JP2012098577A - 液晶装置および投射型表示装置 - Google Patents
液晶装置および投射型表示装置 Download PDFInfo
- Publication number
- JP2012098577A JP2012098577A JP2010247144A JP2010247144A JP2012098577A JP 2012098577 A JP2012098577 A JP 2012098577A JP 2010247144 A JP2010247144 A JP 2010247144A JP 2010247144 A JP2010247144 A JP 2010247144A JP 2012098577 A JP2012098577 A JP 2012098577A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- electrode
- inter
- liquid crystal
- conduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 151
- 239000000758 substrate Substances 0.000 claims abstract description 419
- 239000004020 conductor Substances 0.000 claims abstract description 35
- 239000000463 material Substances 0.000 claims description 21
- 230000002093 peripheral effect Effects 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 11
- 229910044991 metal oxide Inorganic materials 0.000 claims description 5
- 150000004706 metal oxides Chemical class 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 abstract description 35
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 35
- 238000006243 chemical reaction Methods 0.000 abstract description 23
- 238000006056 electrooxidation reaction Methods 0.000 abstract description 16
- 238000000034 method Methods 0.000 abstract description 14
- 239000010408 film Substances 0.000 description 194
- 239000010410 layer Substances 0.000 description 55
- 239000011229 interlayer Substances 0.000 description 24
- 239000002245 particle Substances 0.000 description 18
- 239000003990 capacitor Substances 0.000 description 16
- 238000010586 diagram Methods 0.000 description 15
- 239000000243 solution Substances 0.000 description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 14
- 239000003566 sealing material Substances 0.000 description 13
- 229910052814 silicon oxide Inorganic materials 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000008151 electrolyte solution Substances 0.000 description 8
- 230000010287 polarization Effects 0.000 description 7
- 238000001039 wet etching Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 239000003792 electrolyte Substances 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 229910021332 silicide Inorganic materials 0.000 description 4
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 239000004988 Nematic liquid crystal Substances 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000000565 sealant Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13458—Terminal pads
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133388—Constructional arrangements; Manufacturing methods with constructional differences between the display region and the peripheral region
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/121—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode common or background
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010247144A JP2012098577A (ja) | 2010-11-04 | 2010-11-04 | 液晶装置および投射型表示装置 |
| US13/252,336 US8582069B2 (en) | 2010-11-04 | 2011-10-04 | Liquid crystal device and projection-type display apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010247144A JP2012098577A (ja) | 2010-11-04 | 2010-11-04 | 液晶装置および投射型表示装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012098577A true JP2012098577A (ja) | 2012-05-24 |
| JP2012098577A5 JP2012098577A5 (enExample) | 2013-12-05 |
Family
ID=46019318
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010247144A Withdrawn JP2012098577A (ja) | 2010-11-04 | 2010-11-04 | 液晶装置および投射型表示装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US8582069B2 (enExample) |
| JP (1) | JP2012098577A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014115499A1 (ja) * | 2013-01-22 | 2014-07-31 | セイコーエプソン株式会社 | 電気光学装置、電気光学装置の製造方法、及び電子機器 |
| WO2016151860A1 (ja) * | 2015-03-26 | 2016-09-29 | 堺ディスプレイプロダクト株式会社 | 液晶パネルのコンタクトホール形成方法、液晶パネル及び液晶表示装置 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103246092B (zh) * | 2013-04-28 | 2015-08-19 | 京东方科技集团股份有限公司 | 阵列基板及显示装置 |
| KR20150056110A (ko) * | 2013-11-14 | 2015-05-26 | 삼성디스플레이 주식회사 | 도전성 스페이서를 갖는 액정표시장치 |
| CN104280954B (zh) * | 2014-08-06 | 2017-02-08 | 深圳市华星光电技术有限公司 | 一种液晶显示器及其液晶显示器下基板组件 |
| CN104714344A (zh) * | 2015-03-31 | 2015-06-17 | 合肥京东方光电科技有限公司 | 蓝相液晶显示装置及其制作方法 |
| CN110098199B (zh) * | 2019-05-05 | 2022-04-05 | 深圳市华星光电半导体显示技术有限公司 | 显示面板及显示装置 |
| JP2021001966A (ja) * | 2019-06-21 | 2021-01-07 | セイコーエプソン株式会社 | 電気光学装置、及び電子機器 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02280374A (ja) | 1989-04-21 | 1990-11-16 | Toshiba Corp | 固体撮像装置の電極接続方法 |
| JP3086606B2 (ja) * | 1994-11-14 | 2000-09-11 | シャープ株式会社 | 液晶表示装置 |
| AU1940297A (en) | 1996-03-14 | 1997-10-01 | Citizen Watch Co. Ltd. | Liquid crystal display device |
| KR100188110B1 (ko) * | 1996-04-10 | 1999-06-01 | 김광호 | 액정 표시 장치 |
| JPH10241861A (ja) | 1997-02-21 | 1998-09-11 | Matsushita Electric Ind Co Ltd | 有機発光デバイスと表示装置 |
| US5953094A (en) * | 1997-04-04 | 1999-09-14 | Sanyo Electric Co., Ltd. | Liquid crystal display device |
| JP3161528B2 (ja) * | 1998-09-07 | 2001-04-25 | 日本電気株式会社 | 液晶表示パネル |
| US6335779B1 (en) * | 1999-01-27 | 2002-01-01 | Mistubishi Denki Kaubshiki Kaisha | Liquid crystal display apparatus and method for producing TFT using therefor |
| JP3697173B2 (ja) * | 2000-05-25 | 2005-09-21 | セイコーエプソン株式会社 | 液晶装置および電子機器 |
| JP3702859B2 (ja) * | 2001-04-16 | 2005-10-05 | セイコーエプソン株式会社 | 電気光学装置及び電子機器 |
| JP4050709B2 (ja) * | 2003-04-01 | 2008-02-20 | セイコーエプソン株式会社 | 電気光学装置及びこの電気光学装置を備えた電子機器 |
| US7768590B2 (en) * | 2005-04-26 | 2010-08-03 | Sharp Kabushiki Kaisha | Production method of active matrix substrate, active matrix substrate, and liquid crystal display device |
| US7898632B2 (en) * | 2005-12-28 | 2011-03-01 | Seiko Epson Corporation | Electro-optical device, manufacturing method thereof, and electronic apparatus |
| JP2007304384A (ja) | 2006-05-12 | 2007-11-22 | Epson Imaging Devices Corp | 液晶装置、液晶装置の製造方法、および電子機器 |
| KR101298693B1 (ko) * | 2006-07-19 | 2013-08-21 | 삼성디스플레이 주식회사 | 액정표시패널 및 이의 제조 방법 |
-
2010
- 2010-11-04 JP JP2010247144A patent/JP2012098577A/ja not_active Withdrawn
-
2011
- 2011-10-04 US US13/252,336 patent/US8582069B2/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014115499A1 (ja) * | 2013-01-22 | 2014-07-31 | セイコーエプソン株式会社 | 電気光学装置、電気光学装置の製造方法、及び電子機器 |
| JP2014142384A (ja) * | 2013-01-22 | 2014-08-07 | Seiko Epson Corp | 電気光学装置、電気光学装置の製造方法、及び電子機器 |
| US9645458B2 (en) | 2013-01-22 | 2017-05-09 | Seiko Epson Corporation | Electrooptical device, method of manufacturing electrooptical device, and electronic apparatus |
| WO2016151860A1 (ja) * | 2015-03-26 | 2016-09-29 | 堺ディスプレイプロダクト株式会社 | 液晶パネルのコンタクトホール形成方法、液晶パネル及び液晶表示装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US8582069B2 (en) | 2013-11-12 |
| US20120113333A1 (en) | 2012-05-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102445794B (zh) | 液晶装置以及电子设备 | |
| JP5849489B2 (ja) | 電気光学装置、投射型表示装置、電子機器、および電気光学装置の製造方法 | |
| US8953129B2 (en) | Liquid crystal device and projection-type display apparatus | |
| JP2012098577A (ja) | 液晶装置および投射型表示装置 | |
| JP3199691U (ja) | 電気光学装置および電子機器 | |
| US8817220B2 (en) | Liquid crystal device and projection-type display device | |
| JP5736656B2 (ja) | 液晶装置および電子機器 | |
| JP2017009887A (ja) | 電気光学装置および電子機器 | |
| JP5810589B2 (ja) | 電気光学装置、投射型表示装置、および電子機器 | |
| JP2012083517A (ja) | 液晶装置および投射型表示装置 | |
| JP2009276588A (ja) | 電気光学装置および投射型表示装置 | |
| JP3199692U (ja) | 電気光学装置および電子機器 | |
| JP2012185422A (ja) | 液晶装置、液晶装置の製造方法、および投射型表示装置 | |
| JP6311811B2 (ja) | 電気光学装置、投射型表示装置及び電子機器 | |
| JP6107919B2 (ja) | 電気光学装置、電子機器 | |
| JP2012208294A (ja) | 電気光学装置の製造方法、電気光学装置、投射型表示装置および電子機器 | |
| JP2012198386A (ja) | 電気光学装置、投射型表示装置および電子機器 | |
| JP2012088417A (ja) | 電気光学装置の製造方法および電気光学装置 | |
| JP5691678B2 (ja) | 電気光学装置、投射型表示装置 | |
| JP5332841B2 (ja) | 電気光学装置および電子機器 | |
| JP2012198255A (ja) | 基板、および電気光学装置の製造方法 | |
| JP2013109258A (ja) | 電気光学装置および電子機器 | |
| JP2012185423A (ja) | 電気光学装置および投射型表示装置 | |
| JP2012123141A (ja) | 電気光学装置、電気光学装置の製造方法、および投射型表示装置 | |
| JP2013025075A (ja) | 電気光学装置、投射型表示装置および電子機器 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131018 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20131018 |
|
| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20131216 |