CN111103209A - Rapid test method for fatigue resistance of ceramic lining plate - Google Patents
Rapid test method for fatigue resistance of ceramic lining plate Download PDFInfo
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- CN111103209A CN111103209A CN201811250389.XA CN201811250389A CN111103209A CN 111103209 A CN111103209 A CN 111103209A CN 201811250389 A CN201811250389 A CN 201811250389A CN 111103209 A CN111103209 A CN 111103209A
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- cooling
- heating
- fatigue resistance
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- lining plate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/60—Investigating resistance of materials, e.g. refractory materials, to rapid heat changes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/006—Crack, flaws, fracture or rupture
- G01N2203/0062—Crack or flaws
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/0069—Fatigue, creep, strain-stress relations or elastic constants
- G01N2203/0073—Fatigue
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/022—Environment of the test
- G01N2203/0222—Temperature
- G01N2203/0224—Thermal cycling
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
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- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The invention relates to a rapid testing method for fatigue resistance of a ceramic lining plate, relates to the technical field of power semiconductors, and is used for solving the technical problem that product change cannot be observed in a close range in a temperature impact test in the prior art. According to the rapid testing method for the fatigue resistance of the ceramic lining plate, the heating equipment and the cooling equipment are two mutually independent equipment, so that the heating process and the cooling process of the workpiece to be tested cannot interfere with each other, the testing process can be suspended in any operation step of the workpiece to be tested, the change generated by the testing process can be observed in a short distance, and the state of the workpiece to be tested can be rapidly and accurately grasped.
Description
Technical Field
The invention relates to the technical field of power semiconductors, in particular to a method for quickly testing fatigue resistance of a ceramic lining plate.
Background
Typical power semiconductor modules employ ceramic backing plates as mechanical support and heat dissipation channels for the chips. The ceramic lining plate is integrally of a sandwich structure, the upper surface and the lower surface of the ceramic lining plate are metal layers which are formed by adopting various processes through sintering, and the metal is generally copper, aluminum and the like and is used for realizing subsequent electrical connection and mechanical connection and providing a heat dissipation channel. The intermediate layer is generally a ceramic layer or a resin layer, and is mainly used for insulation, and the material is usually alumina, aluminum nitride, beryllium oxide, various insulation resins, and the like. Since the thermal expansion coefficient of the metal layer is generally several times that of the insulating layer, the deformation of the liner plate is inconsistent when the liner plate expands or contracts under heat, and internal stress is generated. This continued action of internal stress may lead to cracking at the interface of the metal and insulation layers, resulting in a reduction or even failure of the insulation or electrical properties of the product.
The conventional method for detecting the fatigue resistance of the ceramic lining plate is to carry out a temperature impact test, namely, the lining plate is placed in a temperature impact test box, the temperature is kept for a certain time in a low-temperature area and then is switched to a high-temperature area, and the process is repeated in such a circulating way until the test is stopped after the circulation times or time is set.
As shown in fig. 1, the apparatus for temperature impact test in the prior art has the main defects that: the test time is long, and it is difficult to stop the observation halfway. Typically, the temperature shock requires a hold time, for example 30 minutes, sufficient to bring the product temperature to the set temperature, and a cycle period of at least 1 hour is required. The experiment can be completed only by 100 hours after 100 times of temperature circulation, the cavity of the equipment is always kept in a closed state during the period, the change of a product is difficult to observe closely or whether the product is invalid or not, and if the experiment needs to be suspended midway, the equipment needs to be cooled for at least one hour.
Disclosure of Invention
The invention provides a method for rapidly testing fatigue resistance of a ceramic lining plate, which is used for solving the technical problem that the change of a product cannot be observed in a close range in a temperature impact test in the prior art.
The invention provides a rapid test method for fatigue resistance of a ceramic lining plate, which comprises the following steps:
heating a workpiece to be measured to a first preset temperature by using heating equipment;
cooling the workpiece to be measured to a second preset temperature by using cooling equipment;
repeating the steps until the workpiece to be detected is invalid;
wherein the heating device and the cooling device are two devices independent of each other.
In one embodiment, the heating device is a heating platform or furnace.
In one embodiment, the cooling device is a cooling plate, a cooling bath with a cooling medium or a spray cooling.
In one embodiment, the cooling device is a metal heat sink.
In one embodiment, the cooling medium in the cooling tank is water, an ice-water mixture, cooling oil or liquefied gas.
In one embodiment, the liquefied gas is liquid nitrogen.
Compared with the prior art, the invention has the advantages that: because the heating equipment and the cooling equipment are two mutually independent equipment, the heating and cooling processes of the workpiece to be tested cannot interfere with each other, and the testing process can be suspended in any one operation step of the workpiece to be tested, so that the change generated by the testing process can be observed in a close range, and the state of the workpiece to be tested can be rapidly and accurately grasped.
Drawings
The invention will be described in more detail hereinafter on the basis of embodiments and with reference to the accompanying drawings.
FIG. 1 is a prior art apparatus for temperature shock testing;
FIG. 2 is a flow chart of a method for rapid testing of fatigue resistance of a ceramic liner in an embodiment of the present invention;
FIG. 3 is a schematic diagram of the structure of a heating apparatus in one embodiment of the present invention;
FIG. 4 is a schematic view of a heating apparatus according to another embodiment of the present invention;
FIG. 5 is a schematic diagram of the structure of a cooling apparatus according to an embodiment of the present invention;
FIG. 6 is a schematic view showing the structure of a cooling apparatus according to another embodiment of the present invention;
fig. 7 is a schematic structural diagram of a workpiece to be tested according to an embodiment of the invention.
Reference numerals:
1-a heating platform; 1' -heating furnace; 11-a scaffold;
2-a cooling plate; 2' -a cooling tank; 21-a cooling medium;
3-workpiece to be measured.
Detailed Description
The invention will be further explained with reference to the drawings.
As shown in FIG. 2, the invention provides a rapid test method for fatigue resistance of a ceramic lining plate, which comprises the following steps:
firstly, a workpiece 3 to be measured is heated to a first preset temperature by heating equipment, and the workpiece to be measured is kept at the temperature for a certain time so as to ensure that the temperature of each part of the workpiece reaches the first preset temperature.
The first predetermined temperature is a set temperature, such as 200 ℃ or 300 ℃.
In a second step, the workpiece 3 to be measured is quickly transferred from the heating apparatus to the cooling apparatus, and the workpiece 3 to be measured is cooled to a second predetermined temperature with the cooling apparatus. Wherein the second predetermined temperature is a set temperature, such as room temperature.
After cooling, the workpiece 3 to be tested can be subjected to the necessary observations, for example, whether the workpiece 3 to be tested has cracked or has failed.
And thirdly, repeating the steps until the set cycle number or the set time is reached.
Wherein, the heating device and the cooling device are two devices independent of each other. Therefore, the heating and cooling processes of the workpiece 3 to be measured do not interfere with each other, and the change thereof can be observed in a short distance in any operation step of the workpiece 3 to be measured, so that the state of the workpiece 3 to be measured can be grasped quickly and accurately.
Alternatively, as shown in fig. 3, the heating device is a heating stage 1. Further, the heating platform 1 heats the workpiece 3 to be measured by electric heating or high-temperature flame burning.
Alternatively, as shown in fig. 4, the heating device is a heating furnace 1 ', and a support 11 for placing the workpiece 3 to be measured is arranged in the heating furnace 1'.
In the invention, the heating temperature range of the heating platform 1 or the heating furnace 1' is large and continuously adjustable, so that the workpiece 3 to be tested can be disabled by utilizing the huge temperature difference between the heating equipment and the cooling equipment by adjusting the temperatures of the heating equipment and the cooling equipment, and a better test or screening effect can be obtained by utilizing few test times.
Furthermore, the existing temperature shock devices have a large variability between them, resulting in no comparability between test data of different devices. The temperature impact effect is related to the switching speed of cold and hot temperatures besides the temperature setting of the high and low temperature areas, and the heating or cooling power of different equipment is different, so that the cold and hot switching speeds are different, the final test result is greatly different, and effective comparison is difficult. Even different operators and test equipment can obtain basically consistent evaluation results. In the rapid test method of the present invention, the operation is simpler, and since the heating apparatus and the cooling apparatus are independent of each other, a substantially uniform evaluation result can be obtained even with different operators and test apparatuses.
Alternatively, as shown in fig. 5, the cooling device is a cooling plate 2. Further, the cooling plate is a metal cooling plate.
Alternatively, as shown in fig. 6, the cooling device is a cooling tank 2' with a cooling medium. By choosing a reasonable cooling medium 21, different cooling rates can be adjusted. For example, the cooling medium 21 in the cooling tank 2' is water, an ice-water mixture, cooling oil, or liquefied gas; in particular, the liquefied gas is liquid nitrogen.
Optionally, the cooling device is a spray-type cooling device. Wherein, the spray cooling device is a water spraying device or a gas spray cooler.
Optionally, the cooling device may also be a metal heat sink.
In a specific embodiment, the workpiece 3 to be measured is first heated by the electric heating table 1, and during the heating process, the temperature of the workpiece 3 to be measured is measured by the temperature sensor or other temperature measuring equipment. And stopping heating when the temperature of the workpiece 3 to be measured reaches 200 ℃.
Secondly, the workpiece 3 to be measured is quickly transferred into the cooling tank 2 'by the clamping tool, and the cooling medium 21 in the cooling tank 2' is water. The workpiece 3 to be measured is completely immersed in water and the temperature is allowed to reach room temperature. Similarly, during the cooling process, the temperature of the workpiece 3 to be measured is measured by a temperature sensor or other temperature measuring equipment.
Thirdly, the operation of heating and cooling the workpiece 3 to be measured is repeated until 100 temperature cycles are reached.
After any temperature cycle is completed, the operator can choose to pause or continue the test process, and after each cooling, the state of the workpiece 3 to be tested can be observed in a short distance, such as whether cracks exist.
It should be noted that one temperature cycle means that the workpiece 3 to be measured is heated and cooled once.
The test equipment required by the test process is low in cost and simple to operate, and basically consistent evaluation results can be obtained even if different operators perform the test.
It should be noted that the workpiece 3 to be measured is a ceramic lining plate (or a ceramic base plate, a ceramic copper-clad plate, a ceramic aluminum-clad plate, etc.). As shown in fig. 7, the typical structure is a sandwich structure, and the upper and lower surfaces are metal layers, which are usually copper, aluminum, etc., for implementing subsequent electrical connection, mechanical connection and providing heat dissipation channels. The intermediate layer is generally a ceramic layer or a resin layer, and is mainly used for insulation, and is usually made of alumina, aluminum nitride, beryllium oxide, various insulating resins, or the like.
While the invention has been described with reference to a preferred embodiment, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In particular, the technical features mentioned in the embodiments can be combined in any way as long as there is no structural conflict. It is intended that the invention not be limited to the particular embodiments disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.
Claims (6)
1. A rapid test method for fatigue resistance of a ceramic lining plate is characterized by comprising the following steps:
heating a workpiece to be measured to a first preset temperature by using heating equipment;
cooling the workpiece to be measured to a second preset temperature by using cooling equipment;
repeating the steps until reaching the set cycle number or the set time;
wherein the heating device and the cooling device are two devices independent of each other.
2. The method for rapidly testing the fatigue resistance of a ceramic liner plate according to claim 1, wherein the heating device is a heating platform or a heating furnace.
3. The method for rapidly testing the fatigue resistance of the ceramic liner plate according to claim 1 or 2, wherein the cooling device is a cooling plate, a cooling tank with a cooling medium or a spray type cooling device.
4. The method for rapidly testing the fatigue resistance of the ceramic lining plate according to claim 1 or 2, wherein the cooling device is a metal heat sink or a metal cooling plate.
5. The method for rapidly testing the fatigue resistance of the ceramic lining plate according to claim 3, wherein the cooling medium in the cooling tank is water, ice-water mixture, cooling oil or liquefied gas.
6. The method for rapidly testing the fatigue resistance of the ceramic liner according to claim 5, wherein the liquefied gas is liquid nitrogen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811250389.XA CN111103209A (en) | 2018-10-25 | 2018-10-25 | Rapid test method for fatigue resistance of ceramic lining plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811250389.XA CN111103209A (en) | 2018-10-25 | 2018-10-25 | Rapid test method for fatigue resistance of ceramic lining plate |
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| Publication Number | Publication Date |
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| CN111103209A true CN111103209A (en) | 2020-05-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201811250389.XA Pending CN111103209A (en) | 2018-10-25 | 2018-10-25 | Rapid test method for fatigue resistance of ceramic lining plate |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116429817A (en) * | 2023-05-05 | 2023-07-14 | 江苏富乐华半导体科技股份有限公司 | Thermal cycle testing device and method for aluminum nitride coated ceramic lining plate |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BR9905621A (en) * | 1999-12-13 | 2001-09-25 | Minas Gerais Siderurg | End cycle simulation equipment for thermal fatigue assessment of continuous casting rolls |
| CN102768158A (en) * | 2012-05-28 | 2012-11-07 | 南京工业大学 | Automatic tester for thermal shock resistance of ceramic material |
| CN103868945A (en) * | 2014-04-02 | 2014-06-18 | 广西玉柴机器股份有限公司 | System and method for carrying out thermal-fatigue-resisting test on integral parts |
| CN106908342A (en) * | 2017-03-20 | 2017-06-30 | 昆明理工大学 | A kind of thermal shock resistance test device and method |
| CN107490524A (en) * | 2017-07-04 | 2017-12-19 | 昆明理工大学 | A kind of experimental test platform of thermal shock load effect lower component thermal fatigue characteristics |
-
2018
- 2018-10-25 CN CN201811250389.XA patent/CN111103209A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BR9905621A (en) * | 1999-12-13 | 2001-09-25 | Minas Gerais Siderurg | End cycle simulation equipment for thermal fatigue assessment of continuous casting rolls |
| CN102768158A (en) * | 2012-05-28 | 2012-11-07 | 南京工业大学 | Automatic tester for thermal shock resistance of ceramic material |
| CN103868945A (en) * | 2014-04-02 | 2014-06-18 | 广西玉柴机器股份有限公司 | System and method for carrying out thermal-fatigue-resisting test on integral parts |
| CN106908342A (en) * | 2017-03-20 | 2017-06-30 | 昆明理工大学 | A kind of thermal shock resistance test device and method |
| CN107490524A (en) * | 2017-07-04 | 2017-12-19 | 昆明理工大学 | A kind of experimental test platform of thermal shock load effect lower component thermal fatigue characteristics |
Non-Patent Citations (2)
| Title |
|---|
| 施嘉昊: "功率半导体器件热管理", 《电子世界》 * |
| 钱建波等: "IGBT用氮化铝覆铜衬板可靠性研究", 《大功率变流技术》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116429817A (en) * | 2023-05-05 | 2023-07-14 | 江苏富乐华半导体科技股份有限公司 | Thermal cycle testing device and method for aluminum nitride coated ceramic lining plate |
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Effective date of registration: 20200928 Address after: 412001 Room 309, floor 3, semiconductor third line office building, Tianxin hi tech park, Shifeng District, Zhuzhou City, Hunan Province Applicant after: Zhuzhou CRRC times Semiconductor Co.,Ltd. Address before: The age of 412001 in Hunan Province, Zhuzhou Shifeng District Road No. 169 Applicant before: ZHUZHOU CRRC TIMES ELECTRIC Co.,Ltd. |
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Application publication date: 20200505 |