JPS60144638A - Thermal dipping testing device - Google Patents

Abstract

PURPOSE:To take a thermal dipping test without moving a sampling nor opening and closing a door by transporting cooling liquid and heating liquid to a test chamber alternately. CONSTITUTION:The principal part of the main body 1 is surrounded with a heat insulating medium 2, and the test chamber 10 is arranged at a front position and a cooling tank 20 and a heating tank 30 are provided successively at rear positions. A frame 3 containing a sample is installed in the test chamber 10 and a discharge valve 17 and a liquid feed valve 28 are opened to transport the heat medium from the cooling tank 20 to the test chamber 10. A feed air valve 13 and liquid transport valve 28 are opened a specific time later and the heat medium is returned to the cooling tank 20 with pressurized air fed through the valve 13. Then, a liquid transport valve 38 and a discharge valve 17' are opened to discharge the pressurized air from the valve 17' through a condenser 45, and the heat medium is transported from the heating tank 30. The valve 13 and valve 38 are opened a specific time later to return the heat medium to the heating tank 30, and the heat medium is fed from he cooling tank 20 to the test chamber 10. Said operations are repeated to take a thermal dipping test.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention applies to semiconductors such as ICs and LSIs, as well as electronic components,
Immersion tests on precision instruments and membrane materials to determine durability, strength, operation, measurement, etc. against thermal shock and salinity cycles can now be carried out in the test chamber without moving samples or opening/closing doors. , relates to a cold immersion test device.

Conventionally, in order to perform thermal shock tests and temperature cycle tests on semiconductors, small parts, materials, etc., the target sample is placed in a sample support frame or cage that matches the sample shape and test conditions, and then transferred from a cooling tank to a heating tank. , or vice versa, a test device is used in which the sample is moved and the immersion test is repeated.

However, according to the conventional method, as the sample moves, the sample protrudes from the frame or basket, falls out, and
There are handling disadvantages such as damage from vibration and shock, as well as improper measurement and energization.Furthermore, because the sample entrance and exit of the tank is open during transportation, the liquid level in the cooling tank freezes, making it difficult to immerse the sample. In addition, the heating tank poses dangers due to high-temperature steam release, bad odors and pollution, and large consumption of expensive heat transfer fluid. Although the immersion test is superior to other test methods, it is the biggest reason why it is underused, as there is a need to dispose of the heat transfer liquid that drips from the frame or basket during transport.

The present invention solves the conventional problems and enables the test to be carried out while the sample is kept in the test chamber without opening the door until the end of the test.
Based on the instructions given by the test conditions, it is easy to conduct tests by replacing the heat medium in the cooling tank and heating tank, immersing the sample in low salt or high temperature, and depending on the conditions, introducing a room temperature atmosphere in between. This is what I did.

The present invention provides a cooling tank equipped with a mechanism for moving a low-temperature heat medium liquid cooled by a cooling means, a heating tank equipped with a mechanism for moving high-temperature heat gw heated by a heating means,
Valves that can be opened and closed individually and a connected test chamber are separated at the upper and lower parts of the cooling tank and heating tank by insulating walls, arranged as required, and combined into a single box, and the upper part of the test chamber is pressurized. An air supply port for pressurizing gas and a valve that can be opened and closed as required are provided, the exhaust port is connected to the connecting part of the valve on the top of the cooling tank, a check valve is attached to the end, and the heating tank exhaust port is also connected in the same way as above. and install a condenser at the end.

The discharge port of the mechanism (for example, a submersible pump) that moves the liquid medium in the cooling tank or heating tank should be connected to the test chamber through a valve that can be opened and closed as required, and so that it can be discharged into the tank when the valve is closed. Provide a branch entrance.

In the present invention, switching the test chamber from low temperature to high temperature or vice versa, or changing it to room temperature W atmosphere in the middle,
The six valves were opened and closed in a predetermined order using a preset control mechanism, allowing the desired test to be performed on the sample in the test chamber.

be.

In addition, with this device, after placing the sample in the test chamber, the door is closed and the test chamber is pressurized by the outer sgL body, thereby transferring the heat medium liquid in the cooling tank or heating tank from the test chamber to the cooling tank or heating tank. The mechanism for transferring the heat medium liquid in the heating tank or cooling tank from the heating tank or the cooling tank to the test chamber, and further transferring the heat medium liquid in the cooling tank or heating tank. The discharge port is communicated with the test chamber when necessary, and the heat transfer liquid in the cooling tank or heating tank is circulated to maintain temperature accuracy within the test chamber.

Embodiments of the apparatus of the present invention will be described in detail below with reference to the drawings.

1 to 3 show a typical N1 embodiment of the device of the present invention, in which the main part is surrounded by a heat insulating wall (2),
The interior of the main body (1) formed of a foil body of required dimensions is a test chamber (10) with a required volume at the front position.
) At the rear of the test chamber (1o), there is a cold MJ (ZO) that supplies a relatively large volume of low-temperature thermal I-liquid and a heating tank (3o) that supplies a high-temperature heat transfer liquid. At the top, there is a door (1
1) Installed? There is a pressurized gas inlet (15) at the top of this test chamber (10).
and a pressurized gas outlet (16) (16') are connected to each other, and at the bottom of the test chamber (10) there are a heat medium liquid inlet/outlet (25) (35) for transferring the heat medium liquid and a liquid drain port (14). ), and on the side of test M (10), one heat medium liquid circulation (18) (18
') is provided.

A cooling tank (2 o
) is formed, and this cooling tank (2G) contains a cooler (evaporator) (21) and a heater (2G) for temperature control in the low salt range.
2) and a pump (23) for feeding the liquid,
For the test chamber (+0), a feeding port (27) is provided at the top of the cooling tank (2o), and it is communicated with the front pressurized gas outlet (16) via the exhaust valve (17). connects the heat medium liquid transfer port (26) with the heat medium inlet/outlet rJ (25) and the liquid feed valve (28).
) through the heatable wall body (2), and a drain valve (24) is connected at the end, and the discharge port of the pump (23) is connected through the discharge valve (29). The heat medium liquid circulation port (18) is communicated through the heat insulating wall (2).

In addition, the four discharge ports of the pump (23) are connected to a cooling tank (
20) A branch port (40) is provided to allow internal reflux, and the heat transfer liquid lid part (all when the discharge (29) is closed) is constantly circulated within the tank to improve temperature accuracy.

At the rear of the test chamber (10), in parallel with the cooling tank (20), there is a heating tank (30) partitioned by a heat insulating wall (2).
), a heater (32) and a pump (33) are disposed inside this heating tank (30), and a cooling tank (20) is provided for the test chamber (10). Similarly, the supply/exhaust port (37) and the pressurized gas outlet (16') are connected to the heat medium liquid transfer port (
36), the heat medium liquid inlet/outlet (35), the discharge port of the pump (33), and the heat medium liquid circulation port (18'), respectively, through the exhaust valve (+7).
'), a liquid supply valve (38), and a discharge valve (39) to communicate the heat transfer liquid discharged from the pump (33) to the test chamber (1).
The drive motors (23') (33') of the pumps (23) (33) are both installed outside the tank.

An air supply valve (13) is connected in front of the pressurized gas inlet (15), and a condenser (45) is connected to the end of the supply and exhaust port (37) of the heating tank (30), so that the heat exhausted is The vapor of the medium is cooled and condensed, and the transfer valve (46) is opened to collect the condensed JI wave.

A liquid supply valve (46) is connected upward in front of the condenser (45) and is used for liquid replenishment, and a liquid drain valve (34) is installed at the lower end of the heating medium liquid transfer port (36) to Care has been taken to ensure that the liquid can be recovered.

Similarly, the cooling tank (20) is provided with a check valve (41) at the end of the supply/exhaust port (27) to prevent outside air from entering.
There is a wrinkle supply valve (42) upward, and a heating medium liquid supply valve (26).
A drain valve (24) is installed at the bottom of the tank.

A machine room (5) is provided at the bottom and rear of the main body (1) to support the main body (1) and house a cooling device (8). , number of cycles, etc., and measuring instruments that control and display or record each power drive,
A power distribution board (9 units) is installed on which the electrical components that control the operation of the equipment can be installed.

The test chamber (10) and the cooling tank (20) and the test chamber (lO) and the heating tank (30) each have a υr air valve (10) as described above.
7), Liquid feed valve (28)1. Discharge valve (29) and air valve (
17'), a liquid feed valve (38), and a discharge valve (39), and each valve is wired to be activated by a control signal from the u1 measuring instrument installed on the switchboard (9). There is.

Figure 4 is an explanatory diagram showing the transfer of heat transfer liquid in a low-temperature state.
test M (1) by opening the valve and closing the other valves.
0) has completed the low temperature stage, and the cooled heat transfer liquid (50') is passed through the liquid feed valve (28) by the pressurized gas fed from the air supply valve (13) to the cooling tank (20). The heating medium liquid (50') is returned to the (50) position after being reduced to the liquid sending valve (28).
is closed to create a gas atmosphere within the test chamber (10).

If a room temperature atmosphere is required during the test, the Mm state can be maintained for the required time by opening the exhaust valve (14) and reducing the flow rate of the pressurized gas.

FIG. 5 explains and illustrates the state in which the inside of the test chamber (10) becomes hollow and continues to be immersed in high temperature, and the liquid feed valve (38) and the exhaust valve (17') are opened and other - By closing the valve, the pressurized gas in test 1 (10) passes through the exhaust valve (17'), passes through the condenser (45), and is partially discharged to the outside. (37) from the heating tank (
The heated heat transfer liquid (60') is transferred into the test chamber (10) through the liquid delivery valve (38), and is balanced to form a liquid level (60), which is then transferred to the discharge valve (39). Open the valve, close the other valves, and test the heat transfer fluid from the heating tank (30)!
(10) High temperature immersion is maintained by circulating the water.

Although not shown, the required time elapsed diameter, the above-mentioned air supply valve (
13) and the high temperature side liquid feed valve (38), close the other valves, and forcefully feed pressurized gas from the air supply valve (13).
The heating medium liquid is returned from the test chamber (10) to the heating tank (30), the inside of the test chamber (10) is made hollow, and then the exhaust valve (17) and the liquid feed valve (28) on the low temperature side are opened. By closing the other valves and transferring the heat transfer liquid from the cooling tank (2o) into the test chamber (10) and balancing it, immersion in the low temperature range can be performed.

FIG. 6 shows the arrangement of the second embodiment of the apparatus of the present invention, in which a cooling tank (2o), a heating tank (
3. In addition to this, a room temperature tank (7o) is arranged, and as in the first embodiment, the liquid feed valve (78) is communicated with the test chamber (14) through the heat insulating wall (2). An air valve (77) is connected to the top of the tank between the air extraction valves (+7) (17') to form a circuit.

If necessary, a cooler (evaporator) (
71) and a heater (72) are installed to control the temperature, and a pump (73) and a discharge valve (79) are installed to circulate the heat transfer fluid and maintain the required temperature.

Each of the above-mentioned valves is switched by an external signal so that a cold immersion test can be performed repeatedly at low temperature, room temperature, high temperature, or vice versa.

FIG. 7 shows the main parts of the third embodiment of the device of the present invention, in which the heating medium liquid is supplied under pressure from the test chamber (10) to the cooling tank (20) or the heating tank (30). The air valve (13) and the liquid feed valve (28) or (38) were opened, but the liquid feed valve (28)
By closing (38), the test chamber (10) is pressurized, making it possible to apply more stress to the sample.

Close the air supply valve (+3) and close the exhaust valve (17) or (+7')
Then, normal testing can be resumed by opening the discharge valve (29) or (39) and circulating the heat transfer liquid.

FIG. 8 shows the main parts of the fourth embodiment of the device of the present invention, in which tests were carried out alone or during continuous tests with the test chamber (10) in a hollow state, and the air supply valve (13) A steam generator (80) and a cooler (evaporator) (8
By installing a 1L heater (82) and adjusting the temperature and pressure from the outside, it is possible to pressurize the inside of the test chamber (10) while maintaining the required temperature and humidity atmosphere, applying stress to the sample that is different from the immersion test. I can do it.

If this test is to be carried out during continuous testing, please use Kadaiben (83
) is closed, the pressurizing valve (84) is opened, and the discharge valve (14) is closed.
It is desirable to open the test chamber (10) and completely release the water vapor in the test chamber (10) before proceeding to the next cycle.

Although various examples have been listed above regarding the arrangement, configuration, and external shape of each part of the device 11 of the present invention, the present invention is not limited to these examples, and may be configured in other configurations as necessary. This can also be done arbitrarily.

As shown in the above-mentioned embodiments, the present invention apparatus places a sample in a test chamber, transfers a heating liquid to this test chamber to raise the temperature, and transfers a cooling liquid to lower the temperature. By sending in pressurized gas and switching the temperature to room temperature, the test can be carried out by immediately immersing the sample under the required conditions, and there is no risk of sample protrusion, spillage, vibration, shock, etc., and there is no freezing of the liquid surface. This eliminates the need for a moving mechanism or a door opening/closing mechanism, which simplifies the overall configuration and eliminates the need for high-temperature steam. Since there is no danger or contamination, it is safe and easy to handle by workers, and there is little consumption of expensive heat transfer fluid, making it possible to create a test device with many advantages.

Among conventional immersion test equipment, there is no equipment that can perform pressure tests.

There are a few specialized gas pressurization test devices on the market, but they cannot perform heat shock tests or temperature cycle tests.

With the arrangement of the present invention, as mentioned above, it is possible to simply perform a pressurization test on the VJ, and to date, the thermal shock test using a liquid tank has been considered the most severe test, but it overturns common sense and far exceeds that test. , it was possible to apply even more severe stress to the sample, making it possible to achieve the same or even greater effects than before in a short period of time.

Furthermore, with the device of the present invention, alone or during a cycle test,
Humidification and pressurization conditions can be incorporated, and if moisture is not mixed into the heat transfer fluid, freezing and thawing tests on samples are also possible, and different stresses can be applied to the sample. You can also do it.

The apparatus of the present invention is capable of multi-purpose testing as described above, and has been able to be made into a cold/hot immersion test apparatus that comes fairly close to the all-purpose test apparatus that is the goal of the test apparatus.

[Brief explanation of drawings]

FIG. 1 shows a machine accommodating section of a first embodiment of the device of the present invention. FIG. 2 is a vertical sectional view, FIG. 3 is a plan sectional view, and FIGS. 4 and 5 are diagrams explaining the principle. FIG. 6 is a plan layout diagram of a second embodiment of the device of the present invention. FIG. 7 is an enlarged view of the main parts of a third example of the device of the present invention. FIG. 8 is an enlarged view of the main parts of the fourth embodiment of the device of the present invention. (Ivy)...Outer box (21...Insulating wall (:1)...Toruri frame (5)...
Machine room (10) ・ ・ ・ Test room ('i+1
・・・・Insulation door (13)−・・Air supply
Valve (14) (24') (:zu4) Drain valve (+
71 (17'n (77) no J1 Ki Valve (pro)
・-)'L--Cold 1aJ tank +211 (711+8
1) Cooler (22) (321 (72) (82
) Heater (231+331 (73) Bump +
29) (39) (791 Discharge valve (30)...
... Heating tank (41) ... Check valve (4
2) (43) (44) Liquid supply valve (45)...
・ Condenser (46)... Screening valve (70)
...Normal temperature tank (80) ...Steam generator (83) ...Purification valve (84) ...Pressure valve (86) ...Supply Water valve (87)...
...Drainage valve patent applicant Akira Ito Miyuki 31 Kyo Hikaru 6 Figure

Claims (1)

[Claims] The frame or basket containing the sample is placed in a test chamber that can be pressurized, and the heat transfer liquid in the cooling tank that cooled the heat transfer liquid and the heating tank that heated the heat transfer liquid are alternately transferred to the test chamber. Or a cold immersion test device that can repeatedly cool and heat samples without moving the basket or opening/closing the door.