JP2012114358A5 - - Google Patents

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Publication number
JP2012114358A5
JP2012114358A5 JP2010263906A JP2010263906A JP2012114358A5 JP 2012114358 A5 JP2012114358 A5 JP 2012114358A5 JP 2010263906 A JP2010263906 A JP 2010263906A JP 2010263906 A JP2010263906 A JP 2010263906A JP 2012114358 A5 JP2012114358 A5 JP 2012114358A5
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JP
Japan
Prior art keywords
light
coherent light
exposure apparatus
optical element
modulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010263906A
Other languages
English (en)
Japanese (ja)
Other versions
JP5736746B2 (ja
JP2012114358A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010263906A priority Critical patent/JP5736746B2/ja
Priority claimed from JP2010263906A external-priority patent/JP5736746B2/ja
Priority to EP11843776.3A priority patent/EP2645404B1/en
Priority to PCT/JP2011/077216 priority patent/WO2012070651A1/ja
Priority to US13/989,574 priority patent/US20130250269A1/en
Publication of JP2012114358A publication Critical patent/JP2012114358A/ja
Publication of JP2012114358A5 publication Critical patent/JP2012114358A5/ja
Application granted granted Critical
Publication of JP5736746B2 publication Critical patent/JP5736746B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010263906A 2010-11-26 2010-11-26 露光装置 Active JP5736746B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010263906A JP5736746B2 (ja) 2010-11-26 2010-11-26 露光装置
EP11843776.3A EP2645404B1 (en) 2010-11-26 2011-11-25 Exposure apparatus
PCT/JP2011/077216 WO2012070651A1 (ja) 2010-11-26 2011-11-25 露光装置
US13/989,574 US20130250269A1 (en) 2010-11-26 2011-11-25 Exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010263906A JP5736746B2 (ja) 2010-11-26 2010-11-26 露光装置

Publications (3)

Publication Number Publication Date
JP2012114358A JP2012114358A (ja) 2012-06-14
JP2012114358A5 true JP2012114358A5 (enExample) 2013-11-14
JP5736746B2 JP5736746B2 (ja) 2015-06-17

Family

ID=46145988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010263906A Active JP5736746B2 (ja) 2010-11-26 2010-11-26 露光装置

Country Status (4)

Country Link
US (1) US20130250269A1 (enExample)
EP (1) EP2645404B1 (enExample)
JP (1) JP5736746B2 (enExample)
WO (1) WO2012070651A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2909672A1 (en) * 2012-10-17 2015-08-26 Optotune AG Speckle free laser projection
CN105556371B (zh) * 2013-01-21 2018-11-23 英特尔公司 减弱散斑的方法
JP6327035B2 (ja) * 2013-08-12 2018-05-23 大日本印刷株式会社 照明装置、投射装置、レンズアレイおよび光学モジュール
US9367035B2 (en) * 2014-01-13 2016-06-14 Raytheon Company Digital infrared holograms
DE102015115064A1 (de) * 2015-09-08 2017-03-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beleuchtungseinheit und Vorrichtung zur lithografischen Belichtung
TWI881068B (zh) 2020-03-11 2025-04-21 日商奈米系統解決股份有限公司 曝光裝置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2536023B2 (ja) * 1988-02-29 1996-09-18 株式会社ニコン 露光装置、及び露光方法
EP0479490A3 (en) * 1990-10-02 1992-08-12 Physical Optics Corporation Volume holographic diffuser
US5313479A (en) 1992-07-29 1994-05-17 Texas Instruments Incorporated Speckle-free display system using coherent light
JP3387073B2 (ja) * 1993-11-19 2003-03-17 株式会社ニコン 走査型露光装置
US5684566A (en) * 1995-05-24 1997-11-04 Svg Lithography Systems, Inc. Illumination system and method employing a deformable mirror and diffractive optical elements
JP2000277421A (ja) * 1999-03-26 2000-10-06 Nikon Corp 照明装置
JP4214547B2 (ja) * 2002-08-29 2009-01-28 株式会社オーク製作所 ビーム成形光学素子およびそれを備えたパターン描画装置
JP4938069B2 (ja) * 2004-03-31 2012-05-23 日立ビアメカニクス株式会社 パターン露光方法およびパターン露光装置
US7643194B2 (en) * 2006-09-12 2010-01-05 Panasonic Corporation Image forming apparatus
JP2008085266A (ja) * 2006-09-29 2008-04-10 Nikon Corp 露光方法及び装置、並びにデバイス製造方法
WO2008041559A1 (en) * 2006-10-02 2008-04-10 Panasonic Corporation Flat panel lighting system and liquid crystal display device using the same
WO2008114502A1 (ja) * 2007-03-19 2008-09-25 Panasonic Corporation レーザ照明装置及び画像表示装置
EP1976303A1 (en) * 2007-03-31 2008-10-01 Sony Deutschland Gmbh Image generating apparatus
JP5417897B2 (ja) * 2009-02-27 2014-02-19 大日本印刷株式会社 投射型映像表示装置および映像表示方法

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