JP2012171032A - Film suction device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a film suction device capable easily separating a film.SOLUTION: This film suction device 1 sucks the upper surface of a film A. The film suction device 1 includes: a vacuum chuck 10 including a plurality of pressure chambers 12 in the longitudinal direction, and including a suction surface 10a communicating with the plurality of pressure chambers 12 independently of one another, and bulging between both ends in the longitudinal direction; and a hand device for sequentially bringing the suction surface 10a into contact with the upper surface of the film A from one end to the other end out of both the ends in the longitudinal direction.

Description

  The present invention relates to a film adsorption device.

  Patent Document 1 includes a porous body having an adsorption surface and a closed portion having a work contact surface that is flush with the adsorption surface around the porous body, and has a suction force from a vacuum source. A vacuum chuck is disclosed in which a workpiece is adsorbed on the adsorption surface by acting on the adsorption surface through micropores inside a porous body.

Japanese Patent No. 4141877

  However, when an attempt is made to adsorb a film supported on a table or a laminated film using a vacuum chuck as in the prior art, it is not easy to separate the film from the table or from the film below it. There is a problem. This is because the film and the table or the film and the film below it are in surface contact with each other, and the forces attracting each other, for example, atmospheric pressure, electrostatic force, each atom / molecule attracts between the two surfaces. This is because various forces such as attractive force act, and thus a large force is required to separate the film.

  This invention is made | formed in view of the said problem, and aims at provision of the film adsorption | suction apparatus which can perform separation of a film easily.

In order to solve the above problems, the present invention is a film adsorbing device that adsorbs one film surface of a film, and has a plurality of pressure chambers in the length direction, and is independent of the plurality of pressure chambers. A vacuum chuck having a suction surface that communicates with each other and bulges between both end portions in the length direction, and the suction surface with respect to the film surface from one end portion to the other in the length direction both ends. And a moving device that sequentially contacts the end of the head.
By adopting this configuration, in the present invention, the vacuum chuck having the swelled suction surface is moved, and the films can be sequentially separated while being sequentially suctioned. Accordingly, a part of the film can be sequentially separated from the end without separating the entire film at a time, so that the film can be separated without applying a large force.

In the present invention, the negative pressure of the pressure chamber provided at a position corresponding to at least one of the both ends of the suction surface is different from the position corresponding to the both ends. A configuration is adopted in which the pressure is greater than the negative pressure of the pressure chamber provided at the top.
By adopting this configuration, in the present invention, the negative pressure of the pressure chamber provided at the position corresponding to at least one end of the adsorption surface is larger than the negative pressure of the pressure chamber at the other position. The stability of adsorption at the one end in contact with the film surface can be improved, and the films can be sequentially pulled apart without dropping off the end of the film.

Further, in the present invention, the width in the length direction of the pressure chamber provided at a position corresponding to at least one of the both ends of the adsorption surface is a position corresponding to the both ends. A configuration is adopted in which the pressure chambers provided at different positions are smaller than the width in the length direction.
By adopting this configuration, in the present invention, since the width of the pressure chamber provided at the position corresponding to at least one end of the adsorption surface is smaller than the width of the pressure chamber at the other position, the bulged shape Even at the suction surface, it is possible to reliably start up the negative pressure at the one end that first comes into contact with the film surface, and to sequentially separate the film without dropping the end of the film. .

In the present invention, the volume of the pressure chamber provided at a position corresponding to at least one of the both ends of the adsorption surface is different from the position corresponding to the both ends. A configuration is employed in which the volume of the pressure chamber is smaller than that provided.
By adopting this configuration, in the present invention, the volume of the pressure chamber provided at the position corresponding to at least one end of the adsorption surface is smaller than the volume of the pressure chamber at the other position. The rising speed of the negative pressure at the one end in contact with the film can be increased, and the film can be sequentially pulled away without dropping off the end of the film.

Moreover, in this invention, the structure that the said adsorption surface is formed from the porous body is employ | adopted.
By adopting this configuration, in the present invention, the suction surface is formed by an infinite number of fine holes, so that depressions and wrinkles due to pulling deformation of the sucked film can be suppressed.

Moreover, in this invention, the diameter of the hole part of the said porous body provided in the position corresponding to at least said one edge part among the said both edge parts of the said adsorption | suction surface differs from the position corresponding to the said both edge part. A configuration is adopted in which the diameter is larger than the diameter of the hole of the porous body provided at another position.
By adopting this configuration, in the present invention, the diameter of the hole of the porous body provided at a position corresponding to at least one end of the adsorption surface is larger than the diameter of the hole of the porous body at another position. Therefore, it is possible to increase the speed of the negative pressure rising at the one end that first comes into contact with the film surface, and the film can be sequentially pulled away without dropping off the end of the film.

According to the present invention, there is provided a film adsorbing device for adsorbing one film surface of a film, which has a plurality of pressure chambers in a length direction, communicates with each of the plurality of pressure chambers independently, and has the length. A vacuum chuck having a suction surface that bulges between both ends in the direction, and the suction surface sequentially contacts the film surface from one end to the other end of the lengthwise ends. By adopting the configuration of having the moving device, the film can be sequentially separated while moving the vacuum chuck having the swollen suction surface and sequentially sucking the film. Accordingly, a part of the film can be sequentially separated from the end without separating the entire film at a time, so that the film can be separated without applying a large force.
Therefore, in the present invention, the film can be easily pulled away.

It is a block diagram which shows the film adsorption | suction apparatus in embodiment of this invention. It is a perspective view which shows the bottom face side of the vacuum chuck in embodiment of this invention. It is a perspective view which shows the plane side of the vacuum chuck in embodiment of this invention. It is a figure for demonstrating the adsorption | suction operation | movement of the film adsorption | suction apparatus in embodiment of this invention. It is a block diagram which shows the film adsorption | suction apparatus in another embodiment of this invention. It is a block diagram which shows the film adsorption | suction apparatus in another embodiment of this invention.

  Embodiments of the present invention will be described below with reference to the drawings. In the following description, an XYZ orthogonal coordinate system may be set, and the positional relationship of each member may be described with reference to this XYZ orthogonal coordinate system. The predetermined direction is the X axis direction, the direction orthogonal to the X axis direction is the Y axis direction, and the direction orthogonal to each of the X axis direction and the Y axis direction is the Z axis direction.

  FIG. 1 is a configuration diagram illustrating a film adsorption device 1 according to an embodiment of the present invention. FIG. 2 is a perspective view showing the bottom surface side of the vacuum chuck 10 according to the embodiment of the present invention. FIG. 3 is a perspective view showing the plane side of the vacuum chuck 10 according to the embodiment of the present invention.

  As shown in FIG. 1, the film suction device 1 includes a vacuum chuck 10 having a suction surface 10 a that sucks a film, and a hand device (moving device) 20 that moves the vacuum chuck 10. As the adsorption target of the film adsorption device 1, a positive electrode, a negative electrode, a separator, paper, or the like can be used.

  The vacuum chuck 10 has a substantially rectangular parallelepiped chuck base 11 (see FIGS. 2 and 3). The chuck base 11 is formed of a metal body and is configured to be electrically grounded as a countermeasure against static electricity (see FIG. 1). The bottom of the chuck base 11 constitutes a suction surface 10a. The top of the chuck base 11 is connected to the hand device 20.

  The hand device 20 rotates at least the chuck base 11 around an axis extending in the width direction (Y-axis direction) and moves the chuck base 11 in the horizontal direction (X-axis direction) and the vertical direction (Z-axis direction). It has a configuration that can be made. In the present embodiment, a robot arm having a 6-axis joint drive mechanism is used as the hand device 20, and the chuck base 11 can be moved and rotated in an arbitrary direction.

  A plurality of pressure chambers 12 are formed in the chuck base 11 in the length direction (X-axis direction). The pressure chambers 12 communicate with the suction surface 10a independently. The pressure chambers 12 each have an independent suction channel 13 and are connected to a suction device 14 such as a pump or an ejector. Therefore, the suction surface 10a has a plurality of divided suction areas having different suction paths in the length direction, and is configured to be able to independently adjust the magnitude of the negative pressure in each suction area. Further, the suction surface 10a is configured so that suction can be performed in another suction region having a different suction path even when suction cannot be performed in a part of the suction region (an airtight chamber cannot be formed).

  The suction surface 10a has a shape bulging between both end portions in the length direction (X-axis direction). Specifically, when the region of the suction surface 10a is divided into one end 10a1, a center 10a2, and the other end 10a3 in the length direction, the ends of the one end 10a1 and the other end 10a3 with the center of the center 10a2 as the top. It is comprised so that it may bulge so that it may become convex gradually from. The suction surface 10a of the present embodiment has an arc shape having a predetermined curvature in a sectional view.

  At least a part of the adsorption surface 10 a is formed from the porous body 15. The porous body 15 has innumerable fine pores inside, and has a shape along the shape in which the bottom surface bulges the adsorption surface 10a. The kind of the porous body 15 is appropriately selected from materials such as porous ceramics, porous plastic, and porous metal. The porous body 15 is provided so as to be fitted in the pressure chamber 12.

  There are two pressure chambers 12 at a position corresponding to one end 10a1 of the suction surface 10a, two at a position corresponding to the central portion 10a2 of the suction surface 10a, and two at a position corresponding to the other end 10a3 of the suction surface 10a. A total of six are provided. Each pressure chamber 12 has the same length in the Y-axis direction (see FIGS. 2 and 3). On the other hand, the width in the X-axis direction of the pressure chamber 12 provided at a position corresponding to the one end 10a1 and the other end 10a3 is the width in the X-axis direction of the pressure chamber 12 provided at a position corresponding to the central portion 10a2. It has a smaller configuration.

  At the time of film adsorption described later, the suction device 14 such as each pump or ejector corresponds to the central portion 10a2 with the negative pressure in the pressure chamber 12 provided at the position corresponding to the one end 10a1 and the other end 10a3. The pressure chamber 12 is set to be larger than the negative pressure of the pressure chamber 12 provided at the position (the degree of vacuum is increased).

  Since the film falls off from the end portion, the adsorption force at the one end portion 10a1 and the other end portion 10a3 of the adsorption surface 10a is made relatively larger than the adsorption force at the central portion 10a2, thereby stabilizing the adsorption. Can increase the sex. On the other hand, in the central portion 10a2, if the end of the film A is securely attracted, it does not drop out even if the attracting force is not increased. Can be improved.

Next, a series of suction operations of the film suction device 1 having the above-described configuration will be described with reference to FIG. In addition, the film adsorption | suction apparatus 1 of this embodiment is provided with the control part not shown. And unless there is particular notice, the said control part controls the following operation | movement as a subject.
FIG. 4 is a diagram for explaining the suction operation of the film suction device 1 according to the embodiment of the present invention.

  The film A is placed on the table 2. On one side (−X side) of the table 2, a blower-type ionizer 4 that blows static elimination ions along the support surface 3 that supports the film A is provided. The ionizer 4 is configured to electrically neutralize static electricity between the film A and the table 2 by decomposing air by, for example, corona discharge to generate ions.

  First, as shown in FIG. 4 (a), the vacuum chuck 10 is tilted around an axis extending in the width direction (Y-axis direction) by the hand device 20 (not shown in FIG. 4, see FIG. 1). One end portion (the end portion on the −X side, more specifically, the portion communicating with the pressure chamber 12 on the −X side in the one end portion 10a1) of both end portions in the length direction is brought into contact with the upper surface of the film A. .

  Since the width of the pressure chamber 12 on the −X side of the one end portion 10a1 is small, even if the suction surface 10a has a bulging shape, the contact can make contact with the upper surface of the film A substantially in parallel, and the corresponding suction The region can be closed and an airtight chamber can be formed. In this state, when the suction device 14 (not shown in FIG. 4, refer to FIG. 1) such as a pump or an ejector is driven, in the pressure chamber 12 on the −X side of the one end portion 10a1, the inside of the porous body 15 is minute. The internal air including the air in the hole is drawn through the suction flow path 13 and becomes negative pressure.

  Moreover, since the capacity | capacitance of the pressure chamber 12 on the -X side of the one end portion 10a1 is small, the rising speed of the negative pressure rising at the end portion on the -X side of the adsorption surface 10a that first contacts the upper surface of the film A is increased. Can do. Therefore, a part of the film A that has come into contact with the end portion on the −X side of the adsorption surface 10a is adsorbed promptly and reliably without causing a leak by this negative pressure.

  Next, the vacuum chuck 10 is moved by the hand device 20 so as to roll while the suction surface 10a is in contact with the upper surface of the film A as shown in FIG. By this movement, half of the one end portion 10a1 and the central portion 10a2 (more specifically, a portion communicating with the -X side pressure chamber 12 in the central portion 10a2) of the adsorption surface 10a sequentially contacts the film A. And the film A which contacted is adsorb | sucked to the adsorption | suction surface 10a sequentially.

  At the same time, a part of the film A that first contacts and is absorbed by the end of the adsorption surface 10 a on the −X side warps with respect to the support surface 3. Therefore, a part of the film A is sequentially pulled away from the end with respect to the support surface 3 of the table 2. In this way, the effect of the force (atmospheric pressure, electrostatic force, intermolecular force, etc.) acting between the two surfaces is reduced by sequentially separating a part from the end without separating the entire film A at once. The film A can be pulled away without applying a large force.

  Since the end portion on the −X side of the adsorption surface 10a that adsorbs the end of the film A requires a force to overcome the pulling force between the lower surface of the film A and the support surface 3 at the start of the separation of the film A, By making the suction force relatively larger than the suction force of the central portion 10a2 in advance by setting the suction device 14 such as a pump or an ejector, the suction stability is improved and the film A edge is prevented from falling off when being pulled apart. can do.

  Further, as in the present embodiment, if the chuck base 11 is electrically grounded and the ionizer 4 is used to remove electricity toward the portion of the film A that is peeled off from the table 2, the static electricity generated when the film A is pulled away from the table 2 can be reduced. Occurrence can be suppressed. Thereby, the electrostatic force acting between the two surfaces can be removed or reduced, so that it becomes easier to separate the film A.

  Then, the vacuum chuck 10 is moved by the hand device 20 so as to roll while the suction surface 10a is in contact with the upper surface of the film A, as shown in FIG. As described above, the suction surface 10a with respect to the upper surface of the film A is more specifically described from one end portion (−X side end portion) to the other end portion (+ X side end portion). Is sequentially brought into contact with the other end portion 10a3 up to the portion communicating with the pressure chamber 12 on the + X side.

When the suction of the film A to the suction surface 10a is completed, the hand device 20 lifts the vacuum chuck 10 upward and conveys it to a predetermined position.
In addition, what is necessary is just to perform said reverse operation | movement, when putting the film A after conveying to a predetermined position. Further, when the film A is difficult to peel off from the suction surface 10a, each pressure chamber 12 may be sprayed as a positive pressure.

Therefore, according to the above-described embodiment, the film adsorbing device 1 adsorbs the upper surface of the film A, and has the plurality of pressure chambers 12 in the length direction and communicates with the plurality of pressure chambers 12 independently. In addition, the vacuum chuck 10 having the suction surface 10a bulging between the both ends in the length direction, and the suction surface 10a from the one end of the both ends in the length direction with respect to the upper surface of the film A By adopting the configuration of having the hand device 20 that sequentially contacts the other end, the vacuum chuck 10 having the swelled suction surface 10a is moved, and the film A is sequentially sucked while the film A is sucked. Can be pulled apart sequentially. Accordingly, a part of the film A can be sequentially separated from the end without separating the entire film A at a time, so that the film A can be separated without applying a large force.
Therefore, in this embodiment, the film A can be easily separated.

  As mentioned above, although preferred embodiment of this invention was described referring drawings, this invention is not limited to the said embodiment. Various shapes, combinations, and the like of the constituent members shown in the above-described embodiments are examples, and various modifications can be made based on design requirements and the like without departing from the gist of the present invention.

  For example, as in another embodiment shown in FIG. 5, the diameters of the pores of the porous body 15 provided at the positions corresponding to both ends of the adsorption surface 10a are set to be different from those of the porous body 15 provided at other positions. It is good also as a structure made larger than a diameter. According to this configuration, the porous body 15 having a large diameter has a coarse density, and the flow path resistance becomes relatively small. Therefore, the rapid response of the negative pressure rising at both ends of the adsorption surface 10a can be further improved. Efficient film A can be pulled apart.

  Further, for example, in the above-described embodiment, the vacuum chuck 10 has a symmetrical configuration in the length direction. However, if the peeling direction of the film A is defined in one direction, the configuration is not symmetrical. Also good. In this case, at the time of peeling, the pressure on the -X side of at least one of the two ends of the suction surface 10a that first comes into contact with the upper surface of the film A (for example, the pressure on the −X side of the one end 10a1 shown in FIG. 1). The negative pressure of the pressure chamber 12 provided at a position corresponding to the portion communicating with the chamber 12) is made larger than the negative pressure of the pressure chamber 12 provided at another position, and is provided at the corresponding position. The width and volume of the pressure chamber 12 are made smaller than the width and volume of the pressure chamber 12 provided at another position, and the diameter of the porous body 15 provided at the corresponding position is set at another position. It is preferable to employ a configuration in which the diameter is larger than the diameter of the porous body 15 provided on the surface.

  Further, for example, in the above-described embodiment, the configuration in which the curvature extends over the entire surface as the bulging shape of the suction surface 10a is illustrated, but the present invention is not limited to this configuration, and FIG. As shown in FIG. 6, only the both end portions may have a curvature, or as shown in FIG. 6B, the both end portions and the central portion may have different curvatures. As shown to (c), the structure which makes the both ends and center part the plane, and connects between them continuously with a curved surface may be sufficient.

  DESCRIPTION OF SYMBOLS 1 ... Film adsorption apparatus, A ... Film, 10 ... Vacuum chuck, 10a ... Adsorption surface, 12 ... Pressure chamber, 15 ... Porous body, 20 ... Hand apparatus (movement apparatus)

Claims (6)

A film adsorption device for adsorbing one film surface of a film,
A vacuum chuck having a plurality of pressure chambers in the length direction, having a suction surface that communicates with each of the plurality of pressure chambers independently and bulges between both end portions in the length direction;
And a moving device for sequentially bringing the suction surface into contact with the film surface from one end portion to the other end portion of both end portions in the length direction.   The negative pressure of the pressure chamber provided at a position corresponding to at least one of the both end portions of the suction surface is the pressure chamber provided at another position different from the position corresponding to the both end portions. The film suction device according to claim 1, wherein the film suction device is larger than the negative pressure of the film.   The width in the length direction of the pressure chamber provided at a position corresponding to at least one of the both ends of the suction surface is provided at another position different from the position corresponding to the both ends. The film suction device according to claim 1, wherein the pressure suction chamber is smaller than a width of the pressure chamber in the length direction.   The volume of the pressure chamber provided at a position corresponding to at least one of the both ends of the suction surface is different from the position corresponding to the both ends of the pressure chamber provided at another position. The film adsorption device according to any one of claims 1 to 3, wherein the film adsorption device is smaller than a volume.   The film adsorption device according to any one of claims 1 to 4, wherein the adsorption surface is formed of a porous body.   The diameter of the hole of the porous body provided at a position corresponding to at least one of the both ends of the adsorption surface is provided at another position different from the position corresponding to the both ends. The film adsorbing device according to claim 5, wherein the film adsorbing device is larger than a diameter of a hole portion of the porous body.

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