JP2012179706A - Surface coated cutting tool having hard coated layer exhibiting excellent wear resistance - Google Patents

Surface coated cutting tool having hard coated layer exhibiting excellent wear resistance Download PDF

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JP2012179706A
JP2012179706A JP2011174525A JP2011174525A JP2012179706A JP 2012179706 A JP2012179706 A JP 2012179706A JP 2011174525 A JP2011174525 A JP 2011174525A JP 2011174525 A JP2011174525 A JP 2011174525A JP 2012179706 A JP2012179706 A JP 2012179706A
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JP5742572B2 (en
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Fumio Tsushima
文雄 対馬
Takao Okuyama
貴央 奥山
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Mitsubishi Materials Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a surface coated cutting tool having a hard coated layer exhibiting excellent chipping resistance and wear resistance in high speed continuous machining of steel, cast iron and the like.SOLUTION: The surface coated cutting tool includes: a lower layer (a) comprising a Ti compound layer having 3 to 20 μm total average layer thickness; an intermediate layer (b) comprising an aluminum oxide layer having 1 to 15 μm average layer thickness; and an upper layer (c) comprising a modified Ti carbonitride layer having a longitudinally grown crystal structure having 4 to 14 μm average layer thickness, the hard coated layers (a), (b) and (c) being formed by chemical deposition on a surface of a tool base body. In the surface coated cutting tool, (d) the modified Ti carbonitride layer configuring the upper layer has at least one oxygen concentrated region in which a plurality of peaks of oxygen contents appear on the internal side from the surface along the layer thickness direction at intervals in the range of 0.5 to 4.0 μm depth and the oxygen contents Oin the peak positions is O=3 to 8 atm%.

Description

本発明は、鋼や鋳鉄等の高速連続切削加工において、硬質被覆層がすぐれた耐摩耗性および耐チッピング性を発揮し、長期の使用に亘ってすぐれた切削性能を発揮する表面被覆切削工具(以下、被覆工具という)に関するものである。   The present invention is a surface-coated cutting tool that exhibits excellent wear resistance and chipping resistance in a high-speed continuous cutting process such as steel and cast iron, and exhibits excellent cutting performance over a long period of use ( Hereinafter, this is referred to as a coated tool).

従来、一般に、炭化タングステン(以下、WCで示す)基超硬合金または炭窒化チタン(以下、TiCNで示す)基サーメットで構成された基体(以下、これらを総称して工具基体という)の表面に、
(a)下部層が、いずれも化学蒸着形成された、Tiの炭化物(以下、TiCで示す)層、窒化物(以下、同じくTiNで示す)層、炭窒化物(以下、TiCNで示す)層、炭酸化物(以下、TiCOで示す)層、および炭窒酸化物(以下、TiCNOで示す)層のうちの2層以上からなり、かつ3〜20μmの合計平均層厚を有するTi化合物層、
(b)上部層が、化学蒸着形成された、1〜15μmの平均層厚を有する酸化アルミニウム(以下、Alで示す)層、
以上(a)および(b)で構成された硬質被覆層を形成してなる従来被覆工具が知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) Ti carbide (hereinafter referred to as TiC) layer, nitride (hereinafter also referred to as TiN) layer, carbonitride (hereinafter referred to as TiCN) layer formed by chemical vapor deposition of the lower layers. A Ti compound layer consisting of two or more of a carbon oxide (hereinafter referred to as TiCO) layer and a carbonitride oxide (hereinafter referred to as TiCNO) layer and having a total average layer thickness of 3 to 20 μm,
(B) an aluminum oxide (hereinafter referred to as Al 2 O 3 ) layer having an average layer thickness of 1 to 15 μm, in which the upper layer is formed by chemical vapor deposition;
Conventionally, a coated tool formed by forming a hard coating layer composed of (a) and (b) is known.

また、特許文献1に示すように、前記従来被覆工具において、下部層であるTi化合物層を構成するTiCN層を、通常の化学蒸着装置にて、反応ガスとして有機炭窒化物を含む混合ガスを使用し、700〜950℃の中温温度域で化学蒸着し縦長成長結晶組織をもつTiCN層を形成することにより、硬質被覆層自身の強度向上を図ることが知られている。   Further, as shown in Patent Document 1, in the conventional coated tool, a TiCN layer constituting a Ti compound layer as a lower layer is mixed with a mixed gas containing an organic carbonitride as a reaction gas in a normal chemical vapor deposition apparatus. It is known that the strength of the hard coating layer itself is improved by forming a TiCN layer having a vertically grown crystal structure by chemical vapor deposition at a medium temperature range of 700 to 950 ° C.

さらに、特許文献2、3に示すように、前記従来被覆工具において、下部層であるTi化合物層を構成するTiCN層について、工具基体側に位置するTi化合物層の水平方向の結晶粒径(結晶幅)と、上部層側に位置するTi化合物層の水平方向の結晶粒径(結晶幅)とに所定の関係を維持せしめることにより、硬質被覆層の耐チッピング性、耐欠損性、耐摩耗性の向上を図ることも知られている。   Furthermore, as shown in Patent Documents 2 and 3, in the conventional coated tool, the TiCN layer constituting the Ti compound layer as the lower layer has a crystal grain size (crystals) in the horizontal direction of the Ti compound layer located on the tool base side. Width) and the crystal grain size (crystal width) in the horizontal direction of the Ti compound layer located on the upper layer side, by maintaining a predetermined relationship, chipping resistance, chipping resistance, and abrasion resistance of the hard coating layer It is also known to improve this.

特開平6−8010号公報Japanese Patent Laid-Open No. 6-8010 特開平10−109206号公報JP-A-10-109206 特許第4284144号公報Japanese Patent No. 4284144

近年の切削装置の高性能化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工は一段と高速化の傾向にあるが、前記従来被覆工具においては、これを鋼や鋳鉄などの通常の条件での連続切削や断続切削に用いた場合には問題はないが、特にこれを、高熱発生を伴い、かつ、切刃部に断続的・衝撃的負荷がかかる高速連続切削に用いた場合には、硬質被覆層にチッピング(微小欠け)、欠損等が発生し易くなり、また、耐摩耗性も十分であるとは言えないため、比較的短時間で使用寿命に至るのが現状である。   In recent years, the performance of cutting machines has been remarkable. On the other hand, there is a strong demand for labor saving and energy saving and further cost reduction for cutting, and with this, cutting tends to be further accelerated. For tools, there is no problem when used for continuous cutting and intermittent cutting under normal conditions such as steel and cast iron, but this is especially accompanied by high heat generation and intermittent cutting on the cutting edge. When used for high-speed continuous cutting where impact loads are applied, chipping (minute chipping), chipping, etc. are likely to occur in the hard coating layer, and it cannot be said that the wear resistance is sufficient. The current situation is that the service life is reached in a short time.

そこで、本発明者らは、前述のような観点から、前記被覆工具の硬質被覆層の耐チッピング性、耐摩耗性向上を図るべく、これの上部層に高い高温硬さと高温強度を有し、かつ、図1(a)に模式図で示される通り、格子点にTi、炭素、および窒素からなる構成原子がそれぞれ存在するNaCl型面心立方晶の結晶構造(なお、図1(b)は(011)面で切断した状態を示す)を有する縦長成長結晶組織をもつTiCN層(以下、l−TiCN層という)を形成することに着目し、鋭意研究を行った。
(a)まず、従来被覆工具の硬質被覆層は、例えば、通常の化学蒸着装置にて、
反応ガス組成:容量%で、TiCl:2〜10%、CHCN:0.5〜3%、N:10〜30%、H2:残り、
反応雰囲気温度:800〜900℃、
反応雰囲気圧力:6〜20kPa、
の条件(通常条件という)でl−TiCN層からなる下部層を蒸着した後、この上に、Al層を蒸着することにより形成される。
(b)本発明者らは、前記Al層を蒸着した後、この上に、前述の通常の条件でl−TiCN層からなる上部層を蒸着した。
(c)このとき、前記l−TiCN層を通常条件で蒸着する成膜工程の途中段階で、前記反応雰囲気圧力を低下させ、同時に、微量のCO成分を短時間反応ガス中に添加して成膜を行い、その後は、前記通常条件にしたがって、所定目標層厚のl−TiCN層が形成されるまで蒸着を継続したところ、成膜されたl−TiCN層の表層近傍には酸素濃化領域が形成され、成膜されたl−TiCN層の酸素濃化領域における結晶粒は微細化組織となる。しかも、通常、Al層上のl−TiCN層は、粗粒化組織となりやすいが、本発明によれば、微細化組織を形成することができることを見出したのである。
Therefore, from the above viewpoint, the present inventors have high high-temperature hardness and high-temperature strength in the upper layer of this hard coating layer in order to improve the chipping resistance and wear resistance of the coated tool, And as shown schematically in FIG. 1 (a), the crystal structure of NaCl type face-centered cubic crystal in which constituent atoms composed of Ti, carbon, and nitrogen are present at lattice points (note that FIG. 1 (b) is Focusing on the formation of a TiCN layer having a vertically grown crystal structure having a (011) plane cut state (hereinafter referred to as an l-TiCN layer), intensive research was conducted.
(A) First, the hard coating layer of the conventional coated tool is, for example, an ordinary chemical vapor deposition apparatus.
Reaction gas composition: by volume%, TiCl 4: 2~10%, CH 3 CN: 0.5~3%, N 2: 10~30%, H 2: remainder,
Reaction atmosphere temperature: 800 to 900 ° C.
Reaction atmosphere pressure: 6-20 kPa,
After forming a lower layer made of an l-TiCN layer under the above conditions (referred to as normal conditions), an Al 2 O 3 layer is deposited thereon.
(B) The present inventors, after depositing the the Al 2 O 3 layer, thereon, was deposited top layer consisting of l-TiCN layer under normal conditions described above.
(C) At this time, in the middle of the film forming process for depositing the l-TiCN layer under normal conditions, the reaction atmosphere pressure is lowered, and at the same time, a small amount of CO 2 component is added to the reaction gas for a short time. After the film formation, the vapor deposition was continued until the l-TiCN layer having a predetermined target layer thickness was formed according to the normal conditions. As a result, oxygen concentration was concentrated in the vicinity of the surface layer of the formed l-TiCN layer. A region is formed, and crystal grains in the oxygen-concentrated region of the deposited l-TiCN layer become a refined structure. Moreover, the l-TiCN layer on the Al 2 O 3 layer usually tends to have a coarse structure, but according to the present invention, it has been found that a fine structure can be formed.

さらに(c)の工程を繰り返し行うことにより、l−TiCN層の内側に所定の間隔をおいて複数の酸素濃化領域が形成されることが確認された。そして、この酸素濃化領域を1つ以上形成することにより、l−TiCN層の結晶粒も組織微細効果が顕著になることを見出したのである。
(d)また、本発明者らは、前記の酸素濃化領域が形成されているl−TiCN層について、その縦断面研磨面に沿ってオージェ電子分光法により、その層厚方向に酸素含有量を線分析したところ、Al層(中間層)とl−TiCN層(上部層)の界面から、l−TiCN層の内部側に酸素濃化領域が形成されると同時に、図2に示すようにl−TiCN層の結晶組織が微細化されており、さらに、該l−TiCN層の表面から層厚方向に沿って内部側に、0.5〜4.0μmの範囲内の間隔をおいて、酸素含有量の複数のピークが現れ、また、該ピーク位置における酸素含有量OMAXを測定したところ、OMAX=3〜8原子%である酸素濃化領域を1つ以上含むl−TiCN層(以下、「改質l−TiCN層」という)が形成されることを見出した。
(e)そして、Al層(中間層)を蒸着形成した上に、前記少なくとも1つの酸素濃化領域を備え、かつ、微細化された組織を有する改質l−TiCN層(上部層)を蒸着形成した硬質被覆層を備えた本発明の被覆工具は、中間層と上部層との密着性が向上すると同時に、Alの上にl−TiCN層(上部層)を形成しているにもかかわらず、上部層の結晶粒粗大化が抑制されることから、高熱発生を伴い、かつ、切刃部に断続的・衝撃的負荷がかかる高速連続切削に用いた場合でも、すぐれた耐チッピング性を発揮し、長期の使用に亘ってすぐれた耐摩耗性を発揮するのである。
Furthermore, it was confirmed that by repeating the step (c), a plurality of oxygen-enriched regions were formed at predetermined intervals inside the l-TiCN layer. Then, it has been found that by forming one or more oxygen-enriched regions, the crystal grain of the l-TiCN layer has a remarkable microstructure effect.
(D) In addition, the inventors of the l-TiCN layer in which the oxygen-enriched region is formed have an oxygen content in the layer thickness direction by Auger electron spectroscopy along the longitudinally polished surface. As a result of a line analysis, an oxygen-concentrated region is formed on the inner side of the l-TiCN layer from the interface between the Al 2 O 3 layer (intermediate layer) and the l-TiCN layer (upper layer). As shown in the figure, the crystal structure of the l-TiCN layer is refined, and further, an interval in the range of 0.5 to 4.0 μm is provided from the surface of the l-TiCN layer to the inner side along the thickness direction. In this case, a plurality of peaks of the oxygen content appear, and when the oxygen content O MAX at the peak position was measured, it was found that 1− containing at least one oxygen-concentrated region with O MAX = 3 to 8 atomic% TiCN layer (hereinafter referred to as “modified l-TiCN layer”) is shaped It was found to be the difference.
(E) Then, an Al 2 O 3 layer (intermediate layer) is formed by vapor deposition, and the modified l-TiCN layer (upper layer) having the at least one oxygen-concentrated region and having a refined structure is formed. The coating tool of the present invention having the hard coating layer formed by vapor deposition) improves the adhesion between the intermediate layer and the upper layer, and at the same time forms an l-TiCN layer (upper layer) on Al 2 O 3. In spite of this, the coarsening of crystal grains in the upper layer is suppressed, so it is excellent even when used for high-speed continuous cutting that involves high heat generation and intermittent and impact loads on the cutting edge. It exhibits excellent chipping resistance and excellent wear resistance over a long period of use.

本発明は、前記の知見に基づいてなされたものであって、
「 炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に、
(a)3〜20μmの合計平均層厚を有し、Tiの炭化物層、窒化物層、炭窒化物層、炭酸化物層および炭窒酸化物層のうちの1層または2層以上のTi化合物層からなる下部層、
(b)1〜15μmの平均層厚を有する酸化アルミニウム層からなる中間層、
(c)4〜14μmの平均層厚の縦長成長結晶組織をもつ改質Ti炭窒化物層からなる上部層、
前記(a)、(b)、(c)の硬質被覆層が化学蒸着により形成された表面被覆切削工具において、
(d)上部層を構成する前記縦長成長結晶組織をもつ改質Ti炭窒化物層は、その縦断面研磨面について、オージェ電子分光法により、その層厚方向に沿って酸素含有量を線分析した場合、表面から層厚方向に沿って内部側に、深さ0.5〜4.0μmの範囲内の間隔をおいて、酸素含有量の複数のピークが現れ、該ピーク位置における酸素含有量OMAXは、OMAX=3〜8原子%である酸素濃化領域を少なくとも1つ備えることを特徴とする表面被覆切削工具。」
に特徴を有するものである。
The present invention has been made based on the above knowledge,
"On the surface of the tool base made of tungsten carbide base cemented carbide or titanium carbonitride base cermet,
(A) Ti compound having a total average layer thickness of 3 to 20 μm and one or more of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer and carbonitride oxide layer A lower layer consisting of layers,
(B) an intermediate layer comprising an aluminum oxide layer having an average layer thickness of 1 to 15 μm,
(C) an upper layer comprising a modified Ti carbonitride layer having a vertically grown crystal structure with an average layer thickness of 4 to 14 μm,
In the surface-coated cutting tool in which the hard coating layers (a), (b), and (c) are formed by chemical vapor deposition,
(D) The modified Ti carbonitride layer having the vertically grown crystal structure constituting the upper layer is subjected to line analysis of the oxygen content along the layer thickness direction by Auger electron spectroscopy on the polished surface of the longitudinal section. In this case, a plurality of peaks of oxygen content appear on the inner side along the layer thickness direction from the surface at intervals of a depth in the range of 0.5 to 4.0 μm, and the oxygen content at the peak position O MAX has at least one oxygen-concentrated region where O MAX = 3 to 8 atomic%. "
It has the characteristics.

つぎに、本発明の被覆工具の硬質被覆層の構成層について、詳細に説明する。
(a)下部層(Ti化合物層)
TiC層、TiN層、TiCN層(l−TiCN層も含む)、TiCO層、TiCNO層のうち1層または2層以上からなるTi化合物層は、自体が高温強度を有し、これの存在によって硬質被覆層が高温強度を具備するようになるほか、工具基体と中間層であるAl層にも強固に密着し、よって硬質被覆層の工具基体に対する密着性向上に寄与する作用をもつが、その合計平均層厚が3μm未満では、前記作用を十分に発揮させることができず、一方、その合計平均層厚が20μmを越えると、特に高熱発生を伴う高速連続切削でチッピングを起し易くなることから、その合計平均層厚を3〜20μmと定めた。
(b)中間層(Al層)
Al層からなる中間層は、すぐれた高温硬さと耐熱性を有し、硬質被覆層の耐摩耗性向上に寄与する。
Next, the constituent layers of the hard coating layer of the coated tool of the present invention will be described in detail.
(A) Lower layer (Ti compound layer)
Ti compound layer consisting of one or more of TiC layer, TiN layer, TiCN layer (including 1-TiCN layer), TiCO layer, TiCNO layer itself has high temperature strength and is hard due to its presence In addition to the coating layer having high-temperature strength, the tool base and the Al 2 O 3 layer, which is an intermediate layer, are firmly adhered to each other, thereby contributing to the improvement of the adhesion of the hard coating layer to the tool base. When the total average layer thickness is less than 3 μm, the above-mentioned effect cannot be sufficiently exerted. On the other hand, when the total average layer thickness exceeds 20 μm, chipping is likely to occur particularly in high-speed continuous cutting with high heat generation. Therefore, the total average layer thickness was determined to be 3 to 20 μm.
(B) Intermediate layer (Al 2 O 3 layer)
The intermediate layer composed of the Al 2 O 3 layer has excellent high-temperature hardness and heat resistance, and contributes to improving the wear resistance of the hard coating layer.

なお、Al層からなる中間層の平均層厚が1μm未満では、硬質被覆層に十分な耐摩耗性を発揮せしめることができず、一方、その平均層厚が15μmを越えて厚くなりすぎると、チッピングが発生し易くなることから、その平均層厚を1〜15μmと定めた。
(c)上部層の改質l−TiCN層
中間層は前記のとおりAl層で構成するが、中間層の上に形成する上部層については、少なくとも、4μm以上の平均層厚の改質l−TiCN層で構成することが必要である。
When the average layer thickness of the intermediate layer made of Al 2 O 3 is less than 1 μm, the hard coating layer cannot exhibit sufficient wear resistance, while the average layer thickness exceeds 15 μm. If it is too much, chipping tends to occur, so the average layer thickness was determined to be 1 to 15 μm.
(C) Upper modified l-TiCN layer The intermediate layer is composed of the Al 2 O 3 layer as described above, but the upper layer formed on the intermediate layer has an average layer thickness of at least 4 μm. It is necessary to comprise a quality l-TiCN layer.

既述のとおり、改質l−TiCN層は、l−TiCN層を通常条件で蒸着する成膜工程の途中段階、例えば、所定目標層厚のl−TiCN層の成膜が完了する60〜160分前の時点で、反応雰囲気圧力を2.5〜3kPaに低下させ、同時に、反応ガスに占める割合を0.5〜1.8容量%となるようにCOを50〜70秒間反応ガス中に添加して成膜を行い、その後は、通常条件にしたがって、所定目標層厚になるまでl−TiCN層を成膜する。この工程を所定の回数(少なくとも1回)繰り返し行うことにより、形成することができる。 As described above, the modified l-TiCN layer is formed in the middle of the film forming process for depositing the l-TiCN layer under normal conditions, for example, the film formation of the l-TiCN layer having a predetermined target layer thickness is completed. The reaction atmosphere pressure was reduced to 2.5 to 3 kPa at a time before 5 minutes, and at the same time, CO 2 was kept in the reaction gas for 50 to 70 seconds so that the proportion of the reaction gas was 0.5 to 1.8% by volume. In addition, a 1-TiCN layer is formed until a predetermined target layer thickness is obtained according to normal conditions. It can be formed by repeating this step a predetermined number of times (at least once).

図2に示すように、成膜された改質l−TiCN層の内側には、所定の間隔で少なくとも1つの酸素濃化領域が形成され、しかも、酸素濃化領域における改質l−TiCN層の結晶粒は微細化組織となる。   As shown in FIG. 2, at least one oxygen-concentrated region is formed at a predetermined interval inside the formed modified l-TiCN layer, and the modified l-TiCN layer in the oxygen-concentrated region is formed. The crystal grains have a refined structure.

改質l−TiCN層の縦断面研磨面について、オージェ電子分光法により、その層厚方向に沿って酸素含有量を線分析すると、改質l−TiCN層の表面から層厚方向に沿って内部側に0.5〜4.0μmの範囲内の間隔をおいて、酸素含有量の複数のピークが現れる少なくとも1つの酸素濃化領域が存在し、そして、該ピーク位置における酸素含有量OMAXは、OMAX=3〜8原子%である。 When the oxygen content in the longitudinal cross-section polished surface of the modified l-TiCN layer was analyzed by Auger electron spectroscopy along the layer thickness direction, the internal surface was measured from the surface of the modified l-TiCN layer along the layer thickness direction. There is at least one oxygen-concentrated region in which a plurality of peaks of oxygen content appear with an interval in the range of 0.5 to 4.0 μm on the side, and the oxygen content O MAX at the peak position is , O MAX = 3 to 8 atomic%.

酸素含有量のピークが0.5μm未満の深さ位置にある場合には、新たなTiCN結晶の核形成により成長した改質l−TiCN層の強度が不十分であり、加工時における層内破壊による剥離を発生しやすくなり、一方、酸素含有量のピーク位置が、4.0μmを超える内部側にある場合には、新たなTiCN結晶の核形成により成長した改質l−TiCN層の粒径が大きくなり過ぎる。したがって、酸素濃化領域の間隔は、0.5〜4.0μmと定めた。   When the peak of oxygen content is at a depth of less than 0.5 μm, the strength of the modified l-TiCN layer grown by nucleation of a new TiCN crystal is insufficient, and in-layer breakdown during processing When the oxygen content peak position is on the inner side exceeding 4.0 μm, the grain size of the modified l-TiCN layer grown by nucleation of new TiCN crystals Becomes too big. Therefore, the interval between the oxygen-enriched regions was set to 0.5 to 4.0 μm.

また、ピーク位置における酸素含有量OMAXが3原子%未満の場合には、新たなTiCN結晶の核形成が十分でないため、酸素濃化領域より上部層側の改質l−TiCN層における結晶粒微細化効果が少なく、一方、ピーク位置における酸素含有量OMAXが8原子%を超える場合には、結晶構造の異なるTiが形成され、剥離発生の原因になるので、ピーク位置における酸素含有量OMAXは、OMAX=3〜8原子%であることが必要である。 Further, when the oxygen content O MAX at the peak position is less than 3 atomic%, the nucleation of new TiCN crystals is not sufficient, so that the crystal grains in the modified l-TiCN layer on the upper layer side from the oxygen concentration region On the other hand, when the oxygen content O MAX at the peak position exceeds 8 atomic%, Ti 2 O 3 having a different crystal structure is formed and causes peeling, so that the oxygen at the peak position is small. The content O MAX needs to be O MAX = 3 to 8 atomic%.

なお、本発明の改質l−TiCN層について、その表層から、例えば2.5μm以上の深さの内部側での平均酸素含有量OAVを測定したところ、OMAXの値とOAVの値には、2OAV≦OMAX≦5OAVの関係が成立することを確認した。 As for reforming l-TiCN layer of the present invention, from the surface layer, for example, the average oxygen content O AV at 2.5μm or more depth inside of was measured, the O MAX values and O AV value It was confirmed that the relationship of 2O AV ≦ O MAX ≦ 5O AV was established.

従来から、下部層を形成するTi化合物層の一種としてTiCNO層がよく知られているが、TiCNOの蒸着条件の調整によっては、前記の如きOMAX=3〜8原子%かつ2OAV≦OMAX≦5OAVの関係を満足するTiCNO層を形成することはできないから、この意味で、本発明でいう酸素濃化領域が存在する改質l−TiCN層は、従来知られているTiCNO層とは明確に区別し得るものである。 Conventionally, a TiCNO layer is well known as a kind of Ti compound layer that forms the lower layer. However, depending on the adjustment of the deposition conditions of TiCNO, O MAX = 3 to 8 atomic% and 2O AV ≦ O MAX as described above. Since it is not possible to form a TiCNO layer satisfying the relation of ≦ 5O AV , in this sense, the modified l-TiCN layer having an oxygen-enriched region as referred to in the present invention is a conventionally known TiCNO layer. It can be clearly distinguished.

さらに、本発明では、中間層(Al層)の上に形成される改質l−TiCN層において、前記所定の深さ位置に酸素含有量のピークが存在する酸素濃化領域が形成されることによって、この酸素濃化領域における改質l−TiCN層の結晶粒が微細化し、中間層のAl層との密着性が向上するとともに、通常、Al層の上にTi化合物層を形成すると、結晶粒が粗大化するが、本発明では、改質l−TiCN層の結晶粒が微細化され、結晶粒の粗大化による耐チッピング性、耐摩耗性の低下を抑制することができる。 Furthermore, in the present invention, in the modified l-TiCN layer formed on the intermediate layer (Al 2 O 3 layer), an oxygen concentration region in which a peak of oxygen content exists at the predetermined depth position is formed. by being, and crystal grains finer reforming l-TiCN layer in the oxygen concentrated region, with adhesion between the Al 2 O 3 layer of the intermediate layer is improved, usually on the the Al 2 O 3 layer When the Ti compound layer is formed on the crystal, the crystal grains become coarse. However, in the present invention, the crystal grains of the modified l-TiCN layer are refined, and the chipping resistance and wear resistance are reduced due to the coarse crystal grains. Can be suppressed.

本発明の被覆工具は、Al層(中間層)の上に、少なくとも1つの酸素濃化領域を備え、かつ、微細化された組織を有する改質l−TiCN層(上部層)を蒸着形成されていることにより、中間層と上部層の密着性が向上すると同時に、上部層の改質l−TiCN層の結晶粒粗大化が抑制されることから、高熱発生を伴い、かつ、切刃部に断続的・衝撃的負荷がかかる高速連続切削に用いた場合でも、すぐれた耐チッピング性を発揮し、長期の使用に亘ってすぐれた耐摩耗性を発揮するのである。 The coated tool of the present invention comprises a modified l-TiCN layer (upper layer) having at least one oxygen-concentrated region and having a refined structure on an Al 2 O 3 layer (intermediate layer). The formation of the vapor deposition improves the adhesion between the intermediate layer and the upper layer, and at the same time suppresses the coarsening of the crystal grain of the modified l-TiCN layer of the upper layer. Even when used for high-speed continuous cutting in which the blade is subjected to intermittent and impact loads, it exhibits excellent chipping resistance and excellent wear resistance over a long period of use.

硬質被覆層の上部層を構成する改質l−TiCN層が有するNaCl型面心立方晶の結晶構造を示す模式図である。It is a schematic diagram which shows the crystal structure of the NaCl type face centered cubic crystal which the modified l-TiCN layer which comprises the upper layer of a hard coating layer has. 硬質被覆層の縦断面組織構造の一例を示す概略縦断面模式図である。It is a schematic longitudinal cross-sectional schematic diagram which shows an example of the longitudinal cross-section structure | tissue structure of a hard coating layer.

つぎに、本発明の被覆工具を実施例により具体的に説明する。   Next, the coated tool of the present invention will be specifically described with reference to examples.

原料粉末として、いずれも1〜3μmの平均粒径を有するWC粉末、TiC粉末、ZrC粉末、VC粉末、TaC粉末、NbC粉末、Cr32粉末、TiN粉末、TaN粉末、およびCo粉末を用意し、これら原料粉末を、表1に示される配合組成に配合し、さらにワックスを加えてアセトン中で24時間ボールミル混合し、減圧乾燥した後、98MPaの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を5Paの真空中、1370〜1470℃の範囲内の所定の温度に1時間保持の条件で真空焼結し、焼結後、切刃部にR:0.07mmのホーニング加工を施すことによりISO・CNMG120408に規定するインサート形状をもったWC基超硬合金製の工具基体A〜Fをそれぞれ製造した。 WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, and Co powder all having an average particle diameter of 1 to 3 μm are prepared as raw material powders. These raw material powders were blended into the composition shown in Table 1, added with wax, ball milled in acetone for 24 hours, dried under reduced pressure, and pressed into a green compact with a predetermined shape at a pressure of 98 MPa. The green compact was vacuum sintered at a predetermined temperature in the range of 1370 to 1470 ° C. for 1 hour in a vacuum of 5 Pa. After sintering, the cutting edge portion was R: 0.07 mm honing By performing the processing, tool bases A to F made of WC-based cemented carbide having an insert shape specified in ISO · CNMG120408 were manufactured.

また、原料粉末として、いずれも0.5〜2μmの平均粒径を有するTiCN(質量比でTiC/TiN=50/50)粉末、Mo2C粉末、ZrC粉末、NbC粉末、TaC粉末、WC粉末、Co粉末、およびNi粉末を用意し、これら原料粉末を、表2に示される配合組成に配合し、ボールミルで24時間湿式混合し、乾燥した後、98MPaの圧力で圧粉体にプレス成形し、この圧粉体を1.3kPaの窒素雰囲気中、温度:1540℃に1時間保持の条件で焼結し、焼結後、切刃部分にR:0.07mmのホーニング加工を施すことによりISO規格・CNMG120412のインサート形状をもったTiCN基サーメット製の工具基体a〜fを形成した。 In addition, as raw material powders, TiCN (mass ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder, all having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and pressed into a compact at a pressure of 98 MPa. The green compact was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after the sintering, the cutting edge portion was subjected to a honing process of R: 0.07 mm. Tool bases a to f made of TiCN-based cermet having an insert shape of standard / CNMG12041 were formed.

つぎに、これらの工具基体A〜Fおよび工具基体a〜fの表面に、通常の化学蒸着装置を用い、硬質被覆層の下部層として、表3に示される条件で、表5に示される組み合わせでTi化合物層(但し、改質l−TiCN層を除く)を蒸着形成し、
ついで、中間層としてのAl層を同じく、表3に示される条件で、かつ、同じく表5に示される目標層厚で蒸着形成し、その後、表4に示される条件にて、上部層としての改質l−TiCN層を同じく表5に示される組み合わせ、かつ、目標層厚で蒸着形成することにより本発明被覆工具1〜13をそれぞれ製造した。
Next, on the surfaces of these tool bases A to F and tool bases a to f, the combination shown in Table 5 is used as a lower layer of the hard coating layer using a normal chemical vapor deposition apparatus under the conditions shown in Table 3. A Ti compound layer (however, excluding the modified l-TiCN layer) is formed by vapor deposition.
Subsequently, an Al 2 O 3 layer as an intermediate layer is formed by vapor deposition under the conditions shown in Table 3 and with the target layer thickness shown in Table 5 again, and then the upper layer is formed under the conditions shown in Table 4. The coated tools 1 to 13 of the present invention were produced by vapor-depositing the modified l-TiCN layers as layers in the combinations shown in Table 5 and with the target layer thickness.

また、比較の目的で、硬質被覆層の下部層として、表3に示される条件で、表6に示される組み合わせ、かつ、同じく表6に示される目標層厚でTi化合物層を蒸着形成し、その後、表3に示される条件にて、中間層としてのAl層を、同じく表6に示される目標層厚で蒸着形成し、その後、表3に示される条件で、上部層としての通常のl−TiCN層を同じく表6に示される目標層厚で蒸着形成することにより従来被覆工具1〜13をそれぞれ製造した。 Further, for the purpose of comparison, as a lower layer of the hard coating layer, a Ti compound layer is formed by vapor deposition with the combination shown in Table 6 and the target layer thickness also shown in Table 6 under the conditions shown in Table 3. Thereafter, an Al 2 O 3 layer as an intermediate layer is formed by vapor deposition at the target layer thickness shown in Table 6 under the conditions shown in Table 3, and then as an upper layer under the conditions shown in Table 3. Conventional coated tools 1 to 13 were manufactured by vapor-depositing normal l-TiCN layers with the target layer thicknesses shown in Table 6 as well.

ついで、前記本発明被覆工具の改質l−TiCN層について、縦断面研磨面について、オージェ電子分光法により、その層厚方向に沿って酸素含有量を線分析し、酸素含有量のピークが現れる各ピーク位置を求めるとともに、該各ピーク位置における酸素含有量OMAXの値をそれぞれ求めた。 Next, with respect to the modified l-TiCN layer of the coated tool of the present invention, the oxygen content is linearly analyzed along the layer thickness direction by Auger electron spectroscopy on the vertical cross-section polished surface, and the peak of the oxygen content appears. together determine the respective peak positions were determined values of the oxygen content O MAX at respective peak positions.

また、参考のため、改質l−TiCN層の各酸素濃化領域より内部側の深さ位置における酸素含有量についても測定し、その平均酸素含有量OAV(但し、5点測定の平均値)を求めた。 In addition, for reference, the oxygen content at the depth position on the inner side of each oxygen concentration region of the modified l-TiCN layer was also measured, and the average oxygen content O AV (however, the average value of five-point measurement) )

表5に、前記酸素含有量OMAX、平均酸素含有量OAVの値を示す。 Table 5 shows values of the oxygen content O MAX and the average oxygen content O AV .

同様に従来被覆工具のl−TiCN層についても酸素含有量を測定し、その平均酸素含有量OAV(但し、5点測定の平均値)を求めた。 Similarly, the oxygen content of the l-TiCN layer of the conventional coated tool was also measured, and the average oxygen content O AV (however, the average value of five-point measurement) was obtained.

表6に、平均酸素含有量OAVの値を示す。 Table 6 shows the values of the average oxygen content O AV.

さらに、本発明被覆工具の改質l−TiCN層について、電界放出型走査電子顕微鏡及び電子後方散乱回折像装置を用いて、各酸素濃化領域における改質l−TiCN結晶粒の単位面積当たりの粒界長さを求め、また、各酸素濃化領域より内部側にある結晶粒の単位面積当たりの粒界長さを求め、各酸素濃化領域の結晶微細化率RTiCN(但し、R=(酸素濃化領域における改質l−TiCN結晶粒の単位面積当たりの粒界長さ)/(酸素濃化領域より内部側にある改質l−TiCN結晶粒の単位面積当たりの粒界長さ)を算出した。 Further, for the modified l-TiCN layer of the coated tool of the present invention, per unit area of the modified l-TiCN crystal grains in each oxygen concentration region using a field emission scanning electron microscope and an electron backscatter diffraction image apparatus. The grain boundary length is obtained, and the grain boundary length per unit area of the crystal grains on the inner side from each oxygen-concentrated region is obtained, and the crystal refinement ratio R TiCN (where R = (Grain boundary length per unit area of modified l-TiCN crystal grains in oxygen-enriched region) / (grain boundary length per unit area of modified l-TiCN crystal grains on the inner side of the oxygen-enriched region) ) Was calculated.

ここで、改質l−TiCN結晶粒の単位面積当たりの粒界長さは、以下のようにして測定算出することができる。   Here, the grain boundary length per unit area of the modified l-TiCN crystal grains can be measured and calculated as follows.

すなわち、前記改質l−TiCN層の縦断面を研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に70度の入射角度で15kVの加速電圧の電子線を1nAの照射電流で、前記縦断面研磨面の測定範囲内に存在する結晶粒個々に照射して、電子後方散乱回折像装置を用い、所定測定領域を0.1μm/stepの間隔で、前記縦断面研磨面の法線に対して、前記結晶粒の結晶面である(001)面および(011)面の法線がなす傾斜角を測定し、この結果得られた測定傾斜角に基づいて、それぞれ隣接する結晶粒相互間の界面における(001)面の法線同士、および(011)面の法線同士の交わる角度を求め、さらに、前記(001)面の法線同士、および(011)面の法線同士の交わる角度が2度以上の場合を粒界であるとして設定した上で、電界放出型走査電子顕微鏡により、改質l−TiCN層の酸素濃化領域における縦断面測定領域を走査し、該測定領域内で粒界として識別される部分の長さGBLO(μm)を求め、そして、測定した縦断面研磨面の面積GAO(μm)との比の値GBLO/GAOを求めた。 That is, the modified l-TiCN layer is set in a lens barrel of a field emission scanning electron microscope in a state where the vertical cross section of the modified l-TiCN layer is a polished surface, and electrons having an acceleration voltage of 15 kV are incident on the polished surface at an incident angle of 70 degrees. A line is irradiated at an irradiation current of 1 nA to individual crystal grains existing within the measurement range of the vertical cross-section polished surface, and an electron backscatter diffraction image apparatus is used, and a predetermined measurement region is spaced at an interval of 0.1 μm / step. The inclination angle formed by the normal lines of the (001) plane and the (011) plane, which are crystal planes of the crystal grains, is measured with respect to the normal line of the vertical cross-section polished surface, and based on the measured inclination angle obtained as a result. Then, the angles at which the (001) plane normal lines and the (011) plane normal lines cross each other at the interface between adjacent crystal grains are obtained, and the (001) plane normal lines and ( 011) The angle at which the surface normals intersect is 2 degrees After setting the above case as a grain boundary, the field emission scanning electron microscope is used to scan the longitudinal cross-sectional measurement region in the oxygen-enriched region of the modified l-TiCN layer, and as a grain boundary in the measurement region The length GB LO (μm) of the part to be identified was obtained, and the value GB LO / G AO of the ratio to the measured area G AO (μm 2 ) of the polished surface of the longitudinal section was obtained.

また、同様に、改質l−TiCN層の酸素濃化領域より内部側における縦断面測定領域を走査し、該測定領域内で粒界として識別される部分の長さGBLI(μm)を求め、そして、測定した縦断面研磨面の面積GAI(μm)との比の値GBLI/GAIを求めた。 Similarly, the longitudinal cross section measurement region on the inner side of the oxygen concentration region of the modified l-TiCN layer is scanned to obtain the length GB LI (μm) of the portion identified as the grain boundary in the measurement region. and it was determined values GB LI / G AI ratio between the area G AI of the measured longitudinal sectional polished surface (μm 2).

ついで、前記GBLO/GAO(酸素濃化領域における単位面積当たりの粒界長さに相当)と、前記GBLI/GAI(酸素濃化領域より内部側における単位面積当たりの粒界長さに相当)との比の値を求め、これを、改質l−TiCN層の結晶微細化率RTiCNであると定義した。 Next, the GB LO / G AO (corresponding to the grain boundary length per unit area in the oxygen concentrated region) and the GB LI / G AI (grain boundary length per unit area on the inner side from the oxygen concentrated region). And defined as the crystal refinement rate R TiCN of the modified l-TiCN layer.

即ち、結晶微細化率RTiCN
=(酸素濃化領域における改質l−TiCN結晶粒の単位面積当たりの粒界長さ)/(酸素濃化領域より内部側にある改質l−TiCN結晶粒の単位面積当たりの粒界長さ)
=(GBLO/GAO)/(GBLI/GAI
である。
That is, the crystal refinement ratio R TiCN
= (Grain boundary length per unit area of modified l-TiCN crystal grains in oxygen-enriched region) / (grain boundary length per unit area of modified l-TiCN crystal grains located on the inner side of the oxygen-enriched region) Sa)
= (GB LO / G AO ) / (GB LI / G AI )
It is.

表5に、本発明被覆工具の改質l−TiCN層についての各酸素濃化領域の結晶微細化率RTiCNの値を示す。 Table 5 shows the value of the crystal refinement ratio R TiCN of each oxygen-concentrated region for the modified l-TiCN layer of the coated tool of the present invention.

表5、6にそれぞれ示される通り、本発明被覆工具の改質l−TiCN層は、結晶微細化率RTiCNがいずれも7.2より大きく、酸素濃化領域においては結晶粒が微細化していることが分かる。 As shown in Tables 5 and 6, respectively, the modified l-TiCN layer of the coated tool of the present invention has a crystal refinement ratio R TiCN larger than 7.2, and crystal grains are refined in the oxygen concentration region. I understand that.


なお、本発明被覆工具および従来被覆工具の下部層、中間層、上部層の厚さを、走査型電子顕微鏡を用いて測定(同じく縦断面測定)したところ、いずれも目標層厚と実質的に同じ平均層厚(5点測定の平均値)を示した。

In addition, when the thickness of the lower layer, the intermediate layer, and the upper layer of the coated tool of the present invention and the conventional coated tool was measured using the scanning electron microscope (same longitudinal section measurement), all were substantially equal to the target layer thickness. The same average layer thickness (average value of 5-point measurement) was shown.

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Figure 2012179706

Figure 2012179706
つぎに、前記の各種の被覆工具をいずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、本発明被覆工具1〜13および従来被覆工具1〜13について、
被削材:JIS・S45Cの長さ方向等間隔4本縦溝入り丸棒、
切削速度:400m/min.、
切り込み:1.5mm、
送り:0.30mm/rev.、
切削時間:18分、
の条件(切削条件A)での炭素鋼の乾式高速連続切削試験
(通常の切削速度は、250m/min)、
被削材:JIS・SNCM439の長さ方向等間隔4本縦溝入り丸棒、
切削速度:350m/min.、
切り込み:1.8mm、
送り:0.32mm/rev.、
切削時間:13分、
の条件(切削条件B)での合金鋼の乾式高速連続切削試験
(通常の切削速度は、250m/min.)、
被削材:JIS・FC300の長さ方向等間隔4本縦溝入り丸棒、
切削速度:450m/min.、
切り込み:1.5mm、
送り:0.30mm/rev.、
切削時間:20分、
の条件(切削条件C)での鋳鉄の乾式高速連続切削試験
(通常の切削速度は、300m/min)、
を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。
この測定結果を表7に示した。
Figure 2012179706
Next, in the state where all the above-mentioned various coated tools are screwed to the tip of the tool steel tool with a fixing jig, the present coated tools 1 to 13 and the conventional coated tools 1 to 13,
Work material: JIS · S45C lengthwise equal 4 round grooved round bars,
Cutting speed: 400 m / min. ,
Incision: 1.5mm,
Feed: 0.30 mm / rev. ,
Cutting time: 18 minutes
Dry high-speed continuous cutting test of carbon steel under the conditions (cutting condition A) (normal cutting speed is 250 m / min),
Work material: JIS / SNCM439 round direction bar with 4 equal intervals in the length direction,
Cutting speed: 350 m / min. ,
Cutting depth: 1.8mm,
Feed: 0.32 mm / rev. ,
Cutting time: 13 minutes
Dry high-speed continuous cutting test of alloy steel under the following conditions (cutting condition B) (normal cutting speed is 250 m / min.),
Work material: JIS / FC300 lengthwise equidistant 4 bars with vertical grooves,
Cutting speed: 450 m / min. ,
Incision: 1.5mm,
Feed: 0.30 mm / rev. ,
Cutting time: 20 minutes,
A dry high-speed continuous cutting test of cast iron under the above conditions (cutting condition C) (normal cutting speed is 300 m / min),
In each cutting test, the flank wear width of the cutting edge was measured.
The measurement results are shown in Table 7.

Figure 2012179706
表5〜7に示される結果から、本発明被覆工具1〜13は、酸素濃化領域を備えかつ微細化された組織を有する改質l−TiCN層(上部層)が形成されていることにより、中間層と上部層の密着性が向上すると同時に、上部層の改質l−TiCN層の結晶粒粗大化が抑制されることから、高熱発生を伴い、かつ、切刃部に断続的・衝撃的負荷がかかる高速連続切削に用いた場合でも、すぐれた耐チッピング性を発揮し、長期の使用に亘ってすぐれた耐摩耗性を示す。
Figure 2012179706
From the results shown in Tables 5 to 7, the coated tools 1 to 13 of the present invention have the modified l-TiCN layer (upper layer) having an oxygen-concentrated region and a refined structure. In addition, the adhesion between the intermediate layer and the upper layer is improved, and at the same time, the coarsening of crystal grains in the modified l-TiCN layer of the upper layer is suppressed. Even when used for high-speed continuous cutting where a heavy load is applied, it exhibits excellent chipping resistance and excellent wear resistance over a long period of use.

これに対して、硬質被覆層の上部層として、酸素濃化領域を備え、かつ、微細化された組織を有する改質l−TiCN層が形成されていない従来被覆工具1〜13においては、上部層において結晶粒の粗大化が生じやすく、そのため、中間層と上部層の密着性、耐摩耗性が十分でないため、高熱発生を伴い、かつ、切刃部に断続的・衝撃的負荷がかかる高速連続切削では、チッピング、欠損、剥離等が発生し、比較的短時間で使用寿命に至ることが明らかである。   On the other hand, as the upper layer of the hard coating layer, in the conventional coated tools 1 to 13 that are provided with an oxygen-concentrated region and are not formed with a modified l-TiCN layer having a refined structure, Grain coarsening is likely to occur in the layer, and therefore, the adhesion and wear resistance between the intermediate layer and the upper layer are not sufficient, resulting in high heat generation and high speed that causes intermittent and impact loads on the cutting edge. In continuous cutting, it is clear that chipping, chipping, peeling, etc. occur and the service life is reached in a relatively short time.

前述のように、この発明の被覆工具は、各種鋼や鋳鉄などの高速連続切削ですぐれた耐チッピング性、耐摩耗性を示し、長期に亘ってすぐれた切削性能を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。   As described above, the coated tool of the present invention exhibits excellent chipping resistance and wear resistance in high-speed continuous cutting of various steels and cast irons, and exhibits excellent cutting performance over a long period of time. It can cope with high performance of cutting equipment, labor saving and energy saving of cutting, and cost reduction.

Claims (1)

炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に、
(a)3〜20μmの合計平均層厚を有し、Tiの炭化物層、窒化物層、炭窒化物層、炭酸化物層および炭窒酸化物層のうちの1層または2層以上のTi化合物層からなる下部層、
(b)1〜15μmの平均層厚を有する酸化アルミニウム層からなる中間層、
(c)4〜14μmの平均層厚の縦長成長結晶組織をもつ改質Ti炭窒化物層からなる上部層、
前記(a)、(b)、(c)の硬質被覆層が化学蒸着により形成された表面被覆切削工具において、
(d)上部層を構成する前記縦長成長結晶組織をもつ改質Ti炭窒化物層は、その縦断面研磨面について、オージェ電子分光法により、その層厚方向に沿って酸素含有量を線分析した場合、表面から層厚方向に沿って内部側に、深さ0.5〜4.0μmの範囲内の間隔をおいて、酸素含有量の複数のピークが現れ、該ピーク位置における酸素含有量OMAXは、OMAX=3〜8原子%である酸素濃化領域を少なくとも1つ備えることを特徴とする表面被覆切削工具。
On the surface of the tool base composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(A) Ti compound having a total average layer thickness of 3 to 20 μm and one or more of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer and carbonitride oxide layer A lower layer consisting of layers,
(B) an intermediate layer comprising an aluminum oxide layer having an average layer thickness of 1 to 15 μm,
(C) an upper layer comprising a modified Ti carbonitride layer having a vertically grown crystal structure with an average layer thickness of 4 to 14 μm,
In the surface-coated cutting tool in which the hard coating layers (a), (b), and (c) are formed by chemical vapor deposition,
(D) The modified Ti carbonitride layer having the vertically grown crystal structure constituting the upper layer is subjected to line analysis of the oxygen content along the layer thickness direction by Auger electron spectroscopy on the polished surface of the longitudinal section. In this case, a plurality of peaks of oxygen content appear on the inner side along the layer thickness direction from the surface at intervals of a depth in the range of 0.5 to 4.0 μm, and the oxygen content at the peak position O MAX has at least one oxygen-concentrated region where O MAX = 3 to 8 atomic%.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000079022A1 (en) * 1999-06-21 2000-12-28 Sumitomo Electric Industries, Ltd. Coated hard alloy
JP2003048105A (en) * 2001-08-06 2003-02-18 Mitsubishi Materials Corp Surface coated cemented carbide cutting tool having coating layer exhibiting superior chipping resistance
WO2006064724A1 (en) * 2004-12-14 2006-06-22 Sumitomo Electric Hardmetal Corp. Surface-covered cutting tool
JP2009541075A (en) * 2006-06-22 2009-11-26 ケンナメタル インコーポレイテッド CVD coating scheme comprising alumina and / or titanium containing material and method of making the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000079022A1 (en) * 1999-06-21 2000-12-28 Sumitomo Electric Industries, Ltd. Coated hard alloy
JP2003048105A (en) * 2001-08-06 2003-02-18 Mitsubishi Materials Corp Surface coated cemented carbide cutting tool having coating layer exhibiting superior chipping resistance
WO2006064724A1 (en) * 2004-12-14 2006-06-22 Sumitomo Electric Hardmetal Corp. Surface-covered cutting tool
JP2009541075A (en) * 2006-06-22 2009-11-26 ケンナメタル インコーポレイテッド CVD coating scheme comprising alumina and / or titanium containing material and method of making the same

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