JP2012133093A5 - - Google Patents

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Publication number
JP2012133093A5
JP2012133093A5 JP2010284574A JP2010284574A JP2012133093A5 JP 2012133093 A5 JP2012133093 A5 JP 2012133093A5 JP 2010284574 A JP2010284574 A JP 2010284574A JP 2010284574 A JP2010284574 A JP 2010284574A JP 2012133093 A5 JP2012133093 A5 JP 2012133093A5
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JP
Japan
Prior art keywords
substrate
electrode
partial
actuators
interference filter
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Application number
JP2010284574A
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English (en)
Japanese (ja)
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JP5673075B2 (ja
JP2012133093A (ja
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Publication date
Application filed filed Critical
Priority to JP2010284574A priority Critical patent/JP5673075B2/ja
Priority claimed from JP2010284574A external-priority patent/JP5673075B2/ja
Priority to US13/331,568 priority patent/US20120154915A1/en
Priority to CN201110433595.6A priority patent/CN102540312B/zh
Publication of JP2012133093A publication Critical patent/JP2012133093A/ja
Publication of JP2012133093A5 publication Critical patent/JP2012133093A5/ja
Application granted granted Critical
Publication of JP5673075B2 publication Critical patent/JP5673075B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010284574A 2010-12-21 2010-12-21 波長可変干渉フィルター、光モジュール、および光分析装置 Expired - Fee Related JP5673075B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010284574A JP5673075B2 (ja) 2010-12-21 2010-12-21 波長可変干渉フィルター、光モジュール、および光分析装置
US13/331,568 US20120154915A1 (en) 2010-12-21 2011-12-20 Variable wavelength interference filter, optical filter device, optical module, and electronic apparatus
CN201110433595.6A CN102540312B (zh) 2010-12-21 2011-12-21 波长可变干涉滤波器、光学组件以及电子设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010284574A JP5673075B2 (ja) 2010-12-21 2010-12-21 波長可変干渉フィルター、光モジュール、および光分析装置

Publications (3)

Publication Number Publication Date
JP2012133093A JP2012133093A (ja) 2012-07-12
JP2012133093A5 true JP2012133093A5 (enExample) 2014-02-13
JP5673075B2 JP5673075B2 (ja) 2015-02-18

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ID=46648777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010284574A Expired - Fee Related JP5673075B2 (ja) 2010-12-21 2010-12-21 波長可変干渉フィルター、光モジュール、および光分析装置

Country Status (1)

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JP (1) JP5673075B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5884393B2 (ja) * 2011-10-13 2016-03-15 セイコーエプソン株式会社 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
JP2012150353A (ja) * 2011-01-20 2012-08-09 Seiko Epson Corp 波長可変干渉フィルター、光モジュール、および光分析装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2768812B1 (fr) * 1997-09-19 1999-10-22 Commissariat Energie Atomique Interferometre fabry-perot accordable integre
JP4561728B2 (ja) * 2006-11-02 2010-10-13 セイコーエプソン株式会社 光学デバイス、光学デバイスの製造方法、波長可変フィルタ、波長可変フィルタモジュール、および光スペクトラムアナライザ
JP2010230867A (ja) * 2009-03-26 2010-10-14 Olympus Corp 可変形状鏡システム
JP5724557B2 (ja) * 2011-04-07 2015-05-27 セイコーエプソン株式会社 波長可変干渉フィルター、光モジュール、および光分析装置

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