JP2014107143A5 - - Google Patents
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- Publication number
- JP2014107143A5 JP2014107143A5 JP2012259638A JP2012259638A JP2014107143A5 JP 2014107143 A5 JP2014107143 A5 JP 2014107143A5 JP 2012259638 A JP2012259638 A JP 2012259638A JP 2012259638 A JP2012259638 A JP 2012259638A JP 2014107143 A5 JP2014107143 A5 JP 2014107143A5
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- charged particle
- particle beam
- beam apparatus
- radial direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 claims 2
Claims (1)
- 請求項１０記載の荷電粒子線装置において、
前記上磁極および前記下磁極は、半径方向に伸びる排気口を有することを特徴とする荷電粒子線装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012259638A JP6095338B2 (ja) | 2012-11-28 | 2012-11-28 | 電子銃および荷電粒子線装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012259638A JP6095338B2 (ja) | 2012-11-28 | 2012-11-28 | 電子銃および荷電粒子線装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014107143A JP2014107143A (ja) | 2014-06-09 |
| JP2014107143A5 true JP2014107143A5 (ja) | 2015-11-05 |
| JP6095338B2 JP6095338B2 (ja) | 2017-03-15 |
Family
ID=51028456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012259638A Active JP6095338B2 (ja) | 2012-11-28 | 2012-11-28 | 電子銃および荷電粒子線装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6095338B2 (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7068117B2 (ja) * | 2018-09-18 | 2022-05-16 | 株式会社日立ハイテク | 荷電粒子線装置 |
| US11508544B2 (en) * | 2018-09-25 | 2022-11-22 | Hitachi High-Tech Corporation | Thermoelectric field emission electron source and electron beam application device |
| US11961693B2 (en) * | 2020-11-15 | 2024-04-16 | Elve Inc. | Magneto-electrostatic sensing, focusing, and steering of electron beams in vacuum electron devices |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3900792B2 (ja) * | 2000-04-26 | 2007-04-04 | 株式会社日立製作所 | 電子銃 |
| JP2006324119A (ja) * | 2005-05-19 | 2006-11-30 | Hitachi Ltd | 電子銃 |
| JP5386229B2 (ja) * | 2009-05-22 | 2014-01-15 | 株式会社日立ハイテクノロジーズ | 電子銃 |
-
2012
- 2012-11-28 JP JP2012259638A patent/JP6095338B2/ja active Active
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