JP2012032157A - Thermal shock test device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a thermal shock test device for checking a physical change or the like with respect to a thermal shock under various temperature environments for such an electrical and electronic component as a semiconductor element, and capable of achieving quick and highly accurate temperature control.SOLUTION: This thermal shock test device is provided with: a low temperature chamber in which a first heat storage body is stored; a high temperature chamber in which a second heat storage body is stored; and a mobile stand which is repeatedly introduced to the low temperature chamber and the high temperature chamber in such a state that a sample is placed. The mobile stand is deprived of heat by the first heat storage body inside the low temperature chamber and given heat by the second heat storage body inside the high temperature chamber.

Description

  The present invention relates to a thermal shock test apparatus used when a power module using a new material such as an SiC element is manufactured.

  2. Description of the Related Art Conventionally, a thermal shock test apparatus has been used for examining changes in physical properties and the like with respect to thermal shocks under various temperature environments for electrical and electronic parts such as semiconductor elements.

  A typical example of a thermal shock test apparatus is a so-called gas phase thermal shock test apparatus that forms a desired temperature environment by preparing a large amount of low-temperature air and high-temperature air and alternately introducing these air into a test room. is there.

  Patent Document 1 discloses a plate temperature control type environmental test apparatus as an example of a so-called contact-type thermal shock test apparatus. Since such a contact-type thermal shock test apparatus adjusts the temperature of the sample by a direct contact method using a cooling plate or a heating plate on which the sample is placed, the time required for temperature adjustment compared to a vapor-phase type thermal shock test apparatus. Can be shortened, and the test chamber can be formed in a small capacity.

JP 2007-198966 A

  In the contact thermal shock test apparatus, it is necessary to partition the high temperature chamber and the low temperature chamber in order to perform temperature control with higher accuracy. However, if the sample moves between a plurality of partitioned chambers, the advantages of the contact thermal shock test apparatus as described above are lost, and it takes a long time to adjust the temperature, and the entire apparatus becomes large. There is a risk that.

  Accordingly, an object of the present invention is to provide a thermal shock test apparatus capable of realizing a quick and highly accurate temperature control.

  In order to solve the above-mentioned problem, a thermal shock test apparatus according to the present invention includes a low temperature chamber in which a first heat storage body is stored, a high temperature chamber in which a second heat storage body is stored, and a sample placed thereon. A movable base repeatedly introduced into the low temperature chamber and the high temperature chamber, the movable base is deprived of heat by the first heat storage body inside the low temperature chamber, and the second heat storage inside the high temperature chamber It is characterized by being given heat from the body.

  According to such a thermal shock test apparatus of the present invention, the movable table on which the sample is placed is repeatedly introduced into the low temperature chamber and the high temperature chamber in which the first and second heat storage bodies are accommodated, respectively. Since heat is exchanged between the movable table and the sample, and heat is transmitted between the movable table and the sample, the temperature of the sample can be quickly and accurately adjusted even if the apparatus is downsized.

  Further, in the thermal shock test apparatus of the present invention, the thermal shock test apparatus further includes a middle greenhouse in which a third heat storage body is accommodated, wherein the movable base is a first heat storage inside the low temperature chamber. After being deprived of heat by the body, it is introduced into the middle greenhouse and given heat from the third heat storage body, and after being given heat from the second heat storage body inside the high temperature chamber, it is introduced into the middle greenhouse. It is preferable to be formed so that heat is taken away by the third heat storage body. It is necessary to adjust the temperature of the sample by providing a middle greenhouse in which such a third heat storage body is housed, and when the movable platform on which the sample is placed moves between the low temperature chamber and the high temperature chamber via the middle greenhouse. Time can be shortened.

  Moreover, it is preferable that the internal temperature of a middle greenhouse is hold | maintained at normal temperature. By maintaining the internal temperature of the medium temperature room at room temperature, it is not necessary to provide a mechanism for heating or cooling from the outside in the medium temperature room. Therefore, it is possible to minimize the overall size of the equipment due to the medium temperature room. It becomes.

  Moreover, it is preferable that the said thermal storage body has sufficient heat capacity in order to suppress an own temperature fluctuation | variation at the time of the heat transfer between the said movable bases. That is, it is preferable that the first to third heat storage bodies have a heat capacity sufficiently larger than at least the heat capacity of the movable table.

  Moreover, in the thermal shock test apparatus of this invention, it is preferable that heat transfer is performed between the said movable stand and the said thermal storage body by mounting the said movable base on the said thermal storage body. In this way, the movable base is placed on the heat storage body so that the movable base and the heat storage body are in contact with each other, heat transfer is performed through the contact surface, and heat transfer is further performed between the movable base and the sample. By doing so, the movable part of the thermal shock test apparatus capable of adjusting the temperature quickly and with high accuracy is formed by a simple mechanism.

  Moreover, it is preferable that the thermal shock test apparatus of this invention is equipped with the raising / lowering means which raises / lowers the said movable base above the said thermal storage body, and the horizontal movement means which moves the said movable base to a horizontal direction. That is, when the movable base is placed on the first to third heat storage bodies, the movable base is lowered above the heat storage bodies, and when the movable base is introduced from, for example, the low temperature chamber to the high temperature chamber, the first The movable base placed on the heat storage body is raised above the heat storage body and then moved horizontally to be introduced into the high temperature chamber, and then lowered above the second heat storage body to lower the second heat storage body. Is placed on the heat storage body. By configuring the thermal shock test apparatus in this way, the mechanism for moving the movable base can be formed in a very simple form, so that the entire apparatus can be reduced in size and cost.

  Moreover, it is preferable that the said horizontal moving means consists of a rail mechanism provided with the rail extended over the said low temperature chamber and the said high temperature chamber, and a tension mechanism which pulls the said movable stand along the said rail. By configuring the horizontal movement means by the rail mechanism and the pulling mechanism, for example, the lifting mechanism and the horizontal movement means can be driven simply by pulling the movable base moving on the rail mechanism with a wire and raising and lowering the rail mechanism. The operation of the movable table can be easily controlled.

  The thermal shock test apparatus of the present invention preferably includes a cooler that cools the first heat storage body and a heater that heats the second heat storage body. For example, a cooler using a Peltier element and a heater using an electric heater can be used.

  Moreover, it is preferable that the said heat storage body consists of copper, and the said movable stand consists of aluminum. For example, by forming the heat storage body with a thick copper plate and forming the movable base with a thin aluminum plate, the temperature of the movable base can be controlled while suppressing the temperature fluctuation of the heat storage body during heat transfer between the heat storage body and the movable base. It is possible to change quickly.

  Moreover, it is preferable that the thermal shock test apparatus of this invention is equipped with the dryer which dries the inside of the said low temperature chamber. By providing such a dryer, for example, by blowing dry air into the low temperature chamber, it is possible to effectively prevent condensation and freezing in the low temperature chamber.

  It is preferable that the thermal shock test apparatus of the present invention includes a radiator that releases heat from the high temperature chamber. By providing such a radiator, the temperature adjustment in the high temperature chamber can be performed efficiently. In addition, for example, glass wool or vacuum heat insulating material is provided around the high temperature chamber to make it difficult for heat to escape from the high temperature chamber, and a heat sink made of aluminum is provided so that heat can be released from above the high temperature chamber through the heat sink With this configuration, it is possible to suppress the temperature rise of the side surface and the bottom surface of the high temperature chamber, so that a person operating the thermal shock test apparatus is prevented from being burned.

  It is preferable to provide a position detecting means for detecting the position of the movable table. Since the thermal shock test device of the present invention basically shifts between processes such as a temperature raising process and a temperature lowering process by moving the movable table, process control is ensured by accurately detecting the current position of the movable table. Can be performed.

  The thermal shock test apparatus according to the present invention provides a thermal shock test apparatus that is small in size, consumes less energy, and can perform temperature adjustment with high accuracy and speed.

It is a schematic sectional drawing which shows the thermal shock test apparatus which concerns on one embodiment of this invention. It is a characteristic view which shows the repetition test result of temperature rising / falling temperature implemented using the thermal shock test apparatus of FIG.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic cross-sectional view showing a thermal shock test apparatus according to an embodiment of the present invention. The thermal shock tester 1 includes three chambers, a low temperature chamber 2, a middle greenhouse 3, and a high temperature chamber 4. A copper plate 5 as a first heat storage body is installed in the lower part of the low temperature greenhouse 2, and the temperature is adjusted by a Peltier element cooling type cooler 6 installed around the low temperature chamber 2. On the other hand, a copper plate 7 as a second heat storage body is installed at the lower part of the high temperature chamber 4, and the temperature is adjusted by an electric heating heater 8 installed around the high temperature chamber 4.

  A test piece 9 as a sample is placed on the upper surface of a carriage 10 as a movable table and is subjected to a thermal shock test. The carriage 10 is configured to be movable between the low temperature chamber 2, the middle greenhouse 3, and the high temperature chamber 4 by moving on the rail 21. FIG. 1 shows a state where the carriage 10 is placed on the copper plate 7 in the high temperature chamber 4, and the test piece 9 is exposed to a high temperature condition in this state. From this state, when the test piece 9 moves to the low temperature chamber 2 through the middle greenhouse 3, the carriage 10 is placed on the copper plate 5 to be cooled, and further, the test piece 9 on the carriage 10 is cooled to perform the test. The piece 9 is exposed to low temperature conditions. Then, the carriage 10 again moves to the high temperature chamber 4 through the middle greenhouse 3, and the test piece 9 is again exposed to the high temperature condition, thereby achieving one temperature cycle of the thermal shock test. By the operation of the carriage 10 as described above, the temperature of the test piece 9 can be rapidly increased and decreased.

  Although not shown, a copper plate as a third heat storage body on which the carriage 10 is placed is also installed in the lower part of the middle greenhouse 3, and the temperature of the carriage 10 is adjusted by contacting the copper plate with the copper plate. The That is, when the cart 10 is introduced into the middle greenhouse 3 from the high temperature chamber 4, the cart 10 is preliminarily cooled to prepare for a cooling operation in the low temperature chamber 2. Further, when the cart 10 is introduced into the middle greenhouse 3 from the low temperature chamber 2, the cart 10 is preliminarily heated to prepare for a heating operation in the high temperature chamber. By such an action of the middle greenhouse 3, it is possible to apply a thermal shock to the test piece 9 quickly and efficiently.

  A low temperature side door 11 is provided between the middle greenhouse 3 and the low temperature chamber 2, and the low temperature side door 11 is opened when the cart 10 moves between the low temperature chamber 2 and the middle greenhouse 3, Time is closed. Inside the low temperature side door 11, a heat insulating material 13 is enclosed, and the low temperature in the low temperature chamber 2 is maintained. The heat insulating material 13 is also sealed inside the peripheral wall of the low temperature chamber 2.

  Similar to the low greenhouse side, a high temperature side door 12 is provided between the middle greenhouse 3 and the high temperature chamber 4, and when the carriage 10 moves between the high temperature chamber 4 and the middle greenhouse 3, Opened, otherwise closed. Inside the high temperature side door 12, the heat insulating material 14 is enclosed, and the high temperature in the high temperature chamber 4 is maintained. The heat insulating material 14 is also sealed inside the surrounding wall of the high temperature chamber 4.

  The carriage 10 moves on the rail 21 when the wire 16 connected to the carriage 10 is pulled by the power generated by the motor 15. The trolley | bogie 10 stops in the approximate center position of each room in each room 3-5. In each of the chambers 3 to 5, plate-like copper plates 5, 7 and the like are installed, and heat is transferred between the copper plate and the carriage 10 by placing the carriage 10 on the copper plate. And the temperature of the test piece 9 is adjusted to preset temperature by adjusting the trolley | bogie 10 to preset temperature. The material of the carriage 10 is preferably a material having a small heat capacity so as to cope with a rapid temperature change. In this embodiment, the cart 10 is made of aluminum in consideration of cost.

  In this embodiment, when the cart 10 moves in the horizontal direction, the cart 10 is pulled away from the copper plate by lifting the entire rail 21. When the carriage 10 stops in each of the chambers 3 to 5, the entire rail 21 is immediately lowered to bring the carriage 10 into contact with the copper plate. In this way, heat can be efficiently transferred between the carriage 10 and the copper plate.

  Since the inside of the low greenhouse 2 is easily frozen, it is preferable to remove moisture in the low temperature chamber 2. Specifically, a dryer can be provided in the low temperature chamber 2, or the air in the low temperature chamber 2 can be circulated while passing through the dryer.

  In order to keep the temperature in the high greenhouse 4 and the low temperature chamber 2 at the set temperature, a vacuum heat insulating material and glass wool used for a refrigerator or the like are enclosed as a heat insulating material in the wall of the thermal shock test apparatus 1. For example, for the high temperature chamber 4, glass wool is arranged in the vicinity of the heater 8 provided in the wall of the high temperature chamber 4, and the double wall surface provided in the vicinity of the outer surface of the thermal shock test apparatus 1 with the vacuum heat insulating material. Arranged inside the structure. Further, glass wool is uniformly enclosed in the low temperature chamber 2.

  The low greenhouse 2 and the high temperature chamber 4 are supported by anchors 17 and 18 as support columns, respectively. The weight of the thermal shock test apparatus 1 is mainly composed of the weights of the heat insulating materials 13 and 14, the copper plates 5 and 7, and the carriage 10, and the copper plate is particularly heavy. Therefore, if the shafts of the anchors 17 and 18 that support the thermal shock test apparatus 1 are formed thick, heat may escape to the floor or the ground via the anchors 17 and 18 and energy efficiency may be reduced. Therefore, it is preferable that the anchor is made of an aluminum hollow pipe so that a decrease in energy efficiency is prevented while maintaining the strength.

  In order to measure the temperature of each chamber 3-5, there are three thermocouples as temperature sensors in the high temperature chamber 4 (two on the plate and one on the inner wall), two in the middle greenhouse 3, and the low temperature chamber 3 in 2 (2 on the plate and 1 on the inner wall), respectively.

  In order to detect the position of the carriage 10, optical sensors as position detection means are installed in the respective chambers 3 to 5. The optical sensor is configured to be able to calibrate a set position where the carriage 10 should stop.

  Below, the example of the operation procedure in the case of performing a thermal shock test using the thermal shock test apparatus 1 in this embodiment is shown.

[1. (High temperature exposure)
(1-1)
The high temperature side door 12 is opened, the carriage 10 is moved to the high temperature chamber 4, the high temperature side door 12 is closed, and the temperature rise of the carriage 10 is awaited.

(1-2)
In the first high-temperature exposure, the temperature setting is set to a predetermined temperature + 10 ° C. (can be arbitrarily set), and is reset to a predetermined temperature after a predetermined time.

(1-3)
After reaching the predetermined temperature and entering the holding state, the system waits until the specified time elapses.

(1-4)
While waiting for this designated time, the temperature of the low temperature chamber 2 is set to a predetermined temperature of −10 ° C. (can be arbitrarily set), and is reset to that temperature (waiting temperature for the next step).

(1-5)
After the designated time has elapsed, the high temperature side door 12 is opened, the carriage 10 is moved to the intermediate chamber 3, and the high temperature side door 12 is closed.

[2. Medium temperature exposure (1)]
(2-1)
Wait for the temperature of the carriage 10 to drop in the middle greenhouse 3.

(2-2)
Open the middle greenhouse valve of the dryer (dry air) and wait until it reaches the dry air temperature or + 20 ° C (which can be specified). The temperature setting value is used so that the dry air temperature can be stored as a parameter.

(2-3)
An error occurs if the temperature does not reach ± 10 ° C within a given time.

(2-4)
Close the dry air middle greenhouse valve and proceed to the next step.

[3. (Low temperature exposure)
(3-1)
The low temperature side door 11 is opened, the carriage 10 is moved to the low temperature chamber 2, the low temperature side door 11 is closed, and the temperature of the carriage 10 is lowered.

(3-2)
In the initial low temperature exposure, the temperature is set to a predetermined temperature of −10 ° C. (can be set arbitrarily), and after a predetermined time, the temperature is reset to the predetermined temperature.

(3-3)
After reaching the predetermined temperature and entering the holding state, the system waits until the specified time elapses.

(3-4)
While waiting for this designated time, the temperature of the high-temperature tank is set to a predetermined temperature + 10 ° C. (can be arbitrarily set), and is reset to that temperature (next step waiting temperature).

(3-5)
After the specified time has elapsed, the low temperature side door 11 is opened, the carriage 10 is moved to the middle greenhouse 3 and the low temperature side door 11 is closed.

[4. Medium temperature exposure (2)]
(4-1)
Wait for the temperature of the carriage 10 to rise in the middle greenhouse 3.

(4-2)
Fully open the middle air side valve of dry air and wait for it to reach its dry air temperature or + 20 ° C (which can be specified).

(4-3)
An error occurs if the temperature does not reach ± 10 ° C within a given time.

(4-4)
Close the dry air valve and continue.

[5. repetition〕
[1. High temperature exposure] to [4. Medium temperature exposure (2)] is repeated a specified number of times to execute a thermal shock cycle.

  FIG. 2 shows the results of a repeated thermal shock test of temperature increase / decrease performed using the thermal shock test apparatus of FIG.

  According to FIG. 2, in the high temperature chamber 4 maintained at 300 ° C., the temperature of the test piece 9 increases from room temperature to 300 ° C. in about 300 seconds = 5 minutes. Further, in the low temperature chamber 2 maintained at −40 ° C., the temperature of the test piece 9 drops from room temperature + 20 ° C. to −40 ° C. in about 250 seconds = 4 minutes. The time required for the movement from the middle greenhouse 3 to the high temperature chamber 4 by opening and closing the high temperature side door 11 and the movement from the middle greenhouse 3 to the low temperature chamber 2 by opening and closing the low temperature side door 12 is as follows. Each time is about 3 seconds, and the time for one temperature cycle is 3 seconds × 4 = 12 seconds. That is, 5 minutes + 4 minutes + 12 seconds = 9 minutes and 12 seconds is the total time, and it was found that one cycle of the thermal shock test can be sufficiently performed within 15 minutes.

  The thermal shock test apparatus according to the present invention can be used to evaluate the performance reliability of a module or the like of an automotive inverter that requires high heat resistance.

DESCRIPTION OF SYMBOLS 1 Thermal shock test apparatus 2 Low greenhouse 3 Middle greenhouse 4 High greenhouse 5, 7 Copper plate 6 Cooler 8 Heater 9 Test piece 10 Carriage 11 Low temperature side door 12 High temperature side door 13, 14 Heat insulation material 15 Motor 16 Wires 17, 18 Anchor 21 rail

Claims (12)

  A low temperature chamber in which the first heat storage body is stored, a high temperature chamber in which the second heat storage body is stored, and a movable table that is repeatedly introduced into the low temperature chamber and the high temperature chamber in a state where a sample is placed, The movable table is deprived of heat by the first heat storage body inside the low temperature chamber, and is given heat from the second heat storage body inside the high temperature chamber.   Furthermore, a thermal shock test apparatus comprising a middle greenhouse in which a third heat storage body is accommodated, wherein the movable base is introduced into the middle greenhouse after heat is taken away by the first heat storage body inside the low temperature chamber The heat is applied from the third heat storage body, and the heat is supplied from the second heat storage body inside the high temperature chamber, and then introduced into the middle greenhouse and deprived of heat by the third heat storage body. The thermal shock test apparatus according to 1.   The thermal shock test apparatus according to claim 2, wherein an internal temperature of the middle greenhouse is maintained at room temperature.   The thermal shock test apparatus according to any one of claims 1 to 3, wherein the heat storage body has a sufficient heat capacity to suppress a temperature fluctuation of the heat storage body during heat transfer with the movable base.   The thermal shock test apparatus according to any one of claims 1 to 4, wherein heat transfer is performed between the movable base and the heat storage body by placing the movable base on the heat storage body.   The thermal shock test apparatus according to any one of claims 1 to 5, comprising elevating means for elevating and lowering the movable base above the heat storage body and horizontal moving means for moving the movable base in a horizontal direction.   The thermal shock test apparatus according to claim 6, wherein the horizontal moving unit includes a rail mechanism including a rail extending over the low temperature chamber and the high temperature chamber, and a pulling mechanism that pulls the movable table along the rail.   The thermal shock test apparatus in any one of Claims 1-7 provided with the cooler which cools a 1st thermal storage body, and the heater which heats a 2nd thermal storage body.   The thermal shock test apparatus according to any one of claims 1 to 8, wherein the heat storage body is made of copper and the movable base is made of aluminum.   The thermal shock test apparatus in any one of Claims 1-9 provided with the dryer which dries the inside of the said low temperature chamber.   The thermal shock test apparatus in any one of Claims 1-10 provided with the heat radiator which discharge | releases heat from the said high temperature chamber. The thermal shock test apparatus according to claim 1, further comprising a position detection unit that detects a position of the movable table.

Images