JP2012171118A5 - - Google Patents

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Publication number
JP2012171118A5
JP2012171118A5 JP2011032895A JP2011032895A JP2012171118A5 JP 2012171118 A5 JP2012171118 A5 JP 2012171118A5 JP 2011032895 A JP2011032895 A JP 2011032895A JP 2011032895 A JP2011032895 A JP 2011032895A JP 2012171118 A5 JP2012171118 A5 JP 2012171118A5
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JP
Japan
Prior art keywords
forming
metal
reference hole
mask
alignment mark
Prior art date
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Application number
JP2011032895A
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English (en)
Japanese (ja)
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JP5591733B2 (ja
JP2012171118A (ja
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Priority to JP2011032895A priority Critical patent/JP5591733B2/ja
Priority claimed from JP2011032895A external-priority patent/JP5591733B2/ja
Publication of JP2012171118A publication Critical patent/JP2012171118A/ja
Publication of JP2012171118A5 publication Critical patent/JP2012171118A5/ja
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Publication of JP5591733B2 publication Critical patent/JP5591733B2/ja
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JP2011032895A 2011-02-18 2011-02-18 メタルマスク及びその製造方法、並びにアライメントマークの形成方法 Active JP5591733B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011032895A JP5591733B2 (ja) 2011-02-18 2011-02-18 メタルマスク及びその製造方法、並びにアライメントマークの形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011032895A JP5591733B2 (ja) 2011-02-18 2011-02-18 メタルマスク及びその製造方法、並びにアライメントマークの形成方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014155067A Division JP5893690B2 (ja) 2014-07-30 2014-07-30 配列用マスク

Publications (3)

Publication Number Publication Date
JP2012171118A JP2012171118A (ja) 2012-09-10
JP2012171118A5 true JP2012171118A5 (enExample) 2013-11-21
JP5591733B2 JP5591733B2 (ja) 2014-09-17

Family

ID=46974482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011032895A Active JP5591733B2 (ja) 2011-02-18 2011-02-18 メタルマスク及びその製造方法、並びにアライメントマークの形成方法

Country Status (1)

Country Link
JP (1) JP5591733B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023125403A (ja) * 2022-02-28 2023-09-07 マクセル株式会社 アライメントマーク、アライメントマークの形成方法、アライメントマークを備えるメタルマスク

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3103904B2 (ja) * 1991-11-01 2000-10-30 九州日立マクセル株式会社 スクリーン印刷用メタルマスク、およびその製造方法
JPH10151724A (ja) * 1996-11-21 1998-06-09 Ibiden Co Ltd 印刷用マスクおよびそれを用いたプリント配線板の半田印刷方法
JP2005193512A (ja) * 2004-01-07 2005-07-21 Murata Mfg Co Ltd スクリーン印刷用マスク
JP5178501B2 (ja) * 2008-12-26 2013-04-10 株式会社ソノコム 認識マークを備えたメタルマスク及びその製造方法

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