JP2012130841A5 - - Google Patents
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- JP2012130841A5 JP2012130841A5 JP2010283765A JP2010283765A JP2012130841A5 JP 2012130841 A5 JP2012130841 A5 JP 2012130841A5 JP 2010283765 A JP2010283765 A JP 2010283765A JP 2010283765 A JP2010283765 A JP 2010283765A JP 2012130841 A5 JP2012130841 A5 JP 2012130841A5
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上記目的を達成するために、本発明の塗布方法は、矩形シート状の基材の長手方向に所定間隔で連続して形成されている複数の矩形領域に格子状に配設されている複数の凹部のそれぞれに複数のノズルを用いてインクジェット方式によりインクを塗布する塗布方法であって、
前記基材をその長手方向に所定の張力を掛けて所定の高さで保持すると共に、当該長手方向に垂直な短手方向に位置決めする第１の保持工程と、
前記位置決めされた基材を前記所定の高さに位置する面で受け止める第２の保持工程と、
前記複数のノズルを前記保持された基材から外れた、当該基材の側部近傍の待機位置で待機させる待機工程と、
前記短手方向および前記所定の高さに保持された前記基材を、前記矩形領域の単位で供給する基材供給工程と、
前記供給された矩形領域の基材を吸着固定する矩形領域固定工程と、
前記矩形領域の、前記長手方向におけるＸ位置誤差と、前記短手方向におけるＹ位置誤差とを求めるアライメント情報算出工程と、
最初に供給される所定数の矩形領域の形状の歪みを検出する歪み検出工程と、
前記検出された、矩形領域の形状の歪みに基づいて、前記複数の凹部のそれぞれに対してインクを吐出するノズルを決定するマッピングデータを作成するマッピングデータ作成工程と、
前記Ｘ位置誤差に基づき、前記矩形領域に対する前記複数のノズルのＸ方向の位置を補正する工程と、
前記複数のノズルの前記矩形領域に対する位置が補正された後に、前記複数のノズルを前記待機位置から前記短手方向に平行な第１の塗布スキャン方向に移動させながら、当該複数のノズルの中の前記マッピングデータに基づいて選択されたノズルから、前記吸着固定された矩形領域に配設されている複数の凹部のそれぞれにインクを吐出させるインク吐出工程とを備える。
In order to achieve the above-described object, the coating method of the present invention includes a plurality of rectangular regions arranged in a grid pattern in a plurality of rectangular regions continuously formed at predetermined intervals in the longitudinal direction of a rectangular sheet-like substrate. a coating method for applying the Rii ink by the ink jet method using a plurality of nozzles in respective recesses,
A first holding step of holding the base material at a predetermined height by applying a predetermined tension in the longitudinal direction, and positioning in a short direction perpendicular to the longitudinal direction;
A second holding step for receiving the positioned substrate at a surface located at the predetermined height;
A standby step of waiting at a standby position in the vicinity of the side portion of the base material, the plurality of nozzles being detached from the held base material;
A base material supplying step of supplying the base material held in the short direction and the predetermined height in units of the rectangular region;
A rectangular region fixing step for adsorbing and fixing the substrate of the supplied rectangular region;
An alignment information calculation step for obtaining an X position error in the longitudinal direction and a Y position error in the short direction of the rectangular area;
A distortion detection step of detecting distortion of the shape of a predetermined number of rectangular regions supplied first;
A mapping data creating step for creating mapping data for determining nozzles that eject ink to each of the plurality of recesses based on the detected distortion of the shape of the rectangular region;
Correcting the positions of the plurality of nozzles in the X direction with respect to the rectangular region based on the X position error;
After the positions of the plurality of nozzles with respect to the rectangular region are corrected, the plurality of nozzles are moved from the standby position in a first application scanning direction parallel to the lateral direction, An ink ejecting step of ejecting ink from the nozzle selected based on the mapping data to each of the plurality of recesses arranged in the suction-fixed rectangular region.
Claims (39)
前記基材をその長手方向に所定の張力を掛けて所定の高さで保持すると共に、当該長手方向に垂直な短手方向に位置決めする第１の保持工程と、
前記位置決めされた基材を前記所定の高さに位置する面で受け止める第２の保持工程と、
前記複数のノズルを前記保持された基材から外れた、当該基材の側部近傍の待機位置で待機させる待機工程と、
前記短手方向および前記所定の高さに保持された前記基材を、前記矩形領域の単位で供給する基材供給工程と、
前記供給された矩形領域の基材を吸着固定する矩形領域固定工程と、
前記矩形領域の、前記長手方向におけるＸ位置誤差と、前記短手方向におけるＹ位置誤差とを求めるアライメント情報算出工程と、
最初に供給される所定数の矩形領域の形状の歪みを検出する歪み検出工程と、
前記検出された、矩形領域の形状の歪みに基づいて、前記複数の凹部のそれぞれに対してインクを吐出するノズルを決定するマッピングデータを作成するマッピングデータ作成工程と、
前記Ｘ位置誤差に基づき、前記矩形領域に対する前記複数のノズルのＸ方向の位置を補正する工程と、
前記複数のノズルの前記矩形領域に対する位置が補正された後に、前記複数のノズルを前記待機位置から前記短手方向に平行な第１の塗布スキャン方向に移動させながら、当該複数のノズルの中の前記マッピングデータに基づいて選択されたノズルから、前記吸着固定された矩形領域に配設されている複数の凹部のそれぞれにインクを吐出させるインク吐出工程とを備える塗布方法。 Ri by the ink jet method using a plurality of nozzles in each of the plurality of recesses are arranged in a grid pattern into a plurality of rectangular regions in the longitudinal direction of the rectangular sheet substrate are continuously formed at predetermined intervals a coating method for applying the Lee ink,
A first holding step of holding the base material at a predetermined height by applying a predetermined tension in the longitudinal direction, and positioning in a short direction perpendicular to the longitudinal direction;
A second holding step for receiving the positioned substrate at a surface located at the predetermined height;
A standby step of waiting at a standby position in the vicinity of the side portion of the base material, the plurality of nozzles being detached from the held base material;
A base material supplying step of supplying the base material held in the short direction and the predetermined height in units of the rectangular region;
A rectangular region fixing step for adsorbing and fixing the substrate of the supplied rectangular region;
An alignment information calculation step for obtaining an X position error in the longitudinal direction and a Y position error in the short direction of the rectangular area;
A distortion detection step of detecting distortion of the shape of a predetermined number of rectangular regions supplied first;
A mapping data creating step for creating mapping data for determining nozzles that eject ink to each of the plurality of recesses based on the detected distortion of the shape of the rectangular region;
Correcting the positions of the plurality of nozzles in the X direction with respect to the rectangular region based on the X position error;
After the positions of the plurality of nozzles with respect to the rectangular region are corrected, the plurality of nozzles are moved from the standby position in a first application scanning direction parallel to the lateral direction, And an ink ejection step of ejecting ink from a nozzle selected based on the mapping data to each of a plurality of recesses disposed in the suction-fixed rectangular region.
前記矩形領域の輪郭の形状を算出することによって、矩形領域の形状の歪みを検出する、請求項１に記載の塗布方法。 In the distortion detection step,
The coating method according to claim 1, wherein distortion of the shape of the rectangular area is detected by calculating a shape of the outline of the rectangular area.
矩形領域の四隅の角度を求め、
前記四隅の角度に基づき、矩形領域の輪郭の形状を算出する、請求項２に記載の塗布方法。 In the distortion detection step,
Find the angles of the four corners of the rectangular area,
The coating method according to claim 2, wherein the shape of the outline of the rectangular region is calculated based on the angles of the four corners.
矩形領域を複数のサブ領域に分割し、
前記複数のサブ領域それぞれの四隅の角度を求め、
前記四隅の角度に基づき、前記複数のサブ領域それぞれの輪郭の形状を算出し、
前記複数のサブ領域の輪郭の形状に基づき、矩形領域の輪郭の形状を算出する、請求項２に記載の塗布方法。 In the distortion detection step,
Divide the rectangular area into multiple sub-areas,
Find the angles of the four corners of each of the plurality of sub-regions,
Based on the angles of the four corners, calculate the shape of each of the plurality of sub-regions,
The coating method according to claim 2, wherein the contour shape of the rectangular region is calculated based on the contour shape of the plurality of sub-regions.
前記四隅の角度に基づき、矩形領域の各頂点の、前記長手方向におけるＸ方向ずれ量と、前記短手方向におけるＹ方向ずれ量とを求め、
前記Ｘ方向ずれ量及び前記Ｙ方向ずれ量に基づき、矩形領域の輪郭の形状を算出する、請求項３に記載の塗布方法。 In the distortion detection step,
Based on the angles of the four corners, determine the X direction displacement amount in the longitudinal direction and the Y direction displacement amount in the short direction of each vertex of the rectangular region,
The coating method according to claim 3, wherein a contour shape of a rectangular region is calculated based on the X-direction deviation amount and the Y-direction deviation amount.
前記サブ領域それぞれの四隅の角度に基づき、当該サブ領域の各頂点の、前記長手方向におけるＸ方向ずれ量と、前記短手方向におけるＹ方向ずれ量とを求め、
前記Ｘ方向ずれ量及び前記Ｙ方向ずれ量に基づき、当該サブ領域の輪郭の形状を算出する、請求項４に記載の塗布方法。 In the distortion detection step,
Based on the angles of the four corners of each of the sub-regions, determine the X-direction displacement amount in the longitudinal direction and the Y-direction displacement amount in the short direction of each vertex of the sub-region,
The coating method according to claim 4, wherein a contour shape of the sub-region is calculated based on the X-direction shift amount and the Y-direction shift amount.
矩形領域の、基材の中心軸に平行な方向に対する姿勢誤差を求める、請求項１に記載の塗布方法。 In the strain detection step,
The coating method according to claim 1, wherein a posture error of a rectangular region with respect to a direction parallel to the central axis of the substrate is obtained.
矩形領域の端部に位置する所定数の凹部の重心を求め、
前記所定数の重心の近似直線が、基材の中心軸に平行な方向に対してなす傾きを、矩形領域の四辺それぞれについて求め、
前記傾きに基づき、矩形領域の姿勢誤差を求める、請求項７に記載の塗布方法。 In the distortion detection step,
Find the center of gravity of a predetermined number of recesses located at the end of the rectangular area,
The approximate straight line of the predetermined number of centroids is determined for each of the four sides of the rectangular area with respect to a direction parallel to the central axis of the substrate,
The coating method according to claim 7, wherein an attitude error of the rectangular area is obtained based on the inclination.
前記平行誤差に基づき、前記矩形領域に対する前記複数のノズルの配列方向の傾きを補正する工程をさらに備える、請求項１に記載の塗布方法。 In the alignment information calculation step, further, a parallel error of the rectangular region with respect to the longitudinal direction is obtained,
The coating method according to claim 1, further comprising a step of correcting an inclination in an arrangement direction of the plurality of nozzles with respect to the rectangular region based on the parallel error.
前記インク吐出工程においては、前記複数のノズルを前記第２の塗布スキャン方向に移動させながらインクを塗布させることを特徴とする、請求項１３に記載の塗布方法。 In the alignment information calculation step, based on the parallel error, an inclination in the arrangement direction of the plurality of nozzles with respect to the rectangular area is calculated, and only the calculated inclination is corrected with respect to the short direction. 2 to find the application scan direction,
14. The coating method according to claim 13, wherein in the ink ejection step, ink is applied while moving the plurality of nozzles in the second application scan direction.
前記撮影されたテストパターンを検査する工程と、
前記撮影されたテストパターンの検査結果をフィードバックする工程と、
前記検査結果を判断する工程とを備える、請求項１６に記載の塗布方法。 Photographing the applied test pattern;
Inspecting the photographed test pattern;
Feeding back the inspection result of the photographed test pattern;
The coating method according to claim 16, further comprising a step of determining the inspection result.
前記基材をその長手方向に所定の張力を掛けて所定の高さで保持すると共に、当該長手方向に垂直な短手方向に位置決めする第１の保持手段と、
前記位置決めされた基材を前記所定の高さに位置する面で受け止める第２の保持手段と、
前記複数のノズルを前記保持された基材から外れた、当該基材の側部近傍の待機位置で待機させる待機手段と、
前記短手方向および前記所定の高さに保持された前記基材を、前記矩形領域の単位で供給する基材供給手段と、
前記供給された矩形領域の基材を吸着固定する矩形領域固定手段と、
前記矩形領域の、前記長手方向におけるＸ位置誤差と、前記短手方向におけるＹ位置誤差とを求めるアライメント情報算出手段と、
最初に供給される所定数の矩形領域の形状の歪みを検出する歪み検出手段と、
前記検出された、矩形領域の形状の歪みに基づいて、前記複数の凹部のそれぞれに対してインクを吐出するノズルを決定するマッピングデータを作成するマッピングデータ作成手段と、
前記Ｘ位置誤差に基づき、前記矩形領域に対する前記複数のノズルのＸ方向の位置を補正するＸ位置補正手段と、
前記複数のノズルの前記矩形領域に対する位置が補正された後に、前記複数のノズルを前記待機位置から前記短手方向に平行な第１の塗布スキャン方向に移動させながら、当該複数のノズルの中の前記マッピングデータに基づいて選択されたノズルから、前記吸着固定された矩形領域に配設されている複数の凹部のそれぞれにインクを吐出させるインク吐出手段とを備える塗布装置。 Ri by the ink jet method using a plurality of nozzles in each of the plurality of recesses are arranged in a grid pattern into a plurality of rectangular regions in the longitudinal direction of the rectangular sheet substrate are continuously formed at predetermined intervals a coating apparatus for applying a Lee ink,
Holding the substrate at a predetermined height by applying a predetermined tension in the longitudinal direction, and positioning in a short direction perpendicular to the longitudinal direction;
Second holding means for receiving the positioned substrate at a surface located at the predetermined height;
Standby means for waiting the plurality of nozzles at a standby position in the vicinity of the side portion of the base material, which is detached from the held base material;
Base material supply means for supplying the base material held in the short direction and the predetermined height in units of the rectangular area;
A rectangular area fixing means for adsorbing and fixing the substrate of the supplied rectangular area;
Alignment information calculating means for obtaining an X position error in the longitudinal direction and a Y position error in the short direction of the rectangular area;
Distortion detecting means for detecting distortion of the shape of a predetermined number of rectangular regions supplied first;
Mapping data creating means for creating mapping data for determining nozzles that eject ink to each of the plurality of recesses based on the detected distortion of the shape of the rectangular region;
X position correcting means for correcting the positions of the plurality of nozzles in the X direction with respect to the rectangular region based on the X position error;
After the positions of the plurality of nozzles with respect to the rectangular region are corrected, the plurality of nozzles are moved from the standby position in a first application scanning direction parallel to the lateral direction, A coating apparatus comprising: an ink ejection unit configured to eject ink from a nozzle selected based on the mapping data to each of a plurality of concave portions disposed in the suction-fixed rectangular region.
前記矩形領域の輪郭の形状を算出することによって、矩形領域の形状の歪みを検出する、請求項２０に記載の塗布装置。 The strain detecting means includes
21. The coating apparatus according to claim 20, wherein distortion of the shape of the rectangular area is detected by calculating a shape of the outline of the rectangular area.
矩形領域の四隅の角度を求め、
前記四隅の角度に基づき、矩形領域の輪郭の形状を算出する、請求項２１に記載の塗布装置。 The strain detecting means includes
Find the angles of the four corners of the rectangular area,
The coating apparatus according to claim 21, wherein the shape of the outline of the rectangular region is calculated based on the angles of the four corners.
矩形領域を複数のサブ領域に分割し、
前記複数のサブ領域それぞれの四隅の角度を求め、
前記四隅の角度に基づき、前記複数のサブ領域それぞれの輪郭の形状を算出し、
前記複数のサブ領域の輪郭の形状に基づき、矩形領域（Ｓ）の輪郭の形状を算出する、請求項２１に記載の塗布装置。 The strain detecting means includes
Divide the rectangular area into multiple sub-areas,
Find the angles of the four corners of each of the plurality of sub-regions,
Based on the angles of the four corners, calculate the shape of each of the plurality of sub-regions,
The coating apparatus according to claim 21, wherein a contour shape of the rectangular region (S) is calculated based on a contour shape of the plurality of sub-regions.
前記四隅の角度に基づき、矩形領域の各頂点の、前記長手方向におけるＸ方向ずれ量と、前記短手方向におけるＹ方向ずれ量とを求め、
前記Ｘ方向ずれ量及び前記Ｙ方向ずれ量に基づき、矩形領域の輪郭の形状を算出する、請求項２２に記載の塗布装置。 The strain detecting means includes
Based on the angles of the four corners, determine the X direction displacement amount in the longitudinal direction and the Y direction displacement amount in the short direction of each vertex of the rectangular region,
The coating apparatus according to claim 22, wherein a contour shape of a rectangular region is calculated based on the X-direction deviation amount and the Y-direction deviation amount.
前記サブ領域それぞれの四隅の角度に基づき、当該サブ領域の各頂点の、前記長手方向におけるＸ方向ずれ量と、前記短手方向におけるＹ方向ずれ量とを求め、
前記Ｘ方向ずれ量及び前記Ｙ方向ずれ量に基づき、当該サブ領域の輪郭の形状を算出する、請求項２３に記載の塗布装置。 The strain detecting means includes
Based on the angles of the four corners of each of the sub-regions, determine the X-direction displacement amount in the longitudinal direction and the Y-direction displacement amount in the short direction of each vertex of the sub-region,
The coating apparatus according to claim 23, wherein a shape of a contour of the sub-region is calculated based on the X-direction deviation amount and the Y-direction deviation amount.
矩形領域の、基材の中心軸に平行な方向に対する姿勢誤差を求める、請求項２０に記載の塗布装置。 The strain detection means further includes
21. The coating apparatus according to claim 20, wherein a posture error of a rectangular region with respect to a direction parallel to the central axis of the substrate is obtained.
矩形領域の端部に位置する所定数の凹部の重心を求め、
前記所定数の重心の近似直線が、基材の中心軸に平行な方向に対してなす傾きを、矩形領域の四辺それぞれについて求め、
前記傾きに基づき、矩形領域の姿勢誤差を求める、請求項２６に記載の塗布装置。 The strain detecting means includes
Find the center of gravity of a predetermined number of recesses located at the end of the rectangular area,
The approximate straight line of the predetermined number of centroids is determined for each of the four sides of the rectangular area with respect to a direction parallel to the central axis of the substrate,
27. The coating apparatus according to claim 26, wherein a posture error of the rectangular area is obtained based on the inclination.
前記平行誤差に基づき、前記矩形領域に対する前記複数のノズルの配列方向の傾きを補正するθ補正手段をさらに備える、請求項２０に記載の塗布装置。 The alignment information calculation means further obtains a parallel error of the rectangular area with respect to the longitudinal direction,
21. The coating apparatus according to claim 20, further comprising θ correction means that corrects an inclination in an arrangement direction of the plurality of nozzles with respect to the rectangular region based on the parallel error.
前記インク吐出手段は、前記複数のノズルを前記第２の塗布スキャン方向に移動させながらインクを塗布させることを特徴とする、請求項３２に記載の塗布装置。 The alignment information calculation means further calculates an inclination of the arrangement direction of the plurality of nozzles with respect to the rectangular area based on the parallel error, and corrects only the calculated inclination with respect to the short side direction. Find the application scan direction of
The coating apparatus according to claim 32, wherein the ink ejection unit applies ink while moving the plurality of nozzles in the second application scan direction.
前記撮影されたテストパターンの検査結果をフィードバックする手段と、
前記検査結果を判断する手段とを備える、請求項３６に記載の塗布装置。 Means for inspecting the photographed test pattern;
Means for feeding back the inspection result of the photographed test pattern;
37. The coating apparatus according to claim 36, comprising: means for determining the inspection result.
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| JP2006088091A (en) * | 2004-09-27 | 2006-04-06 | Seiko Epson Corp | Drawing method for liquefied body, drawing apparatus for liquefied body, production method for electrooptical apparatus, electrooptical apparatus, driving method for electrooptical apparatus and electronic equipment |
| JP4042737B2 (en) * | 2004-10-27 | 2008-02-06 | セイコーエプソン株式会社 | Pattern forming system |
| JP5606258B2 (en) * | 2010-10-06 | 2014-10-15 | 東レエンジニアリング株式会社 | Coating method and coating apparatus |
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2010
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