TW201934457A - Vacuum suction method and vacuum suction device prevents wrinkles from being generated when the flexible sheet is adsorbed - Google Patents

Abstract

The vacuum suction device of the invention prevents wrinkles from being generated when the flexible sheet is adsorbed. A cavity part (12a) is arranged in the platform (10), and forms a plurality of through-holes (13) upwards in advance. The vacuum pump (24) is connected with the pressure pump (25) through the electromagnetic valve (23). Then, the flexible sheet (31) is conveyed to the platform (10) so that the vacuum pump (24) is activated to form a negative pressure. Thereafter, the pressure in the cavity portion (12a) is raised by the pressure pump 25, and after reaching a predetermined value which is about to become atmospheric pressure, the suction is again attracted, and the flexible sheet (31) is adsorbed on the platform (10).

Description

Vacuum adsorption method and vacuum adsorption device

The invention relates to a vacuum adsorption method and a vacuum adsorption device for processing a flexible sheet, such as a scoring device or a breaking device, on a platform.

A vacuum suction device is used when cutting a brittle material substrate into a predetermined shape. For example, Patent Document 1 discloses a scribing device and a breaking device for scoring a substrate. The substrate is adsorbed on a platform, the substrate is fixed on the substrate, and the scoring wheel is rotated to perform scoring or press the breaking rod. To break the device.
[Existing Technology Literature]
[Patent Literature]

[Patent Document 1] WO2004 / 073946

[Inventive Problems]

When the flexible sheet is processed by using the vacuum adsorption device as described above, when it is placed on a platform and vacuum-adsorbed from the platform, the flexible sheet may be deformed because it is thin and soft. For example, as shown in FIG. 1 (a), when the flexible sheet 102 is placed on the platform 101, if air is contained between the platforms in the central part of the flexible sheet 102, it is sucked under negative pressure from most of the through holes provided on the platform. Later, as shown in FIG. 1 (b), there is a problem that a wrinkle 103 of a linear or circular shape is formed on a part of the flexible sheet 102.

The present invention was completed by focusing on the problems of the conventional vacuum adsorption device as described above, and the purpose is to prevent the wrinkles and the like from being generated on the platform even if the flexible sheet is adsorbed during the processing of the flexible sheet. .
[Means for solving problems]

In order to solve the above problems, the vacuum adsorption device of the present invention includes:
The platform has a hollow portion along the surface inside, and a plurality of through holes are formed facing the platform, and the flexible sheet is placed thereon;
Vacuum pump to attract air;
Booster pump to feed air;
A duct connecting the cavity portion in the platform to the vacuum pump and the pressure pump;
A solenoid valve connecting any one of the vacuum pump and the pressure pump to the conduit;
A pressure sensor that detects the pressure in the cavity portion of the platform;
The controller is configured to open and close the solenoid valve based on the pressure of the pressure sensor when the flexible sheet is placed on the platform, and connect any one of the vacuum pump and the pressure pump to the cavity. control.

In order to solve the above problems, the vacuum adsorption method of the present invention uses a vacuum adsorption device:
When the flexible sheet is placed on the platform, the conduit is switched to the vacuum pump side, and the pressure of the cavity portion of the platform is reduced by driving the vacuum pump.
When the pressure in the cavity portion reaches the first negative pressure, the conduit is switched to the pressure pump side to increase the pressure in the cavity portion,
When the pressure in the cavity portion reaches a second negative pressure, the conduit is switched to the vacuum pump to reduce the pressure in the cavity portion,
When the pressure in the cavity portion reaches the third negative pressure, control is performed in a manner to maintain the third negative pressure.
[Effect of Invention]

According to the present invention having the characteristics described above, after the flexible sheet is transported, it is sucked first, then returned to a value close to the atmospheric pressure, and then sucked again, so that the effect of maintaining a flat state on the platform and holding it without wrinkles can be obtained.

A vacuum adsorption device for a flexible sheet according to an embodiment of the present invention will be described with reference to FIG. 2. FIG. 2 is a schematic diagram showing a vacuum adsorption device and a processing platform thereof in this embodiment. In this figure, the cross-sectional structure of the display platform 10 is shown. The platform 10 includes a first sub-platform 11 and a second sub-platform 12. A flexible sheet is a sheet that has flexibility and is also a sheet that may cause wrinkles when placed on a platform. Examples of the flexible sheet include resin sheets such as polyimide resins, polyimide resins, polyester resins such as PET, polyolefin resins such as polyethylene and polypropylene, and polyethylene resins such as polystyrene and polyvinyl chloride. It also includes a laminated sheet in which a plurality of resin sheets are laminated.

The first sub-platform 11 is a flat plate-shaped member fixed to a working platform of a processing device (not shown), and can be freely attached to and detached from the working platform. The second sub-platform 12 is disposed on the first sub-platform 11 in the same shape as the first sub-platform 11. Below the second sub-platform 12, most of the plate thickness except the perimeter has thin depressions, and a hollow portion 12 a is formed by being superposed on the first sub-platform 11.

A plurality of through holes 13 are formed from the cavity portion 12 a toward the upper surface of the second sub-platform 12. The through-hole 13 is a hole that adsorbs a flexible sheet described later, covers the mounting range of the flexible sheet, and vertically penetrates the grid-like position of the second sub-platform 12. In addition, instead of forming a hollow portion 12 a by providing a recess under the second sub-platform 12, a hollow may be formed by providing a recess on the first sub-platform 11.

In addition, an image sensor 14 is provided on the upper part of the vacuum adsorption device to identify the flexible sheet conveyed to the platform.

As shown in the figure, a catheter 21 is connected to the hollow portion 12 a, and a pressure sensor 22 is provided on the catheter 21. The pressure sensor 22 is a pressure sensor that detects the relative negative pressure when the atmospheric pressure is set to 0, and a pressure sensor capable of measuring a range of 0.0 kPa to -100 kPa is selected. In addition, as shown in the figure, a solenoid valve 23 is provided on the other end of the conduit 21, and a vacuum pump 24 and a pressure pump 25 are provided on the solenoid valve 23. The vacuum pump 24 is a person that reduces the pressure of the cavity portion 12a, and the pressure pump 25 is a person that increases the pressure of the cavity portion 12a. In addition, the controller 26 is connected to an image sensor 14, a pressure sensor 22, a solenoid valve 23, and a transport mechanism 27. The solenoid valve 23 is one that switches between the vacuum pump 24 and the pressure pump 25 based on an instruction from the controller 26. The controller 26 controls the actions of the solenoid valve 23, the vacuum pump 24, and the pressure pump 25 based on the output from the image sensor 14, the pressure sensor 22, and wrinkles of the flexible sheet to be placed on the platform 10. After removal, it is adsorbed on the platform 10.

Next, the operation | movement at the time of attracting the flexible sheet conveyed to the platform 10 is demonstrated. If the vacuum pump 24 is operated while the flexible sheet is being transported to the platform 10, the air is attracted by the through-holes 13, but since the upper part is open, the cavity portion 12a of the platform 10 will be close to atmospheric pressure (0 Pa). Of the state. As shown in FIG. 3, after the flexible sheet 31 is carried on the platform 10, the image sensor 14 detects this state. Thereafter, as shown in FIG. 4, since the air is sucked through the duct 21 by the vacuum pump 24, the cavity portion 12 a becomes negative pressure, and the pressure detected by the pressure sensor 22 gradually decreases as shown in the figure. Then, when a predetermined first negative pressure is reached, for example, -30 kPa, the presence or absence of wrinkles may be confirmed using the image sensor 14. If there is no wrinkle at this time, it can be processed directly. Conversely, when wrinkles are generated, the solenoid valve 23 is switched to the pressure pump 25 side, and the pressure pump 25 is operated. In this way, air is fed from the pressure pump 25 to the cavity portion 12a in the platform 10, and as shown in FIG. 4, the pressure in the cavity portion 12a gradually increases.

After that, the pressure rises to a second negative pressure that will become atmospheric pressure, for example, -1 kPa. The force to attract the flexible sheet 31 is almost non-existent, and no air remains between the flexible sheet 31 and the platform 10, so the wrinkles disappear. At this time, the solenoid valve 23 is switched to the vacuum pump 24 side again. In this way, although the pressure detected by the pressure sensor 22 gradually decreases again, no wrinkles will be generated during this period. After that, when the third negative pressure is reached that can surely hold the flexible sheet 31 on the platform 10, for example, -30 kPa, the vacuum pump 24 is stopped to maintain the pressure at this time. Thereafter, while maintaining this state, necessary processing such as laser processing is performed on the flexible sheet 31 held on the stage 10.

In this embodiment, although the vacuum pump 24 is operated before the flexible sheet 31 is transferred to the platform 10, the vacuum pump 24 is operated after the flexible sheet 31 is placed on the platform 10, and the cavity portion is operated. 12a can be controlled by the way of negative pressure.

In this embodiment, although the first negative pressure and the third negative pressure are set to the same value (-30 kPa), it is not necessary to make the first negative pressure and the third negative pressure the same value. For example, the third negative pressure may be set to -50 kPa.
[Industrial availability]

The vacuum adsorption device of the present invention can be applied to a breaking device that performs laser processing or scoring on a substrate such as a flexible sheet, or performs cutting processing along a scribe line.

10‧‧‧platform

11‧‧‧ the first vice platform

12‧‧‧Second Vice Platform

12a‧‧‧Hollow

13‧‧‧through hole

14‧‧‧Image Sensor

21‧‧‧ Catheter

22‧‧‧Pressure Sensor

23‧‧‧Solenoid valve

24‧‧‧Vacuum pump

25‧‧‧ booster pump

26‧‧‧Controller

27‧‧‧ transfer agency

31‧‧‧flexible sheet

FIG. 1 is a diagram showing a state where air is present between a flexible sheet and a platform and a state where crepe is generated in a conventional vacuum adsorption device.

FIG. 2 is a schematic view showing a vacuum adsorption device according to the embodiment.

FIG. 3 is a view showing a state where the flexible sheet is transported to the vacuum adsorption device in the present embodiment.

FIG. 4 is a graph showing a change in pressure in a cavity portion after a flexible sheet is transported in the vacuum adsorption device in this embodiment.

Claims (2)

A vacuum adsorption device includes: The platform has a hollow portion along the surface inside, and a plurality of through holes are formed facing the platform, and the flexible sheet is placed thereon; Vacuum pump to attract air; Booster pump to feed air; A duct connecting the cavity portion in the platform to the vacuum pump and the pressure pump; A solenoid valve connecting any one of the vacuum pump and the pressure pump to the conduit; A pressure sensor that detects the pressure in the cavity portion of the platform; and The controller is configured to open and close the solenoid valve based on the pressure of the pressure sensor when the flexible sheet is placed on the platform, and connect any one of the vacuum pump and the pressure pump to the cavity. control. A vacuum adsorption method using the vacuum adsorption device described in claim 1: When the flexible sheet is placed on the platform, the conduit is switched to the vacuum pump side, and the pressure of the cavity portion of the platform is reduced by driving the vacuum pump. When the pressure in the cavity portion reaches the first negative pressure, the conduit is switched to the pressure pump side to increase the pressure in the cavity portion, When the pressure in the cavity portion reaches a second negative pressure, the conduit is switched to the vacuum pump to reduce the pressure in the cavity portion, When the pressure in the cavity portion reaches the third negative pressure, control is performed in a manner to maintain the third negative pressure.