JP2012046408A - Sealing glass - Google Patents

Sealing glass Download PDF

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JP2012046408A
JP2012046408A JP2011134113A JP2011134113A JP2012046408A JP 2012046408 A JP2012046408 A JP 2012046408A JP 2011134113 A JP2011134113 A JP 2011134113A JP 2011134113 A JP2011134113 A JP 2011134113A JP 2012046408 A JP2012046408 A JP 2012046408A
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JP5831839B2 (en
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Taketami Kikutani
武民 菊谷
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Nippon Electric Glass Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a sealing glass composed of a SnO-PO-based glass and capable of well sealing a metallic material to be sealed in a moderate temperature region of 450 to 800°C even in a non-oxidative atmosphere (reduced-pressure atmosphere, inert atmosphere or the like), to thereby secure the air tightness of a sealed portion over a long period.SOLUTION: The sealing glass is one for sealing a metallic material to be sealed, and includes, as a glass composition in mol%, 15 to 30% (excluding 30%) of SnO, 20 to 40% of PO, 5 to 20% (excluding 5%) of WO, and 3.4 to 30% (excluding 30%) of ZnO, wherein the molecular ratio of SnO/ZnO is ≤4.5.

Description

本発明は、封止用ガラスに関し、特に450〜800℃の中温度域で金属製被封止物を良好に封止可能な封止用ガラスに関する。なお、以下の説明において、「封止」は部材同士を気密接合する「封着」の概念を含み、また「封止用ガラス」は「封着用ガラス」の概念を含むものとする。   The present invention relates to a glass for sealing, and particularly relates to a glass for sealing capable of satisfactorily sealing a metal object in an intermediate temperature range of 450 to 800 ° C. In the following description, “sealing” includes the concept of “sealing” in which members are hermetically bonded, and “sealing glass” includes the concept of “sealing glass”.

封止用ガラスとして、従来から低融点の封止用ガラスが使用されており、鉛を多量に含むPbO−B系ガラスが広く使用されている(例えば、特許文献1〜3参照)。 Conventionally, low-melting-point sealing glass has been used as sealing glass, and PbO—B 2 O 3 -based glass containing a large amount of lead is widely used (see, for example, Patent Documents 1 to 3). .

一方、低融点の封止用ガラスとして、鉛を含有しないSnO−P系ガラスが提案されている(例えば、特許文献4〜8参照)。 On the other hand, SnO—P 2 O 5 -based glass not containing lead has been proposed as a low-melting glass for sealing (see, for example, Patent Documents 4 to 8).

実公平6−16897号公報Japanese Utility Model Publication No. 6-16897 特開昭62−209712号公報JP-A-62-209712 特開平5−47322号公報Japanese Patent Laid-Open No. 5-47322 特開2005−350314号公報JP-A-2005-350314 特許第2628007号公報Japanese Patent No. 2628007 特開2000−72479号公報JP 2000-72479 A 特開2001−139344号公報JP 2001-139344 A 特開2008−30972号公報JP 2008-30972 A

ところで、シーズヒーターの口元封止等の場合、450〜800℃の中温度域で封止が行われる。しかし、上記のSnO−P系ガラスを用いて、450〜800℃の中温度域で金属製被封止物を封止すると、低融点であることに起因して、ガラス中に多数の気泡が発生し、結果として、長期間の使用により気泡からリークが生じて、封止部分の気密性が損なわれたり、封止部分が剥離する可能性が高くなる。 By the way, in the case of sealing the mouth of a sheathed heater, sealing is performed in an intermediate temperature range of 450 to 800 ° C. However, when the above-mentioned SnO—P 2 O 5 system glass is used and a metal object to be sealed is sealed at an intermediate temperature range of 450 to 800 ° C., there are many in the glass due to the low melting point. As a result, there is a high possibility that a leak occurs from the bubbles due to long-term use, and the airtightness of the sealed portion is impaired or the sealed portion is peeled off.

近年、PbO−B系ガラスの無鉛代替品として、Bi−B系ガラスが使用されている。しかし、Bi−B系ガラスは、非酸化雰囲気の封止工程でビスマス成分が還元され易く、安定な状態を確保し難い問題がある(例えば、特許文献8参照)。なお、金属製被封止物の封止(金属と金属、金属とセラミック、金属とガラス等の封着を含む)は、通常、金属の酸化を防止するために、非酸化雰囲気で行われる(例えば、特許文献2参照)。 In recent years, Bi 2 O 3 —B 2 O 3 based glass has been used as a lead-free substitute for PbO—B 2 O 3 based glass. However, Bi 2 O 3 —B 2 O 3 -based glass has a problem that a bismuth component is easily reduced in a sealing process in a non-oxidizing atmosphere and it is difficult to ensure a stable state (see, for example, Patent Document 8). In addition, sealing of metal objects to be sealed (including sealing of metal and metal, metal and ceramic, metal and glass, etc.) is usually performed in a non-oxidizing atmosphere in order to prevent oxidation of the metal ( For example, see Patent Document 2).

そこで、本発明は、非酸化雰囲気(減圧雰囲気、不活性雰囲気等)であっても、450〜800℃の中温度域で金属製被封止物を良好に封止可能なSnO−P系ガラスからなる封止用ガラスを創案することにより、長期間に亘って、封止部分の気密性を確保することを技術的課題とする。 Therefore, the present invention provides SnO—P 2 O that can satisfactorily seal a metal object in an intermediate temperature range of 450 to 800 ° C. even in a non-oxidizing atmosphere (depressurized atmosphere, inert atmosphere, etc.). By creating a glass for sealing made of 5- system glass, it is a technical problem to ensure the airtightness of the sealing portion over a long period of time.

本発明者は、種々の実験を行ったところ、SnO−P系ガラスのガラス組成範囲を厳密に規制することにより、非酸化雰囲気であっても、450〜800℃の中温度域で金属製被封止物を良好に封止し得ると共に、封止時にガラスと金属製被封止物の反応を適正化できることを見出し、本発明として、提案するものである。すなわち、本発明の封止用ガラスは、金属製被封止物を封止するための封止用ガラスであって、ガラス組成として、モル%表示で、SnO 15〜30%(但し、30%を含まず)、P 20〜40%、WO 5〜20%(但し、5%を含まず)、ZnO 3.4〜30%(但し、30%を含まず)を含有し、モル比SnO/ZnOが1以上4.5以下であることを特徴とする。 The present inventor conducted various experiments. By strictly regulating the glass composition range of the SnO—P 2 O 5 glass, even in a non-oxidizing atmosphere, in the middle temperature range of 450 to 800 ° C. The present invention is proposed as the present invention by finding that the metal object to be sealed can be satisfactorily sealed and that the reaction between the glass and the metal object to be sealed can be optimized at the time of sealing. That is, the sealing glass of the present invention is a sealing glass for sealing a metal object, and the glass composition is SnO 15-30% (however, 30% in terms of mol%). containing not including), P 2 O 5 20~40% , WO 3 5~20% ( not inclusive of 5%), ZnO from 3.4 to 30% (not inclusive of 30%), The molar ratio SnO / ZnO is 1 or more and 4.5 or less.

本発明の封止用ガラスは、上記のようにガラス組成範囲が規制されている。このようにすれば、450〜800℃の中温度域で良好に封止可能になる。即ち、このようにすれば、450〜800℃の中温度域で適正に流動しつつ、ガラス中に多数の気泡が発生する事態を防止し得ると共に、封止用ガラスが金属製被封止物と適正に反応して、強固な接着性を確保することができる。また、非酸化雰囲気で封止する場合であっても、封止部分の表面が失透、変質する事態を防止でき、結果として、長期間に亘って、封止部分の気密性を確保することが可能になる。   The glass composition range of the sealing glass of the present invention is regulated as described above. If it does in this way, it will become possible to seal favorably in the middle temperature range of 450-800 ° C. That is, in this way, while properly flowing in the middle temperature range of 450 to 800 ° C., it is possible to prevent the occurrence of a large number of bubbles in the glass, and the sealing glass is made of metal to be sealed. It can react appropriately and can secure strong adhesiveness. Moreover, even when sealing in a non-oxidizing atmosphere, it is possible to prevent a situation where the surface of the sealing portion is devitrified and deteriorated, and as a result, to ensure airtightness of the sealing portion over a long period of time. Is possible.

第二に、本発明の封止用ガラスは、実質的にPbOを含まないことが好ましい。このようにすれば、近年の環境的要請を満たすことができる。ここで、「実質的にPbOを含まない」とは、ガラス組成中のPbOの含有量が1000ppm(質量)以下の場合を指す。   Second, it is preferable that the sealing glass of the present invention does not substantially contain PbO. In this way, environmental demands in recent years can be satisfied. Here, “substantially free of PbO” refers to a case where the content of PbO in the glass composition is 1000 ppm (mass) or less.

第三に、本発明の封止用ガラスは、ガラス転移点が350〜500℃であることが好ましい。なお、ガラス転移点は、押し棒式熱膨張計等で測定可能である。   Thirdly, it is preferable that the glass for sealing of this invention has a glass transition point of 350-500 degreeC. The glass transition point can be measured with a push rod thermal dilatometer or the like.

第四に、本発明の封止用ガラスは、1.0×10−2Torr以下の減圧雰囲気における封止に用いることが好ましい。 Fourthly, the sealing glass of the present invention is preferably used for sealing in a reduced pressure atmosphere of 1.0 × 10 −2 Torr or less.

第五に、本発明の封止用ガラスは、酸素濃度が5体積%以下の雰囲気における封止に用いることが好ましい。   Fifth, the sealing glass of the present invention is preferably used for sealing in an atmosphere having an oxygen concentration of 5% by volume or less.

第六に、本発明の封止用複合材料は、ガラス粉末と耐火性フィラーを含有する封止用複合材料において、ガラス粉末が、上記の封止用ガラスからなることを特徴とする。   Sixth, the sealing composite material of the present invention is characterized in that, in the sealing composite material containing glass powder and a refractory filler, the glass powder is made of the sealing glass described above.

第七に、本発明の封止用複合材料は、ガラス粉末の含有量が45〜100体積%、耐火性フィラーの含有量が0〜55体積%であることが好ましい。   Seventh, the sealing composite material of the present invention preferably has a glass powder content of 45 to 100% by volume and a refractory filler content of 0 to 55% by volume.

上記のように、SnO−P系ガラスのガラス組成範囲を限定した理由を以下に説明する。なお、各成分の含有範囲の説明において、%表示はモル%を指す。 The reason for limiting the glass composition range of SnO—P 2 O 5 based glass as described above will be described below. In addition, in description of the containing range of each component,% display points out mol%.

SnOは、ガラスの融点を下げる成分であり、その含有量は15〜30%(但し、30%を含まず)、好ましくは20〜28%である。SnOの含有量が15%より少ないと、ガラスの粘性が高くなって、中温度域で流動性が低下し易くなる。なお、SnOの含有量が20%以上であると、中温度域で流動性が向上するため、高い気密性を確保し易くなる。一方、SnOの含有量が30%より多いと、低温でガラスが軟化するため、作業温度が低くなり過ぎて、中温度域で使用し難くなる。   SnO is a component that lowers the melting point of glass, and its content is 15 to 30% (however, not including 30%), preferably 20 to 28%. When the SnO content is less than 15%, the viscosity of the glass increases, and the fluidity tends to decrease in the middle temperature range. Note that when the SnO content is 20% or more, the fluidity is improved in the middle temperature range, so that high airtightness is easily secured. On the other hand, if the SnO content is more than 30%, the glass softens at a low temperature, so that the working temperature becomes too low and it is difficult to use in the middle temperature range.

は、ガラス形成酸化物であり、その含有量は20〜40%、好ましくは25〜35%である。Pの含有量が20%より少ないと、ガラスが不安定になる。一方、Pの含有量が40%より多いと、耐湿性が低下する。なお、Pの含有量が25%以上であれば、ガラスがより安定化し、35%以下であれば、耐候性を高めることができる。 P 2 O 5 is a glass-forming oxide, and its content is 20 to 40%, preferably 25 to 35%. If the content of P 2 O 5 is less than 20%, the glass becomes unstable. On the other hand, when the content of P 2 O 5 is more than 40%, the moisture resistance is lowered. Incidentally, when the content of P 2 O 5 is more than 25%, the glass is more stable, if 35% or less, it is possible to improve the weather resistance.

WOは、本発明の必須成分であり、金属製被封止物との反応性を適正化して、接着強度や気密性を高める成分である。また、WOを添加すると、耐候性が向上するため、封止部分の長期信頼性を高めることができる。WOの含有量は5〜20%(5%を含まず)、好ましくは10〜15%である。WOの含有量が5%以下であると、上記効果を得ることができない。一方、WOの含有量が20%より多いと、溶融時に分相傾向が強くなり、ガラスが不安定になる。なお、WOの含有量が10〜15%であると、中温度域において流動性が向上する。また、WOの含有量が5%より多いと、上記効果を享受できるが、大気雰囲気で封止する場合、封止時にガラスが失透し易くなる。このため、本発明の封止用ガラスは、1.0×10−2Torr以下の減圧雰囲気における封止、或いは酸素濃度が5体積%以下の雰囲気における封止に用いることが好ましい。 WO 3 is an essential component of the present invention, and is a component that optimizes the reactivity with the metal object to be sealed and increases the adhesive strength and airtightness. Further, when WO 3 is added, the weather resistance is improved, so that the long-term reliability of the sealed portion can be improved. The content of WO 3 is 5 to 20% (not including 5%), preferably 10 to 15%. When the content of WO 3 is 5% or less, it is impossible to obtain the above effect. On the other hand, when the content of WO 3 is more than 20%, the phase separation tendency becomes strong at the time of melting, and the glass becomes unstable. Incidentally, the content of WO 3 is 10 to 15% improves the fluidity at the middle temperature range. Further, when the content of WO 3 is more than 5%, the above effect can be enjoyed. However, when sealing is performed in an air atmosphere, the glass tends to be devitrified at the time of sealing. For this reason, the sealing glass of the present invention is preferably used for sealing in a reduced pressure atmosphere of 1.0 × 10 −2 Torr or lower, or for sealing in an atmosphere having an oxygen concentration of 5% by volume or lower.

ZnOは、中間酸化物であり、またガラスを安定化させる効果が大きい成分であり、その含有量は3.4〜30%(但し、30%を含まず)、好ましくは5〜28%である。全体的なガラスの安定性(耐失透性、分相性等)を考慮すると、ZnOの含有量は5%以上が好ましい。しかし、ZnOの含有量が30%以上になると、ガラス組成の成分バランスが損なわれて、封止時にガラスの表面に失透が発生し易くなる。なお、ZnOの含有量が28%以下になると、中温度域においてガラスの安定性が向上する。   ZnO is an intermediate oxide and a component having a great effect of stabilizing the glass, and its content is 3.4 to 30% (however, not including 30%), preferably 5 to 28%. . In consideration of overall glass stability (devitrification resistance, phase separation, etc.), the ZnO content is preferably 5% or more. However, when the ZnO content is 30% or more, the component balance of the glass composition is impaired, and devitrification is likely to occur on the glass surface during sealing. If the ZnO content is 28% or less, the stability of the glass is improved in the middle temperature range.

モル比SnO/ZnOは1以上4.5以下、好ましくは1以上4以下である。モル比SnO/ZnOが1より小さいと、ガラスが不安定になり易い。一方、モル比SnO/ZnOが4.5より大きいと、封止時にガラスが流動し過ぎて、金属製被封止物を封止し難くなると共に、ガラス中に気泡が発生し易くなる。   The molar ratio SnO / ZnO is 1 or more and 4.5 or less, preferably 1 or more and 4 or less. When the molar ratio SnO / ZnO is smaller than 1, the glass tends to be unstable. On the other hand, when the molar ratio SnO / ZnO is larger than 4.5, the glass flows too much at the time of sealing, and it becomes difficult to seal the metal object to be sealed, and bubbles are easily generated in the glass.

任意成分として、以下の成分を添加することができる。   The following components can be added as optional components.

MgOは、網目修飾酸化物であり、またガラスを安定化させる成分である。MgOの含有量は0〜20%、特に0〜5%が好ましい。MgOの含有量が20%より多いと、封止時にガラスの表面に失透が発生し易くなる。   MgO is a network-modifying oxide and a component that stabilizes the glass. The content of MgO is preferably 0 to 20%, particularly preferably 0 to 5%. When the content of MgO is more than 20%, devitrification tends to occur on the glass surface during sealing.

Alは、中間酸化物であり、またガラスを安定化させる成分であり、更に熱膨張係数を低下させる成分である。Alの含有量は0〜10%、特にガラスの安定性、熱膨張係数、流動性等を考慮すると、0.5〜5%が好ましい。Alの含有量が10%より多いと、軟化温度が上昇して、中温度域で流動性が低下し易くなる。 Al 2 O 3 is an intermediate oxide, a component that stabilizes the glass, and a component that further reduces the thermal expansion coefficient. The content of Al 2 O 3 is preferably 0 to 10%, and particularly preferably 0.5 to 5% in consideration of glass stability, thermal expansion coefficient, fluidity, and the like. When the content of Al 2 O 3 is more than 10%, the softening temperature rises, the fluidity tends to decrease at medium temperature range.

SiOは、ガラス形成酸化物であり、また失透を抑制する成分であり、その含有量は0〜15%、特に0〜8%が好ましい。SiOの含有量が15%より多いと、軟化温度が上昇して、中温度域で流動性が低下し易くなる。 SiO 2 is a glass-forming oxide and a component that suppresses devitrification, and its content is preferably 0 to 15%, particularly preferably 0 to 8%. If the content of SiO 2 is more than 15%, the softening temperature rises and the fluidity tends to decrease in the middle temperature range.

は、ガラス形成酸化物であり、またガラスを安定化させる成分であり、その含有量は0〜25%である。Bの含有量が25%より多いと、ガラスの粘性が高くなり過ぎて、封止時に流動性が著しく低下して、封止部分の気密性が損なわれるおそれがある。特に、本発明に係るガラス組成系において、Bの含有量が25%より多いと、ガラスが分相し易くなる。なお、Bは、ガラスの粘性を高くする傾向が強い。このため、軟化温度を大幅に低下させたい場合は、実質的にBを含有しないこと、つまり0.1%以下が好ましい。 B 2 O 3 is a glass-forming oxide and a component that stabilizes the glass, and its content is 0 to 25%. When the content of B 2 O 3 is more than 25%, the viscosity of the glass becomes too high, and the fluidity is remarkably lowered at the time of sealing, which may impair the airtightness of the sealing part. In particular, in the glass composition system according to the present invention, when the content of B 2 O 3 is more than 25%, the glass is likely to undergo phase separation. B 2 O 3 tends to increase the viscosity of the glass. For this reason, when it is desired to greatly reduce the softening temperature, it is preferable that B 2 O 3 is not substantially contained, that is, 0.1% or less.

O(RはLi、Na、K、Csのいずれか)は、必須成分ではないが、RO成分の内、少なくとも1種類を添加すると、ステンレス等の金属製被封止物との接着性が向上する。ROの含有量は0〜20%、特に0.1〜10%が好ましい。ROの含有量が20%より多いと、封止時にガラスが失透し易くなる。また、LiO、NaO、KO、CsOの含有量は、各々0〜12%、特に0.1〜10%が好ましい。なお、RO成分の内、LiOは、金属製被封止物との接着性を高める効果が大きい。 R 2 O (R is any one of Li, Na, K, and Cs) is not an essential component. However, when at least one of R 2 O components is added, it can be used as a metal sealing object such as stainless steel. Adhesion is improved. The content of R 2 O is preferably 0 to 20%, particularly preferably 0.1 to 10%. When the content of R 2 O is more than 20%, the glass tends to be devitrified at the time of sealing. Further, the content of Li 2 O, Na 2 O, K 2 O, and Cs 2 O is preferably 0 to 12%, particularly preferably 0.1 to 10%. Of the R 2 O components, Li 2 O has a great effect of improving the adhesion with a metal object.

ランタノイド酸化物は、網目修飾酸化物であり、その含有量は0〜25%、0.1〜20%、特に0.5〜15%が好ましい。ランタノイド酸化物の含有量が25%より多いと、封止温度が高くなって、中温度域で流動性が低下し易くなる。なお、ランタノイド酸化物として、La、CeO、Nd等が使用可能である。また、ランタノイド酸化物の含有量を0.1%以上にすれば、耐候性を高めることができる。 The lanthanoid oxide is a network-modified oxide, and its content is preferably 0 to 25%, 0.1 to 20%, particularly preferably 0.5 to 15%. When the content of the lanthanoid oxide is more than 25%, the sealing temperature becomes high, and the fluidity tends to decrease in the middle temperature range. As the lanthanoid oxide, La 2 O 3 , CeO 2 , Nd 2 O 3 or the like can be used. Moreover, weather resistance can be improved if content of a lanthanoid oxide shall be 0.1% or more.

ランタノイド酸化物に加えて、他の希土類酸化物、例えばYを添加すると、耐候性を更に高めることができる。ランタノイド酸化物を除く希土類酸化物の含有量は合量で0〜5%が好ましい。 In addition to the lanthanoid oxide, the addition of other rare earth oxides such as Y 2 O 3 can further enhance the weather resistance. The total content of rare earth oxides excluding lanthanoid oxides is preferably 0 to 5%.

さらに、ガラスを安定化させるために、MoO、Nb、TiO、ZrO、CuO、MnO、In、R’O(R’はMg、Ca、Sr、Baのいずれか)等を合量で35%まで添加してもよい。なお、これらの成分の含有量が合量で35%より多いと、ガラス組成の成分バランスが損なわれて、逆にガラスが不安定になり、製造が困難になる。なお、これらの成分の含有量が合量で25%以下であれば、ガラスが不安定になり難い。 Furthermore, in order to stabilize the glass, MoO 3 , Nb 2 O 5 , TiO 2 , ZrO 2 , CuO, MnO, In 2 O 3 , R′O (R ′ is any of Mg, Ca, Sr, and Ba). ) Etc. may be added up to 35% in total. In addition, when there is more content of these components than 35%, the component balance of a glass composition will be impaired, glass will become unstable on the contrary, and manufacture will become difficult. In addition, if content of these components is 25% or less in total, glass will not become unstable easily.

MoOの含有量は0〜20%、特に0〜10%が好ましい。MoOの含有量が20%より多いと、ガラスの粘性が高くなって、中温度域でガラスが流動し難くなる。 The content of MoO 3 is preferably 0 to 20%, particularly preferably 0 to 10%. When the content of MoO 3 is more than 20%, the viscosity of the glass becomes high and the glass hardly flows in the middle temperature range.

Nb、TiO、ZrOの含有量は各々0〜15%、特に0〜10%が好ましい。これらの成分が各々15%より多いと、ガラス組成の成分バランスが損なわれて、逆にガラスが不安定になり易い。 The contents of Nb 2 O 5 , TiO 2 and ZrO 2 are each preferably 0 to 15%, particularly preferably 0 to 10%. If these components are each more than 15%, the component balance of the glass composition is impaired, and conversely, the glass tends to be unstable.

CuO、MnOの含有量は各々0〜10%、特に0〜5%が好ましい。これらの成分が各々10%より多いと、ガラス組成の成分バランスが損なわれて、逆にガラスが不安定になり易い。   The contents of CuO and MnO are each preferably 0 to 10%, particularly preferably 0 to 5%. If each of these components is more than 10%, the component balance of the glass composition is impaired, and the glass tends to be unstable.

Inは、コストを度外視した場合、高度な耐候性を得る目的で使用可能な成分である。Inの含有量は0〜5%が好ましい。 In 2 O 3 is a component that can be used for the purpose of obtaining high weather resistance when the cost is not taken into consideration. The content of In 2 O 3 is preferably 0 to 5%.

R’Oの含有量は合量で0〜15%、特に0〜5%が好ましい。R’Oの含有量が合量で15%より多いと、ガラス組成の成分バランスが損なわれて、逆にガラスが不安定になり易い。   The total content of R′O is preferably 0 to 15%, particularly preferably 0 to 5%. When the content of R'O is more than 15% in total, the component balance of the glass composition is impaired, and conversely, the glass tends to become unstable.

なお、上記成分以外にも、他の成分を例えば5%まで添加することができる。また、上記の通り、環境的観点から、実質的にPbOを含まないことが好ましい。   In addition to the above components, other components can be added up to 5%, for example. Moreover, as mentioned above, it is preferable that PbO is not included substantially from an environmental viewpoint.

以上のガラス組成を有するSnO−P系ガラスは、ガラス転移点が約350〜500℃、屈伏点が約380〜530℃、30〜300℃の温度範囲における熱膨張係数が約60×10−7〜110×10−7/℃であり、また1.0×10−2Torr以下の減圧雰囲気において、500〜800℃の温度範囲で良好に封止可能であり、更に残存酸素濃度が5体積%以下の雰囲気、例えば窒素やアルゴン等の不活性雰囲気において、450〜650℃の温度範囲で良好に封止可能である。 The SnO—P 2 O 5 glass having the above glass composition has a glass transition point of about 350 to 500 ° C., a deformation point of about 380 to 530 ° C., and a thermal expansion coefficient of about 60 × in a temperature range of 30 to 300 ° C. 10 −7 to 110 × 10 −7 / ° C. and can be well sealed in a temperature range of 500 to 800 ° C. in a reduced pressure atmosphere of 1.0 × 10 −2 Torr or less, and the residual oxygen concentration is It can be satisfactorily sealed in a temperature range of 450 to 650 ° C. in an atmosphere of 5% by volume or less, for example, an inert atmosphere such as nitrogen or argon.

本発明の封止用ガラスにおいて、ガラス転移点は350〜500℃、特に400〜450℃が好ましい。ガラス転移点が350℃より低いと、中温度域でガラスが流動し過ぎて、金属製被封止物を封止し難くなると共に、ガラス中に気泡が発生し易くなる。一方、ガラス転移点が500℃より高いと、軟化温度が上昇して、中温度域で流動性が低下し易くなる。   In the sealing glass of the present invention, the glass transition point is preferably 350 to 500 ° C, particularly preferably 400 to 450 ° C. When the glass transition point is lower than 350 ° C., the glass flows too much in the middle temperature range, and it becomes difficult to seal the metal object to be sealed, and bubbles are easily generated in the glass. On the other hand, when the glass transition point is higher than 500 ° C., the softening temperature increases, and the fluidity tends to decrease in the middle temperature range.

本発明の封止用ガラスにおいて、屈伏点は380〜530℃、特に440〜480℃が好ましい。屈伏点が380℃より低いと、中温度域でガラスが流動し過ぎて、金属製被封止物を封止し難くなると共に、ガラス中に気泡が発生し易くなる。一方、屈伏点が530℃より高いと、軟化温度が上昇して、中温度域で封止し難くなる。なお、屈伏点は、押し棒式熱膨張計等で測定可能である。   In the sealing glass of the present invention, the yield point is preferably 380 to 530 ° C, particularly preferably 440 to 480 ° C. When the yield point is lower than 380 ° C., the glass flows too much in the middle temperature range, and it becomes difficult to seal the metal object to be sealed, and bubbles are easily generated in the glass. On the other hand, if the yield point is higher than 530 ° C., the softening temperature rises and it becomes difficult to seal in the middle temperature range. The yield point can be measured with a push rod thermal dilatometer or the like.

本発明の封止用ガラスにおいて、30〜300℃の温度範囲における熱膨張係数は60×10−7〜110×10−7/℃、特に70×10−7〜85×10−7/℃が好ましい。このようにすれば、金属製被封止物の熱膨張係数に整合し易くなるため、封止部分にかかる応力を低減することができる。なお、30〜300℃の温度範囲における熱膨張係数は、押し棒式熱膨張計等で測定可能である。 In the sealing glass of the present invention, the thermal expansion coefficient in the temperature range of 30 to 300 ° C. is 60 × 10 −7 to 110 × 10 −7 / ° C., particularly 70 × 10 −7 to 85 × 10 −7 / ° C. preferable. If it does in this way, since it becomes easy to match the thermal expansion coefficient of a metal to-be-sealed thing, the stress concerning a sealing part can be reduced. The thermal expansion coefficient in the temperature range of 30 to 300 ° C. can be measured with a push rod type thermal dilatometer or the like.

本発明の封止用ガラスは、種々の金属製被封止物に対して、良好に封止可能である。また、本発明の封止用ガラスは、封止時に金属の酸化を防止するために、1.0×10−2Torr以下の減圧雰囲気、或いは酸素濃度が5体積%以下の雰囲気における封止に用いることが好ましい。 The sealing glass of the present invention can be satisfactorily sealed against various metal objects to be sealed. In addition, the sealing glass of the present invention can be used for sealing in a reduced pressure atmosphere of 1.0 × 10 −2 Torr or lower, or in an atmosphere having an oxygen concentration of 5 vol% or lower in order to prevent metal oxidation during sealing. It is preferable to use it.

本発明の封止用ガラスは、熱膨張係数の調整のために、耐火性フィラーを添加して、複合化して使用してもよい。耐火性フィラーを混合する場合、その混合量は封止用ガラス(ガラス粉末)45〜100体積%、耐火性フィラー0〜55体積%が好ましい。耐火性フィラーの含有量が55体積%より多いと、相対的にガラス粉末の割合が少なくなり、必要な流動性を確保し難くなる。   The glass for sealing of the present invention may be combined and used by adding a refractory filler in order to adjust the thermal expansion coefficient. When mixing a refractory filler, the mixing amount is preferably 45 to 100% by volume of sealing glass (glass powder) and 0 to 55% by volume of refractory filler. When there is more content of a refractory filler than 55 volume%, the ratio of glass powder will decrease relatively and it will become difficult to ensure required fluidity | liquidity.

耐火性フィラーとして、種々の材料が使用可能であり、例えば石英、コージエライト、ジルコン、酸化錫、酸化ニオブ、リン酸ジルコニウム、リン酸タングステン酸ジルコニウム、ウイレマイト、ムライト等が使用可能である。またNbZr(PO系セラミック粉末は、成分中にリン酸を含有するため、SnO−P系ガラスと適合性が良好である。なお、NbZr(PO系セラミック粉末は、焼結助剤としてMgOが少量(例えば、0.1〜2質量%)添加されていることが好ましい。 Various materials can be used as the refractory filler, such as quartz, cordierite, zircon, tin oxide, niobium oxide, zirconium phosphate, zirconium tungstate phosphate, willemite, and mullite. The NbZr (PO 4) 3 based ceramic powder, since it contains phosphoric acid in component compatible with SnO-P 2 O 5 based glass is excellent. In addition, it is preferable that a small amount (for example, 0.1 to 2 mass%) of MgO is added to the NbZr (PO 4 ) 3 ceramic powder as a sintering aid.

以下、本発明の封止用ガラスの製造方法について詳述する。   Hereinafter, the manufacturing method of the glass for sealing of this invention is explained in full detail.

本発明の封止用ガラスおよびこれを用いた複合材料の作製には、まず上記のガラス組成になるように、ガラス原料を調合した後、850〜1000℃で溶融して、溶融ガラスを作製する。本発明に係るガラス組成範囲の場合、大気中で溶融しても支障はないが、溶融時にガラス組成中のSnOがSnOに酸化されないように留意する必要がある。ガラス組成中のSnOがSnOに酸化する事態を防止するため、N中で溶融したり、溶融ガラス中にNバブリングする等、非酸化性雰囲気で溶融することが好ましい。また、実験室レベルの溶融の場合、溶融坩堝に蓋をして溶融することが、作業性の観点から好ましい。 In the production of the sealing glass of the present invention and a composite material using the same, first a glass raw material is prepared so as to have the above glass composition, and then melted at 850 to 1000 ° C. to produce a molten glass. . In the case of the glass composition range according to the present invention, there is no problem even if it is melted in the atmosphere, but it is necessary to pay attention so that SnO in the glass composition is not oxidized to SnO 2 at the time of melting. Since the SnO in the glass composition is prevented from oxidizing to SnO 2, or melted in N 2, etc. to N 2 bubbling in the molten glass, it is preferable to perform the melt in a non-oxidizing atmosphere. Further, in the case of melting at the laboratory level, it is preferable from the viewpoint of workability that the melting crucible is covered and melted.

被封止物が金属の場合、耐火性フィラーを混合せずに、ガラス単独で使用する場合が多い。この場合、(1)溶融ガラスを棒状に引き出して、所定長に切断したり、(2)溶融ガラスを滴下して、所定の大きさを有するチップ形状に成形したり、(3)塊状に成形後、固化することにより、封止用ガラスを作製することができる。なお、塊状の封止用ガラスは、所定の大きさに切り出された後に使用に供される。本発明の封止用ガラスは、ガラス単独で使用される場合、直方体、円柱、球、楕円球、半球、卵型、おはじき形状等の形状が好ましい。また、この場合、後述の脱バインダー等が不要になり、封止工程の簡略化を図ることができるが、ペースト化できないため、金属製被封止物の封止すべき部分に、封止用ガラスを設置するための凹部を設けることが好ましい。   When the object to be sealed is a metal, it is often used alone without mixing a refractory filler. In this case, (1) the molten glass is drawn into a rod shape and cut into a predetermined length, (2) the molten glass is dropped and formed into a chip shape having a predetermined size, or (3) is formed into a lump shape. Then, the glass for sealing can be produced by solidifying. In addition, the lump-like sealing glass is used after being cut into a predetermined size. When the glass for sealing of the present invention is used alone, a shape such as a rectangular parallelepiped, a cylinder, a sphere, an elliptical sphere, a hemisphere, an egg shape, and a repellent shape is preferable. Further, in this case, the debinding described later is unnecessary, and the sealing process can be simplified. However, since it cannot be made into a paste, it is necessary to seal the portion to be sealed of the metal object to be sealed. It is preferable to provide a recess for installing glass.

また、溶融ガラスをフィルム形状に成形した後、粉砕、分級することにより、粉末形状に加工することができる。得られたガラス粉末に対し、耐火性フィラーを混合すると、複合粉末を作製することができる。次に、得られたガラス粉末又は複合粉末(着色剤を含む場合が多い)とビークルを混練すると、ペースト材料を作製することができる。   Moreover, after shape | molding molten glass into a film shape, it can process into a powder form by grind | pulverizing and classifying. When the obtained glass powder is mixed with a refractory filler, a composite powder can be produced. Next, when the obtained glass powder or composite powder (which often contains a colorant) and a vehicle are kneaded, a paste material can be produced.

ビークル中の樹脂として、脂肪族ポリオレフィン系カーボネート、特にポリエチレンカーボネート、ポリプロピレンカーボネートが好ましい。これらの樹脂は、封止時にSnO−P系ガラスを変質させ難い性質を有する。一方、樹脂として、汎用のエチルセルロースを用いると、SnO−P系ガラスが変質する可能性が高い。ビークル中の溶媒は、N,N’−ジメチルホルムアミド、エチレングリコール、ジメチルスルホキサイド、炭酸ジメチル、プロピレンカーボネート、ブチロラクトン、カプロラクトン、N−メチル−2−ピロリドンから選ばれる一種または二種以上が好ましい。これらの溶媒は、封止時にSnO−P系ガラスを変質させ難い性質を有する。 As the resin in the vehicle, aliphatic polyolefin carbonates, particularly polyethylene carbonate and polypropylene carbonate are preferred. These resins have properties that make it difficult to alter the SnO—P 2 O 5 glass during sealing. On the other hand, when general-purpose ethyl cellulose is used as the resin, there is a high possibility that the SnO—P 2 O 5 glass will be altered. The solvent in the vehicle is preferably one or more selected from N, N′-dimethylformamide, ethylene glycol, dimethyl sulfoxide, dimethyl carbonate, propylene carbonate, butyrolactone, caprolactone, and N-methyl-2-pyrrolidone. These solvents have properties that make it difficult to alter the SnO—P 2 O 5 glass during sealing.

続いて、金属製被封止物の表面にペースト材料を塗布して、乾燥する。ペースト材料の塗布は、ディスペンサー、スクリーン印刷機等を使用すればよい。次に、必要に応じて、脱バインダーのために焼成(一次焼成)を行った後、他方の被封止物と接触させながら焼成(二次焼成)して、被封止物同士を封止する。ガラス粉末又は複合材料が被封止物の接着表面を濡らすのに十分な条件で二次焼成を行う必要がある。   Subsequently, a paste material is applied to the surface of the metal object to be sealed and dried. The paste material may be applied using a dispenser, a screen printer, or the like. Next, if necessary, after firing (primary firing) for debinding, firing (secondary firing) while contacting the other object to be sealed to seal the objects to be sealed To do. It is necessary to perform secondary firing under conditions sufficient for the glass powder or the composite material to wet the adhesion surface of the object to be sealed.

一次焼成は、SnO−P系ガラスの変質を防止するため、窒素、アルゴン等の不活性雰囲気、特に窒素雰囲気で行うことが好ましい。 The primary firing is preferably performed in an inert atmosphere such as nitrogen or argon, particularly in a nitrogen atmosphere in order to prevent the SnO—P 2 O 5 glass from being altered.

本発明の封止用ガラスは、1.0×10−2Torr以下の減圧雰囲気における封止に用いることが好ましい。1.0×10−2Torr以下の減圧雰囲気であれば、金属製被封止物の酸化を防止することができる。また、金属製被封止物の酸化を確実に防止するため、1.0×10−3Torr以下の減圧雰囲気で封止することが更に好ましい。一方、圧力が1.0×10−2Torrより大きいと、封止時にガラスが失透、変質し易くなる。なお、1.0×10−2Torr以下の減圧であれば、一般的に使用されるロータリーポンプで到達可能である。 The sealing glass of the present invention is preferably used for sealing in a reduced-pressure atmosphere of 1.0 × 10 −2 Torr or less. If it is a reduced pressure atmosphere of 1.0 × 10 −2 Torr or less, oxidation of the metal object can be prevented. Further, in order to reliably prevent oxidation of the metal object to be sealed, it is more preferable to seal in a reduced pressure atmosphere of 1.0 × 10 −3 Torr or less. On the other hand, if the pressure is greater than 1.0 × 10 −2 Torr, the glass tends to devitrify and deteriorate during sealing. In addition, as long as the pressure is 1.0 × 10 −2 Torr or less, it can be reached by a commonly used rotary pump.

金属製二重容器等の実生産において、容器中の真空度を高めるために、油拡散ポンプ(ディフージョンポンプ)で封止雰囲気を減圧する場合が多い。この場合、封止雰囲気の真空度は1.0×10−3Torr以下となる。封止雰囲気の真空度の上限は特に制限されない。なお、ロータリーポンプとターボ分子ポンプを併用することにより、1.0×10−6Torrに減圧して、封止試験を行ったところ、本発明の封止用ガラスに失透、変質が認められなかったことが確認されている。但し、実生産上、封止雰囲気の真空度は、封止用ガラスや金属製被封止物からの放出ガスの影響により、1.0×10−6Torr以下とすることは困難である。 In actual production of a metal double container or the like, the sealing atmosphere is often decompressed with an oil diffusion pump (diffusion pump) in order to increase the degree of vacuum in the container. In this case, the degree of vacuum in the sealing atmosphere is 1.0 × 10 −3 Torr or less. The upper limit of the degree of vacuum of the sealing atmosphere is not particularly limited. In addition, when a rotary pump and a turbo molecular pump were used in combination and the pressure was reduced to 1.0 × 10 −6 Torr and a sealing test was performed, devitrification and alteration were observed in the sealing glass of the present invention. It has been confirmed that there was not. However, in actual production, it is difficult for the degree of vacuum in the sealing atmosphere to be 1.0 × 10 −6 Torr or less due to the influence of the gas released from the sealing glass or the metal sealing object.

本発明の封止用ガラスは、酸素濃度が5体積%以下の雰囲気、例えば窒素、アルゴン等の不活性雰囲気における封止に用いることが好ましい。このようにすれば、封止時にガラスが失透、変質し難くなると共に、金属製被封止物の酸化を防止することができる。一方、封止雰囲気の酸素濃度が5体積%より多いと、ガラスが失透、変質し易くなると共に、金属製被封止物が酸化し易くなる。なお、真空ポンプ等を使用しなくても、単に窒素、アルゴン等の不活性ガスを封止雰囲気に流して、不活性ガスの雰囲気濃度を95体積%以上にすれば、封止雰囲気中の残存酸素濃度を5体積%以下にすることができる。   The sealing glass of the present invention is preferably used for sealing in an atmosphere having an oxygen concentration of 5% by volume or less, for example, an inert atmosphere such as nitrogen or argon. This makes it difficult for the glass to be devitrified and altered during sealing, and also prevents the metal object from being oxidized. On the other hand, when the oxygen concentration in the sealing atmosphere is more than 5% by volume, the glass is easily devitrified and deteriorated, and the metal sealing object is easily oxidized. Even if a vacuum pump or the like is not used, if an inert gas such as nitrogen or argon is simply allowed to flow in the sealing atmosphere, and the atmospheric concentration of the inert gas is set to 95% by volume or more, the remaining in the sealing atmosphere The oxygen concentration can be 5% by volume or less.

以下、実施例に基づいて、本発明の封止用ガラスを詳述する。なお、以下の実施例は単なる例示である。本発明は、以下の実施例に何ら限定されない。   Hereinafter, based on an Example, the glass for sealing of this invention is explained in full detail. The following examples are merely illustrative. The present invention is not limited to the following examples.

表1、2は本発明の実施例(No.1〜11)を示し、表3は比較例(No.12〜16)を示している。   Tables 1 and 2 show examples (Nos. 1 to 11) of the present invention, and Table 3 shows comparative examples (Nos. 12 to 16).

次のようにして、各試料を調製した。まず表中のガラス組成になるように、ガラス原料を調合した。また、リンの導入原料として、液体原料である正リン酸(オルトリン酸)を使用せず、ピロリン酸第一錫及びメタリン酸亜鉛を用いて、リンの導入原料をすべて固体原料とした。リンの導入原料をすべて固体原料にすると、他のガラス系と同様の製造設備を使用できるという利点がある。なお、リンの導入原料として、液体原料を直接溶融炉に入れて溶融すると、噴きこぼれの問題が発生し易くなる。そして、噴きこぼれの問題を回避するには、一旦、ガラス原料を乾燥しなければならない。   Each sample was prepared as follows. First, glass raw materials were prepared so as to have the glass composition in the table. Further, as the phosphorus introduction raw material, orthophosphoric acid (orthophosphoric acid), which is a liquid raw material, was not used, but stannous pyrophosphate and zinc metaphosphate were used, and the phosphorus introduction raw materials were all solid raw materials. When all the raw materials for introducing phosphorus are made into solid raw materials, there is an advantage that the same production equipment as other glass systems can be used. In addition, if a liquid raw material is directly put into a melting furnace and melted as a raw material for introducing phosphorus, a problem of spilling easily occurs. And in order to avoid the problem of spilling, the glass raw material must be once dried.

次に、調合したガラス原料を950℃で2時間溶融した。なお、溶融の際に、SnOの酸化を抑制するために、溶融炉内に窒素を流した。窒素流入時の溶融炉内の残存酸素濃度は1%以下であった。   Next, the prepared glass raw material was melted at 950 ° C. for 2 hours. In addition, in order to suppress the oxidation of SnO during melting, nitrogen was passed through the melting furnace. The residual oxygen concentration in the melting furnace at the time of nitrogen inflow was 1% or less.

続いて、カーボン冶具を用いて、溶融ガラスを直径5mm、長さ20mmの円柱状に成形した。この成形試料をアニール処理し、押し棒式熱膨張計(TMA、リガク製)により、ガラス転移点、屈伏点、30〜300℃の温度範囲における熱膨張係数を測定した。また、同様の円柱状の試料(アニール済み)を長さ3mmに加工して、接着性の評価に使用した。   Subsequently, the molten glass was formed into a cylindrical shape having a diameter of 5 mm and a length of 20 mm using a carbon jig. This molded sample was annealed, and the glass transition point, yield point, and thermal expansion coefficient in the temperature range of 30 to 300 ° C. were measured by a push rod type thermal dilatometer (TMA, manufactured by Rigaku). A similar cylindrical sample (annealed) was processed to a length of 3 mm and used for the evaluation of adhesion.

次のようにして、接着性の有無を評価した。評価用金属として、低温域で一般的に使用されるオーステナイト系のSUS304ではなく、高耐熱性のフェライト系のSUS430を使用した。評価用金属の形状は40mm×40mmの平板形状とした。次に、この金属製被封止物上に、上記の評価用試料を載せて、表中の雰囲気で焼成した。   The presence or absence of adhesiveness was evaluated as follows. As a metal for evaluation, high-heat-resistant ferrite-based SUS430 was used instead of austenitic SUS304 generally used in a low temperature range. The shape of the metal for evaluation was a flat plate shape of 40 mm × 40 mm. Next, the above-described sample for evaluation was placed on the metal object to be sealed and fired in the atmosphere shown in the table.

表中の「減圧焼成」は、絶えずロータリーポンプによって減圧しながら、焼成したものである。減圧焼成時には、封止用ガラスから発生した発泡ガスによる圧力の変動があったが、圧力ゲージにより、その圧力が1.0×10−2Torr以下であることを確認した。なお、焼成条件は、焼成温度650℃で10分間保持、室温から焼成温度までの昇温速度20℃/分、室温までの降温速度15℃/分であった。 The “reduced pressure firing” in the table is a result of firing while continuously reducing the pressure with a rotary pump. At the time of firing under reduced pressure, there was a change in pressure due to the foaming gas generated from the sealing glass, but it was confirmed by a pressure gauge that the pressure was 1.0 × 10 −2 Torr or less. The firing conditions were a firing temperature of 650 ° C. for 10 minutes, a heating rate of 20 ° C./min from room temperature to the firing temperature, and a cooling rate of 15 ° C./min to room temperature.

表中の「雰囲気焼成」は、絶えず表中に記載のガスを2.0L/分で流し続けながら、焼成したものである。焼成時に残存する酸素濃度は、酸素濃度計により5体積%以下であることを確認した。なお、焼成条件は、焼成温度550℃で10分間保持、室温から焼成温度までの昇温速度15℃/分、室温までの降温速度10℃/分であった。   The “atmosphere firing” in the table is one in which the gas described in the table is constantly flowed at 2.0 L / min. The oxygen concentration remaining at the time of firing was confirmed to be 5% by volume or less by an oxygen concentration meter. The firing conditions were a firing temperature of 550 ° C. for 10 minutes, a heating rate of 15 ° C./min from room temperature to the firing temperature, and a cooling rate of 10 ° C./min to room temperature.

表1、2から明らかなように、試料No.1〜11は、30〜300℃の温度範囲における熱膨張係数が69.6×10−7〜83.7×10−7/℃、ガラス転移点が389〜463℃、屈伏点が416〜472℃であり、また減圧焼成、雰囲気焼成共に、焼成後に失透、変質がなく、金属製被封止物と良好な接着性を示していた。よって、試料No.1〜11は、中温度域の封止用ガラスとして好適であった。 As apparent from Tables 1 and 2, Sample No. 1 to 11 have a thermal expansion coefficient of 69.6 × 10 −7 to 83.7 × 10 −7 / ° C. in a temperature range of 30 to 300 ° C., a glass transition point of 389 to 463 ° C., and a yield point of 416 to 472. In addition, both low-pressure firing and atmosphere firing were free from devitrification and deterioration after firing, and showed good adhesion to the metal object. Therefore, sample no. 1 to 11 were suitable as glass for sealing in the middle temperature range.

一方、試料No.12、13、16は、減圧焼成、雰囲気焼成共に、焼成後に失透、変質がなかったが、金属との接着性がなく、封止後に金属製被封止物から剥がれ落ちてしまった。試料No.14は、減圧焼成、雰囲気焼成共に、焼成後に失透、変質がなかったが、モル比SnO/ZnOが5より大きいため、金属製被封止物上で過剰に流動して、金属製被封止物からガラスがはみ出してしまい、接着性の評価を行うことができなかった。なお、試料No.14は、融点が低過ぎて、中温度域で使用できないものと考えられる。試料No.15は、減圧焼成、雰囲気焼成共に、焼成後に失透、変質がなかったが、金属製被封止物上で殆ど流動しなかったため、接着性の評価を行うことができなかった。   On the other hand, sample No. 12, 13, and 16 were neither devitrified nor altered after firing in both reduced-pressure firing and atmosphere firing, but they did not have adhesiveness to metal and were peeled off from the metal object after sealing. Sample No. 14 was neither devitrified nor altered after firing in both reduced pressure firing and atmosphere firing, but because the molar ratio SnO / ZnO was larger than 5, it flowed excessively on the metal sealed object, and the metal sealed The glass protruded from the stationary article, and the adhesiveness could not be evaluated. Sample No. No. 14 has a melting point that is too low to be used in the middle temperature range. Sample No. No. 15 was neither devitrified nor altered after firing in both reduced-pressure firing and atmosphere firing, but was hardly flowable on the metal object to be sealed, so the adhesion could not be evaluated.

以下、実施例に基づいて、本発明の封止用複合材料を詳述する。なお、以下の実施例は単なる例示である。本発明は、以下の実施例に何ら限定されない。   Hereinafter, based on an Example, the composite material for sealing of this invention is explained in full detail. The following examples are merely illustrative. The present invention is not limited to the following examples.

表4は本発明の実施例(No.17〜20)を示している。   Table 4 shows Examples (Nos. 17 to 20) of the present invention.

表4に記載のガラス粉末と耐火性フィラーを所定比率で混合して、各試料を作製した。なお、ガラス粉末と耐火性フィラーの平均粒子径D50を10μmとした。 Each sample was produced by mixing the glass powder described in Table 4 and the refractory filler at a predetermined ratio. Incidentally, the average particle diameter D 50 of the glass powder and the refractory filler and 10 [mu] m.

押し棒式熱膨張計(TMA、リガク製)により、30〜300℃の温度範囲における熱膨張係数を測定した。なお、各試料を緻密に焼結させたものを測定試料とした。   The thermal expansion coefficient in a temperature range of 30 to 300 ° C. was measured with a push rod type thermal dilatometer (TMA, manufactured by Rigaku). In addition, what measured each sample densely was used as the measurement sample.

次のようにして、接着性の有無を評価した。まず各試料を焼結させて、直径20mm、1mm厚の焼結体を作製した。次に、この焼結体を40mm×40mmのSUS430の金属プレート上に載置し、更にこの焼結体の上に、40mm×40mmのアルミナプレートを載せて、評価用試料を作製した。続いて、この評価用試料を表中の雰囲気で焼成した。最後に、SUS430の金属プレートとアルミナプレートの接着の有無を評価した。   The presence or absence of adhesiveness was evaluated as follows. First, each sample was sintered to produce a sintered body having a diameter of 20 mm and a thickness of 1 mm. Next, this sintered body was placed on a 40 mm × 40 mm SUS430 metal plate, and a 40 mm × 40 mm alumina plate was further placed on the sintered body to prepare a sample for evaluation. Subsequently, this evaluation sample was fired in the atmosphere shown in the table. Finally, the presence or absence of adhesion between the metal plate of SUS430 and the alumina plate was evaluated.

表4から明らかなように、試料No.17〜20は、30〜300℃の温度範囲における熱膨張係数が59.2×10−7〜64.5×10−7/℃であり、また表中の雰囲気による焼成で失透、変質がなく、良好な接着性を示していた。 As is apparent from Table 4, sample No. 17-20 has a thermal expansion coefficient of 59.2 × 10 −7 to 64.5 × 10 −7 / ° C. in a temperature range of 30 to 300 ° C., and devitrification and alteration are caused by firing in the atmosphere in the table. There was no good adhesiveness.

本発明の封止用ガラスは、450〜800℃の中温度域において、金属製被封止物を良好に封止可能であるため、例えばダイオードの封止、ガラスとジュメット線の封止、シーズヒーターの口元封止、磁気ヘッドの封止に好適であり、また耐火性フィラー等を添加して、金属製被封止物の熱膨張係数に整合させると、金属とセラミックの封止、例えばICパッケージの封止等にも好適に使用可能である。   The sealing glass of the present invention can satisfactorily seal a metal object in an intermediate temperature range of 450 to 800 ° C., for example, sealing of a diode, sealing of glass and jumet wire, seeds. It is suitable for sealing the mouth of the heater and the magnetic head, and by adding a refractory filler or the like to match the thermal expansion coefficient of the metal object to be sealed, sealing of metal and ceramic, for example, IC It can be suitably used for sealing a package or the like.

Claims (7)

金属製被封止物を封止するための封止用ガラスであって、
ガラス組成として、モル%表示で、SnO 15〜30%(但し、30%を含まず)、P 20〜40%、WO 5〜20%(但し、5%を含まず)、ZnO 3.4〜30%(但し、30%を含まず)を含有し、モル比SnO/ZnOが1以上4.5以下であることを特徴とする封止用ガラス。
A sealing glass for sealing a metal object to be sealed,
As a glass composition, in mol%, SnO 15 to 30% (not inclusive of 30%), P 2 O 5 20~40%, WO 3 5~20% ( not inclusive of 5%), ZnO Glass for sealing containing 3.4-30% (however, not including 30%) and having a molar ratio SnO / ZnO of 1 or more and 4.5 or less.
実質的にPbOを含まないことを特徴とする請求項1に記載の封止用ガラス。   The glass for sealing according to claim 1, which is substantially free of PbO. ガラス転移点が350〜500℃であることを特徴とする請求項1又は2に記載の封止用ガラス。   The glass for sealing according to claim 1 or 2, wherein a glass transition point is 350-500 ° C. 1.0×10−2Torr以下の減圧雰囲気における封止に用いることを特徴とする請求項1〜3の何れか一項に記載の封止用ガラス。 The sealing glass according to any one of claims 1 to 3, wherein the sealing glass is used for sealing in a reduced-pressure atmosphere of 1.0 x 10-2 Torr or less. 酸素濃度が5体積%以下の雰囲気における封止に用いることを特徴とする請求項1〜3の何れか一項に記載の封止用ガラス。   The glass for sealing according to any one of claims 1 to 3, which is used for sealing in an atmosphere having an oxygen concentration of 5% by volume or less. ガラス粉末と耐火性フィラーを含有する封止用複合材料において、
ガラス粉末が、請求項1〜5の何れか一項に記載の封止用ガラスからなることを特徴とする封止用複合材料。
In the sealing composite material containing glass powder and refractory filler,
The glass powder is made of the sealing glass according to any one of claims 1 to 5, wherein the sealing composite material is characterized in that
ガラス粉末の含有量が45〜100体積%、耐火性フィラーの含有量が0〜55体積%であることを特徴とする請求項6に記載の封止用複合材料。
The sealing composite material according to claim 6, wherein the content of the glass powder is 45 to 100% by volume and the content of the refractory filler is 0 to 55% by volume.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012046358A (en) * 2010-08-24 2012-03-08 Nippon Electric Glass Co Ltd Sealing glass tablet
JP2012046409A (en) * 2010-07-28 2012-03-08 Nippon Electric Glass Co Ltd Sealing glass

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2628007B2 (en) * 1992-08-03 1997-07-09 コーニング インコーポレイテッド Lead-free glass and sealing material using the same
JPH11349347A (en) * 1998-06-08 1999-12-21 Asahi Glass Co Ltd Crystalline low melting point glass composition
JP2000072479A (en) * 1998-06-19 2000-03-07 Asahi Glass Co Ltd Low melting point glass and its use
JP2001139344A (en) * 1999-11-05 2001-05-22 Asahi Glass Co Ltd Leadless low melting point glass and glass frit
JP2002160937A (en) * 2000-11-24 2002-06-04 Ngk Insulators Ltd Low temperature-meltable glass
JP2005350314A (en) * 2004-06-11 2005-12-22 Nippon Electric Glass Co Ltd Glass for sealing and sealing method
JP2008030972A (en) * 2006-07-26 2008-02-14 Agc Techno Glass Co Ltd Lead-free composition and press frit
JP2008037740A (en) * 2006-07-11 2008-02-21 Nippon Electric Glass Co Ltd Glass composition for sealing and sealing material
JP2009001433A (en) * 2007-06-19 2009-01-08 Nippon Electric Glass Co Ltd Sealing material
JP2010100485A (en) * 2008-10-24 2010-05-06 Nippon Electric Glass Co Ltd Nozzle for forming droplet

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2628007B2 (en) * 1992-08-03 1997-07-09 コーニング インコーポレイテッド Lead-free glass and sealing material using the same
JPH11349347A (en) * 1998-06-08 1999-12-21 Asahi Glass Co Ltd Crystalline low melting point glass composition
JP2000072479A (en) * 1998-06-19 2000-03-07 Asahi Glass Co Ltd Low melting point glass and its use
JP2001139344A (en) * 1999-11-05 2001-05-22 Asahi Glass Co Ltd Leadless low melting point glass and glass frit
JP2002160937A (en) * 2000-11-24 2002-06-04 Ngk Insulators Ltd Low temperature-meltable glass
JP2005350314A (en) * 2004-06-11 2005-12-22 Nippon Electric Glass Co Ltd Glass for sealing and sealing method
JP2008037740A (en) * 2006-07-11 2008-02-21 Nippon Electric Glass Co Ltd Glass composition for sealing and sealing material
JP2008030972A (en) * 2006-07-26 2008-02-14 Agc Techno Glass Co Ltd Lead-free composition and press frit
JP2009001433A (en) * 2007-06-19 2009-01-08 Nippon Electric Glass Co Ltd Sealing material
JP2010100485A (en) * 2008-10-24 2010-05-06 Nippon Electric Glass Co Ltd Nozzle for forming droplet

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012046409A (en) * 2010-07-28 2012-03-08 Nippon Electric Glass Co Ltd Sealing glass
JP2012046358A (en) * 2010-08-24 2012-03-08 Nippon Electric Glass Co Ltd Sealing glass tablet

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