JP2012025101A - Multi-scribing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a multi-scribing apparatus which prevents an edge of a brittle material substrate from chipping when the run-over deviation is caused on the substrate due to the positional deviation of the edge of blade of a scribing head.SOLUTION: A run-over detection means for detecting whether a wheel chip arrives onto the brittle material substrate is disposed on each scribing head and, when the run-over is detected by each run-over detection means, the scribing load is increased with respect to the scribing head for which the run-over is detected and, when the run-over is detected by all run-over detection means, the scribing speed is raised. Thereby, even in a strip type thin brittle material substrate, the chipping of the brittle material substrate upon the starting of the scribing is prevented.

Description

  The present invention relates to a multi-scribe device capable of simultaneously forming a plurality of scribe lines on a brittle material substrate.

  Conventionally, in a flat panel display (FPD) such as a liquid crystal display panel or a liquid crystal projector substrate, a mother glass substrate is bonded together in a manufacturing process, and then divided into a single panel of a predetermined size. For dividing a brittle material substrate such as a mother glass substrate, there are a scribing process and a breaking process, and a scribing apparatus is used in the scribing process. In manufacturing the FPD, a single mother substrate is scribed, and a plurality of panel substrates are taken out by a break process. However, when the size of the mother substrate becomes large and the number of panel substrates becomes large, a multi-scribe device equipped with a plurality of scribe heads is used in order to increase the scribe efficiency.

  FIG. 1 is a schematic perspective view showing an example of a conventional multi-scribe device disclosed in Patent Document 1. As shown in FIG. In the multi-scribe device 100, a moving table 101 is held so as to be movable in the y-axis direction along a pair of guide rails 102a and 102b. The ball screw 103 is screwed with the moving base 101. The ball screw 103 is rotated by driving the motor 104, and moves the moving base 101 in the y-axis direction along the guide rails 102a and 102b. A motor 105 is provided on the upper surface of the movable table 101. The motor 105 rotates the table 106 on the xy plane and positions it at a predetermined angle. The brittle material substrate 107 is placed on the table 106 and held by a vacuum suction means (not shown). Two CCD cameras 108 that image the alignment marks of the brittle material substrate 107 are provided on the scriber.

  In the scribe device 100, a bridge 110 is installed by struts 111 a and 111 b along the x-axis direction so as to straddle the moving table 101 and the upper table 106. In the bridge 110, a plurality of scribe heads 112 can move along the guide 113 in the x-axis direction. Each scribe head 112 is mounted therein with a drive source for moving the scribe head 112 independently along the x-axis direction. Alternatively, the guide 113 and each scribe head 112 may be linearly driven, for example, so that each scribe head 112 can move independently. A tip holder 130 is attached to the tip of the scribe head 112 via a holder joint 120.

  Now, when a single liquid crystal display device is manufactured by dividing a large number of liquid crystal elements from a mother panel, the mother panel is once cut into strips to be divided. After forming an elongated rectangular panel (hereinafter referred to as a strip-shaped panel) in this way, a single panel is divided by dividing it into smaller shapes. In this case, by using a multi-scribe device equipped with a plurality of scribe heads, a plurality of scribe devices can be scribed simultaneously, and efficient scribe becomes possible.

WO2008-149515

  However, when the conventional multi-scribing device is used to scribe the strip-shaped panel into a single piece by external scribing, in order to prevent chipping of the substrate edge for scribing, a plurality of wheel tips (cutting edges) are not It is necessary to lower the wheel tip accurately and start scribing so that the distance from the edge is constant. However, when the mother panel substrate is cut into strip-shaped panels, the edge line is not a perfect straight line, and a slight curve or the like often occurs. For this reason, it is difficult to lower a plurality of cutting edges to a position that is exactly the same distance away from the edge of the strip-shaped panel when performing external cutting. In addition, there is a mounting error at the time of replacement, and in the multi-scribe device, a slight shift occurs in the blade position of each scribe head. For this reason, it is complicated to finely adjust the setting so that the mounting positions of the individual heads coincide with each other. In particular, thinning of liquid crystal panels has been progressing recently, and there has been a problem that the edge of a strip-shaped panel tends to be missing when a bonded substrate having a thickness of 0.2 mm or less is scribed with a conventional multi-scribe device.

  The present invention has been made paying attention to such a conventional problem, and it is possible to prevent the chipping of the edge by scribing by applying a predetermined scribe load after each blade edge rides on the brittle material substrate. The purpose is to.

In order to solve this problem, the multi-scribe device of the present invention is a multi-scribe device equipped with a plurality of scribe heads, a table on which a brittle material substrate is installed,
A plurality of scribing heads provided to oppose a brittle material substrate on the table and having a lifting means for moving up and down a chip holder provided with a wheel chip at the tip thereof; and the table and the plurality of scribing heads relatively Moving means for moving; a plurality of ride detection means for detecting whether or not a wheel tip at the tip of each scribe head has reached the brittle material substrate; and each of the ride detection means includes a wheel tip on the brittle material substrate. When it is detected that the wheel chip is mounted on the brittle material substrate, the scribe head increases the load on the brittle material substrate. And a controller for controlling to raise .

  Here, the raising / lowering means of the scribe head includes a servo motor, a ball screw connected to the rotation shaft of the servo motor, and a slide block connected to the ball screw to raise and lower the chip holder. The climbing detection means may include an encoder connected to the servo motor, and a climbing detection unit that detects that a wheel chip has climbed on the brittle material substrate based on an output of the encoder. .

  Here, the elevating means of the scribe head includes a casing attached to the scribe head, a cylinder fixed to the casing, a piston that is held in the cylinder so as to be movable up and down, and has a wheel chip attached to a lower end thereof. The riding-up detection means may be detection means for detecting the vertical movement of the piston.

  According to the present invention having such a feature, when scribing with a multi-scribe device equipped with a multi-head, it is detected that each wheel chip has run on a brittle material substrate, and the scribe load of the scribe head is increased. At the same time, the scribing speed is increased by detecting that all the wheel chips have traveled on the brittle material substrate, and the scribing is completed in a short time. In this way, it is not necessary to finely adjust the distance between each scribe head and the brittle material substrate to be constant, and even a strip-shaped panel does not lack an edge, and can quickly finish the scribe.

FIG. 1 is a perspective view showing an example of a conventional multi-scribe device. FIG. 2 is a perspective view showing the multi-scribe device according to the first embodiment of the present invention. FIG. 3 is a perspective view of a scribe head used in the present embodiment. FIG. 4 is a central longitudinal sectional view of the scribe head used in the present embodiment. FIG. 5 is a block diagram showing a controller of the multiscribe device according to the present embodiment. FIG. 6A is a time chart (part 1) showing the operation of the multi-scribe device according to the present embodiment. FIG. 6B is a time chart (part 2) illustrating the operation of the multiscribe device according to the present embodiment. FIG. 7A is a schematic view showing a main part of a multiscribe device according to a second embodiment of the present invention. FIG. 7B is a schematic view showing a state at the time of scribing the main part of the multi-scribe device according to the second embodiment of the present invention.

(First embodiment)
A first embodiment of the present invention will be described. FIG. 2 is a perspective view of a multi-scribe device equipped with a plurality of scribe heads according to the first embodiment. In the multiscribe device 10, the movable table 11 is held so as to be movable in the y-axis direction along the pair of guide rails 12 a and 12 b. The ball screw 13 is screwed with the movable table 11. The ball screw 13 is rotated by the drive of the motor 14, and moves the moving base 11 in the y-axis direction along the guide rails 12a and 12b. A motor 15 is provided on the upper surface of the movable table 11. The motor 15 rotates the table 16 on the xy plane and positions it at a predetermined angle. The brittle material substrate 17 is placed on the table 16 and held by a vacuum suction means (not shown). Two CCD cameras 18 that image the alignment marks of the brittle material substrate 17 are provided on the scriber.

  In the scribe device 10, a bridge 20 is installed by struts 21a and 21b along the x-axis direction so as to straddle the movable table 11 and the table 16 on the upper side thereof. The bridge 20 holds a plurality of, in the present embodiment, five linear sliders 23 a to 23 e along the guide 22 movably in the x-axis direction. Each of the linear sliders 23a to 23e is mounted with motors 24a to 24e for moving the sliders independently along the x-axis direction. Furthermore, scribe heads 25a to 25e are provided on the linear sliders 23a to 23e, respectively.

  Here, the motor 14, the guide rails 12a and 12b, and the ball screw 13 are moving units that move the table in the y-axis direction. The bridge 20, the columns 21a and 21b, the guide 22, the linear sliders 23a to 23e, and the motors 24a to 24e. Is a moving unit that moves the scribe head in the x-axis direction, and the motor 15 is a rotating unit that rotates the table 16, and these constitute a relative moving unit.

  Since the scribe heads 25a to 25e are the same, the scribe head 25a will be described with reference to FIGS. In the following description, a to e are added to the reference numerals only when distinguishing the elements of each scribe head. The scribe head has a rectangular base plate 31 that is vertically attached to each linear slider. A top plate 32 is provided horizontally above the base plate 31, and a bottom plate 33 is provided parallel to the top plate 32 at the bottom of the base plate 31. The top plate 32 and the bottom plate 33 are sufficiently thick metal plates having substantially the same shape, and have the same thickness. A servo motor 34 is fixed on the top of the top plate 32 with its rotating shaft facing downward. An encoder 35 for detecting the rotation angle is provided on the servo motor 34. A shaft 37-1 of a ball screw 37 is attached to the motor shaft of the servo motor 34 through a coupling 36 as shown in FIG. 4. A slide block 38 is attached to the base plate 31 between the top plate 32 and the bottom plate 33 via a linear way 39 so as to be movable up and down. A nut portion 37-2 of a ball screw 37 is attached to the slide block 38, and the slide block 38 can be moved up and down as the servo motor 34 rotates. A chip holder 41 is provided below the slide block 38 so as to penetrate the bottom plate 33 and to the inside of the upper head cover 40. The tip holder 41 holds the wheel tip 42 rotatably at the lower end of the holder portion. Here, the servo motor 34, the coupling 36, the ball screw 37, the slide block 38, and the linear way 39 constitute an elevating unit that elevates the chip holder 41 and applies a scribing load.

  Here, the brittle material substrate 17 described in the present specification may be a large-sized substrate called a mother panel substrate, or may be a strip-shaped panel obtained by dividing the mother panel substrate into a long and narrow shape. The brittle material substrate 17 includes substrates such as glass, ceramic, and semiconductor wafer, which are sequentially divided into predetermined small sizes and used for various purposes.

  The wheel chip 42 is formed of a material having super hardness such as cemented carbide or sintered diamond. The wheel chip 42 has a disk shape and protrudes so that the central portion in the width direction has a maximum diameter. The wheel tip 42 is rotatably supported by a tip holder 41 whose bottom surface is open.

  The encoder 35 provided on the upper side of the servo motor 34 can detect the amount of vertical displacement of the wheel chip 42 that contacts the surface of the brittle material substrate 17 by detecting the rotation speed of the servo motor 34. When the wheel chip 42 rides on the brittle material substrate, the upward linear motion of the nut portion 37-2 of the ball screw 37 changes to the rotational motion of the screw, and the rotational shaft of the servo motor 34 is rotated. Therefore, by detecting the rotation of the servo motor 34 by the encoder 35, the vertical movement of the wheel chip 42 is detected.

  Next, the configuration of the controller 50 of the multiscribe device 10 according to the present embodiment will be described with reference to the block diagram of FIG. In this figure, the outputs from the two CCD cameras 18 are given to the control unit 52 via the image processing unit 51 of the controller 50. The control unit 52 outputs drive signals to the X motor drive units 53a to 53e. The X motor drive units 53a to 53e drive the X direction drive motors 24a to 24e of the linear sliders 23a to 23e, respectively. The Y motor drive unit 54 directly drives the motor 14 and moves the table 16 in the y-axis direction. The rotary motor drive unit 55 directly drives the motor 15 to rotate the table 16. Further, servo motor driving units 56 a to 56 e and a monitor 57 are connected to the control unit 52. The servo motor driving units 56a to 56e control the vertical movement of the wheel chip 42 and the load on the brittle material substrate before and after riding on the brittle material substrate.

  The outputs of the encoders 35a to 35e connected to the servo motors 34a to 34e are input to the ride detection units 58a to 58e. The ride-on detection units 58a to 58e output the outputs of the encoders 35a to 35e to the control unit 52 as they are to perform feedback control, and also detect minute movements upward after the start of scribing, so that the wheel chips 42a to 42e become substrates. It is to detect that you are on board. Here, the encoders 35a to 35e connected to the servo motors 34a to 34e and the run-up detection units 58a to 58e constitute run-up detection means for detecting whether or not the scribing wheel has run on the brittle material substrate. The riding-up detection unit can be realized by a comparator or the like, but the encoder output may be directly input to the control unit and realized by software of the control unit.

  Next, the scribe operation of the multi-scribe device according to this embodiment will be described. Below, the case where a strip-shaped panel is arrange | positioned on the table 16 and this cuts off with five scribe heads 25a-25e is demonstrated.

  First, the brittle material substrate 17 held on the table is monitored by the CCD camera 18, and the position of the table 16 in the y-axis direction is controlled so that the tip holder of each scribe head is in front of the bridging material substrate 17 riding position. Set as follows. At the same time, the position of the scribe head in the x-axis direction is set to a predetermined position by the linear sliders 23a to 23e. Then, the slide blocks of the scribe heads 25 a to 25 e are lowered before the brittle material substrate 17. In this state, the wheel chips 42 a to 42 e of the chip holders 41 a to 41 e have their heights slightly lower than the brittle material substrate 17 placed on the table 16. In addition, the controller 50 causes the load of each wheel chip to be a predetermined value or less, for example, 10 (N) by the servo motor driving units 56a to 56e so that a pressing force that generates a vertical crack on the surface of the brittle material substrate 17 is not applied. To control.

Next, the motor 14 is rotated at a low speed by the Y motor drive unit 55, the moving speed of the table 16 is set to 20 mm / s, for example, and the table 16 is advanced in the y-axis direction. Then, the wheel chip of one of the chip holders 41, for example, the wheel chip 42 c reaches the position of the end of the brittle material substrate 17. At this time, since the wheel chip 42c is controlled so as not to apply a pressing force that generates a vertical crack on the surface of the brittle material substrate 17, the wheel chip 42c installed slightly below the surface of the brittle material substrate 17 is used. After contacting the end portion of the brittle material substrate 17, it runs on the surface of the brittle material substrate 17 as it is without causing chipping or the like at the end portion of the brittle material substrate 17. By riding on the surface of the brittle material substrate 17, the chip holder 41c is pushed up slightly, and this movement is transmitted to the servo motor 34c via the ball screw 37c, so that the rotating shaft of the encoder 35c rotates. Thus riding detecting section 58c can detect that the wheel tip 42c of the tip holder 41c rides on the surface of the brittle material substrate 17 at time t ₁ as shown in FIG. 6A (e).

  Now, the boarding detection signal is transmitted to the control unit 52. Based on this input, the controller 50 increases the scribe load for the scribe head 23c from 10 (N) to 14 (N), for example, as shown in FIG. 6A (f).

Then it is assumed that the detection signal rides from wheel tip 42a at time t ₂ as shown in was obtained Fig 6A (a). Based on this input, the controller 50 increases the scribe load for the scribe head 23a from 10 (N) to 14 (N), for example, as shown in FIG. 6A (b).

As for other chip holders, as shown in FIGS. 6A (c), 6B (i), and (g), the chip holders are sequentially moved at different timings t _{3 to} t ₅ depending on the inclination of the strip panel and the shape of the edges. It rides on the brittle material substrate 17. Based on these inputs, the controller 50 applies the scribe load to the scribe heads 23b, 23e, and 23d as shown in FIGS. 6A (d), 6B (j), and (h) from 10 (N) to 14 (N ) To increase.

Furthermore, the controller 50 is the slowest riding the timing of time t ₅ the detection signal is obtained as shown in FIG. 6B (k), and the moving speed of the table 16 by driving the motor 14 to raise the scribing speed. For example, in the t ₅ after raising the 300 mm / s scribe speed from 20 mm / s. After confirming that all the heads have been mounted in this way, scribing is performed under the original scribing conditions. In this way, even when the distance between each wheel chip and the edge of the brittle material substrate varies, it is possible to reduce the chipping of the edge of the brittle material substrate.

  In this example, the encoders 35a to 35e connected to the servo motors 34a to 34e and the ride detection units 58a to 58e to which outputs from the encoders 35a to 35e are input constitute the ride detection means. Instead, a stator that has a permanent magnet attached inside, and a coil that generates a magnetic force corresponding to the permanent magnet of the stator is wound around the outer surface, and is movable up and down by the current applied to the coil. You may use the voice coil motor which consists of a child. In this case, since the current value applied to the coil changes when the wheel chips 42 a to 42 e ride on the surface of the brittle material substrate 17, the ride can be detected by the change.

(Second Embodiment)
Next, a multiscribe device according to a second embodiment of the present invention will be described. The multi-scribe device of this embodiment is a multi-scribe device having a structure in which a chip holder is moved up and down by an air cylinder instead of a scribe head using a servo motor. A scribing device using an air head is disclosed in Japanese Patent Laid-Open No. 6-345471, and a plurality of scribing heads are used in this embodiment.

  FIG. 7A is a schematic view showing a scribe head using an air head. This scribe head has a casing 60 that can be raised and lowered by expansion and contraction of an air cylinder (not shown), and a cylinder 61 is fixed to the casing 60. A stem 63 is fixed to the piston 62 in the cylinder 61. A wheel chip 65 is attached to the lower end portion of the stem 63 via a fixture 64. However, the right end of the fixture 64 in the drawing is pivotally attached to a fastener 66 fixed to the lower portion of the casing 60 by a pin 66a, and the left end of the fixture 64 in the drawing is provided by an L-shaped stopper 67. It is locked so as not to descend. Both the fixture 64 and the stopper 67 are insulated from the main body by an insulating member (not shown). Lead wires L1 and L2 are drawn out from the fixture 64 and the stopper 67, and a switch is constituted by the attachment portion 64 and the stopper 67. In the state of FIG. 7A in which the piston 62 descends in the cylinder 61 due to its own weight, the lead wires L1 and L2 are in a conductive state via the fixture 64 and the stopper 67. Then, the air pressure in the cylinder 61 is controlled and the piston 62 is moved up and down via the stem 63, whereby the position of the wheel chip in the vertical direction can be set and a scribing load can be applied.

  Also in this embodiment, the brittle material substrate is set in a predetermined position, and the wheel chip of each scribe head is set to be lower than the brittle material substrate before the brittle material substrate. When the table is moved, when the wheel chip rides on the brittle material substrate, the fixture 64 rotates as shown in FIG. 7B, so that the switch is turned off and the ride can be detected. Also in this case, the load is increased when the wheel chip of each scribe head rides on the brittle material substrate, and the scribe speed is increased when the wheel chip of all the scribe heads ride on the brittle material substrate. By doing so, it is possible to eliminate the chipping of the edge regardless of the distance between each wheel chip and the edge of the brittle material substrate.

  In this case, the switch composed of the fixture 64 and the stopper 67 is used as the climbing detection means. Instead, various displacement sensors such as photoelectric switches and magnetic sensors are provided, and the scribing wheel rides on the brittle material substrate. May be detected.

  In the multi-scribe device, when scribing a brittle material substrate simultaneously with a large number of scribing heads, the scribing load of the scribing head on which the wheel chip rides on the brittle material substrate is increased, and the scribing speed after all the wheel chips ride on Is raised. For this reason, even in the case of a thin strip-shaped brittle material substrate, it is possible to reduce the chipping of the edge, and it can be suitably used for the purpose of manufacturing a large number of small single panels.

DESCRIPTION OF SYMBOLS 10 Multi-scribe apparatus 11 Moving base 12a, 12b Guide rail 13, 37a-37e Ball screw 14, 15, 24a-24e Motor 16 Table 17 Brittle material board | substrate 18 CCD camera 20 Bridge 22 Guide 23a-23e Linear slider 25a-25e Scribe head 34a-34e Servo motor 35a-35e Encoder 38a-38e Slide block 41a-41e Tip holder 42a-42e Wheel tip 50 Controller 52 Control part 53a-53e X motor drive part 54 Y motor drive part 55 Rotary motor drive part 56a-56e Servo Motor drive part 58a-58e Riding detection part

Claims (3)

A multi-scribe device equipped with a plurality of scribe heads,
A table on which a brittle material substrate is installed;
A plurality of scribing heads provided to be opposed to the brittle material substrate on the table, and having a lifting means for lifting and lowering a chip holder provided with a wheel chip at its tip;
Moving means for relatively moving the table and the plurality of scribe heads;
A plurality of ride detection means for detecting whether a wheel tip at the tip of each scribe head has reached the brittle material substrate;
When each of the rising detection means detects that the wheel chip has been mounted on the brittle material substrate, the load on the brittle material substrate is increased for the scribe head, and all the rising detection means are used for the brittle material substrate. And a controller for controlling the scribe speed to be increased when it is detected that the vehicle has been ridden. The elevating means of the scribe head is
A servo motor,
A ball screw connected to the rotation shaft of the servo motor;
A slide block connected to the ball screw to raise and lower the chip holder,
The ride detection means is
An encoder connected to the servo motor;
The multi-scribe device according to claim 1, further comprising: a run-up detection unit that detects that a wheel chip has run on the brittle material substrate based on an output of the encoder. The elevating means of the scribe head is
A casing attached to the scribe head;
A cylinder fixed to the casing;
It is held in the cylinder so as to be movable up and down, and has a piston with a wheel chip attached to the lower end thereof,
The multiscribing apparatus according to claim 1, wherein the climbing detection unit is a detection unit that detects vertical movement of the piston.

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