JP2012035639A - Substrate breaking apparatus and substrate breaking method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate breaking apparatus capable of accurately positioning a breaking position even when a brittle material substrate to be broken is thin and is broken with a small pitch.SOLUTION: The substrate breaking apparatus includes: an elastic film 4; the upper breaking bars 6a and 6b which are arranged to enable vertical movement above the elastic film 4 and break along a scribing line 11; and a lower breaking bar 5 which is arranged to enable vertical movement under the elastic film 4 and breaks along the scribing line 11. Breaking is performed in such a state that the lower breaking bar 5 and a first upper breaking bar 6a pinch the brittle material substrate 1 by pressure-contacting the lower breaking bar 5 along the scribing line 11 opposite the side at which the scribing line 11 is formed.

Description

  The present invention relates to a substrate breaker capable of breaking a brittle material substrate such as a glass plate on which a scribe line is formed with high quality without depending on the plate thickness.

  When a plurality of electronic components are cut out by breaking a LTCC (Low Temperature Co-fired Ceramics) substrate made of a brittle material such as ceramic, a scribe line is formed on the surface of the LTCC substrate and a predetermined load is applied. As a result, the LTCC substrate is broken along the formed scribe line to cut out a plurality of electronic components.

  When the thickness of the LTCC substrate is thin, an excessive load is applied to a normal substrate break device, and not only a vertical crack but also an unexpected horizontal crack may occur. Due to the occurrence of horizontal cracks, the cross-section of the broken electronic component is not uniform, which is problematic in cutting out an electronic component that requires break accuracy.

  Therefore, various ideas have been made so that even a thin plate can be broken with high accuracy. For example, in Patent Document 1, the substrate is broken by the lower break bar 31B while being supported by the pair of upper substrate fixing bars 32A and 32A, or the upper break bar 31A is supported by the pair of lower substrate fixing bars 32B and 32B. A substrate break device for breaking a substrate is disclosed.

  In the substrate break device of Patent Document 1, since the substrate is supported at two points and the substrate is broken by a break bar positioned between the two points, the position where the break bar is pressed, that is, the accuracy of determining the break position is high. Moreover, even a thin substrate such as a laminated substrate can be broken with high accuracy.

JP 2006-289625 A

  However, in the substrate break apparatus as disclosed in Patent Document 1, the substrate to be broken is supported at two points, and the substrate is broken by a break bar positioned between the two supported points. There is a considerable shift in the break position due to bending of the thin substrate. When used for cutting out a small electronic component, positioning accuracy capable of corresponding to a minimum pitch is required for the break position.

  Further, when a break is made so as to be sandwiched from above and below as in Patent Document 1, it is difficult to detect a mark or the like for specifying a break position when breaks occur continuously. Therefore, in order to pinpoint the break position with high accuracy, it is necessary to move the break bar positioned at least above to ensure the field of view of the mark or the like every time the positioning operation of the substrate to be broken is executed, and the operation is complicated. There was also the problem of becoming.

  The present invention has been made in view of such circumstances, and even when the brittle material substrate to be broken is a thin plate and breaks at a small pitch, the substrate break can be accurately positioned. An object is to provide an apparatus.

  In order to achieve the above object, a substrate break device according to a first aspect of the present invention is a substrate break device that breaks a brittle material substrate having a scribe line formed on a surface thereof along the scribe line. A substrate support plate having a corresponding rectangular opening formed thereon, an elastic film mounted on the upper surface of the substrate support plate so as to cover the opening, and fixing the brittle material substrate; and above the elastic film The first upper break bar and the second upper break bar which are arranged so as to be movable in the vertical direction and break along the scribe line, and are moved in the vertical direction below the elastic film. And a lower break bar arranged to break along the scribe line, the lower break bar being disposed on the scribe line. Crimping along the scribe line to the side opposite to the side where the live line is formed, the second upper break in a state where the brittle material substrate is sandwiched between the lower break bar and the first upper break bar It is characterized by a break at the bar.

  In the first invention, a substrate support plate in which a rectangular opening corresponding to the shape of the brittle material substrate is formed, and mounted on the upper surface of the substrate support plate so as to cover the opening, to fix the brittle material substrate. An elastic film, a first upper break bar and a second upper break bar which are arranged so as to be movable in the vertical direction above the elastic film and break along a scribe line, and an elastic film And a lower break bar that breaks along the scribe line and is arranged so as to be able to move vertically. The lower break bar is crimped to the opposite side of the scribe line along the scribe line, and the second upper break bar is sandwiched between the lower break bar and the first upper break bar. By making a break at, it is possible to reliably break along the scribe line, and to accurately position the break position. In addition, by supporting the break position from above and below, an unexpected crack does not occur even when a break is caused at a small pitch, and the possibility of unevenness in the broken section is low.

  The substrate breaker according to a second aspect of the present invention is the substrate breaker according to the first aspect, wherein the elastic film is fixed to the substrate support plate by a film crimping mechanism disposed around the four sides of the opening. It is characterized by that.

  In the second invention, the elastic film is fixed to the substrate support plate by a film crimping mechanism disposed around the four sides of the opening, thereby allowing the gap between the elastic film and the rectangular brittle material substrate. Can be shortened, and it is possible to minimize the positional deviation due to the stretch of the elastic film.

  The substrate breaker according to a third aspect of the present invention is the substrate breaker according to the first or second aspect, wherein an imaging device is disposed above the first upper breakbar and the second upper breakbar, and the imaging The mark given to the brittle material substrate is imaged by an apparatus to adjust the installation position of the brittle material substrate, and the first upper break bar and the second upper break bar are An oblique movement mechanism capable of moving obliquely at a predetermined angle with respect to the substrate support plate is provided.

  In the third invention, the imaging device is arranged above the first upper break bar and the second upper break bar. The mark given to the brittle material substrate is imaged by the imaging device, and the installation position of the brittle material substrate is adjusted. By providing an oblique movement mechanism capable of moving the first upper break bar and the second upper break bar obliquely at a predetermined angle with respect to the substrate support plate, a brittle material is obtained by the imaging device before the break starts. The mark attached to the substrate can be imaged, and the break position can be accurately positioned.

  The substrate breaker according to a fourth aspect of the present invention is the substrate breaker according to the first or second aspect, wherein an imaging device is disposed above the first upper breakbar and the second upper breakbar, and the imaging The mark given to the brittle material substrate is imaged by an apparatus to adjust the installation position of the brittle material substrate, and the first upper break bar and the second upper break bar are A horizontal movement mechanism capable of moving in a substantially horizontal direction with respect to the substrate support plate is provided.

  In the fourth invention, the imaging device is disposed above the first upper break bar and the second upper break bar. The mark given to the brittle material substrate is imaged by the imaging device, and the installation position of the brittle material substrate is adjusted. By providing a horizontal movement mechanism capable of moving the first upper break bar and the second upper break bar in a substantially horizontal direction with respect to the substrate support plate, the imaging device applies the brittle material substrate before the break starts. The marked mark can be imaged, and the break position can be accurately positioned.

  As described above, the lower break bar is crimped along the scribe line to the side opposite to the side where the scribe line is formed, and the brittle material substrate is sandwiched between the lower break bar and the first upper break bar. By making a break at the upper break bar 2, it is possible to reliably break along the scribe line, and to accurately position the break position. In addition, by supporting the break position from above and below, an unexpected crack does not occur even when a break is caused at a small pitch, and the possibility of unevenness in the broken section is low.

It is sectional drawing in the surface substantially orthogonal to the moving direction of the brittle material board | substrate which shows the structure of the board | substrate break apparatus which concerns on embodiment of this invention. It is a top view which shows the state which mounted the LTCC board | substrate. It is a top view which shows the state which carried out the scribe process in the state which mounted the LTCC board | substrate. It is sectional drawing which illustrates typically the break process of the board | substrate break apparatus which concerns on embodiment of this invention. It is a schematic diagram which shows the positional relationship of the board | substrate break apparatus and imaging device in the case of moving an upper break bar up and down. It is a schematic diagram which shows the positional relationship of the board | substrate break apparatus and imaging device in the case of moving up and down the upper break bar of the board | substrate break apparatus which concerns on embodiment of this invention.

  Hereinafter, the present invention will be described in detail with reference to the drawings illustrating embodiments thereof. FIG. 1 is a cross-sectional view taken along a plane substantially perpendicular to the moving direction of a brittle material substrate made of a brittle material, showing the configuration of the substrate breaker according to the embodiment of the present invention.

  As shown in FIG. 1, the substrate breaker according to the embodiment of the present invention opens a strong adhesive elastic film 4 using a dicing frame 3 and has an opening 7 from the lower surface in the dicing frame 3. It fixes to the upper surface of the support plate 2 (for example, by the vacuum suction mechanism of the substrate support plate 2). The upper surface of the elastic film 4 has strong adhesiveness, and this adhesiveness can hold the brittle material substrate 1 to be scribed or broken.

  The substrate break device has two upper breaks that can move up and down above the brittle material substrate 1 with the brittle material substrate 1 to be broken mounted on the upper surface of the opening 7 of the substrate support plate 2. Bars 6a and 6b and one lower break bar 5 that can move up and down below the elastic film 4 are provided. A plurality of scribe lines 11, 11,... Are formed on the upper surface of the brittle material substrate 1 placed on the elastic film 4.

  When the brittle material substrate 1 is broken by the substrate break device, the upper break bars 6 a and 6 b are lowered across the scribe line 11 formed on the upper surface of the brittle material substrate 1, and the lower break bar 5 is moved to the scribe line 11. The brittle material substrate 1 is broken along the scribe line 11 by raising it so as to match the position.

  FIG. 2 is a plan view showing a state in which the LTCC substrate 1 is mounted as the brittle material substrate 1. Since the LTCC substrate 1 on which a plurality of electronic components are integrally formed is square, a rectangular opening 7 is provided at the center of the substrate support plate 2. The elastic film 4 is placed so as to cover the rectangular opening 7, and the elastic film 4 is opened by the dicing frame 3 that functions as a film opening mechanism provided outside the substrate supporting plate 2. (For example, by a vacuum suction mechanism on the upper surface). The LTCC substrate 1 is provided with a mark (alignment mark) 8 for alignment with the lower break bar 5. For example, by imaging the surface of the LTCC substrate 1 from above with an imaging device or the like, the break position can be positioned based on the imaged alignment mark 8.

  FIG. 3 is a plan view showing a state in which the LTCC substrate 1 is mounted and scribed. As shown in FIG. 3, a plurality of scribe lines 11, 11,... Are formed by a scribe device vertically and horizontally so that an electronic component can be cut out from the mounted LTCC substrate 1.

  After the scribing process, the substrate is moved to the substrate breaker and aligned. After the alignment, a protective sheet for protecting the surface of the LTCC substrate 1 is attached to the scribed surface, and a break is caused by pressurization by a three-point bending method using three break bars. FIG. 4 is a cross-sectional view for schematically explaining a break process of the substrate break device according to the embodiment of the present invention.

  As shown in FIG. 4A, the substrate break device according to the present embodiment has two pieces so as to straddle the scribe line 11 formed on the upper surface of the LTCC substrate 1 mounted on the substrate support plate 2. The upper break bars 6 a and 6 b are arranged, the one upper break bar 6 a is lowered, and the lower break bar 5 is raised from below to the position of the scribe line 11. As a result, the LTCC substrate 1 is clamped by the upper and lower break bars, and even when the LTCC substrate 1 is warped, bent or the like is generated, it is adjusted to be substantially horizontal by the pressure of the break bar. Can do.

  Thereafter, the LTCC substrate 1 can be broken along the scribe line 11 by lowering the other upper break bar 6b. After the break, the upper break bars 6a and 6b are raised and the lower break bar 5 is lowered, and then the substrate support plate 2 is pitch-moved until the next scribe line 11 is directly above the lower break bar 5, and the above-described operation Is repeated to break the LTCC substrate 1.

  The order of movement of the upper break bars 6a and 6b and the lower break bar 5 is not limited to the order described above. For example, in a state where only the upper break bars 6a and 6b are lowered first at a position sandwiching the scribe line 11 to be broken and pressed against the LTCC substrate 1 to be broken, thereby reducing warpage, bending and the like. The lower break bar 5 is raised from below. Thereby, the LTCC substrate 1 can be broken along the scribe line 11.

  By irradiating UV from the back side of the elastic film 4 in a broken state, the adhesive force is lost, whereby each electronic component can be separated from the elastic film 4 as separated pieces.

  In this way, the lower break bar 5 is crimped along the one scribe line 11 to the side opposite to the side on which the scribe lines 11, 11,... Are formed, and the lower break bar 5 and the upper break bar 6a. Since the upper break bar 6b is lowered while the LTCC substrate 1 is sandwiched, the scribe line 11 to be broken can be specified with high accuracy, and the break position is supported from above and below to break at a small pitch. However, it is difficult to generate cracks that are not assumed, and the possibility that irregularities are generated in the broken cross section is reduced, so that it can be used for cutting out small electronic components.

  Note that an imaging device for alignment is disposed above the upper break bars 6a and 6b. The imaging mark is used to image the alignment mark 8 provided on the LTCC substrate 1 and the installation position of the LTCC substrate 1 is adjusted. FIG. 5 is a schematic diagram showing the positional relationship between the substrate break device and the imaging device when the upper break bars 6a and 6b are moved up and down.

  FIG. 5A is a schematic diagram showing a state in which the upper break bars 6a and 6b are raised, and FIG. 5B is a schematic diagram showing a state in which the upper break bars 6a and 6b are lowered during a break. is there. In either case, the upper break bars 6a and 6b are obstructive, and the image-taking device 20 cannot be used to image the alignment mark 8 provided on the LTCC substrate 1, and the break position can be positioned. Can not.

  Therefore, in the present embodiment, the upper break bars 6a and 6b are provided with an oblique movement mechanism capable of moving the upper break bars 6a and 6b obliquely at a predetermined angle with respect to the substrate support plate 2, thereby enabling alignment by the imaging device 20. The mark 8 can be imaged, and the break position can be reliably positioned.

  FIG. 6 is a schematic diagram showing a positional relationship between the substrate break device and the imaging device when the upper break bars 6a and 6b of the substrate break device according to the embodiment of the present invention are moved up and down. FIG. 6A is a schematic diagram showing a state in which the upper break bars 6a and 6b are raised, and FIG. 6B is a schematic diagram showing a state in which the upper break bars 6a and 6b are lowered during a break. is there.

  As shown in FIG. 6B, when the upper break bars 6a and 6b are lowered, the upper break bars 6a and 6b become an obstacle, and the alignment provided on the LTCC substrate 1 using the imaging device 20 is performed. The mark 8 cannot be imaged and cannot be aligned. However, as shown in FIG. 6A, when the upper break bars 6a and 6b are raised obliquely upward, the upper break bars 6a and 6b do not interfere with imaging, and are disposed above. The alignment mark 8 provided on the LTCC substrate 1 can be imaged using the imaging device 20.

  Note that the method of enabling imaging by the imaging device 20 is not limited to the above-described method of raising the upper break bars 6a and 6b obliquely upward. For example, the upper break bars 6a and 6b are attached to the substrate support plate 2. On the other hand, a horizontal movement mechanism capable of moving in a substantially horizontal direction is provided, and in the case of alignment, the upper break bars 6a and 6b are directed toward FIG. 6 so that an image directly below the imaging device 20 can be taken. May be moved in the left-right direction.

  As described above, according to the present embodiment, the lower break bar 5 is pressure-bonded along the scribe line 11 to the side opposite to the side where the scribe lines 11, 11,. By breaking at the upper break bar 6b with the LTCC substrate 1 which is a brittle material sandwiched between the upper break bar 6a, it is possible to reliably break along the scribe line 11 and to accurately position the break position. Can be done. In addition, by supporting the break position from above and below, an unexpected crack does not occur even when a break is caused at a small pitch, and the possibility of unevenness in the broken section is low.

  The target of the break is not limited to the LTCC substrate, and is not particularly limited as long as the substrate is made of a brittle material that needs to break at a small pitch. In addition, it goes without saying that various modifications and replacements are possible within the scope of the present invention.

1 Brittle material substrate (LTCC substrate)
2 Substrate support plate 3 Dicing frame (film crimping mechanism)
4 Elastic Film 5 Lower Break Bar 6, 6a, 6b Upper Break Bar 7 Opening 8 Alignment Mark (Alignment Mark)
11 scribe line 20 imaging device

Claims (6)

In a substrate break device for breaking a brittle material substrate having a scribe line formed on the surface along the scribe line ,
An elastic film which fixes the front Symbol brittle material substrate,
A first upper break bar and a second upper break bar which are arranged so as to be movable in the vertical direction above the elastic film and which break along the scribe line;
A lower break bar arranged along the scribe line, arranged so as to be movable in the vertical direction below the elastic film,
The lower break bar is crimped along the scribe line to the side opposite to the side where the scribe line is formed, and the brittle material substrate is sandwiched between the lower break bar and the first upper break bar. Breaking at the second upper break bar, the substrate break device. 2. The substrate breaker according to claim 1, wherein the brittle material substrate is an LTCC substrate. The substrate breaker according to claim 1, wherein the elastic film is opened using a dicing frame. In a substrate break method of breaking a brittle material substrate on which a scribe line is formed along the scribe line,
  An elastic film for fixing the brittle material substrate;
  A first upper break bar and a second upper break bar which are arranged so as to be movable in the vertical direction above the elastic film and which break along the scribe line;
  A lower break bar which is arranged so as to be movable in the vertical direction below the elastic film and which breaks along the scribe line;
  Using,
  The lower break bar is crimped along the scribe line to the side opposite to the side where the scribe line is formed, and the brittle material substrate is sandwiched between the lower break bar and the first upper break bar. Breaking at the second upper break bar, the substrate break method. 5. The substrate break method according to claim 4, wherein the brittle material substrate is an LTCC substrate. The substrate break method according to claim 4, wherein the elastic film is opened using a dicing frame.