JP2012085085A5 - - Google Patents
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- Publication number
- JP2012085085A5 JP2012085085A5 JP2010229321A JP2010229321A JP2012085085A5 JP 2012085085 A5 JP2012085085 A5 JP 2012085085A5 JP 2010229321 A JP2010229321 A JP 2010229321A JP 2010229321 A JP2010229321 A JP 2010229321A JP 2012085085 A5 JP2012085085 A5 JP 2012085085A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- semiconductor layer
- substrate
- patterning
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 13
- 239000000758 substrate Substances 0.000 claims 11
- 238000000059 patterning Methods 0.000 claims 8
- 238000004519 manufacturing process Methods 0.000 claims 5
- 239000012535 impurity Substances 0.000 claims 4
- 238000000034 method Methods 0.000 claims 4
- 238000001312 dry etching Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010229321A JP5601463B2 (ja) | 2010-10-12 | 2010-10-12 | Ｍｅｍｓ振動子、発振器、およびｍｅｍｓ振動子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010229321A JP5601463B2 (ja) | 2010-10-12 | 2010-10-12 | Ｍｅｍｓ振動子、発振器、およびｍｅｍｓ振動子の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012085085A JP2012085085A (ja) | 2012-04-26 |
| JP2012085085A5 true JP2012085085A5 (enExample) | 2013-11-07 |
| JP5601463B2 JP5601463B2 (ja) | 2014-10-08 |
Family
ID=46243486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010229321A Expired - Fee Related JP5601463B2 (ja) | 2010-10-12 | 2010-10-12 | Ｍｅｍｓ振動子、発振器、およびｍｅｍｓ振動子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5601463B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014116707A (ja) * | 2012-12-07 | 2014-06-26 | Seiko Epson Corp | 振動子の製造方法 |
| JP2014170997A (ja) | 2013-03-01 | 2014-09-18 | Seiko Epson Corp | Ｍｅｍｓ振動子、ｍｅｍｓ振動子の製造方法、電子機器、及び移動体 |
| JP2015080012A (ja) | 2013-10-15 | 2015-04-23 | セイコーエプソン株式会社 | 振動子、発振器、電子機器及び移動体 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03263833A (ja) * | 1990-03-14 | 1991-11-25 | Mitsubishi Electric Corp | テーパエツチング方法 |
| EP1777816A1 (en) * | 2005-10-18 | 2007-04-25 | Seiko Epson Corporation | MEMS resonator and method of enhancing an output signal current from a MEMS resonator |
| JP2010166201A (ja) * | 2009-01-14 | 2010-07-29 | Seiko Epson Corp | Ｍｅｍｓデバイス及びその製造方法 |
| JP5446365B2 (ja) * | 2009-03-25 | 2014-03-19 | セイコーエプソン株式会社 | 機能素子の寸法の測定方法、機能素子付き基板の製造方法、機能素子付き基板および電子装置 |
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2010
- 2010-10-12 JP JP2010229321A patent/JP5601463B2/ja not_active Expired - Fee Related