186583A1 (ja) * | 2020-03-17 | 2021-09-23 | 東レエンジニアリング株式会社 | 塗布装置及び塗布方法 |
CN118150594A (zh) * | 2024-05-09 | 2024-06-07 | 江苏德鲁尼智能家居有限公司 | 一种木业板材裂痕检测装置 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104549945B (zh) * | 2013-10-17 | 2017-09-01 | 京东方科技集团股份有限公司 | 一种涂布机及其尘粒检测、清除方法 |
CN103910493B (zh) * | 2014-03-21 | 2016-05-04 | 京东方科技集团股份有限公司 | 光刻胶回收装置,涂布系统及涂布方法 |
SI3223963T1 (sl) * | 2014-10-07 | 2020-04-30 | IPCO Sweden AB, | Upravljalni sistem prehodnega rakla |
CN104511388B (zh) * | 2014-12-29 | 2017-08-04 | 深圳市华星光电技术有限公司 | 光阻涂布设备及光阻涂布方法 |
CN105195375B (zh) * | 2015-10-13 | 2017-08-01 | 海宁宏远产业用布有限公司 | 一种用于软体车厢材料的刮涂装置 |
CN109608051B (zh) * | 2018-11-28 | 2022-04-05 | Tcl华星光电技术有限公司 | 一种检测涂布设备与涂布品质相关性的方法 |
CN109701960B (zh) * | 2018-12-28 | 2021-07-27 | 惠科股份有限公司 | 基板清洗设备和清洗方法 |
CN110000046A (zh) * | 2019-04-29 | 2019-07-12 | 华工制造装备数字化国家工程中心有限公司 | 一种用于硬质载体的液体涂布设备及方法 |
CN111398290B (zh) * | 2020-03-20 | 2021-02-12 | 华中科技大学 | 一种适用于狭缝式涂布的涂布液珠缺陷识别方法 |
KR20220053760A (ko) | 2020-10-22 | 2022-05-02 | 세메스 주식회사 | 기판 처리 장치 및 방법 |
Citations (5)
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JPH07260415A (ja) * | 1994-03-16 | 1995-10-13 | Ishikawajima Harima Heavy Ind Co Ltd | ステージ位置検出用レーザ干渉計におけるビームシールド機構 |
JPH09119825A (ja) * | 1995-10-26 | 1997-05-06 | Nikon Corp | パターン座標測定方法および測定装置 |
JP2000100704A (ja) * | 1998-09-24 | 2000-04-07 | Nec Corp | 走査型露光装置と走査型露光方法 |
JP2010078348A (ja) * | 2008-09-24 | 2010-04-08 | Tokyo Electron Ltd | 光学式異物検出装置およびこれを搭載した処理液塗布装置 |
JP2010237048A (ja) * | 2009-03-31 | 2010-10-21 | Advanced Mask Inspection Technology Kk | パターン検査装置およびパターン検査方法 |
Family Cites Families (7)
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JP3653688B2 (ja) * | 1998-07-10 | 2005-06-02 | 平田機工株式会社 | スリットコート式塗布装置とスリットコート式塗布方法 |
JP4325084B2 (ja) * | 2000-06-19 | 2009-09-02 | 東レ株式会社 | 塗布方法およびそれを用いたカラーフィルタの製造方法 |
BR0313325A (pt) * | 2003-06-24 | 2005-06-14 | Huber Corp J M | Aparelho para aplicar desenhos de tinta sobre painéis |
JP4105613B2 (ja) * | 2003-09-04 | 2008-06-25 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP4417205B2 (ja) * | 2004-08-27 | 2010-02-17 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP4490779B2 (ja) * | 2004-10-04 | 2010-06-30 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP4726123B2 (ja) * | 2005-09-27 | 2011-07-20 | 大日本スクリーン製造株式会社 | 塗布システム |
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2011
- 2011-02-28 JP JP2011042439A patent/JP5679866B2/ja active Active
- 2011-12-02 TW TW100144300A patent/TWI541075B/zh active
-
2012
- 2012-01-05 KR KR1020120001378A patent/KR101850361B1/ko active IP Right Grant
- 2012-01-16 CN CN201210012000.4A patent/CN102649624B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07260415A (ja) * | 1994-03-16 | 1995-10-13 | Ishikawajima Harima Heavy Ind Co Ltd | ステージ位置検出用レーザ干渉計におけるビームシールド機構 |
JPH09119825A (ja) * | 1995-10-26 | 1997-05-06 | Nikon Corp | パターン座標測定方法および測定装置 |
JP2000100704A (ja) * | 1998-09-24 | 2000-04-07 | Nec Corp | 走査型露光装置と走査型露光方法 |
JP2010078348A (ja) * | 2008-09-24 | 2010-04-08 | Tokyo Electron Ltd | 光学式異物検出装置およびこれを搭載した処理液塗布装置 |
JP2010237048A (ja) * | 2009-03-31 | 2010-10-21 | Advanced Mask Inspection Technology Kk | パターン検査装置およびパターン検査方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104487262A (zh) * | 2013-03-29 | 2015-04-01 | 得立鼎工业株式会社 | 部件的加饰方法和加饰部件 |
WO2021186583A1 (ja) * | 2020-03-17 | 2021-09-23 | 東レエンジニアリング株式会社 | 塗布装置及び塗布方法 |
CN112354807A (zh) * | 2020-11-23 | 2021-02-12 | 上海应用技术大学 | 一种带检测平台的自动涂胶装置 |
CN118150594A (zh) * | 2024-05-09 | 2024-06-07 | 江苏德鲁尼智能家居有限公司 | 一种木业板材裂痕检测装置 |
Also Published As
Publication number | Publication date |
---|---|
TWI541075B (zh) | 2016-07-11 |
CN102649624A (zh) | 2012-08-29 |
KR101850361B1 (ko) | 2018-04-19 |
JP5679866B2 (ja) | 2015-03-04 |
KR20120098405A (ko) | 2012-09-05 |
TW201236728A (en) | 2012-09-16 |
CN102649624B (zh) | 2016-05-11 |
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