JP2012161983A5 - - Google Patents

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Publication number
JP2012161983A5
JP2012161983A5 JP2011023736A JP2011023736A JP2012161983A5 JP 2012161983 A5 JP2012161983 A5 JP 2012161983A5 JP 2011023736 A JP2011023736 A JP 2011023736A JP 2011023736 A JP2011023736 A JP 2011023736A JP 2012161983 A5 JP2012161983 A5 JP 2012161983A5
Authority
JP
Japan
Prior art keywords
substrate
manufacturing
discharge head
liquid discharge
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011023736A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012161983A (ja
JP5744552B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011023736A priority Critical patent/JP5744552B2/ja
Priority claimed from JP2011023736A external-priority patent/JP5744552B2/ja
Priority to US13/348,177 priority patent/US8673660B2/en
Publication of JP2012161983A publication Critical patent/JP2012161983A/ja
Publication of JP2012161983A5 publication Critical patent/JP2012161983A5/ja
Application granted granted Critical
Publication of JP5744552B2 publication Critical patent/JP5744552B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011023736A 2011-02-07 2011-02-07 液体吐出ヘッドの製造方法 Expired - Fee Related JP5744552B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011023736A JP5744552B2 (ja) 2011-02-07 2011-02-07 液体吐出ヘッドの製造方法
US13/348,177 US8673660B2 (en) 2011-02-07 2012-01-11 Method of producing liquid ejection head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011023736A JP5744552B2 (ja) 2011-02-07 2011-02-07 液体吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2012161983A JP2012161983A (ja) 2012-08-30
JP2012161983A5 true JP2012161983A5 (enExample) 2014-03-06
JP5744552B2 JP5744552B2 (ja) 2015-07-08

Family

ID=46599948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011023736A Expired - Fee Related JP5744552B2 (ja) 2011-02-07 2011-02-07 液体吐出ヘッドの製造方法

Country Status (2)

Country Link
US (1) US8673660B2 (enExample)
JP (1) JP5744552B2 (enExample)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4259509B2 (ja) * 2004-12-27 2009-04-30 セイコーエプソン株式会社 静電アクチュエータ、液滴吐出ヘッド、液滴吐出装置及び静電デバイス並びにそれらの製造方法
JP2007076141A (ja) * 2005-09-14 2007-03-29 Seiko Epson Corp 液滴吐出ヘッドの製造方法
JP2007160625A (ja) * 2005-12-12 2007-06-28 Canon Inc シリコン基板のエッチング方法、インクジェット記録ヘッドおよびその製造方法
JP4321574B2 (ja) * 2006-02-27 2009-08-26 セイコーエプソン株式会社 ノズル基板の製造方法、液滴吐出ヘッドの製造方法、液滴吐出ヘッドおよび液滴吐出装置
JP4850637B2 (ja) * 2006-09-04 2012-01-11 キヤノン株式会社 液体吐出ヘッドの製造方法および液体吐出ヘッド
US8206998B2 (en) * 2009-06-17 2012-06-26 Canon Kabushiki Kaisha Method for manufacturing liquid discharge head

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