JP2012109472A - プラズマ処理方法 - Google Patents
プラズマ処理方法 Download PDFInfo
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- JP2012109472A JP2012109472A JP2010258466A JP2010258466A JP2012109472A JP 2012109472 A JP2012109472 A JP 2012109472A JP 2010258466 A JP2010258466 A JP 2010258466A JP 2010258466 A JP2010258466 A JP 2010258466A JP 2012109472 A JP2012109472 A JP 2012109472A
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- 238000003672 processing method Methods 0.000 title claims abstract description 26
- 239000000463 material Substances 0.000 claims abstract description 55
- 238000005530 etching Methods 0.000 claims abstract description 28
- 239000000460 chlorine Substances 0.000 claims abstract description 12
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 12
- 229910052801 chlorine Inorganic materials 0.000 claims abstract description 10
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000011737 fluorine Substances 0.000 claims abstract description 9
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims abstract description 7
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000002344 surface layer Substances 0.000 claims description 7
- 238000001020 plasma etching Methods 0.000 claims description 6
- 230000009467 reduction Effects 0.000 abstract description 2
- 229910052756 noble gas Inorganic materials 0.000 abstract 1
- 230000001629 suppression Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 53
- 235000012431 wafers Nutrition 0.000 description 51
- 239000010419 fine particle Substances 0.000 description 45
- 239000007789 gas Substances 0.000 description 43
- 238000004140 cleaning Methods 0.000 description 38
- 238000000034 method Methods 0.000 description 20
- 239000000126 substance Substances 0.000 description 13
- 230000008569 process Effects 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 10
- 230000004075 alteration Effects 0.000 description 6
- 125000004429 atom Chemical group 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 230000009257 reactivity Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical group [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 238000005660 chlorination reaction Methods 0.000 description 2
- 238000003682 fluorination reaction Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000002294 plasma sputter deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000011573 trace mineral Substances 0.000 description 1
- 235000013619 trace mineral Nutrition 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32816—Pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32816—Pressure
- H01J37/32834—Exhausting
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
【解決手段】本発明は処理室内壁面を構成する材料、または処理室内パーツの材料がイットリアからなるプラズマ処理装置を用いたプラズマ処理方法において、前記処理室内に試料を配置し、前記試料をエッチングする工程と、前記エッチング工程により前記処理室内に堆積した堆積物を、フッ素または塩素を含むガスを用いたプラズマにより除去する堆積物除去工程と、前記堆積物除去工程後の前記処理室内を、希ガスのプラズマに曝す工程とを有することを特徴とするプラズマ処理方法である。
【選択図】 図4
Description
2 天板
3 内壁
4 隔壁板
5 ウエハ搬送用ゲート
6 サセプタ
7 バッフル板
8 圧力制御バルブ
9 試料台
10 試料台カバー
Claims (5)
- 処理室内壁面を構成する材料、または処理室内パーツの材料がイットリアからなるプラズマ処理装置を用いたプラズマ処理方法において、
前記処理室内に試料を配置し、前記試料をエッチングする工程と、
前記エッチング工程により前記処理室内に堆積した堆積物を、フッ素または塩素を含むガスを用いたプラズマにより除去する堆積物除去工程と、
前記堆積物除去工程後の前記処理室内を、希ガスのプラズマに曝す工程とを有することを特徴とするプラズマ処理方法。 - 処理室内壁面を構成する材料、または処理室内パーツの材料がイットリアからなるプラズマ処理装置を用いたプラズマ処理方法において、
前記処理室内に試料を配置し、前記試料をエッチングする工程と、
前記エッチング工程により前記処理室内に堆積した堆積物を、フッ素または塩素を含むガスを用いたプラズマにより除去する堆積物除去工程と、
前記堆積物除去工程後の前記処理室の表面層を、希ガスを用いたプラズマにより除去する表面層除去工程とを有することを特徴とするプラズマ処理方法。 - 請求項2記載のプラズマ処理方法において、
前記表面層除去工程は、前記堆積物除去工程の後であって、前記堆積物除去工程の際に変質した前記処理室の表面層を、希ガスを用いたプラズマにより除去することを特徴とするプラズマ処理方法。 - 請求項2記載のプラズマ処理方法において、
前記表面層除去工程は、前記堆積物除去工程の後であって、次のエッチングする工程の前に、前記堆積物除去工程の際に変質した前記処理室の表面層を、希ガスを用いたプラズマにより除去することを特徴とするプラズマ処理方法。 - 内壁面がイットリアで構成された処理室内または処理室内バーツがイットリアで構成された処理室内に試料を配置して該試料をプラズマ処理するプラズマ処理方法において、
前記試料が複数膜からなる積層膜を有し、前記試料の所定の膜までプラズマエッチング処理した後に、前記処理室内に希ガスを供給し、前記処理室内を前記希ガスのプラズマに晒し、その後、残余膜をプラズマエッチングすることを特徴とするプラズマ処理方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010258466A JP2012109472A (ja) | 2010-11-19 | 2010-11-19 | プラズマ処理方法 |
TW099144759A TWI445082B (zh) | 2010-11-19 | 2010-12-20 | Plasma processing method |
KR1020110006328A KR101190804B1 (ko) | 2010-11-19 | 2011-01-21 | 플라즈마처리방법 |
US13/011,070 US8486291B2 (en) | 2010-11-19 | 2011-01-21 | Plasma processing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010258466A JP2012109472A (ja) | 2010-11-19 | 2010-11-19 | プラズマ処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012109472A true JP2012109472A (ja) | 2012-06-07 |
JP2012109472A5 JP2012109472A5 (ja) | 2013-11-21 |
Family
ID=46063349
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010258466A Pending JP2012109472A (ja) | 2010-11-19 | 2010-11-19 | プラズマ処理方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8486291B2 (ja) |
JP (1) | JP2012109472A (ja) |
KR (1) | KR101190804B1 (ja) |
TW (1) | TWI445082B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9330891B2 (en) | 2013-10-31 | 2016-05-03 | Tokyo Electron Limited | Plasma processing method and plasma processing apparatus |
KR20210041512A (ko) | 2019-10-07 | 2021-04-15 | 도쿄엘렉트론가부시키가이샤 | 온도 계측 시스템 및 온도 계측 방법 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10233388A (ja) * | 1997-02-20 | 1998-09-02 | Hitachi Ltd | プラズマクリーニング方法 |
JP2006086377A (ja) * | 2004-09-16 | 2006-03-30 | Hitachi High-Technologies Corp | プラズマ処理方法 |
JP2007036139A (ja) * | 2005-07-29 | 2007-02-08 | Sharp Corp | プラズマ処理装置およびプラズマクリーニング終点検出方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3594759B2 (ja) | 1997-03-19 | 2004-12-02 | 株式会社日立製作所 | プラズマ処理方法 |
US6379575B1 (en) * | 1997-10-21 | 2002-04-30 | Applied Materials, Inc. | Treatment of etching chambers using activated cleaning gas |
KR100755804B1 (ko) | 2005-12-27 | 2007-09-05 | 주식회사 아이피에스 | 알루미늄 함유 금속막 및 알루미늄 함유 금속 질화막을증착하는 박막 증착 장치의 세정방법 |
JP2009188257A (ja) | 2008-02-07 | 2009-08-20 | Tokyo Electron Ltd | プラズマエッチング方法及びプラズマエッチング装置並びに記憶媒体 |
JP5064319B2 (ja) * | 2008-07-04 | 2012-10-31 | 東京エレクトロン株式会社 | プラズマエッチング方法、制御プログラム及びコンピュータ記憶媒体 |
JP2010153508A (ja) * | 2008-12-24 | 2010-07-08 | Hitachi High-Technologies Corp | 試料のエッチング処理方法 |
-
2010
- 2010-11-19 JP JP2010258466A patent/JP2012109472A/ja active Pending
- 2010-12-20 TW TW099144759A patent/TWI445082B/zh not_active IP Right Cessation
-
2011
- 2011-01-21 KR KR1020110006328A patent/KR101190804B1/ko not_active IP Right Cessation
- 2011-01-21 US US13/011,070 patent/US8486291B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10233388A (ja) * | 1997-02-20 | 1998-09-02 | Hitachi Ltd | プラズマクリーニング方法 |
JP2006086377A (ja) * | 2004-09-16 | 2006-03-30 | Hitachi High-Technologies Corp | プラズマ処理方法 |
JP2007036139A (ja) * | 2005-07-29 | 2007-02-08 | Sharp Corp | プラズマ処理装置およびプラズマクリーニング終点検出方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9330891B2 (en) | 2013-10-31 | 2016-05-03 | Tokyo Electron Limited | Plasma processing method and plasma processing apparatus |
KR20210041512A (ko) | 2019-10-07 | 2021-04-15 | 도쿄엘렉트론가부시키가이샤 | 온도 계측 시스템 및 온도 계측 방법 |
US11668608B2 (en) | 2019-10-07 | 2023-06-06 | Tokyo Electron Limited | Temperature measurement system and temperature measurement method |
Also Published As
Publication number | Publication date |
---|---|
US8486291B2 (en) | 2013-07-16 |
US20120125890A1 (en) | 2012-05-24 |
KR20120054498A (ko) | 2012-05-30 |
TWI445082B (zh) | 2014-07-11 |
TW201222658A (en) | 2012-06-01 |
KR101190804B1 (ko) | 2012-10-12 |
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