JP2012171866A5 - - Google Patents

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JP2012171866A5
JP2012171866A5 JP2012036619A JP2012036619A JP2012171866A5 JP 2012171866 A5 JP2012171866 A5 JP 2012171866A5 JP 2012036619 A JP2012036619 A JP 2012036619A JP 2012036619 A JP2012036619 A JP 2012036619A JP 2012171866 A5 JP2012171866 A5 JP 2012171866A5
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Japan
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low energy
energy particles
pulse
variant
doing
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JP2012036619A
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JP6053294B2 (ja
JP2012171866A (ja
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Priority claimed from DE102011012160.9A external-priority patent/DE102011012160B4/de
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この変法は、パルスの急な立ち上がりエッジ（Ｅｉｎｓｃｈａｌｔｆｌａｎｋｅｎ）を達成し、パルス期間での電流の低下を回避するために有利であることが判明した。そうすることによって、低エネルギー粒子の生成が回避される。というのはそのような低エネルギー粒子はあまり平滑でない層をもたらす可能性があるからである。
JP2012036619A 2011-02-23 2012-02-22 反射防止コーティングを有する基板およびその製造方法 Active JP6053294B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102011012160.9 2011-02-23
DE102011012160.9A DE102011012160B4 (de) 2011-02-23 2011-02-23 Substrat mit Antireflexionsbeschichtung und Verfahren zu dessen Herstellung
DE102012000997.6 2012-01-20
DE102012000997 2012-01-20

Publications (3)

Publication Number Publication Date
JP2012171866A JP2012171866A (ja) 2012-09-10
JP2012171866A5 true JP2012171866A5 (ja) 2012-10-18
JP6053294B2 JP6053294B2 (ja) 2016-12-27

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JP2012036619A Active JP6053294B2 (ja) 2011-02-23 2012-02-22 反射防止コーティングを有する基板およびその製造方法

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US (4) US9296648B2 (ja)
EP (1) EP2492251B1 (ja)
JP (1) JP6053294B2 (ja)
CN (2) CN107082575A (ja)
DE (1) DE202012013052U1 (ja)

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KR101806698B1 (ko) * 2016-05-30 2017-12-07 현대자동차주식회사 적외선 광학 필터
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