JP2012130841A5 - - Google Patents

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Publication number
JP2012130841A5
JP2012130841A5 JP2010283765A JP2010283765A JP2012130841A5 JP 2012130841 A5 JP2012130841 A5 JP 2012130841A5 JP 2010283765 A JP2010283765 A JP 2010283765A JP 2010283765 A JP2010283765 A JP 2010283765A JP 2012130841 A5 JP2012130841 A5 JP 2012130841A5
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JP
Japan
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rectangular
rectangular area
nozzles
shape
coating apparatus
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JP2010283765A
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English (en)
Japanese (ja)
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JP5697967B2 (ja
JP2012130841A (ja
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Publication of JP2012130841A5 publication Critical patent/JP2012130841A5/ja
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JP2010283765A 2010-12-20 2010-12-20 塗布方法および塗布装置 Active JP5697967B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010283765A JP5697967B2 (ja) 2010-12-20 2010-12-20 塗布方法および塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010283765A JP5697967B2 (ja) 2010-12-20 2010-12-20 塗布方法および塗布装置

Publications (3)

Publication Number Publication Date
JP2012130841A JP2012130841A (ja) 2012-07-12
JP2012130841A5 true JP2012130841A5 (https=) 2014-02-13
JP5697967B2 JP5697967B2 (ja) 2015-04-08

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ID=46647084

Family Applications (1)

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JP2010283765A Active JP5697967B2 (ja) 2010-12-20 2010-12-20 塗布方法および塗布装置

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JP (1) JP5697967B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5663342B2 (ja) * 2011-02-21 2015-02-04 東レエンジニアリング株式会社 塗布方法および塗布装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4320561B2 (ja) * 2003-05-14 2009-08-26 セイコーエプソン株式会社 液滴吐出装置
JP2006088091A (ja) * 2004-09-27 2006-04-06 Seiko Epson Corp 液状体の描画方法、液状体の描画装置、電気光学装置の製造方法、電気光学装置、電気光学装置の駆動方法及び電子機器
JP4042737B2 (ja) * 2004-10-27 2008-02-06 セイコーエプソン株式会社 パターン形成システム
JP5606258B2 (ja) * 2010-10-06 2014-10-15 東レエンジニアリング株式会社 塗布方法および塗布装置

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