JPH0352820B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention is designed to prevent freezing of the liquid surface that occurs when conducting durability tests and strength tests against thermal shock, temperature cycles, etc. of semiconductors such as ICs and LSIs, and consumption of liquid due to steam leakage. This article relates to a heat immersion test device that attempts to minimize contamination, etc.

In the conventional system, when the frame 3 or the basket is at the entrance/exit 4 of the tank, the inside and outside of the tank are open, and the outside air starts to freeze on the liquid level of the cooling tank 1, which eventually blocks the immersion of the frame 3. This makes it difficult to drive for long periods of time.

In the heating tank 2, the steam of the heating medium leaks to the outside, so in order to prevent the danger and odor caused by the high temperature, the device is surrounded by a wall and a duct is installed in the ceiling to dispose of the expensive heating medium outdoors.

As a result, maintenance costs are high, in some cases reaching hundreds of thousands of yen per month, and this is the reason for the low utilization rate despite the excellent testing methods.

As described above, the conventionally employed test equipment has various problems, and it is difficult to perform long cycle operation or profitable economical operation.

The present invention solves the conventional problems, and when moving, the frame 3 is stopped at the entrance/exit 4 for a certain period of time, and when the temperature is low, dehumidified gas is blown into the space of the entrance/exit 4 to replace the outside air.
If the movement is on the high temperature side, the cooling gas is replaced with steam,
By condensing the displaced vapor and performing liquefaction reduction, it was possible to conduct tests without worrying about consumption or freezing of the heating medium. That is, the present invention has a cooling tank 1 and a heating tank 2 filled with a heat transfer liquid, and a container 3 such as a frame containing a sample is placed in each of the tanks 1, 2, and 3.
In a heat immersion test device that can be inserted into the tank 2 or pulled out from the tank, (a) the upper opening of each of the cooling tank 1 and the heating tank 2 is set to a size that can accommodate a container 3 containing a sample; Entrance/exit 4 with internal space
(b) An opening/closing door 5 is provided between each entrance/exit 4 and the cooling tank 1 and heating tank 2 to allow the container 3 to enter and exit. A heat insulating lid 7, 8 or 7' is provided to close the upper part of the entrance/exit 4 when stored in the hollow,
When the container 3 enters the respective entrance/exit 4 from the immersion position in each tank 1, 2, it is temporarily stopped, the opening/closing door 5 and the insulating lid 7, 8 or 7' are closed, and the container 3 is placed inside the entrance/exit 4. (c) The entrance 4 of the cooling tank 1 is provided with a means 16 for dehumidifying the inside thereof so that the outside air, etc. that has entered the entrance 4 does not condense and mix into the cooling tank 1. (d) The inlet/outlet 4 of the heating tank 2 is provided with means 17 for cooling the inside thereof, and the vapor of the high temperature heat transfer liquid that has entered the inlet/outlet 4 is cooled, condensed, and returned to the heating tank 2. We are taking measures.

As a result, the container 3 such as a frame can be moved from the immersion position in the cooling tank 1 or the heating tank 2 to the respective entrances and exits 4.
When entering the container, stop temporarily, close the opening/closing door 5 and the insulating lid 7, 8 or 7', and move the container 3 to the entrance/exit 4.
Seal it inside.

At the inlet/outlet 4 of the cooling tank 1, a dehumidifying means 16 dehumidifies the outside air that has entered the inlet/outlet 4 so that it does not condense and mix into the cooling tank 1.

Further, at the entrance/exit 4 of the heating tank 2, the cooling means 1
At step 7, the vapor of the high-temperature heat transfer medium that has entered the inlet/outlet 4 is cooled, condensed, and returned to the heating tank 2.

Embodiments of the present invention will be described below with reference to the drawings.

What is shown in FIGS. 4 to 4 is a typical first embodiment of the apparatus of the present invention, which is a low-temperature tank equipped with a cooler 21 and stirring blades 23 for moving the low-temperature heat medium cooled by the cooler 21. 1 and a high-temperature tank 2 equipped with a heater 22 and stirring blades 23 for moving the high-temperature heat medium heated by the heater 22.
4, and is provided with an entrance 4 through which a frame 3 containing a sample or a basket can enter and exit each tank, and an opening/closing door 5 is attached to the lower part of the entrance 4,
A support rod 6 and an insulating cover 7 that can move on the same axis as the support rod 6 are passed through the support rod 6, and these are moved up and down by a reciprocating linear drive body (for example, an air cylinder) 9 directly connected to the support rod 6, and then installed horizontally. guide shaft 10
The upper part is horizontally moved by another reciprocating linear drive body 11, and between tanks 1 and 2 is moved by an electric signal from the outside.
A cold/heat cycle test is performed by repeating immersion and movement.

Figure 1 shows its outline.

Figure 2 shows the frame 3 immersed in the tank.The frame 3 is connected to the support rod 6 and the reciprocating linear drive body 9 to move up and down, and the drive body 9 moves horizontally. It is fixed to a reciprocating linear drive body 11 and is arranged so that it can move between the tanks 1 and 2 around the same axis of a guide rod 10 which is attached horizontally to the main body.

An opening/closing door 5 attached to the lower part of the entrance/exit 4 is open while the frame 3 is immersed, and the entrance/exit 4 is closed by a heat insulating door 7.

Assuming that the frame 3 is currently immersed in the high-temperature tank 2, the reciprocating linear drive body 9 will start to ascend upon receiving the signal indicating the end of the immersion time, and will stop when the frame 3 reaches the 3' position, thereby maintaining the current state. keep.

The insulating lid 7 stays in its original position under its own weight (if the lid is small and light, it will lock) and plays the role of a lid.
The opening/closing door 5 closes in conjunction with the stop signal to create a sealed space within the entrance/exit 4.

A cooler 17 is attached to the outer wall of the entrance/exit port 4, and serves to constantly condense and reduce the vapor of the heating medium.

Furthermore, cooling gas (air cooled inside the device, or liquefied carbon dioxide gas, fluorocarbon gas, etc. from the outside) is sent in from the air supply port 14, depending on the scale of the device, to lower the steam temperature inside the space, and at the same time The steam is exhausted from the exhaust port 15, and a condenser is provided in the middle to liquefy and reduce the steam.

I would like to explain the reason for using cooling gas here.

The purpose of blowing in gas is to replace the steam in the space, so normal compressed air can be used, and if the capacity of the condenser on the exhaust side is appropriate, steam can be treated.

However, if the capacity of the device is large or the downtime in the space is extremely short, more efficient processing can be achieved by using cooling gas to promote condensation of steam.

For the above reasons, we decided to use cooling gas for the configuration.

When the time to stop inside the entrance/exit 4 has elapsed,
The frame 3' further rises and reaches 3'', but at this time the heat insulating lid 7
It is also pulled up to frame 3' and stopped at 7'.

The steam in the tank is insulated from the outside air by the closed door 5', and there is almost no leakage of steam to the outside.

Movement is performed by a reciprocating linear drive body 9, but if the height of the device is restricted, the drive body 2 can be used.
It needs to be organized in stages.

This completes the upward movement and moves on to horizontal movement.

FIG. 3 shows the state after the frame 3 has moved or before the frame 3 starts dipping.

Since the state in which the frame 3 is immersed in the high temperature bath 2 has been explained previously, the state of the low temperature bath 1 will be explained in this figure.

Since the heating medium is cooled in the cryogenic tank 1, almost no steam is generated, but since the pressure inside the tank is lower than that outside, outside air infiltrates and condenses on the inner walls and liquid surface of the tank, causing cooling. and try to freeze.

In the present invention, the opening/closing door 5 disposed at the bottom of the entrance/exit 4 is closed at the 5' position to block outside air, and furthermore, a single heat insulating lid 8 is provided at the top to create a sealed space inside.

There is a heater 16 on the outer wall of the entrance/exit 4 that uses the residual heat of the discharged gas from the refrigerator to prevent the enclosed air and outside air from being cooled by heat conduction from the cryostat 1 and condensing. .

The heat insulating lid 8 is a reciprocating linear drive body 11 that moves horizontally.
moves in the opposite direction.

The description in the figure is one example. In this case, a thin wire rope 19 is attached to the driving body 11 via a guide pulley 20 to form a ring, and a heat insulating door 8 is attached on the moving side opposite to the driving body 11. ing.

The heat insulating lid 8 slides on the rising edge of the upper outer periphery of the entrance/exit 4 of each tank and the upper surface of the guide plate 26 that connects the two tanks. The gasket 27 on the inside of the lid facilitates smooth movement and return of the heat medium.

FIG. 4 shows the state in which the frame 3'' is being moved and immersion is starting.

A heating medium cover 7' is placed on the top of the frame 3''.
The heating medium cover 8' on the opposite side moves on the guide plate under the frame 3'' and passes three-dimensionally, so there is no collision.

The frame 3'' finishes its horizontal movement and begins to be immersed in the cryostat 1, but before the heating medium cover 7' reaches the position 7 and the opening/closing door 5' is opened, the air supply port 12 is opened to supply dry gas. is blown in, and the outside air inside the entrance/exit 4 is released to the outside.

Dry air can be obtained relatively easily by using the equipment's cooling source, but the relative humidity is only around 20%, so to ensure completeness, it is necessary to supply dry air from outside.

Normally, nitrogen gas or air with a dew point below -60°C is used.

When drying gas is supplied, frame 3'' is the entrance 4.
By setting the time from when the drying gas reaches the inlet to when the opening/closing door 5' is opened, the supply amount of the drying gas can be kept to the minimum limit.

Please refer to FIG. 2 again for the state in which the opening/closing door 5 is open.

The frame 3' moves to the third position and enters the immersion state, and the entrance/exit 4 is closed with the heat insulating lid 7.

In the process of the frame 3 rising as the immersion time elapses,
As in the case of high temperature, it is temporarily stopped at the 3' position, but air is not supplied.

In the case of high temperature, when the frame 3'' is lowered from position 3 to immersion, it does not stop in the middle like in low temperature, and air is not supplied.

In either case, the reason for the temporary stop on the way up is to replace the steam on the high temperature side, but also to allow the heating medium attached to the sample and frame to drip.

The time required for dripping the heating medium varies depending on the viscosity, surface tension, temperature, etc. of the heating medium, so it is not constant.
Most of it seems to drip in ~5 seconds.

Most test standards stipulate that the sample moving time be within 10 seconds, but it is better to allow the rising time to be as long as possible.

The device shown in FIG. 5 is a second embodiment of the device of the present invention, and has almost the same effects as the first embodiment.

The difference is that frames are fixed to the left and right sides of the inverting arm 31 (two-frame type), and the test is performed by repeatedly rising, inverting, descending, and dipping.

Twice as many samples can be tested in the same time without changing the size of the frame, and the heat insulating lid 8 and moving mechanisms 19, 20 used in the first embodiment (single frame type) are unnecessary.

The cooling and heating capacity requires approximately twice the output compared to the one-frame type.

By configuring a sealed space that is not present in conventional test equipment, the present invention eliminates freezing at low temperatures and steam leakage at high temperatures, which were the biggest drawbacks, and further recovers the steam. As already explained, the consumption of more expensive heat medium is kept to a minimum.

The present invention also overcomes another difficulty with conventional test equipment.

When starting a test, it is normal to first place a sample in the frame and turn on the operation button to start automatic operation.

In conventional test equipment, the entrance and exit of the tank is open when the sample is placed in the frame, so automatic operation cannot be started immediately.

If operation is forced, it is expected that the low-temperature tank will freeze before the temperature inside the tank reaches the set temperature, and the liquid level in the high-temperature tank will drop as steam is released.

Therefore, in conventional test equipment, the sample is initially immersed in the frame without placing it in the frame, and after the temperature inside the tank reaches the set temperature, the frame is raised manually, the sample is quickly placed in the frame, and automatic operation starts. , it is hard to call it true autonomous driving.

The same is true at the end of the exam.

When the end of the test is notified, the sample must be quickly removed, the frame immersed manually, and the entrance and exit door closed.

The device of the present invention solves the conventional problems, so all you have to do is operate it according to the test order, and at the start of operation, the frame enters the closed space, automatically stops, and waits until the temperature inside the tank reaches the set temperature. It's safe because the period will continue.

Even when the test is over, the door inside the tank is closed to block outside air, so the frame can be stopped at the same position as when the test started, and the next test can be continued immediately by replacing the sample. . In this invention, when a sample is pulled out from a cooling tank, it is possible to effectively prevent external air from entering the sample and causing freezing and deterioration of the low-temperature heat transfer liquid.

Furthermore, when the sample is drawn out from the high temperature tank, the vaporized high temperature heat transfer liquid can be prevented from leaking to the outside, and can be cooled, liquefied, and returned into the high temperature tank.

This makes it possible to use the medium efficiently, which is excellent in economic efficiency, and is extremely beneficial because it does not leak bad odors to the outside and does not deteriorate the environment.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view of the first embodiment of the device of the present invention excluding the machine housing part, FIGS. 2 and 3 are enlarged sectional views of the main parts, FIG. 4 is an enlarged side view of the main parts, and FIG. The figure is a cross-sectional view of the second embodiment excluding the machine housing section. 1...Cooling tank, 2...Heating tank, 3...Frame or basket, 4...Entrance/exit, 5...Opening/closing door, 6...Support rod, 7, 8...Insulating lid, 9, 11...Reciprocating Linear drive body, 10... Guide rod, 12, 14... Air supply port,
15...exhaust port, 16, 22...heater, 17,
21...Cooler, 19...Wire rope, 20
... Guide pulley, 23 ... Stirring blade, 24 ...
Insulation material, 25...outer box, 26...information board, 27...
...gasket, 31...arm.

Claims (1)

[Claims] 1. It has a cooling tank 1 filled with a heating medium liquid and a heating tank 2, and a container 3 such as a frame containing a sample is immersed in each of the tanks 1 and 2 or pulled out of the tank. In the heat immersion test device, the upper openings of the cooling tank 1 and the heating tank 2 are provided with entrances and exits 4, 4 each having an internal space set to a size that can accommodate a container 3 containing a sample. , An opening/closing door 5 is provided between each entrance/exit 4 and the cooling tank 1 and heating tank 2 to allow the container 3 to enter and exit, and when the container 3 is stored in the hollow of the entrance/exit 4 above the entrance/exit 4. A heat insulating lid 7, 8 or 7' is provided to close the upper part of the entrance/exit 4, so that when the container 3 enters the respective entrance/exit 4 from the immersion position in each tank 1, 2, the opening/closing door 5 is temporarily stopped. and the insulating lid 7, 8 or 7' are closed so that the container 3 can be hermetically sealed within the entrance/exit 4, and the entrance/exit 4 of the cooling tank 1 is provided with a means 16 for dehumidifying the inside thereof. The outside air is dehumidified to prevent condensation from entering the cooling tank 1, and the inlet/outlet 4 of the heating tank 2 is provided with means 17 for cooling the inside thereof to cool the vapor of the high-temperature heat transfer liquid that has entered the inlet/outlet 4. A thermal immersion test device characterized by condensing and reducing the water into a heating tank 2.